JP5992802B2 - Sheet sticking device and sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and more particularly, to a sheet sticking apparatus and a sticking method capable of dividing a necessary part and an unnecessary part and sticking an adhesive sheet to the necessary part.

An adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as a “wafer”) has been subjected to various treatments in a state of being extremely thinly ground. In order not to be stiff, an annular convex portion is provided on the outer periphery to provide a function as a reinforcing portion.
For example, an adhesive sheet is attached to a wafer having an annular protrusion on the outer periphery by an apparatus disclosed in Patent Document 1, and the protrusion is removed by a protrusion removing apparatus disclosed in Patent Document 2.

JP 2012-38880 A JP2011-159798A

  However, in the configuration as described above, the adhesion of the adhesive sheet to the thin portion and the division of the thin portion and the convex portion are performed using separate apparatuses, which causes a disadvantage that the equipment is increased in size.

[Object of invention]
The objective of this invention is providing the sheet sticking apparatus and sticking method which can prevent that an installation enlarges.

  In order to achieve the above object, the present invention provides a sheet sticking apparatus for sticking an adhesive sheet to an adherend having an annular protrusion on the outer periphery and a thin-walled part formed inside the protrusion. Sheet support means for relatively disposing the adhesive sheet so as to oppose one surface of the thin portion continuous with the inner peripheral surface of the portion, and first pressing means for pressing the thin portion against the adhesive sheet from the other surface of the thin portion The first pressing means adopts a configuration in which the thinned portion is deformed to divide the thinned portion and the convex portion, thereby sticking the adhesive sheet to the divided thinned portion. Yes.

  In this invention, the structure provided with the 2nd press means which presses the said adhesive sheet and affixes an adhesive sheet to a part of one surface of the said thin part can be taken.

  In addition, the structure includes a severance promoting part forming means for forming a severance promoting part in the thin part along the inner periphery of the convex part, and the thin part and the convex part are separated from the severing promotion part as a starting point. It is preferable to adopt.

  Moreover, the present invention provides an inner peripheral surface of the convex portion in a sheet sticking method in which an annular convex portion is provided on the outer periphery and an adhesive sheet is attached to an adherend having a thin portion formed inside the convex portion. A step of relatively disposing the adhesive sheet so as to face one surface of the thin-walled portion, and pressing the thin-walled portion against the adhesive sheet from the other surface of the thin-walled portion, and deforming the thin-walled portion to The method of dividing the said convex part and including the process of sticking the said adhesive sheet to the said thin part cut | disconnected is taken.

According to the present invention, the thin portion and the convex portion are divided, and the adhesive sheet is attached to the thin portion, so that the equipment can be prevented from being enlarged.
Moreover, according to the structure provided with the 2nd press means, an adhesive sheet can be previously affixed on a thin part, and the thin part parted from the convex part will be affixed on the unexpected position of an adhesive sheet. This can be prevented.
Furthermore, according to the structure provided with the dividing promotion part forming means, the dividing position of the thin part can be made clear, and the thin part can be prevented from being divided at an unexpected position.

The schematic sectional side view of a sheet sticking apparatus. Operation | movement explanatory drawing of a sheet sticking apparatus. Operation explanation diagram of sheet pasting device Operation | movement explanatory drawing of a sheet sticking apparatus. Operation | movement explanatory drawing of a sheet sticking apparatus. Operation | movement explanatory drawing of a sheet sticking apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, for example, when directions such as up, down, left, right, front, back, etc. are shown, all of FIG. When viewed from the appropriate orientation), the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction orthogonal to the page. To do.

  The sheet sticking apparatus 10 is an apparatus for sticking an adhesive sheet AS to a wafer WF as an adherend in which an annular convex portion WF1 is provided on the outer periphery and a thin portion WF2 is formed inside the convex portion WF1. , A supporting means 11 for supporting the wafer WF, a sheet supporting means 12 for relatively disposing the adhesive sheet AS so as to face one surface (upper surface) of the thin portion WF2 connected to the inner peripheral surface of the convex portion WF1, and the thin portion The first pressing means 15 that presses the thin portion WF2 against the adhesive sheet AS from the other surface (lower surface) of WF2, and one surface (upper surface) of the thin portion WF2 that presses the adhesive sheet AS and continues to the inner surface of the convex portion WF1. ), A second pressing means 16 for affixing the adhesive sheet AS to a part thereof, and a split promoting part forming means 17 for forming a split promoting part WF3 (see FIG. 2) in the thin part WF2 along the inner periphery of the convex part WF1; , Be prepared It is configured Te.

  The support means 11 is supported by a rotation motor DM as a drive device, a linear motion motor LM1 as a drive device supported by an output shaft DM1 of the rotation motor DM, and an output shaft LM1A of the linear motion motor LM1. The table 20 includes a plurality of through holes 20A and a friction engagement member 21 having a viscosity made of rubber, silicone resin, or the like on the outer peripheral surface of the upper surface.

  The sheet support means 12 has a lower case 14A having a bottom wall 22 for supporting the rotation motor DM and a peripheral wall 23 having a mounting surface 23A for mounting a ring frame RF having an adhesive sheet AS attached to the upper surface. It is comprised by.

  The first pressing means 15 is constituted by a pressurizing means 25 such as a turbine or a pressurizing pump capable of supplying a gas such as air or gas from the bottom wall 22 side via a pipe 28.

  The second pressing means 16 includes an upper case 14B supported by an output shaft LM2A of a direct acting motor LM2 serving as a driving device, a turbine capable of supplying a gas such as air or gas from the upper case 14B via a pipe 33, A pressurizing means 30 such as a pressurizing pump, a decompression means 31 such as a decompression pump or a vacuum ejector capable of sucking a gas such as air or gas, and the pressurization means 30 and the decompression means 31 are connected to the pipe 33 via a pipe 33. It is comprised with the switching valve 34 switched with respect to it.

  The division promoting part forming unit 17 includes a linear motor LM3 as a driving device and a laser irradiation unit 37 that is supported by an output shaft LM3A of the linear motor LM3 and irradiates a laser.

  Next, the sheet sticking method in this embodiment is demonstrated.

As shown in FIG. 1, in a state where the lower case 14A and the upper case 14B are separated from each other, the wafer WF is brought into contact with the frictional engagement member 21 by a conveying means (not shown) so that the lower portion of the convex portion WF1 of the wafer WF contacts the friction engagement member 21. Is transferred to the table 20.
Next, the division promoting part forming means 17 drives the linear motor LM3, and as shown in FIG. 2, the laser irradiation means 37 is positioned on the outer peripheral edge of the thin part WF2, and at the same time, the support means 11 is irradiated. Drives the rotation motor DM to rotate the wafer WF in a plane. As a result, the structure of the thin portion WF2 is partially embrittled, and an annular division promoting portion WF3 is formed on the outer periphery of the thin portion WF2.

  Next, as shown in FIG. 3, the adhesive sheet AS supported by the ring frame RF is placed on the placement surface 23 </ b> A of the peripheral wall 23 by a conveying means (not shown) so as to face one surface of the thin portion WF <b> 2. Adhesive sheet AS is disposed relatively. Thereafter, the second pressing means 16 drives the linear motor LM2, lowers the upper case 14B, sandwiches the ring frame RF between the upper case 14B and the mounting surface 23A of the peripheral wall 23, and the upper case 14B and the ring frame RF. A space SP closed by the adhesive sheet AS is formed.

  Next, the second pressing means 16 drives the switching valve 34 and the pressurizing means 30, and as shown in FIG. 4, the pressure between the upper case 14B and the adhesive sheet AS is increased to a predetermined pressure. Then, the adhesive sheet AS is pressed to attach the adhesive sheet AS to a part of the thin portion WF2.

  Thereafter, when the first pressing unit 15 drives the pressing unit 25 to increase the pressure in the space SP, the pressure between the table 20 and the wafer WF also increases through the through hole 20A. Then, when the pressure between the upper case 14B and the adhesive sheet AS and the pressure in the space SP are balanced, the second pressing means 16 drives the switching valve 34 and the pressure reducing means 31, and the pressurizing means 25 is pressurized. The pressure between the upper case 14B and the adhesive sheet AS is reduced according to the degree of pressure. As a result, as shown in FIG. 5, after the thin portion WF2 is deformed, a shearing force is applied to the division promoting portion WF3, and the thin portion WF2 and the convex portion WF1 are separated from the division promoting portion WF3 as a starting point. As shown in FIG. 6, the adhesive sheet AS is attached to the entire surface of the thin portion WF2.

  Next, the first and second pressing means 15 and 16 stop driving the pressing means 25 and the decompressing means 31, and the second pressing means 16 drives the linear motor LM2 to raise the upper case 14B, and then bond The thin portion WF2 integrated with the ring frame RF via the sheet AS is conveyed to another process by a conveying unit (not shown), and the convex portion WF1 is removed by a removing unit (not shown). Thereafter, the same operation as described above is repeated.

  Therefore, according to such an embodiment, the thin-walled portion WF2 and the convex-shaped portion WF1 are divided, and the adhesive sheet AS is attached to the thin-walled portion WF2, thereby preventing the equipment from becoming large. Can do.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary, and can adopt various configurations shown below.

  For example, the first pressing means 15 and the second pressing means 16 are provided with a rubber sheet opposed to the adhesive sheet AS and the thin part WF2, and the rubber sheet is bulged by supplying air to press the adhesive sheet AS and the thin part WF2. It is good also as a structure which gives a pressure.

Further, the first pressing means 15 is provided with an abutting member that can be projected and retracted from the upper surface of the table 20 and can abut on the lower surface of the thin portion WF2, raises the abutting member, and makes the thin portion WF2 a convex portion WF1. It is good also as a structure which presses and sticks one surface of the thin part WF2 to the adhesive sheet AS.
The second pressing means 16 is provided with an adsorbing member that can be projected and retracted from the lower surface of the upper case 14B, and can suck the adhesive sheet AS by a sucking means such as a vacuum pump or a vacuum ejector. After pressing and sticking AS to the thin part WF2, you may comprise the said adsorption | suction member in the state which adsorb | sucked the adhesive sheet AS with the adsorption | suction member. The second pressing means 16 may not be provided.

  Furthermore, the division promoting portion forming means can be configured to form a cut or a groove in the thin portion WF2 by a cutting means such as a cutting blade, an air cutter, or a hydraulic cutter. In addition, the division promotion part formation means does not need to be provided.

  In addition, the drive device adopts an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, a combination of them directly or indirectly can be adopted (some of them overlap with those exemplified in the embodiment).

Further, the material, type, shape and the like of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When the heat-sensitive adhesive sheet AS is employed, appropriate heating for heating the adhesive sheet is performed. Means may be provided. Moreover, such an adhesive sheet has, for example, a single layer having only an adhesive layer, an intermediate layer between the base material sheet and the adhesive layer, a cover layer on the upper surface of the base material sheet, etc. 3 It may be a layer or more, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer, and the double-sided adhesive sheet has a single-layer or multi-layer intermediate layer. Or a single layer or multiple layers without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes, and the like can be attached to any adherend as described above.
Further, the adhesive sheet AS may be placed on the placement surface 23A without being supported by the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 12 Sheet support means 15 1st press means 16 2nd press means 17 Dividing promotion part formation means AS adhesive sheet WF Semiconductor wafer (adhered body)
WF1 Convex part WF2 Thin part WF3 Parting promotion part

Claims (4)

In the sheet sticking apparatus for sticking the adhesive sheet to the adherend in which the annular protrusion is provided on the outer periphery and the thin part is formed inside the protrusion,
Sheet support means for opposingly arranging the adhesive sheet so as to oppose one surface of the thin portion continuous to the inner peripheral surface of the convex portion;
A first pressing means for pressing the thin portion against the adhesive sheet from the other surface of the thin portion;
The said 1st press means sticks the said adhesive sheet to the said thin part by dividing the said thin part and dividing the said thin part and the said convex part, The sheet sticking apparatus characterized by the above-mentioned.   The sheet sticking apparatus according to claim 1, further comprising a second pressing unit that presses the adhesive sheet to attach the adhesive sheet to a part of one surface of the thin portion.   It includes a division promoting portion forming means for forming a division promoting portion in the thin portion along the inner periphery of the convex portion, and the thin portion and the convex portion are divided from the division promoting portion as a starting point. The sheet sticking apparatus according to claim 1 or 2. In the sheet sticking method of sticking an adhesive sheet to an adherend in which an annular convex part is provided on the outer periphery and a thin part is formed inside the convex part,
A step of relatively disposing an adhesive sheet so as to face one surface of the thin portion continuous to the inner peripheral surface of the convex portion;
The thin portion is pressed against the adhesive sheet from the other surface of the thin portion, the thin portion is deformed to divide the thin portion and the convex portion, and the adhesive sheet is attached to the divided thin portion. A sheet sticking method comprising the steps of:

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