JP6204765B2 - Sheet sticking device and sticking method - Google Patents

Sheet sticking device and sticking method Download PDF

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JP6204765B2
JP6204765B2 JP2013185098A JP2013185098A JP6204765B2 JP 6204765 B2 JP6204765 B2 JP 6204765B2 JP 2013185098 A JP2013185098 A JP 2013185098A JP 2013185098 A JP2013185098 A JP 2013185098A JP 6204765 B2 JP6204765 B2 JP 6204765B2
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祐太 黒澤
祐太 黒澤
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リンテック株式会社
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本発明は、シート貼付装置及び貼付方法に関する。   The present invention relates to a sheet sticking apparatus and a sticking method.
従来より、半導体ウエハ(以下、単に「ウエハ」という。)には、その回路面を保護するための保護用の接着シートを貼付したり、個片化するためのダイシング用の接着シートを貼付したりすることが行われている。   Conventionally, a semiconductor wafer (hereinafter simply referred to as a “wafer”) has been attached with a protective adhesive sheet for protecting the circuit surface or a dicing adhesive sheet for individualization. Has been done.
特許文献1には、押圧部材により接着シートに押圧力を付与して被着体に接着シートを貼付する装置が開示され、変形許容部が初期形状に対して変形することで、押圧面を介して接着シートに押圧力を付与している。   Patent Document 1 discloses an apparatus for applying a pressing force to an adhesive sheet by a pressing member and sticking the adhesive sheet to an adherend, and the deformation allowing portion is deformed with respect to the initial shape so that the pressing surface is interposed. The pressing force is applied to the adhesive sheet.
特開2009−152424号公報JP 2009-152424 A
しかしながら、特許文献1のシート貼付装置の場合、被着体の外縁領域の押圧力が不足するという問題がある。これを図5を用いて説明すると、接着シートAS及び被着体WFが重なった重なり領域(以下、単に「重なり領域」という場合がある)AWの外縁AW1から変形許容部100が外側に延在しているので、変形許容部100を変形させて接着シートASに押圧力を付与したときに、当該変形許容部100が接着シートASの上面よりも下方に位置するように変形する。このような場合、重なり領域AWの外縁AW1が支点、外縁AW1よりも外側の変形許容部100が力点、外縁AW1よりも内側の変形許容部100が作用点となって、変形許容部100における重なり領域AWの外縁領域に対応する部分に浮き上がる方向の力が加わり、当該重なり領域AWの外縁領域の押圧力が不足する。このため、接着シートASは、その外縁領域が簡単に被着体WFから剥がれたり、外縁領域に気泡が介在された状態で被着体WFに貼付されたりしてしまう場合がある。このような場合、例えば、変形許容部100で被着体WFに接着シートASを押圧した後に、接着シートAS上を押圧ローラで押圧する方策も考慮されるが、この場合、重なり領域AWの外縁領域全体を同時に押圧することができず、単位時間当たりの処理能力が低下する上、被着体WF全体を押圧することとなるので、当該被着体WFにストレスを与える可能性もある。   However, in the case of the sheet sticking device of Patent Document 1, there is a problem that the pressing force in the outer edge region of the adherend is insufficient. This will be described with reference to FIG. 5. The deformation allowing portion 100 extends outward from the outer edge AW1 of the overlapping area where the adhesive sheet AS and the adherend WF overlap (hereinafter sometimes simply referred to as “overlapping area”) AW. Therefore, when the deformation permitting portion 100 is deformed and a pressing force is applied to the adhesive sheet AS, the deformation permitting portion 100 is deformed so as to be positioned below the upper surface of the adhesive sheet AS. In such a case, the outer edge AW1 of the overlapping area AW is a fulcrum, the deformation allowable portion 100 outside the outer edge AW1 is a force point, and the deformation allowable portion 100 inside the outer edge AW1 is the action point, and the overlapping in the deformation allowable portion 100 is performed. A force in a floating direction is applied to a portion corresponding to the outer edge area of the area AW, and the pressing force of the outer edge area of the overlapping area AW is insufficient. For this reason, the adhesive sheet AS may be easily peeled off from the adherend WF or attached to the adherend WF with air bubbles interposed in the outer edge region. In such a case, for example, a measure of pressing the adhesive sheet AS on the adherend WF with the pressing roller after pressing the adhesive sheet AS against the adherend WF is considered, but in this case, the outer edge of the overlapping area AW is considered. Since the entire area cannot be pressed simultaneously, the processing capacity per unit time is reduced, and the entire adherend WF is pressed. Therefore, there is a possibility that the adherend WF is stressed.
本発明の目的は、単位時間当たりの処理能力が低下すること及び被着体にストレスを与えることを極力抑え、重なり領域における外縁領域の押圧力が不足することを防止して接着シートを確実に被着体に貼付することができるシートの貼付装置及び貼付方法を提供することにある。   It is an object of the present invention to suppress a decrease in processing capacity per unit time and to apply stress to an adherend as much as possible, and to prevent a pressing force in an outer edge region in an overlapping region from being insufficient, thereby securely bonding an adhesive sheet. It is providing the sticking apparatus and sticking method of the sheet | seat which can be stuck to a to-be-adhered body.
上記の目的を達成するために、本発明は、所定の貼付空間で被着体の被着面に接着シートの接着面を対向配置させ、被着体及び接着シートに相対接近する方向の押圧力を付与することで、被着面に接着シートを貼付するシート貼付装置であって、変形可能な変形部材を備え、当該変形部材を間に挟んで前記貼付空間の反対側に位置する密閉空間を当該貼付空間よりも高圧にすることで、当該変形部材を変形させて前記被着面に接着シートを押圧する押圧手段と、
環状の押圧面を備え、前記押圧手段とは別に、前記接着シート及び被着体が重なった重なり領域の外縁領域を押圧する再押圧手段とを備え、当該再押圧手段は、前記変形部材を介して前記重なり領域の外縁領域を押圧する、という構成を採っている。
To achieve the above object, the present onset Ming, is opposed to the adhesive surface of the adhesive sheet to the adherend surface of the adherend at a predetermined sticking space, the direction of the push of the relative proximity to the adherend and the adhesive sheet by applying pressure, a sheet sticking apparatus for sticking an adhesive sheet to an adherend surface, comprising a deformation possible variations member, positioned on the opposite side of the sticking space in between the deformable member sealing space by a pressure higher than the sticking space, a pressing means for deforming the deformable member to press the adhesive sheet to the adherend surface,
A pressing surface of the annular, separately from the pressing means, and a re-pressing means for pressing the outer edge region of the adhesive sheet and the region overlapping the adherend is overlapped, the re-pressing means, through said deformable member The outer edge area of the overlapping area is pressed.
また、本発明は、所定の貼付空間で被着体の被着面に接着シートの接着面を対向配置させ、被着体及び接着シートに相対接近する方向の押圧力を付与することで、被着面に接着シートを貼付するシート貼付方法であって、変形可能な変形部材を間に挟んで前記貼付空間の反対側に位置する密閉空間を当該貼付空間よりも高圧にすることで、当該変形部材を変形させて前記被着面に接着シートを押圧する工程と、前記変形部材を変形させる押圧工程とは別に、前記接着シート及び被着体が重なった重なり領域の外縁領域を環状の押圧面を備えた再押圧手段で前記変形部材を介して前記重なり領域の外縁領域を押圧する工程とを有する、という手法を採っている。
In the present invention , the adhesive surface of the adhesive sheet is disposed opposite to the adherend surface of the adherend in a predetermined affixing space, and a pressing force in a direction approaching the adherend and the adhesive sheet is applied. What sheet sticking method der sticking the adhesive sheet to the wearing surface, a sealed space located on the opposite side of the sticking space in between the deformable deformable member by a pressure higher than the sticking space, the a step of pressing the adhesive sheet to the adherend surface to deform the deformable member, separately from the pressing step of deforming said deforming member, presses the outer circumferential area of the circular of the adhesive sheet and the overlap area adherend overlap And a step of pressing an outer edge region of the overlapping region via the deforming member by a re-pressing means having a surface .
本発明によれば、重なり領域の外縁領域を再押圧手段で押圧するので、単位時間当たりの処理能力が低下すること及び被着体にストレスを与えることを極力抑え、重なり領域における外縁領域の押圧力が不足することを防止して接着シートを確実に被着体に貼付することができる。   According to the present invention, since the outer edge area of the overlapping area is pressed by the re-pressing means, the processing capacity per unit time is reduced and stress on the adherend is suppressed as much as possible, and the outer edge area in the overlapping area is pressed. It is possible to prevent the pressure from being insufficient and to reliably adhere the adhesive sheet to the adherend.
本実施形態に係るシート貼付装置の概略正面図。The schematic front view of the sheet sticking apparatus which concerns on this embodiment. 図1のシート貼付装置の動作説明図。Operation | movement explanatory drawing of the sheet sticking apparatus of FIG. 第1変形例を示す概略正面図。The schematic front view which shows a 1st modification. 第2変形例を示す概略正面図。The schematic front view which shows a 2nd modification. 従来のシート貼付装置における不具合例を示す概略図。Schematic which shows the example of a malfunction in the conventional sheet sticking apparatus.
以下、本発明の一実施形態を図面に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
なお、本実施形態におけるX軸、Y軸、Z軸は、それぞれが直交する関係にあり、X軸およびY軸は、所定平面内の軸とし、Z軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Y軸と平行な図1の手前方向から観た場合を基準とし、方向を示した場合、「上」がZ軸の矢印方向で「下」がその逆方向、「左」がX軸の矢印方向で「右」がその逆方向、「前」がY軸の矢印方向であって紙面から手前に向かう方向で「後」がその逆方向とする。   In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the arrow direction of the Y axis, and the direction is from the paper to the front, and “Back” is the opposite direction.
図1において、実施形態に係るシート貼付装置10は、所定の貼付空間SP1(図2(A)参照)で被着体としてのウエハWFの被着面WF1に接着シートASの接着面ADを対向配置させ、当該ウエハWF及び接着シートASに相対接近する方向の押圧力を付与することで、被着面WF1に接着シートASを貼付する装置であって、変形可能な変形部材21を備え、当該変形部材21を間に挟んで貼付空間SP1の反対側に位置する密閉空間SP2(図2(B)参照)を当該貼付空間SP1よりも高圧にすることで、当該変形部材21を変形させて被着面WF1に接着シートASを押圧する押圧手段20と、環状の押圧面31Aを備え、押圧手段20とは別に、接着シートAS及びウエハWFが重なった重なり領域AWの外縁領域を押圧する再押圧手段30と、ウエハWFを下方から支持する被着体支持手段40とを備えている。   In FIG. 1, the sheet sticking apparatus 10 according to the embodiment opposes the adhesive surface AD of the adhesive sheet AS to the adherend surface WF1 of the wafer WF as the adherend in a predetermined sticking space SP1 (see FIG. 2A). An apparatus for attaching the adhesive sheet AS to the adherend surface WF1 by placing and applying a pressing force in a direction relatively approaching the wafer WF and the adhesive sheet AS, comprising a deformable deformable member 21, By making the sealed space SP2 (see FIG. 2 (B)) located on the opposite side of the application space SP1 with the deformation member 21 interposed therebetween at a higher pressure than the application space SP1, the deformation member 21 is deformed to be covered. A pressing means 20 for pressing the adhesive sheet AS on the landing surface WF1 and an annular pressing surface 31A are provided, and separately from the pressing means 20, the outer edge area of the overlapping area AW where the adhesive sheet AS and the wafer WF overlap is pressed. Re pressing means 30, and a adherend support means 40 for supporting the wafer WF from below.
押圧手段20は、平面視略円形に設けられたゴムや樹脂等によって変形可能に設けられるとともに、図示しない電圧印加手段のクーロン力によって接着シートASをその下面で保持可能な所謂静電チャック機能を備えた変形部材21と、変形部材21の外縁領域をその下面で支持する上壁22A及び当該上壁22Aの外縁に連なる側壁22Bからなる下部開放型の上ケース22と、上ケース22をその出力軸23Aで支持する駆動機器としての直動モータ23と、密閉空間SP2に連通された減圧ポンプや真空エジェクタ等の減圧手段24と、密閉空間SP2の圧力を検知可能な圧力センサやロードセル等の圧力検知手段25とを備え、変形部材21の上面と上壁22Aの下面とで密閉された密閉空間SP2が形成され、上壁22Aを介して密閉空間SP2に減圧手段24が連通されている。尚、上ケース22の上壁22Aの下面には、再押圧部材31を受容する凹溝22Cが形成されている。また、減圧手段24は、密閉空間SP2に大気を導入可能に設けられている。   The pressing means 20 is provided so as to be deformable by rubber or resin provided in a substantially circular shape in plan view, and has a so-called electrostatic chuck function capable of holding the adhesive sheet AS on its lower surface by a Coulomb force of a voltage applying means (not shown). The deformable member 21 provided, the upper wall 22A supporting the outer edge region of the deformable member 21 on its lower surface, the lower open type upper case 22 composed of the side wall 22B connected to the outer edge of the upper wall 22A, and the upper case 22 are output. A linear motor 23 as a driving device supported by the shaft 23A, a decompression means 24 such as a decompression pump or a vacuum ejector communicated with the sealed space SP2, and a pressure sensor or a load cell capable of detecting the pressure in the sealed space SP2. The detection unit 25 is provided, and a sealed space SP2 is formed that is sealed by the upper surface of the deformable member 21 and the lower surface of the upper wall 22A. Pressure reducing means 24 to the closed space SP2 are communicated. A concave groove 22 </ b> C for receiving the re-pressing member 31 is formed on the lower surface of the upper wall 22 </ b> A of the upper case 22. The decompression means 24 is provided so that the atmosphere can be introduced into the sealed space SP2.
再押圧手段30は、その下面が押圧面31Aとされた環状の再押圧部材31と、再押圧部材31をその出力軸32Aで支持する駆動機器としての直動モータ32とを備えている。尚、再押圧部材31の厚みは、凹溝22Cの段部22Dの深さと略同一寸法に設定されることで、上壁22Aの底面と押圧面31Aとが同一平面に位置するようになるので、変形部材21が上壁22Aの底面に接している状態で当該変形部材21の面がフラットに維持され、当該変形部材21が損傷することを防止するようになっている。   The re-pressing means 30 includes an annular re-pressing member 31 whose lower surface is a pressing surface 31A, and a linear motion motor 32 as a drive device that supports the re-pressing member 31 with its output shaft 32A. In addition, since the thickness of the re-pressing member 31 is set to be approximately the same as the depth of the step portion 22D of the concave groove 22C, the bottom surface of the upper wall 22A and the pressing surface 31A are positioned on the same plane. The surface of the deformable member 21 is kept flat while the deformable member 21 is in contact with the bottom surface of the upper wall 22A, and the deformable member 21 is prevented from being damaged.
被着体支持手段40は、駆動機器としての直動モータ41と、直動モータ41の出力軸41Aに支持されるとともに、図示しない電圧印加手段のクーロン力によってウエハWFをその上面で保持可能な所謂静電チャック機能を備えたテーブル42と、直動モータ41をその上面で支持する底壁43A及び側壁43Bからなる上部開放型の下ケース43と、変形部材21の下面と上ケース22と下ケース43とで形成される貼付空間SP1に連通された減圧ポンプや真空エジェクタ等の減圧手段44と、貼付空間SP1の圧力を検知可能な圧力センサやロードセル等の圧力検知手段45とを備えている。尚、減圧手段44は、貼付空間SP1に大気を導入可能に設けられている。   The adherend support means 40 is supported by a linear motion motor 41 as a driving device and an output shaft 41A of the linear motion motor 41, and can hold the wafer WF on its upper surface by a Coulomb force of a voltage application means (not shown). A table 42 having a so-called electrostatic chuck function, an upper open type lower case 43 including a bottom wall 43A and a side wall 43B for supporting the linear motion motor 41 on its upper surface, a lower surface of the deformable member 21, an upper case 22 and a lower case A pressure reducing means 44 such as a decompression pump or a vacuum ejector communicated with the application space SP1 formed by the case 43, and a pressure detection means 45 such as a pressure sensor or a load cell capable of detecting the pressure of the application space SP1 are provided. . In addition, the decompression means 44 is provided so that air | atmosphere can be introduce | transduced into sticking space SP1.
次に、本実施形態におけるシート貼付装置10を用いた接着シートASの貼付方法について説明する。   Next, a method of sticking the adhesive sheet AS using the sheet sticking device 10 in the present embodiment will be described.
先ず、図1に示すように、上下ケース22、43が離隔した状態で、人手または多関節ロボットやベルトコンベア等の図示しない搬送手段等によって、接着シートASを変形部材21の下面に当接させると、押圧手段20が図示しない電圧印加手段を駆動し、クーロン力によって接着シートASを保持する。次に、人手または図示しない搬送手段等によって、テーブル42上にウエハWFを載置すると、被着体支持手段40が図示しない電圧印加手段を駆動し、クーロン力によってウエハWFを保持する。次いで、押圧手段20が直動モータ23を駆動し、上ケース22を下降させて図2(A)に示すように、貼付空間SP1を形成する。その後、押圧手段20及び被着体支持手段40が減圧手段24、44を駆動し、密閉空間SP2及び貼付空間SP1を同じ減圧率で減圧し、各圧力検知手段25、45によって密閉空間SP2及び貼付空間SP1が所定の減圧状態(第1圧力)となったことが検知されると、押圧手段20及び被着体支持手段40が減圧手段24、44の駆動を停止する。次に、被着体支持手段40が直動モータ41を駆動し、テーブル42を所定の位置にまで上昇させた後、押圧手段20が減圧手段24を駆動し、密閉空間SP1に大気を徐々に導入することで、密閉空間SP1を貼付空間SP2よりも高圧にする。これにより、変形部材21を変形させ、図2(B)に示すように、接着シートASの中央部をウエハWFの被着面WF1中央部に当接させた後、その貼付領域を徐々に外側に広げて行き、図2(C)に示すように、接着シートAS全体を被着面WF1に押圧する。これにより、接着シートASと被着面WF1との間の空気が外方に追い出されながら貼付が行われるので、当該接着シートASと被着面WF1との間に気泡が形成されることを防止することができる。   First, as shown in FIG. 1, the adhesive sheet AS is brought into contact with the lower surface of the deformable member 21 by a manual means or a conveying means (not shown) such as an articulated robot or a belt conveyor in a state where the upper and lower cases 22 and 43 are separated from each other. Then, the pressing means 20 drives a voltage applying means (not shown), and holds the adhesive sheet AS by Coulomb force. Next, when the wafer WF is placed on the table 42 by a hand or by a transfer means (not shown), the adherend support means 40 drives a voltage application means (not shown) to hold the wafer WF by Coulomb force. Next, the pressing means 20 drives the linear motor 23 to lower the upper case 22 to form a pasting space SP1 as shown in FIG. Thereafter, the pressing unit 20 and the adherend support unit 40 drive the decompression units 24 and 44 to decompress the sealed space SP2 and the pasting space SP1 at the same decompression rate. When it is detected that the space SP1 is in a predetermined reduced pressure state (first pressure), the pressing means 20 and the adherend support means 40 stop driving the pressure reducing means 24 and 44. Next, after the adherend support means 40 drives the linear motion motor 41 and raises the table 42 to a predetermined position, the pressing means 20 drives the decompression means 24 to gradually release the atmosphere into the sealed space SP1. By introducing, the sealed space SP1 has a higher pressure than the pasting space SP2. As a result, the deformable member 21 is deformed and, as shown in FIG. 2 (B), the center portion of the adhesive sheet AS is brought into contact with the center portion of the adherend surface WF1 of the wafer WF, and then the sticking region is gradually moved outward. As shown in FIG. 2C, the entire adhesive sheet AS is pressed against the adherend surface WF1. This prevents the air from being formed between the adhesive sheet AS and the adherend surface WF1 because the sticking is performed while the air between the adhesive sheet AS and the adherend surface WF1 is expelled outward. can do.
そして、密閉空間SP2の圧力を更に高め、圧力検知手段25によって密閉空間SP2の圧力が所定の減圧状態(第2圧力)となったことが検知されると、押圧手段20が減圧手段24の駆動を停止する。このとき、図2(D)に示すように、変形部材21の一部が接着シートASの上面よりも下方に位置するように変形するので、変形部材21における重なり領域AWの外縁領域に対応する部分に浮き上がる方向の力が加わり、当該重なり領域AWにおける外縁領域の押圧力が不足する。そこで、再押圧手段30が、直動モータ32を駆動し、再押圧部材31を下降させて押圧面31Aで重なり領域AWの外縁領域を押圧する。なお、変形部材21が変形する間は、被着体支持手段40が減圧手段44を駆動し、圧力検知手段45の検知結果に基づいて貼付空間SP1の圧力を第1圧力で維持するように制御する。   When the pressure in the sealed space SP2 is further increased and the pressure detecting means 25 detects that the pressure in the sealed space SP2 has reached a predetermined reduced pressure state (second pressure), the pressing means 20 drives the pressure reducing means 24. To stop. At this time, as shown in FIG. 2D, since a part of the deformation member 21 is deformed so as to be positioned below the upper surface of the adhesive sheet AS, it corresponds to the outer edge region of the overlapping region AW in the deformation member 21. A force in the direction of floating is applied to the portion, and the pressing force of the outer edge region in the overlapping region AW is insufficient. Therefore, the re-pressing means 30 drives the linear motion motor 32 to lower the re-pressing member 31 and press the outer edge region of the overlapping region AW with the pressing surface 31A. While the deformable member 21 is deformed, the adherend support means 40 drives the decompression means 44 and controls so as to maintain the pressure of the application space SP1 at the first pressure based on the detection result of the pressure detection means 45. To do.
再押圧部材31の押圧力が所定の押圧力に達したことを圧力センサやロードセル等の図示しない検知手段が検知すると、押圧手段20が図示しない電圧印加手段の駆動を停止し、接着シートASの保持を解除する。その後、再押圧手段30が、直動モータ32を駆動し、再押圧部材31を上昇させるとともに、押圧手段20が減圧手段24を駆動し、密閉空間SP2が第1圧力となるまで減圧することで、再押圧部材31及び変形部材21が図2(A)で示す状態に戻る。その後、押圧手段20及び被着体支持手段40が減圧手段24、44を駆動し、密閉空間SP2及び貼付空間SP1を同じ加圧率で加圧し(大気を導入し)、各圧力検知手段25、45によって大気圧となったことが検知されると、押圧手段20及び被着体支持手段40が減圧手段24、44の駆動を停止する。そして、押圧手段20が直動モータ23を駆動し、上ケース22を上昇させた後、被着体支持手段40が図示しない電圧印加手段の駆動を停止し、人手または図示しない搬送手段等によって、接着シートASが貼付されたウエハWFを次の工程に搬送し、以降上述と同様の動作が繰り返される。   When detecting means (not shown) such as a pressure sensor or a load cell detects that the pressing force of the re-pressing member 31 has reached a predetermined pressing force, the pressing means 20 stops driving the voltage applying means (not shown), and the adhesive sheet AS Release the hold. Thereafter, the re-pressing means 30 drives the linear motor 32 to raise the re-pressing member 31, and the pressing means 20 drives the pressure-reducing means 24 to reduce the pressure until the sealed space SP2 reaches the first pressure. The re-pressing member 31 and the deforming member 21 return to the state shown in FIG. Thereafter, the pressing means 20 and the adherend support means 40 drive the decompression means 24 and 44 to pressurize the sealed space SP2 and the pasting space SP1 at the same pressurization rate (introducing the atmosphere), and each pressure detection means 25, When it is detected by 45 that the atmospheric pressure has been reached, the pressing means 20 and the adherend support means 40 stop driving the decompression means 24 and 44. Then, after the pressing means 20 drives the linear motion motor 23 and raises the upper case 22, the adherend support means 40 stops driving the voltage applying means (not shown) and is manually or by a conveying means (not shown). The wafer WF to which the adhesive sheet AS is affixed is transferred to the next step, and thereafter the same operation as described above is repeated.
従って、このような実施形態によれば、重なり領域AWの外縁領域を再押圧手段30で押圧するので、単位時間当たりの処理能力が低下すること及びウエハWFにストレスを与えることを極力抑え、重なり領域AWにおける外縁領域の押圧力が不足することを防止して接着シートASを確実にウエハWFに貼付することができる。   Therefore, according to such an embodiment, since the outer edge area of the overlap area AW is pressed by the re-pressing means 30, it is possible to suppress a reduction in processing performance per unit time and stress on the wafer WF as much as possible. It is possible to prevent the pressing force of the outer edge region in the region AW from being insufficient and to adhere the adhesive sheet AS to the wafer WF reliably.
以上、本発明の好ましい実施形態を説明したが、本発明はこれらに限定されるものではなく、その要旨の範囲内で様々な変形や変更が可能である。
例えば、変形部材21は、弾性変形可能な部材であってもよいし、完全に又は部分的に元の形状に戻ることのない部材であってもよい。
また、変形部材21の材質や、形状、厚さ、大きさは適宜に選択することができる。
更に、変形部材21やテーブル42は、吸引、接着、メカチャック等によって接着シートASやウエハWFを保持する構成であってもよい。
また、押圧手段は、接着シートAS全体を同時にウエハWFに押圧する構成、或いは、接着シートASの右から左又は左から右、前から後ろ又は後ろから前に徐々に押圧する構成であってもよい。
更に、押圧手段が押圧する側は、接着シートAS側でもよいし、ウエハWF側でもよいし、それら両方でもよい。
また、減圧手段24、44に代えて液体やジェル等の空気以外の流体によって密閉空間SP1及び貼付空間SP2を加減圧する構成のものを採用してもよい。
更に、押圧手段20は、被着体支持手段40とで第2空間SP2を形成することのない構成であってもよい。
As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to these, A various deformation | transformation and change are possible within the range of the summary.
For example, the deformable member 21 may be a member that can be elastically deformed, or may be a member that does not completely or partially return to the original shape.
The material, shape, thickness, and size of the deformable member 21 can be selected as appropriate.
Further, the deformable member 21 and the table 42 may be configured to hold the adhesive sheet AS and the wafer WF by suction, adhesion, mechanical chuck, or the like.
Further, the pressing means may be configured to press the entire adhesive sheet AS simultaneously onto the wafer WF, or may be configured to gradually press the adhesive sheet AS from right to left or from left to right, from front to back, or from back to front. Good.
Further, the side pressed by the pressing means may be the adhesive sheet AS side, the wafer WF side, or both of them.
Moreover, it may replace with the decompression means 24 and 44, and the thing of the structure which pressurizes and depressurizes sealed space SP1 and sticking space SP2 with fluids other than air, such as a liquid and a gel, may be employ | adopted.
Further, the pressing means 20 may be configured so as not to form the second space SP2 with the adherend support means 40.
また、再押圧手段は、図3に示すように、変形部材21と同様の部材で構成された環状の環状変形部材33と、当該環状変形部材33と上壁22Aとの間に形成される密閉された再押圧空間SP3に連通された減圧ポンプや真空エジェクタ等の減圧手段34と、密閉空間SP2の圧力を検知可能な圧力センサやロードセル等の圧力検知手段35とで構成された再押圧手段30Aとしてもよい。なお、減圧手段34は、再押圧空間SP3に大気を導入可能に設けられている。
この場合、変形部材21で接着シートAS全体を被着面WF1に押圧した後、再押圧手段30Aが圧力検知手段35の検知結果を基に、減圧手段34を駆動し、環状変形部材33を変形させてその下面である押圧面33Aで重なり領域AWの外縁領域を押圧する。なお、環状変形部材33が変形する間は、押圧手段20が減圧手段24を駆動し、圧力検知手段25の検知結果に基づいて密閉空間SP2の圧力を第2圧力で維持するように制御する。また、変形部材21が損傷することを防止するために、変形部材21が上壁22Aの底面に接している状態で当該変形部材21の面がフラットに維持されるように、環状変形部材33の厚みを上壁22Aの下面に形成された凹溝22Eの深さと略同一寸法に設定するとよい。
Further, as shown in FIG. 3, the re-pressing means is an annular annular deformation member 33 made of the same member as the deformation member 21, and a sealing formed between the annular deformation member 33 and the upper wall 22A. Repressing means 30A comprising a pressure reducing means 34 such as a pressure reducing pump or a vacuum ejector communicated with the repressing space SP3, and a pressure sensor 35 such as a pressure sensor capable of detecting the pressure in the sealed space SP2 or a load cell. It is good. The decompression means 34 is provided so that the atmosphere can be introduced into the repressing space SP3.
In this case, after the entire adhesive sheet AS is pressed against the adherend surface WF1 by the deformation member 21, the re-pressing means 30A drives the decompression means 34 based on the detection result of the pressure detection means 35 to deform the annular deformation member 33. Then, the outer edge area of the overlapping area AW is pressed by the pressing surface 33A which is the lower surface thereof. While the annular deformation member 33 is deformed, the pressing means 20 drives the decompression means 24 and controls the pressure of the sealed space SP2 to be maintained at the second pressure based on the detection result of the pressure detection means 25. Further, in order to prevent the deformation member 21 from being damaged, the annular deformation member 33 is arranged so that the surface of the deformation member 21 is kept flat while the deformation member 21 is in contact with the bottom surface of the upper wall 22A. The thickness may be set to be approximately the same as the depth of the concave groove 22E formed on the lower surface of the upper wall 22A.
更に、再押圧手段は、図4に示すように、上壁22Aから突出した環状の環状突出部材36によって構成された再押圧手段30Bとしてもよい。この場合、変形部材21で接着シートAS全体を被着面WF1に押圧した後、被着体支持手段40が直動モータ41を駆動し、ウエハWF及び接着シートASを環状突出部材36に相対接近させて、当該環状突出部材36での下面である押圧面36Aで重なり領域AWの外縁領域を押圧する。なお、押圧手段20が直動モータ23を駆動し、ウエハWF及び接着シートASを環状突出部材36に相対接近させてもよいし、押圧手段20及び被着体支持手段40が直動モータ23、41を駆動し、ウエハWF及び接着シートASを環状突出部材36に相対接近させてもよい。このとき、側壁22Bはない方がよい。また、ウエハWF及び接着シートASを環状突出部材36に相対接近させる間は、押圧手段20が減圧手段24を駆動し、圧力検知手段25の検知結果に基づいて密閉空間SP2の圧力を第2圧力で維持するように制御する。   Furthermore, as shown in FIG. 4, the repressing means may be a repressing means 30B configured by an annular projecting member 36 projecting from the upper wall 22A. In this case, after the entire adhesive sheet AS is pressed against the adherend surface WF 1 by the deformable member 21, the adherend support means 40 drives the linear motion motor 41 to bring the wafer WF and the adhesive sheet AS relatively close to the annular projecting member 36. Thus, the outer edge region of the overlapping region AW is pressed by the pressing surface 36A which is the lower surface of the annular projecting member 36. The pressing means 20 may drive the linear motion motor 23 to bring the wafer WF and the adhesive sheet AS relatively close to the annular projecting member 36, or the pressing means 20 and the adherend support means 40 may be the linear motion motor 23, 41 may be driven to bring the wafer WF and the adhesive sheet AS relatively close to the annular projecting member 36. At this time, it is better not to have the side wall 22B. Further, while the wafer WF and the adhesive sheet AS are relatively approached to the annular projecting member 36, the pressing unit 20 drives the decompression unit 24, and the pressure of the sealed space SP2 is set to the second pressure based on the detection result of the pressure detection unit 25. Control to maintain at.
また、再押圧部材の形状は、被着体の形状に応じて種々の環形状、例えば、多角形や楕円形の環形状等とすることができる上、周囲全体として繋がったクローズドループ形状(周状)であってもよいし、部分的に切り欠かれて離散配置されるものであってもよい。
更に、再押圧部材を構成する材料は、金属、樹脂、ゴム、木材、陶器等、特に限定されることはない。
また、再押圧部材の押圧面を変形可能な部材で構成し、内周縁側が先に変形部材21に当接し、押圧力が増すにつれて外周縁側が変形部材21に当接する断面視テーパー型とし、再押圧部材によっても、接着シートASと被着面WF1との間の空気が外方に追い出されながら貼付できるように構成してもよい。
更に、再押圧部材の押圧面は、曲面であってもよく、この場合も、押圧面は変形可能な部材を採用することが好ましい。
The shape of the re-pressing member can be various ring shapes such as a polygonal or elliptical ring shape according to the shape of the adherend, and a closed loop shape (circumference) connected as a whole. Shape) or may be partly cut out and discretely arranged.
Furthermore, the material which comprises a repressing member is not specifically limited, such as a metal, resin, rubber | gum, wood, earthenware.
Further, the pressing surface of the re-pressing member is composed of a deformable member, and the inner peripheral edge side first comes into contact with the deformation member 21, and the outer peripheral edge side comes into contact with the deformation member 21 as the pressing force increases. The re-pressing member may be configured so that the air between the adhesive sheet AS and the adherend surface WF1 can be stuck while being driven outward.
Furthermore, the pressing surface of the re-pressing member may be a curved surface. In this case as well, it is preferable to employ a deformable member for the pressing surface.
更に、被着体支持手段40は、テーブル42を上昇させる直動モータ41を設けなくてもよいし、別の装置でウエハWFを支持する場合、本願のシート貼付装置10において被着体支持手段40はなくてもよい。
また、貼付空間SP2を減圧することなく、密閉空間SP1にのみに空気等を送り、ウエハWF及び接着シートASに所定の押圧力を付与する構成としてもよいし、貼付空間SP1を大気圧状態や大気圧よりも高圧にした状態で、密閉空間SP2を貼付空間SP1よりも更に高圧にしてウエハWF及び接着シートASに所定の押圧力を付与する構成としてもよい。
更に、第1圧力、第2圧力は、変形部材21を変形させて接着シートASをウエハWFに押圧して貼付できれば、任意に設定することができるし、第3圧力も任意に設定することができる。
また、接着シートASは、上下ケース22、43の外側まで連続した帯状のシートであってもよく、左右方向に繰出されることで上下ケース22、43間にセットされるとともに、接着シートASが貼付されたウエハWFを次の工程に送る構成であってもよいし、ウエハWFに貼付された帯状のシートを所定形状に切断する適宜な切断手段を採用してもよい。
Further, the adherend support means 40 does not need to be provided with the linear motor 41 that raises the table 42. When the wafer WF is supported by another apparatus, the adherend support means is used in the sheet sticking apparatus 10 of the present application. 40 may be omitted.
Moreover, it is good also as a structure which sends air etc. only to sealed space SP1, without decompressing sticking space SP2, and gives predetermined | prescribed pressing force to wafer WF and adhesive sheet AS. In a state where the pressure is higher than the atmospheric pressure, the sealed space SP2 may be set to a pressure higher than that of the pasting space SP1, and a predetermined pressing force may be applied to the wafer WF and the adhesive sheet AS.
Further, the first pressure and the second pressure can be arbitrarily set as long as the deformable member 21 is deformed and the adhesive sheet AS can be pressed and attached to the wafer WF, and the third pressure can also be arbitrarily set. it can.
The adhesive sheet AS may be a belt-like sheet that continues to the outside of the upper and lower cases 22 and 43. The adhesive sheet AS is set between the upper and lower cases 22 and 43 by being fed out in the left-right direction, and the adhesive sheet AS is The configuration may be such that the affixed wafer WF is sent to the next step, or an appropriate cutting means for cutting the belt-like sheet affixed to the wafer WF into a predetermined shape may be employed.
また、本発明における接着シートASおよび保持対象物の材質、種別、形状等は、特に限定されることはない。例えば、接着シートASは、感圧接着性、感熱接着性等の接着形態に限定されることはなく、感熱接着性のものが採用された場合は、当該接着シートASを加熱する適宜な加熱手段を設ければよい。また、このような接着シートASは、例えば、接着剤層だけの単層のもの、基材シートと接着剤層との間に中間層を有するもの、基材シートの上面にカバー層を有する等3層以上のもの、更には、基材シートを接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。
また、保持対象物としては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、接着シートASを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の保持対象物に貼付することができる。
Further, the material, type, shape, etc. of the adhesive sheet AS and the holding object in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer.
In addition, as the holding object, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary shaped sheets, films, tapes, etc. can be attached to any holding object as described above.
更に、本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、再押圧手段は、環状の押圧面を備え、押圧手段とは別に、接着シート及び被着体が重なった重なり領域の外縁領域を押圧できるものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない(他の手段および工程についての説明は省略する)。   Furthermore, the means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps, and moreover, the configuration of a simple embodiment shown in the above embodiment. It is not limited at all to a thing or a process. For example, if the re-pressing means has an annular pressing surface and can press the outer edge area of the overlapping area where the adhesive sheet and the adherend overlap, separately from the pressing means, the re-pressing means can be compared with the common general technical knowledge at the time of filing. However, there is no limitation as long as it is within the technical range (the description of other means and steps is omitted).
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダ及びロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる(実施形態で例示したものと重複するものもある)。   The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).
10 シート貼付装置
AS 接着シート
AW 重なり領域
SP1 貼付空間
SP2 密閉空間
WF ウエハ
WF1 被着面
20 押圧手段
21 変形部材
30,30A,30B 再押圧手段
31 再押圧部材
31A 押圧面
DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus AS Adhesive sheet AW Overlapping area | region SP1 Pasting space SP2 Sealed space WF Wafer WF1 Adhering surface 20 Pressing means 21 Deformation member 30, 30A, 30B Repressing means 31 Repressing member 31A Pressing surface

Claims (2)

  1. 所定の貼付空間で被着体の被着面に接着シートの接着面を対向配置させ、当該被着体及び接着シートに相対接近する方向の押圧力を付与することで、前記被着面に接着シートを貼付するシート貼付装置であって、
    変形可能な変形部材を備え、当該変形部材を間に挟んで前記貼付空間の反対側に位置する密閉空間を当該貼付空間よりも高圧にすることで、当該変形部材を変形させて前記被着面に接着シートを押圧する押圧手段と、
    環状の押圧面を備え、前記押圧手段とは別に、前記接着シート及び被着体が重なった重なり領域の外縁領域を押圧する再押圧手段とを備え、当該再押圧手段は、前記変形部材を介して前記重なり領域の外縁領域を押圧することを特徴とするシート貼付装置。
    Adhering to the adherend surface by placing the adhesive surface of the adhesive sheet opposite to the adherend surface of the adherend in a predetermined affixing space and applying a pressing force in a direction approaching the adherend and the adhesive sheet. A sheet sticking device for sticking a sheet,
    A deformable deformable member is provided, and a sealing space located on the opposite side of the paste space with the deformable member interposed therebetween is set to a pressure higher than the paste space, thereby deforming the deformable member and the adherend surface Pressing means for pressing the adhesive sheet;
    In addition to the pressing unit, the pressing unit includes a re-pressing unit that presses an outer edge region of the overlapping region where the adhesive sheet and the adherend are overlapped, and the re-pressing unit includes the deforming member. And pressing the outer edge area of the overlapping area .
  2. 所定の貼付空間で被着体の被着面に接着シートの接着面を対向配置させ、当該被着体及び接着シートに相対接近する方向の押圧力を付与することで、前記被着面に接着シートを貼付するシート貼付方法であって、
    変形可能な変形部材を間に挟んで前記貼付空間の反対側に位置する密閉空間を当該貼付空間よりも高圧にすることで、当該変形部材を変形させて前記被着面に接着シートを押圧する工程と、
    前記変形部材を変形させる押圧工程とは別に、前記接着シート及び被着体が重なった重なり領域の外縁領域を環状の押圧面を備えた再押圧手段で前記変形部材を介して前記重なり領域の外縁領域を押圧する工程と、を有することを特徴とするシート貼付方法。
    Adhering to the adherend surface by placing the adhesive surface of the adhesive sheet opposite to the adherend surface of the adherend in a predetermined affixing space and applying a pressing force in a direction approaching the adherend and the adhesive sheet. A sheet affixing method for affixing a sheet,
    The sealed space located on the opposite side of the sticking space with a deformable deforming member interposed therebetween is set to a pressure higher than that of the sticking space, thereby deforming the deformable member and pressing the adhesive sheet against the adherend surface. Process,
    Separately from the pressing step of deforming the deformable member, the outer edge region of the overlapping region where the adhesive sheet and the adherend are overlapped with the outer surface of the overlapping region via the deforming member by the repressing means having an annular pressing surface. And a step of pressing the region .
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