CN103244378B - 低温泵 - Google Patents
低温泵 Download PDFInfo
- Publication number
- CN103244378B CN103244378B CN201310044685.5A CN201310044685A CN103244378B CN 103244378 B CN103244378 B CN 103244378B CN 201310044685 A CN201310044685 A CN 201310044685A CN 103244378 B CN103244378 B CN 103244378B
- Authority
- CN
- China
- Prior art keywords
- cryopump
- possesses
- cryopanel
- peripheral portion
- intakeport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000002093 peripheral effect Effects 0.000 claims description 58
- 230000005855 radiation Effects 0.000 description 41
- 230000004888 barrier function Effects 0.000 description 39
- 238000001816 cooling Methods 0.000 description 34
- 239000007789 gas Substances 0.000 description 24
- 230000004941 influx Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002594 sorbent Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-021289 | 2012-02-02 | ||
| JP2012021289A JP5822747B2 (ja) | 2012-02-02 | 2012-02-02 | クライオポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103244378A CN103244378A (zh) | 2013-08-14 |
| CN103244378B true CN103244378B (zh) | 2016-03-30 |
Family
ID=48901711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310044685.5A Active CN103244378B (zh) | 2012-02-02 | 2013-02-04 | 低温泵 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9737828B2 (enExample) |
| JP (1) | JP5822747B2 (enExample) |
| KR (1) | KR101440715B1 (enExample) |
| CN (1) | CN103244378B (enExample) |
| TW (1) | TWI507243B (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2565149C2 (ru) * | 2014-01-21 | 2015-10-20 | Акционерное общество "Информационные спутниковые системы" имени академика М.Ф. Решетнёва" | Способ тепловакуумных испытаний космических аппаратов и устройство для его реализации |
| JP6415230B2 (ja) * | 2014-10-07 | 2018-10-31 | 住友重機械工業株式会社 | クライオポンプ |
| US9909582B2 (en) | 2015-01-30 | 2018-03-06 | Caterpillar Inc. | Pump with plunger having tribological coating |
| US9828976B2 (en) | 2015-01-30 | 2017-11-28 | Caterpillar Inc. | Pump for cryogenic liquids having temperature managed pumping mechanism |
| US10041484B2 (en) | 2015-01-30 | 2018-08-07 | Caterpillar Inc. | Pump having inlet reservoir with vapor-layer standpipe |
| US10041447B2 (en) | 2015-01-30 | 2018-08-07 | Caterpillar Inc. | Pump manifold |
| US9828987B2 (en) | 2015-01-30 | 2017-11-28 | Caterpillar Inc. | System and method for priming a pump |
| US9926922B2 (en) | 2015-01-30 | 2018-03-27 | Caterpillar Inc. | Barrel assembly for a fluid pump having separate plunger bore and outlet passage |
| GB2613595A (en) * | 2021-12-08 | 2023-06-14 | Edwards Vacuum Llc | A cryopump with increased capacity |
| CN116591929A (zh) * | 2023-04-28 | 2023-08-15 | 中船重工鹏力（南京）超低温技术有限公司 | 一种带有倾斜进气道挡板的低温真空泵 |
| JP2025093787A (ja) * | 2023-12-12 | 2025-06-24 | 住友重機械工業株式会社 | クライオポンプ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101094710A (zh) * | 2005-02-08 | 2007-12-26 | 住友重机械工业株式会社 | 改进的低温泵 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2163945A5 (enExample) * | 1971-12-07 | 1973-07-27 | Cit Alcatel | |
| US4277951A (en) * | 1980-04-10 | 1981-07-14 | Air Products And Chemicals, Inc. | Cryopumping apparatus |
| US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
| US4655046A (en) * | 1985-07-19 | 1987-04-07 | Helix Technology Corporation | Cryopump with exhaust filter |
| US4918930A (en) | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
| DE69006021T2 (de) * | 1989-04-07 | 1994-06-01 | Helix Tech Corp | Überdruckventil und kryopumpe die dieses verwendet. |
| US5301511A (en) * | 1992-06-12 | 1994-04-12 | Helix Technology Corporation | Cryopump and cryopanel having frost concentrating device |
| US5483803A (en) * | 1993-06-16 | 1996-01-16 | Helix Technology Corporation | High conductance water pump |
| US5782096A (en) * | 1997-02-05 | 1998-07-21 | Helix Technology Corporation | Cryopump with improved shielding |
| WO2005052369A1 (ja) * | 2003-11-28 | 2005-06-09 | Sumitomo Heavy Industries, Ltd. | 水の再生方法及び装置 |
| US7320224B2 (en) * | 2004-01-21 | 2008-01-22 | Brooks Automation, Inc. | Method and apparatus for detecting and measuring state of fullness in cryopumps |
| DK1917441T3 (en) * | 2005-08-25 | 2016-10-31 | Ateliers Busch S A | Pumpeaggregat |
| JP2008223538A (ja) * | 2007-03-09 | 2008-09-25 | Canon Anelva Technix Corp | クライオポンプ |
| KR101177306B1 (ko) * | 2007-03-29 | 2012-08-30 | 스미도모쥬기가이고교 가부시키가이샤 | 크라이오 펌프 및 스패터링 장치 및 반도체 제조장치 |
| US20100011784A1 (en) | 2008-07-17 | 2010-01-21 | Sumitomo Heavy Industries, Ltd. | Cryopump louver extension |
| WO2011055465A1 (ja) * | 2009-11-09 | 2011-05-12 | 住友重機械工業株式会社 | クライオポンプ、及び真空排気方法 |
-
2012
- 2012-02-02 JP JP2012021289A patent/JP5822747B2/ja active Active
- 2012-12-22 TW TW101149320A patent/TWI507243B/zh active
-
2013
- 2013-01-04 KR KR1020130000886A patent/KR101440715B1/ko active Active
- 2013-02-01 US US13/757,123 patent/US9737828B2/en active Active
- 2013-02-04 CN CN201310044685.5A patent/CN103244378B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101094710A (zh) * | 2005-02-08 | 2007-12-26 | 住友重机械工业株式会社 | 改进的低温泵 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101440715B1 (ko) | 2014-09-17 |
| CN103244378A (zh) | 2013-08-14 |
| KR20130089584A (ko) | 2013-08-12 |
| US20130199210A1 (en) | 2013-08-08 |
| TW201343245A (zh) | 2013-11-01 |
| JP5822747B2 (ja) | 2015-11-24 |
| JP2013160105A (ja) | 2013-08-19 |
| TWI507243B (zh) | 2015-11-11 |
| US9737828B2 (en) | 2017-08-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |