TWI507243B - Low temperature pump - Google Patents

Low temperature pump Download PDF

Info

Publication number
TWI507243B
TWI507243B TW101149320A TW101149320A TWI507243B TW I507243 B TWI507243 B TW I507243B TW 101149320 A TW101149320 A TW 101149320A TW 101149320 A TW101149320 A TW 101149320A TW I507243 B TWI507243 B TW I507243B
Authority
TW
Taiwan
Prior art keywords
cryopump
cryopanel
peripheral portion
inlet
gap
Prior art date
Application number
TW101149320A
Other languages
English (en)
Chinese (zh)
Other versions
TW201343245A (zh
Inventor
Ken Oikawa
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201343245A publication Critical patent/TW201343245A/zh
Application granted granted Critical
Publication of TWI507243B publication Critical patent/TWI507243B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW101149320A 2012-02-02 2012-12-22 Low temperature pump TWI507243B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012021289A JP5822747B2 (ja) 2012-02-02 2012-02-02 クライオポンプ

Publications (2)

Publication Number Publication Date
TW201343245A TW201343245A (zh) 2013-11-01
TWI507243B true TWI507243B (zh) 2015-11-11

Family

ID=48901711

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101149320A TWI507243B (zh) 2012-02-02 2012-12-22 Low temperature pump

Country Status (5)

Country Link
US (1) US9737828B2 (enExample)
JP (1) JP5822747B2 (enExample)
KR (1) KR101440715B1 (enExample)
CN (1) CN103244378B (enExample)
TW (1) TWI507243B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2565149C2 (ru) * 2014-01-21 2015-10-20 Акционерное общество "Информационные спутниковые системы" имени академика М.Ф. Решетнёва" Способ тепловакуумных испытаний космических аппаратов и устройство для его реализации
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
US10041484B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump having inlet reservoir with vapor-layer standpipe
US9828976B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. Pump for cryogenic liquids having temperature managed pumping mechanism
US10041447B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump manifold
US9909582B2 (en) 2015-01-30 2018-03-06 Caterpillar Inc. Pump with plunger having tribological coating
US9828987B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. System and method for priming a pump
US9926922B2 (en) 2015-01-30 2018-03-27 Caterpillar Inc. Barrel assembly for a fluid pump having separate plunger bore and outlet passage
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity
CN116591929A (zh) * 2023-04-28 2023-08-15 中船重工鹏力（南京）超低温技术有限公司 一种带有倾斜进气道挡板的低温真空泵
JP2025093787A (ja) * 2023-12-12 2025-06-24 住友重機械工業株式会社 クライオポンプ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1322105C (en) * 1988-09-13 1993-09-14 Peter W. Gaudet Electronically controlled cryopump
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
DE19881966T1 (de) * 1997-02-05 1999-12-16 Helix Tech Corp Cryopumpe mit verbesserter Abschirmung
TW200708665A (en) * 2005-08-25 2007-03-01 Busch Sa Atel Pump casing
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
WO2011055465A1 (ja) * 2009-11-09 2011-05-12 住友重機械工業株式会社 クライオポンプ、及び真空排気方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2163945A5 (enExample) * 1971-12-07 1973-07-27 Cit Alcatel
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4655046A (en) * 1985-07-19 1987-04-07 Helix Technology Corporation Cryopump with exhaust filter
JPH04504454A (ja) * 1989-04-07 1992-08-06 ヘリツクス・テクノロジー・コーポレーシヨン 圧力逃がし弁とそれを使用したクライオポンプ
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
WO2005052369A1 (ja) * 2003-11-28 2005-06-09 Sumitomo Heavy Industries, Ltd. 水の再生方法及び装置
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US20080184712A1 (en) 2005-02-08 2008-08-07 Sumitomo Heavy Industries, Ltd. Cryopump
JP2008223538A (ja) * 2007-03-09 2008-09-25 Canon Anelva Technix Corp クライオポンプ
KR101177306B1 (ko) * 2007-03-29 2012-08-30 스미도모쥬기가이고교 가부시키가이샤 크라이오 펌프 및 스패터링 장치 및 반도체 제조장치

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1322105C (en) * 1988-09-13 1993-09-14 Peter W. Gaudet Electronically controlled cryopump
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
DE19881966T1 (de) * 1997-02-05 1999-12-16 Helix Tech Corp Cryopumpe mit verbesserter Abschirmung
TW200708665A (en) * 2005-08-25 2007-03-01 Busch Sa Atel Pump casing
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
WO2011055465A1 (ja) * 2009-11-09 2011-05-12 住友重機械工業株式会社 クライオポンプ、及び真空排気方法

Also Published As

Publication number Publication date
US9737828B2 (en) 2017-08-22
CN103244378B (zh) 2016-03-30
KR20130089584A (ko) 2013-08-12
US20130199210A1 (en) 2013-08-08
JP2013160105A (ja) 2013-08-19
JP5822747B2 (ja) 2015-11-24
KR101440715B1 (ko) 2014-09-17
TW201343245A (zh) 2013-11-01
CN103244378A (zh) 2013-08-14

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