JP5986408B2 - 試料作製方法 - Google Patents
試料作製方法 Download PDFInfo
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- JP5986408B2 JP5986408B2 JP2012066006A JP2012066006A JP5986408B2 JP 5986408 B2 JP5986408 B2 JP 5986408B2 JP 2012066006 A JP2012066006 A JP 2012066006A JP 2012066006 A JP2012066006 A JP 2012066006A JP 5986408 B2 JP5986408 B2 JP 5986408B2
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- sample
- thin film
- deposition
- deposition film
- electron beam
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using ion beam radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
- H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
- H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Sampling And Sample Adjustment (AREA)
Description
本発明に係る試料作製方法は、試料片をイオンビームで加工し、電子ビームが透過可能な膜厚の薄膜部を形成する工程と、薄膜部にデポジションガスを供給する工程と、薄膜部に電子ビームを照射し、薄膜部の電子ビームが入射される側の第一の面と、当該面に対向する第二の面に同時にデポジション膜を形成する工程と、を有する。
まず、試料作製方法を実施する荷電粒子ビーム装置について説明する。荷電粒子ビーム装置は、図1に示すように、EB鏡筒1と、FIB鏡筒2と、試料室3を備えている。試料室3内に収容された試料7にEB鏡筒1から電子ビーム8を、FIB鏡筒2からイオンビーム9を照射する。EB鏡筒1とFIB鏡筒2とは、それぞれの照射軸が試料7上で互いに直交するように配置されている。
まず、デポジション膜の形成原理について図4を用いて説明する。図4(a)に示すように薄膜部7aに向けて電子ビーム8を照射すると、電子ビーム鏡筒1側の薄膜部7aの表面7dから二次電子が発生する。また、電子ビーム8は薄膜部7aを透過するので、表面7dの反対側の裏面7eからも二次電子が発生する。すなわち、電子ビーム8が照射される位置について薄膜部7aの両面から二次電子が発生する。この二次電子を利用して薄膜部7aの両面に同時にデポジション膜を形成する。つまり、デポジションガスを薄膜部7aの表面7dと裏面7eに均等に吹きつけ、電子ビーム8を表面7dに照射することで、その照射位置の薄膜部7aの両面から二次電子が発生し、デポジションガスを分解する。これにより分解された成分が薄膜部7aに堆積する。
2…FIB鏡筒
3…試料室
4…二次電子検出器
5…透過電子検出器
6…試料台
7…試料
7a…薄片部
7b、7c…支持部
7d…表面
7e…裏面
7f…観察領域
8…電子ビーム
9…イオンビーム
10…入力部
11…制御部
12…EB制御部
13…FIB制御部
14…像形成部
15…試料台駆動部
16…試料台制御部
17…表示部
18…ガス銃
21…ウエハ
22…加工溝
31、34…SIM像
32、33…照射領域
41、42…堆積物
51、53…SEM像
52…照射領域
54、55、56…デポジション膜
61、62…SIM像
Claims (4)
- 試料片をイオンビームで加工し、電子ビームが透過可能な膜厚の薄膜部を形成する工程と、
前記薄膜部にデポジションガスを供給する工程と、
前記薄膜部に前記電子ビームを照射し、前記薄膜部の前記電子ビームが入射される側の第一の面と、当該面に対向する第二の面に同時にデポジション膜を形成する工程と、を有する試料作製方法。 - 前記第一の面に形成されたデポジション膜を前記イオンビームでエッチング加工し、前記デポジション膜の膜厚を小さくする工程を有する請求項1に記載の試料作製方法。
- 前記デポジション膜の膜厚を小さくする工程は、前記第一の面のデポジション膜の膜厚が前記第二の面のデポジション膜の膜厚と同じになるように前記イオンビームにより前記第一の面のデポジション膜をエッチング加工する請求項2に記載の試料作製方法。
- 前記イオンビームは前記電子ビームの照射方向に対し、垂直な方向から照射する請求項2または3に記載の試料作製方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2012066006A JP5986408B2 (ja) | 2012-03-22 | 2012-03-22 | 試料作製方法 |
DE102013102537.4A DE102013102537B4 (de) | 2012-03-22 | 2013-03-13 | Proben-vorbereitungsverfahren |
US13/842,184 US9260782B2 (en) | 2012-03-22 | 2013-03-15 | Sample preparation method |
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JP2012066006A JP5986408B2 (ja) | 2012-03-22 | 2012-03-22 | 試料作製方法 |
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JP2013195380A JP2013195380A (ja) | 2013-09-30 |
JP5986408B2 true JP5986408B2 (ja) | 2016-09-06 |
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US (1) | US9260782B2 (ja) |
JP (1) | JP5986408B2 (ja) |
DE (1) | DE102013102537B4 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3101406B1 (de) | 2015-06-05 | 2022-12-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur präparation einer probe für die mikrostrukturdiagnostik sowie probe für die mikrostrukturdiagnostik |
JP6668050B2 (ja) * | 2015-11-24 | 2020-03-18 | 日本電子株式会社 | 薄膜試料加工方法 |
JP6900027B2 (ja) * | 2017-03-28 | 2021-07-07 | 株式会社日立ハイテクサイエンス | 試料トレンチ埋込方法 |
KR102180979B1 (ko) * | 2019-08-19 | 2020-11-19 | 참엔지니어링(주) | 처리 장치 및 방법 |
CN110553885B (zh) * | 2019-10-14 | 2022-04-12 | 长江存储科技有限责任公司 | 采用fib制备测试样品的方法以及测试样品 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5854191B2 (ja) * | 1981-12-14 | 1983-12-03 | 日電アネルパ株式会社 | 両面スパッタリング装置 |
JP2988452B2 (ja) * | 1997-09-26 | 1999-12-13 | 日本電気株式会社 | 結晶格子歪み測定用試料の作製方法、および結晶格子歪み測定方法 |
JP2000035390A (ja) * | 1998-07-16 | 2000-02-02 | Seiko Instruments Inc | 薄片化加工方法 |
JP4153388B2 (ja) * | 2003-08-29 | 2008-09-24 | Tdk株式会社 | 試料測定方法 |
JP2006071339A (ja) * | 2004-08-31 | 2006-03-16 | Tdk Corp | 解析用試料、試料作製方法および試料解析方法 |
JP4947965B2 (ja) * | 2005-12-06 | 2012-06-06 | ラピスセミコンダクタ株式会社 | 透過型電子顕微鏡用の試料の作製方法、観察方法及び構造 |
JP5099291B2 (ja) | 2006-02-14 | 2012-12-19 | エスアイアイ・ナノテクノロジー株式会社 | 集束イオンビーム装置及び試料の断面加工・観察方法 |
JP2009198412A (ja) * | 2008-02-25 | 2009-09-03 | Sii Nanotechnology Inc | 透過電子顕微鏡用試料の作製方法及び透過電子顕微鏡用試料 |
DE102009008166A1 (de) * | 2009-02-10 | 2010-09-02 | Carl Zeiss Nts Gmbh | Verfahren zur Abscheidung von Schutzstrukturen |
JP5564299B2 (ja) * | 2010-03-18 | 2014-07-30 | 株式会社日立ハイテクサイエンス | 試料加工観察方法 |
US8859963B2 (en) | 2011-06-03 | 2014-10-14 | Fei Company | Methods for preparing thin samples for TEM imaging |
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2012
- 2012-03-22 JP JP2012066006A patent/JP5986408B2/ja active Active
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2013
- 2013-03-13 DE DE102013102537.4A patent/DE102013102537B4/de active Active
- 2013-03-15 US US13/842,184 patent/US9260782B2/en active Active
Also Published As
Publication number | Publication date |
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US9260782B2 (en) | 2016-02-16 |
DE102013102537B4 (de) | 2022-10-06 |
US20130251914A1 (en) | 2013-09-26 |
DE102013102537A1 (de) | 2013-09-26 |
JP2013195380A (ja) | 2013-09-30 |
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