JP5983878B2 - 被覆切削工具 - Google Patents
被覆切削工具 Download PDFInfo
- Publication number
- JP5983878B2 JP5983878B2 JP2015522802A JP2015522802A JP5983878B2 JP 5983878 B2 JP5983878 B2 JP 5983878B2 JP 2015522802 A JP2015522802 A JP 2015522802A JP 2015522802 A JP2015522802 A JP 2015522802A JP 5983878 B2 JP5983878 B2 JP 5983878B2
- Authority
- JP
- Japan
- Prior art keywords
- hard layer
- particle size
- layer
- particles
- cutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 238000005520 cutting process Methods 0.000 title claims description 65
- 239000010410 layer Substances 0.000 claims description 184
- 239000002245 particle Substances 0.000 claims description 132
- 239000000463 material Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 34
- 239000011247 coating layer Substances 0.000 claims description 29
- 238000009826 distribution Methods 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 229910052721 tungsten Inorganic materials 0.000 claims description 15
- 229910052804 chromium Inorganic materials 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 229910052719 titanium Inorganic materials 0.000 claims description 14
- 229910052727 yttrium Inorganic materials 0.000 claims description 14
- 229910052796 boron Inorganic materials 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- 229910052735 hafnium Inorganic materials 0.000 claims description 11
- 229910052750 molybdenum Inorganic materials 0.000 claims description 11
- 229910052758 niobium Inorganic materials 0.000 claims description 11
- 229910052715 tantalum Inorganic materials 0.000 claims description 11
- 229910052720 vanadium Inorganic materials 0.000 claims description 11
- 229910052726 zirconium Inorganic materials 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 239000002356 single layer Substances 0.000 claims description 6
- 238000001883 metal evaporation Methods 0.000 description 17
- 238000012360 testing method Methods 0.000 description 16
- 238000010891 electric arc Methods 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 229910001873 dinitrogen Inorganic materials 0.000 description 12
- 238000011156 evaluation Methods 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 238000003754 machining Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 239000010419 fine particle Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 238000010849 ion bombardment Methods 0.000 description 9
- 239000011362 coarse particle Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 238000007733 ion plating Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 239000002826 coolant Substances 0.000 description 4
- 238000003801 milling Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 229910017150 AlTi Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000011195 cermet Substances 0.000 description 3
- 239000008119 colloidal silica Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910000997 High-speed steel Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 102200082816 rs34868397 Human genes 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- -1 cemented carbide Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Drilling Tools (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013122322 | 2013-06-11 | ||
JP2013122322 | 2013-06-11 | ||
PCT/JP2014/065415 WO2014200005A1 (fr) | 2013-06-11 | 2014-06-11 | Outil de coupe revêtu |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5983878B2 true JP5983878B2 (ja) | 2016-09-06 |
JPWO2014200005A1 JPWO2014200005A1 (ja) | 2017-02-23 |
Family
ID=52022296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015522802A Active JP5983878B2 (ja) | 2013-06-11 | 2014-06-11 | 被覆切削工具 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5983878B2 (fr) |
WO (1) | WO2014200005A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015009322A (ja) * | 2013-06-28 | 2015-01-19 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107530786B (zh) * | 2015-04-27 | 2020-05-05 | 株式会社泰珂洛 | 被覆切削工具 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011177799A (ja) * | 2010-02-26 | 2011-09-15 | Mitsubishi Materials Corp | ダイヤモンド被覆切削工具 |
JP2011218541A (ja) * | 2010-03-23 | 2011-11-04 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具 |
JP2011224716A (ja) * | 2010-04-20 | 2011-11-10 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具 |
JP2011224767A (ja) * | 2010-03-29 | 2011-11-10 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5459504B2 (ja) * | 2010-07-16 | 2014-04-02 | 三菱マテリアル株式会社 | ダイヤモンド被覆切削工具 |
JP5590332B2 (ja) * | 2011-02-14 | 2014-09-17 | 三菱マテリアル株式会社 | 耐摩耗性と切屑排出性に優れた表面被覆ドリル |
-
2014
- 2014-06-11 WO PCT/JP2014/065415 patent/WO2014200005A1/fr active Application Filing
- 2014-06-11 JP JP2015522802A patent/JP5983878B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011177799A (ja) * | 2010-02-26 | 2011-09-15 | Mitsubishi Materials Corp | ダイヤモンド被覆切削工具 |
JP2011218541A (ja) * | 2010-03-23 | 2011-11-04 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具 |
JP2011224767A (ja) * | 2010-03-29 | 2011-11-10 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具 |
JP2011224716A (ja) * | 2010-04-20 | 2011-11-10 | Mitsubishi Materials Corp | 硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015009322A (ja) * | 2013-06-28 | 2015-01-19 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
Also Published As
Publication number | Publication date |
---|---|
WO2014200005A1 (fr) | 2014-12-18 |
JPWO2014200005A1 (ja) | 2017-02-23 |
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