KR101440715B1 - 크라이오펌프 - Google Patents

크라이오펌프 Download PDF

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Publication number
KR101440715B1
KR101440715B1 KR1020130000886A KR20130000886A KR101440715B1 KR 101440715 B1 KR101440715 B1 KR 101440715B1 KR 1020130000886 A KR1020130000886 A KR 1020130000886A KR 20130000886 A KR20130000886 A KR 20130000886A KR 101440715 B1 KR101440715 B1 KR 101440715B1
Authority
KR
South Korea
Prior art keywords
inlet
panel
cryo
cryopump
cryopanel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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KR1020130000886A
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English (en)
Korean (ko)
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KR20130089584A (ko
Inventor
겐 오이카와
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Application filed by 스미도모쥬기가이고교 가부시키가이샤 filed Critical 스미도모쥬기가이고교 가부시키가이샤
Publication of KR20130089584A publication Critical patent/KR20130089584A/ko
Application granted granted Critical
Publication of KR101440715B1 publication Critical patent/KR101440715B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020130000886A 2012-02-02 2013-01-04 크라이오펌프 Active KR101440715B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012021289A JP5822747B2 (ja) 2012-02-02 2012-02-02 クライオポンプ
JPJP-P-2012-021289 2012-02-02

Publications (2)

Publication Number Publication Date
KR20130089584A KR20130089584A (ko) 2013-08-12
KR101440715B1 true KR101440715B1 (ko) 2014-09-17

Family

ID=48901711

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130000886A Active KR101440715B1 (ko) 2012-02-02 2013-01-04 크라이오펌프

Country Status (5)

Country Link
US (1) US9737828B2 (enExample)
JP (1) JP5822747B2 (enExample)
KR (1) KR101440715B1 (enExample)
CN (1) CN103244378B (enExample)
TW (1) TWI507243B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2565149C2 (ru) * 2014-01-21 2015-10-20 Акционерное общество "Информационные спутниковые системы" имени академика М.Ф. Решетнёва" Способ тепловакуумных испытаний космических аппаратов и устройство для его реализации
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
US9926922B2 (en) 2015-01-30 2018-03-27 Caterpillar Inc. Barrel assembly for a fluid pump having separate plunger bore and outlet passage
US9828976B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. Pump for cryogenic liquids having temperature managed pumping mechanism
US10041447B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump manifold
US9909582B2 (en) 2015-01-30 2018-03-06 Caterpillar Inc. Pump with plunger having tribological coating
US10041484B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump having inlet reservoir with vapor-layer standpipe
US9828987B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. System and method for priming a pump
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity
CN116591929A (zh) * 2023-04-28 2023-08-15 中船重工鹏力（南京）超低温技术有限公司 一种带有倾斜进气道挡板的低温真空泵
JP2025093787A (ja) * 2023-12-12 2025-06-24 住友重機械工業株式会社 クライオポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080184712A1 (en) 2005-02-08 2008-08-07 Sumitomo Heavy Industries, Ltd. Cryopump
KR20080088182A (ko) * 2007-03-29 2008-10-02 스미도모쥬기가이고교 가부시키가이샤 크라이오 펌프 및 스패터링 장치 및 반도체 제조장치

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2163945A5 (enExample) * 1971-12-07 1973-07-27 Cit Alcatel
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4655046A (en) * 1985-07-19 1987-04-07 Helix Technology Corporation Cryopump with exhaust filter
US4918930A (en) 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
CA2049029A1 (en) * 1989-04-07 1990-10-08 Hans T. Clarke Pressure relief valve and cryopump utilizing the same
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
US5782096A (en) * 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
WO2005052369A1 (ja) * 2003-11-28 2005-06-09 Sumitomo Heavy Industries, Ltd. 水の再生方法及び装置
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
CA2618729C (fr) * 2005-08-25 2013-08-13 Ateliers Busch Sa Corps de pompe
JP2008223538A (ja) * 2007-03-09 2008-09-25 Canon Anelva Technix Corp クライオポンプ
US20100011784A1 (en) 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
CN102686880B (zh) * 2009-11-09 2015-05-13 住友重机械工业株式会社 低温泵及真空排气方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080184712A1 (en) 2005-02-08 2008-08-07 Sumitomo Heavy Industries, Ltd. Cryopump
KR20080088182A (ko) * 2007-03-29 2008-10-02 스미도모쥬기가이고교 가부시키가이샤 크라이오 펌프 및 스패터링 장치 및 반도체 제조장치

Also Published As

Publication number Publication date
CN103244378A (zh) 2013-08-14
JP5822747B2 (ja) 2015-11-24
TW201343245A (zh) 2013-11-01
JP2013160105A (ja) 2013-08-19
KR20130089584A (ko) 2013-08-12
US9737828B2 (en) 2017-08-22
US20130199210A1 (en) 2013-08-08
CN103244378B (zh) 2016-03-30
TWI507243B (zh) 2015-11-11

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