JP5984406B2 - 測定装置 - Google Patents

測定装置 Download PDF

Info

Publication number
JP5984406B2
JP5984406B2 JP2012019884A JP2012019884A JP5984406B2 JP 5984406 B2 JP5984406 B2 JP 5984406B2 JP 2012019884 A JP2012019884 A JP 2012019884A JP 2012019884 A JP2012019884 A JP 2012019884A JP 5984406 B2 JP5984406 B2 JP 5984406B2
Authority
JP
Japan
Prior art keywords
measured
measurement
reference mirror
probe
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012019884A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013160516A5 (enExample
JP2013160516A (ja
Inventor
哲二 太田
哲二 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012019884A priority Critical patent/JP5984406B2/ja
Priority to US13/754,223 priority patent/US20130197844A1/en
Publication of JP2013160516A publication Critical patent/JP2013160516A/ja
Publication of JP2013160516A5 publication Critical patent/JP2013160516A5/ja
Application granted granted Critical
Publication of JP5984406B2 publication Critical patent/JP5984406B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Data Mining & Analysis (AREA)
  • Theoretical Computer Science (AREA)
  • Computational Mathematics (AREA)
  • Mathematical Analysis (AREA)
  • Mathematical Optimization (AREA)
  • Algebra (AREA)
  • Pure & Applied Mathematics (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2012019884A 2012-02-01 2012-02-01 測定装置 Expired - Fee Related JP5984406B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012019884A JP5984406B2 (ja) 2012-02-01 2012-02-01 測定装置
US13/754,223 US20130197844A1 (en) 2012-02-01 2013-01-30 Measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012019884A JP5984406B2 (ja) 2012-02-01 2012-02-01 測定装置

Publications (3)

Publication Number Publication Date
JP2013160516A JP2013160516A (ja) 2013-08-19
JP2013160516A5 JP2013160516A5 (enExample) 2015-03-26
JP5984406B2 true JP5984406B2 (ja) 2016-09-06

Family

ID=48870996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012019884A Expired - Fee Related JP5984406B2 (ja) 2012-02-01 2012-02-01 測定装置

Country Status (2)

Country Link
US (1) US20130197844A1 (enExample)
JP (1) JP5984406B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5532238B2 (ja) * 2010-07-08 2014-06-25 国立大学法人東京工業大学 剛体特性同定装置及び剛体特性同定方法
JP5713660B2 (ja) * 2010-12-21 2015-05-07 キヤノン株式会社 形状測定方法
DE102011115027A1 (de) * 2011-10-07 2013-04-11 Polytec Gmbh Kohärenzrasterinterferometer und Verfahren zur ortsaufgelösten optischen Vermessung der Oberflächengeometrie eines Objekts
KR101458407B1 (ko) 2013-08-23 2014-11-10 주식회사 고영테크놀러지 형상 측정장치
JP6655888B2 (ja) 2014-08-20 2020-03-04 キヤノン株式会社 計測装置、計測方法、および物品の製造方法
JP6309868B2 (ja) * 2014-09-26 2018-04-11 株式会社神戸製鋼所 形状測定装置および形状測定方法
JP6611582B2 (ja) * 2015-12-11 2019-11-27 キヤノン株式会社 計測装置、および計測方法
JP6484196B2 (ja) 2016-04-21 2019-03-13 ファナック株式会社 厚さ測定装置および厚さ測定方法
CN114964126B (zh) * 2018-05-08 2025-07-18 汉阳大学校Erica产学协力团 对象物的表面测定装置及测定方法
JP7414643B2 (ja) * 2020-05-28 2024-01-16 株式会社日立製作所 形状測定装置および形状測定方法
CN112066961B (zh) * 2020-09-15 2021-04-13 山东鑫诚精密机械有限公司 精密测量阿贝误差控制系统
CN120063673B (zh) * 2025-04-25 2025-07-11 长春萨米特光电科技有限公司 一种快速反射镜振动环境下锁止精度的测量装置及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08219738A (ja) * 1995-02-16 1996-08-30 Nikon Corp 干渉測定装置
JP4212138B2 (ja) * 1998-03-26 2009-01-21 コニカミノルタセンシング株式会社 ３次元計測装置
US6252659B1 (en) * 1998-03-26 2001-06-26 Minolta Co., Ltd. Three dimensional measurement apparatus
JP2005017020A (ja) * 2003-06-24 2005-01-20 Canon Inc ３次元形状計測装置
EP1730465B1 (en) * 2004-03-18 2015-05-20 Renishaw plc Scanning an object
JP4474443B2 (ja) * 2007-07-17 2010-06-02 キヤノン株式会社 形状測定装置および方法
TWI371574B (en) * 2008-08-05 2012-09-01 Univ Nat Taipei Technology Vibration resistant interferometric scanning system and method thereof
JP5147065B2 (ja) * 2008-10-14 2013-02-20 Ｊｕｋｉ株式会社 三次元形状検査装置
US8004688B2 (en) * 2008-11-26 2011-08-23 Zygo Corporation Scan error correction in low coherence scanning interferometry

Also Published As

Publication number Publication date
JP2013160516A (ja) 2013-08-19
US20130197844A1 (en) 2013-08-01

Similar Documents

Publication Publication Date Title
JP5984406B2 (ja) 測定装置
JP6114010B2 (ja) 形状測定装置及び形状測定誤差の補正方法
JP3946499B2 (ja) 被観察体の姿勢検出方法およびこれを用いた装置
US7907288B2 (en) Shape measuring apparatus
US10591271B2 (en) Method and apparatus for calibrating a rotating device attached to a movable part of a coordinate measuring device
CN102788563B (zh) 一种在平面子孔径拼接测量中调整被测镜倾斜的装置和方法
JP2014066693A (ja) 形状測定装置及び形状測定誤差の補正方法
JP6020593B2 (ja) 形状測定装置、構造物製造システム、ステージシステム、形状測定方法、構造物製造方法、プログラムを記録した記録媒体
JP2009025024A (ja) 形状測定装置および方法
CN111141767A (zh) 测量用x射线ct装置和使用该装置的ct重建方法
JP2012237686A (ja) 測定装置
JP2011095239A (ja) 面形状計測装置
KR20240012553A (ko) 비디오 익스텐소미터를 위한 오차 보정 시스템 및 오차 보정 방법
KR20110065365A (ko) 비구면체 측정 방법 및 장치
JP5493152B2 (ja) 形状測定装置
JP2005140673A (ja) 非球面偏心測定装置及び非球面偏心測定方法
JP4790551B2 (ja) 微細形状測定装置
KR102434166B1 (ko) 마스크의 표면을 검사하기 위한 장치
JP4208565B2 (ja) 干渉装置及びそれを有する測定方法
JP4183576B2 (ja) 走査型面形状測定装置および面形状測定方法
JP2009244227A (ja) 光波干渉測定装置
JP2015052566A (ja) 測定装置、測定方法および物品の製造方法
CN1206105A (zh) 传感器的自校准方法
JP4490793B2 (ja) 三次元測定方法
JP2006133059A (ja) 干渉測定装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150202

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150202

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20151207

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20151215

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160215

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160705

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160802

R151 Written notification of patent or utility model registration

Ref document number: 5984406

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees