JP2013160105A5 - - Google Patents

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Publication number
JP2013160105A5
JP2013160105A5 JP2012021289A JP2012021289A JP2013160105A5 JP 2013160105 A5 JP2013160105 A5 JP 2013160105A5 JP 2012021289 A JP2012021289 A JP 2012021289A JP 2012021289 A JP2012021289 A JP 2012021289A JP 2013160105 A5 JP2013160105 A5 JP 2013160105A5
Authority
JP
Japan
Prior art keywords
inlet
gate valve
inlet flange
shape
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012021289A
Other languages
English (en)
Japanese (ja)
Other versions
JP5822747B2 (ja
JP2013160105A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2012021289A external-priority patent/JP5822747B2/ja
Priority to JP2012021289A priority Critical patent/JP5822747B2/ja
Priority to TW101149320A priority patent/TWI507243B/zh
Priority to KR1020130000886A priority patent/KR101440715B1/ko
Priority to US13/757,123 priority patent/US9737828B2/en
Priority to CN201310044685.5A priority patent/CN103244378B/zh
Publication of JP2013160105A publication Critical patent/JP2013160105A/ja
Publication of JP2013160105A5 publication Critical patent/JP2013160105A5/ja
Publication of JP5822747B2 publication Critical patent/JP5822747B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012021289A 2012-02-02 2012-02-02 クライオポンプ Active JP5822747B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012021289A JP5822747B2 (ja) 2012-02-02 2012-02-02 クライオポンプ
TW101149320A TWI507243B (zh) 2012-02-02 2012-12-22 Low temperature pump
KR1020130000886A KR101440715B1 (ko) 2012-02-02 2013-01-04 크라이오펌프
US13/757,123 US9737828B2 (en) 2012-02-02 2013-02-01 Cryopump having inlet cryopanel extension
CN201310044685.5A CN103244378B (zh) 2012-02-02 2013-02-04 低温泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012021289A JP5822747B2 (ja) 2012-02-02 2012-02-02 クライオポンプ

Publications (3)

Publication Number Publication Date
JP2013160105A JP2013160105A (ja) 2013-08-19
JP2013160105A5 true JP2013160105A5 (enExample) 2013-11-28
JP5822747B2 JP5822747B2 (ja) 2015-11-24

Family

ID=48901711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012021289A Active JP5822747B2 (ja) 2012-02-02 2012-02-02 クライオポンプ

Country Status (5)

Country Link
US (1) US9737828B2 (enExample)
JP (1) JP5822747B2 (enExample)
KR (1) KR101440715B1 (enExample)
CN (1) CN103244378B (enExample)
TW (1) TWI507243B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2565149C2 (ru) * 2014-01-21 2015-10-20 Акционерное общество "Информационные спутниковые системы" имени академика М.Ф. Решетнёва" Способ тепловакуумных испытаний космических аппаратов и устройство для его реализации
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
US9926922B2 (en) 2015-01-30 2018-03-27 Caterpillar Inc. Barrel assembly for a fluid pump having separate plunger bore and outlet passage
US9909582B2 (en) 2015-01-30 2018-03-06 Caterpillar Inc. Pump with plunger having tribological coating
US10041484B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump having inlet reservoir with vapor-layer standpipe
US9828987B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. System and method for priming a pump
US9828976B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. Pump for cryogenic liquids having temperature managed pumping mechanism
US10041447B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump manifold
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity
CN116591929A (zh) * 2023-04-28 2023-08-15 中船重工鹏力（南京）超低温技术有限公司 一种带有倾斜进气道挡板的低温真空泵
JP2025093787A (ja) * 2023-12-12 2025-06-24 住友重機械工業株式会社 クライオポンプ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2163945A5 (enExample) * 1971-12-07 1973-07-27 Cit Alcatel
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4655046A (en) * 1985-07-19 1987-04-07 Helix Technology Corporation Cryopump with exhaust filter
US4918930A (en) 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
DE69006021T2 (de) * 1989-04-07 1994-06-01 Helix Tech Corp Überdruckventil und kryopumpe die dieses verwendet.
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
US5782096A (en) * 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
US7997089B2 (en) * 2003-11-28 2011-08-16 Sumitomo Heavy Industries, Ltd. Method and apparatus for regeneration water
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
JP5025492B2 (ja) * 2005-02-08 2012-09-12 住友重機械工業株式会社 改善されたクライオポンプ
CN101248275A (zh) * 2005-08-25 2008-08-20 阿特里尔斯布希股份有限公司 泵体
JP2008223538A (ja) * 2007-03-09 2008-09-25 Canon Anelva Technix Corp クライオポンプ
KR101177306B1 (ko) * 2007-03-29 2012-08-30 스미도모쥬기가이고교 가부시키가이샤 크라이오 펌프 및 스패터링 장치 및 반도체 제조장치
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
CN102686880B (zh) 2009-11-09 2015-05-13 住友重机械工业株式会社 低温泵及真空排气方法

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