WO2014200005A1 - Outil de coupe revêtu - Google Patents

Outil de coupe revêtu Download PDF

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Publication number
WO2014200005A1
WO2014200005A1 PCT/JP2014/065415 JP2014065415W WO2014200005A1 WO 2014200005 A1 WO2014200005 A1 WO 2014200005A1 JP 2014065415 W JP2014065415 W JP 2014065415W WO 2014200005 A1 WO2014200005 A1 WO 2014200005A1
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Prior art keywords
hard layer
layer
particle size
particles
hard
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PCT/JP2014/065415
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English (en)
Japanese (ja)
Inventor
正和 菊池
司 城地
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株式会社タンガロイ
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Priority to JP2015522802A priority Critical patent/JP5983878B2/ja
Publication of WO2014200005A1 publication Critical patent/WO2014200005A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides

Definitions

  • the present invention relates to a coated cutting tool.
  • coated cutting tools in which a TiN layer or TiAlN layer is formed on the surface of a substrate such as cemented carbide, cermet, or cBN sintered body are widely used. ing.
  • coated cutting tools there are two or more types selected from IVa, Va, VIa group metal elements and Al, Si on the surface of the base material made of WC base cemented carbide, cermet, ceramics, high speed steel, etc.
  • a surface-coated hard member characterized by having a coating composed of a nitride, oxide, carbide, carbonitride or boride of an alloy consisting of elements with a particle diameter of 50 nm or less by physical vapor deposition ( For example, see Patent Document 1.)
  • a lower layer composed of columnar particles having an average crystal width larger than that of the upper layer, and an upper layer composed of columnar particles having an average crystal width smaller than that of the lower layer.
  • a surface-coated cutting tool characterized by forming a coating layer (see, for example, Patent Document 2).
  • the lower layer is composed only of large columnar particles.
  • the progress of wear due to falling off is suppressed.
  • the coating layer is largely peeled off, and there is a problem that the peeling of the coating layer is a starting point and leads to defects.
  • the present invention has been made to solve such a problem, and an object of the present invention is to provide a coated cutting tool having excellent wear resistance and fracture resistance and having a long tool life.
  • the present inventors have found that when the hard layer contains fine particles and coarse particles, the hard layer particles are less likely to be worn out or chipped, and the coated cutting tool formed with such a hard layer is formed. It was found that wear resistance and fracture resistance were improved and tool life was prolonged.
  • the gist of the present invention is as follows. (1) A substrate and a coating layer formed on the surface of the substrate, wherein at least one of the coating layers is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si And a hard layer made of a compound composed of at least one element selected from the group consisting of Y and at least one element selected from the group consisting of C, N, B and O, When the particle size is measured from a cross-sectional structure of a plane parallel to the surface of the substrate, hard layer particles having a particle size of less than 1 to 300 nm are 10 to 80 area% with respect to the entire cross-sectional structure of the hard layer.
  • Hard layer particles having a particle size of 1 to less than 300 nm are 20 to 80 area% with respect to the entire cross-sectional structure of the hard layer, and hard layer particles having a particle size of 300 to 1000 nm are The coated cutting tool according to (1), which is 20 to 80 area% with respect to the entire cross-sectional structure, and the total of these is 100 area%.
  • Hard layer particles having a particle size of 1 to less than 300 nm are 30 to 70 area% with respect to the entire cross-sectional structure of the hard layer, and hard layer particles having a particle size of 300 to 1000 nm are The coated cutting tool according to (1) or (2), which is 30 to 70 area% with respect to the entire cross-sectional structure, and the total of these is 100 area%.
  • the particle size distribution of the hard layer particles has at least one peak at a particle size of 1 to less than 300 nm, and the particle size distribution of the hard layer particles has at least one peak at a particle size of 300 to 1000 nm (1) to ( The coated cutting tool according to any one of 3).
  • At least one of the coating layers is a lower layer formed between the base material and the hard layer, and the lower layer includes Ti, Zr, Hf, V, Nb, Ta, Cr, A single layer composed of a compound composed of at least one element selected from the group consisting of Mo, W, Al, Si and Y and at least one element selected from the group consisting of C, N, B and O Alternatively, a coated cutting tool according to any one of (1) to (6), which is a multilayer.
  • At least one of the coating layers is an upper layer formed on the surface of the hard layer, and the upper layer is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al,
  • a single layer or multilayer (1) comprising a compound composed of at least one element selected from the group consisting of Si and Y and at least one element selected from the group consisting of C, N, B and O
  • the coated cutting tool of the present invention includes a base material and a coating layer formed on the surface of the base material.
  • the base material of the present invention is not particularly limited as long as it is used as a base material for a coated cutting tool.
  • Specific examples of the base material for the coated cutting tool include cemented carbide, cermet, ceramics, cubic boron nitride sintered body, diamond sintered body, and high-speed steel. Among them, it is more preferable that the base material is a cemented carbide because it is excellent in wear resistance and fracture resistance.
  • the coating layer of this invention will not be specifically limited if it is used as a coating layer of a coated cutting tool.
  • a metal compound layer such as (AlTi) N or Mo 2 S, a metal layer such as metal Ti, or a hard carbon layer such as DLC (diamond-like carbon) or diamond can be used.
  • a metal compound layer such as (AlTi) N or Mo 2 S
  • a metal layer such as metal Ti
  • a hard carbon layer such as DLC (diamond-like carbon) or diamond
  • a single layer or a multilayer of a compound composed of at least one selected element is more preferable because it is excellent in wear resistance.
  • the coating layer of the present invention may be composed of only the hard layer of the present invention, but may include a lower layer between the substrate and the hard layer.
  • the lower layer is made of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si and Y, and a group consisting of C, N, B and O
  • a single layer or a multilayer of a compound composed of at least one element selected from the above is more preferable because it is excellent in wear resistance.
  • the coating layer of the present invention may be composed of only the hard layer of the present invention, but an upper layer may be formed on the surface of the hard layer.
  • the upper layer is made of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si and Y, and a group consisting of C, N, B and O
  • a single layer or a multilayer of a compound composed of at least one element selected from the above is more preferable because it is excellent in wear resistance. It is also preferable to further form a hard layer on the surface of the upper layer, and an alternate laminated structure in which two or more upper layers and hard layers are alternately laminated is also preferred.
  • the average thickness of the entire coating layer of the present invention is less than 0.2 ⁇ m, the wear resistance tends to decrease, and when it exceeds 15 ⁇ m, the fracture resistance tends to decrease.
  • the average thickness of the entire coating layer is more preferably 0.2 to 15 ⁇ m.
  • the thickness of each layer is measured from the cross-sectional structure of the coated cutting tool using an optical microscope, a scanning electron microscope (SEM), a field emission scanning electron microscope (FE-SEM), a transmission electron microscope (TEM), or the like. can do.
  • the layer thickness of each layer of the coated cutting tool was measured at three or more points in the vicinity of the position of 50 ⁇ m from the blade edge of the surface facing the metal evaporation source toward the center of the surface, and the average The value was calculated and taken as the average layer thickness of each layer.
  • the composition of each layer can be measured using an energy dispersive X-ray spectrometer (EDS), a wavelength dispersive X-ray spectrometer (WDS), or the like.
  • EDS energy dispersive X-ray spectrometer
  • WDS wavelength dispersive X-ray spectrometer
  • the hard layer of the present invention comprises hard layer particles having a particle size of 1 to less than 300 nm and hard layer particles having a particle size of 300 to 1000 nm.
  • the coating layer made up of fine particles rubs between the cutting edge of the coated cutting tool and the work material during cutting, and wear due to falling off of the particles occurs. Resulting in poor wear resistance.
  • the fracture resistance is not sufficient.
  • the coating layer composed of coarse particles there is little abrasion due to the falling off of the particles, but the coating layer is largely peeled off as the cracks propagate along the grain boundaries.
  • defect resistance is inferior.
  • the hard layer of the present invention includes both fine particles and coarse particles, the fine particles are prevented from falling off, so the wear resistance is excellent and the peeling of the coating layer is minimized. Excellent fracture resistance.
  • the hard layer particles having a particle size of less than 1 to 300 nm are 10 to 80% by area with respect to the entire cross-sectional structure of the hard layer, and the particle size is 300 to 300%.
  • the hard layer particles of 1000 nm are 20 to 90 area% with respect to the entire cross-sectional structure of the hard layer, and the total of these is 100 area%.
  • the chipping resistance is lowered and the particle size is reduced to 1 If the hard layer particles having a particle size of less than ⁇ 300 nm exceed 80 area% and the hard layer particles having a particle size of 300 to 1000 nm are less than 20 area%, the wear resistance and fracture resistance are lowered. Determined.
  • the hard layer particles having a particle size of less than 1 to 300 nm are 20 to 80% by area with respect to the entire cross-sectional structure of the hard layer, and the hard layer particles having a particle size of 300 to 1000 nm are the cross-sectional structure of the hard layer. More preferably, it is 20 to 80 area% with respect to the whole.
  • the hard layer particles having a particle size of less than 1 to 300 nm are 30 to 70 area% with respect to the entire cross-sectional structure of the hard layer, and the hard layer particles having a particle size of 300 to 1000 nm are the cross-sectional structure of the hard layer. More preferably, it is 30 to 70 area% with respect to the whole.
  • the hard layer of the present invention is contained in one or more layers in the coating layer of the present invention.
  • the particle size of the hard layer is determined by observing the cross-sectional structure of the hard layer. Specifically, the surface of the hard layer parallel to the surface of the substrate, or from the interface between the upper layer and the hard layer toward the inside was mirror-polished until the irregularities of the hard layer disappeared.
  • the mirror polished surface is a cross-sectional structure.
  • the cross-sectional structure near the surface of the hard layer may be observed, or the cross-sectional structure inside the hard layer may be observed. Examples of the method of mirror polishing the hard layer include a method of polishing using diamond paste or colloidal silica, ion milling, and the like.
  • the cross-sectional structure excluding droplets with a diameter of 100 nm or more is observed using an FE-SEM, TEM, electron beam backscattering diffractometer (EBSD), etc., and the diameter of a circle having an area equal to the area of the hard layer particles is measured.
  • the particle size is taken as the particle size.
  • image analysis software may be used.
  • a droplet having a diameter of 100 nm or more can be easily distinguished from a cross-sectional structure other than the droplet.
  • the droplet When the mirror-polished surface of the cross-sectional structure is observed, the droplet is circular, and a void having a thickness of several nanometers to several tens of nanometers is formed around the droplet.
  • the droplet may fall off from the hard layer during mirror polishing, and in this case, a circular hole is formed in the hard layer. Therefore, in the hard layer, a droplet having a diameter of 100 nm or more and a cross-sectional structure other than the droplet can be easily distinguished.
  • the particle size distribution is divided into 100 nm intervals such as 1 nm or more and less than 100 nm, 100 nm or more and less than 200 nm, and 200 nm or more and less than 300 nm.
  • the distribution is shown.
  • EBSD that can clearly observe the grain boundaries of the particles is preferable.
  • the EBSD is preferably set so that a boundary having a step size of 0.01 ⁇ m, a measurement range of 2 ⁇ m ⁇ 2 ⁇ m, and an orientation difference of 5 ° or more is regarded as a grain boundary.
  • the particle size distribution of the hard layer particles in the present invention has at least one peak when the particle size is less than 1 to 300 nm, and at least one peak when the particle size is 300 to 1000 nm. It is further preferable because the fracture resistance is improved.
  • having a peak means, for example, that the particle size is divided into 100 nm intervals such as 1 nm or more and less than 100 nm, 100 nm or more and less than 200 nm, and the area ratio of 200 nm or more and less than 300 nm is 1 nm or more and less than 100 nm. Or an area ratio higher than an area ratio of 200 nm or more and less than 300 nm.
  • the hard layer of the present invention comprises at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si and Y, and C, N, B and O. It is comprised with the compound which consists of at least 1 sort (s) of elements chosen from the group which consists of.
  • the composition As the influence of the composition on the particle size of the hard layer of the present invention, if the Al content of (AlTi) N or (AlCr) N is increased, the particle size tends to be fine.
  • the hard layer is (Al a M b L c ) X [wherein M represents one or two of Ti and Cr, and L represents at least one selected from the group consisting of W, Y and Si. X represents one or two elements of C and N, a represents the atomic ratio of Al element to the sum of Al element, M element and L element, and b represents Al element and M element.
  • M represents the atomic ratio of the M element to the total of the L element
  • c represents the atomic ratio of the L element to the total of the Al element, the M element, and the L element
  • the wear resistance tends to decrease, and when it exceeds 15 ⁇ m, the fracture resistance tends to decrease. Is more preferable.
  • the hard layer of the present invention can be formed by physical vapor deposition.
  • the physical vapor deposition method include an arc ion plating method, an ion plating method, a sputtering method, and an ion mixing method.
  • the arc ion plating method is more preferable because the adhesion between the base material and the coating layer is excellent.
  • the present inventors have studied the influence of the forming conditions on the particle size of the hard layer.
  • the substrate temperature is increased, the substrate bias voltage is increased, and the growth rate of the hard layer is increased, the particles of the hard layer are increased. It was found that the diameter became fine.
  • the hard layer of the present invention can be obtained. For example, if the growth rate of the hard layer is greatly changed while the hard layer is formed, a hard layer including both fine particles and coarse particles can be obtained.
  • As a method for greatly changing the growth rate of the hard layer there is a method of repeatedly evaporating and stopping the metal evaporation source.
  • the particle size distribution of the hard layer particles can be adjusted by adjusting the time for evaporating the metal evaporation source and the time for stopping the evaporation.
  • the following method can be mentioned as a method for producing the hard layer of the present invention.
  • a substrate is placed in a reaction vessel of an arc ion plating apparatus, heated with a heater in the reaction vessel of the arc ion plating apparatus until the temperature of the substrate reaches 200 to 800 ° C., and then the pressure in the reaction container is increased.
  • the reaction gas atmosphere is 0.5 Pa to 5.0 Pa
  • the substrate bias voltage is ⁇ 10 V to ⁇ 150 V
  • the arc discharge to the metal evaporation source corresponding to the metal component of the hard layer is 0.5 to 3 minutes.
  • the hard layer of the present invention including both fine particles and coarse particles can be formed.
  • the arc discharge time or the arc discharge stop time is shorter than 0.5 minutes, the change in the growth rate of the hard phase is small, so that the hard layer containing fine particles and coarse particles is formed. I can't get it.
  • the arc discharge time or the arc discharge stop time is longer than 3 minutes, the formation time is longer, which is not useful.
  • coated cutting tool of the present invention include an insert, a drill, an end mill, and a reamer.
  • the coated cutting tool of the present invention is excellent in wear resistance and fracture resistance, and has an effect that the tool life is longer than that in the past.
  • An example of a conceptual diagram of a cross-sectional structure of a hard layer containing both coarse particles and fine particles of the present invention An example of a conceptual diagram of the cross-sectional structure of a coating layer composed of comparatively fine particles
  • An example of a conceptual diagram of the cross-sectional structure of a coating layer composed of coarse particles for comparison The figure which shows the particle size distribution of the sample number 3 of this invention
  • an ISO standard SEKN1203AGTN insert-shaped cemented carbide equivalent to P20 was prepared.
  • a metal evaporation source of a metal component having a hard layer composition shown in Table 2 was placed in the reaction vessel of the arc ion plating apparatus.
  • the prepared base material was fixed to the fixture of the turntable in the reaction vessel. Thereafter, vacuuming was performed until the pressure in the reaction vessel became a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less.
  • the substrate was heated with a heater in the reaction vessel until the temperature of the substrate reached 500 ° C. After heating, Ar gas was introduced so that the pressure in the reaction vessel was 5.0 Pa.
  • a substrate bias voltage of ⁇ 1000 V is applied to the substrate, a current of 10 A is passed through the tungsten filament in the reaction vessel, and Ar gas is applied to the surface of the substrate.
  • Ion bombardment treatment was performed for 30 minutes. After the ion bombardment treatment, the sample numbers 1 to 10 and 12 to 14 were evacuated until the pressure in the reaction vessel became a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less. Next, nitrogen gas was introduced into the reaction vessel, and the inside of the reaction vessel was brought to a nitrogen gas atmosphere at a pressure of 3.0 Pa. The substrate was heated to the temperature shown in Table 1 with a heater.
  • the substrate bias voltage shown in Table 1 is applied to the substrate, and intermittent discharge that alternately repeats arc discharge and discharge stop shown in Table 1 is performed on the metal evaporation source until a predetermined layer thickness is reached.
  • a hard layer was formed.
  • Table 1 shows the arc current of intermittent discharge, discharge time, and stop time. After the hard layer was formed, the heater was turned off, and the sample was taken out from the reaction vessel after the sample temperature became 100 ° C. or lower.
  • a hard layer was formed until a predetermined layer thickness was obtained by performing intermittent discharge repeatedly.
  • Table 1 shows the arc current of intermittent discharge, discharge time, and stop time. After the hard layer was formed, the heater was turned off, and the sample was taken out from the reaction vessel after the sample temperature became 100 ° C. or lower.
  • the ion bombardment process was performed in the same manner as the sample numbers 1 to 10 and 12 to 14.
  • evacuation was performed until the pressure in the reaction vessel became a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less.
  • nitrogen gas was introduced into the reaction vessel, and the inside of the reaction vessel was brought to a nitrogen gas atmosphere at a pressure of 3.0 Pa.
  • the base material bias voltage shown in Table 1 is applied to the base material, and arc discharge that causes the arc current shown in Table 1 to flow to the metal evaporation source is performed.
  • a hard layer was formed until a predetermined layer thickness was obtained. After the hard layer was formed, the heater was turned off, and the sample was taken out from the reaction vessel after the sample temperature became 100 ° C. or lower.
  • the cross section in the vicinity of the position of 50 ⁇ m from the cutting edge of the surface facing the metal evaporation source of the coated cutting tool toward the center of the surface is measured at three locations using SEM, The average value was calculated.
  • a cross section in the vicinity of a position of 50 ⁇ m from the cutting edge of the surface facing the metal evaporation source of the coated cutting tool toward the center of the surface was measured using EDS.
  • the results are shown in Table 2.
  • the composition ratio of the metal component of the hard layer in Table 2 indicates the atomic ratio of each metal element with respect to the entire metal element.
  • the obtained sample was mirror-polished using diamond paste and colloidal silica until the hard layer had no irregularities.
  • a structure obtained by removing droplets having a diameter of 100 nm or more from the cross-sectional structure of the hard layer obtained by mirror polishing is observed using EBSD, and the diameter of a circle having an area equal to the area of the hard layer particle is determined by the grain size of the particle.
  • the EBSD was set such that a boundary having a step size of 0.01 ⁇ m, a measurement range of 2 ⁇ m ⁇ 2 ⁇ m, and an orientation difference of 5 ° or more was regarded as a grain boundary.
  • Table 3 shows the particle size distribution of the cross-sectional structure of the hard layer.
  • the particle size distribution shown in Table 3 is divided into 100 nm intervals such as 1 nm or more and less than 100 nm, 100 nm or more and less than 200 nm, and 200 nm or more and less than 300 nm.
  • the area ratio is shown.
  • Table 3 also shows the area ratio of the particle size of 1 to less than 300 nm and the area ratio of the particle size of 300 nm or more.
  • FIG. 4 shows the particle size distribution of Sample No. 3.
  • FIG. 4 shows that the particle size distribution of sample number 3 has two peaks.
  • the particle size distribution of the inventive product whether or not there is a peak in each of the particle size of 1 to less than 300 nm and the particle size of 300 nm or more was examined.
  • the particle size distribution of Sample Nos. 5 and 6 of the invention product there is one peak at a particle size of 200 nm or more and less than 300 nm, and another peak at a particle size of 500 nm or more and less than 600 nm.
  • Table 4 shows the machining lengths up to the tool life under test conditions 1 and 2.
  • the machining length was evaluated as C when the processing length was 0.0 m or more and less than 5.0 m, B as 5.0 m or more and less than 10.0 m, and A as 10.0 m or more.
  • a and A are AA
  • a and B are AB
  • B and B are BB
  • B and C are BC
  • C and C are CC.
  • a comprehensive evaluation was performed. In this comprehensive evaluation, the order is (excellent) AA> AB> BB> BC> CC (inferior).
  • samples Nos. 1 to 14 of the invention are B or higher mainly under test condition 1 for evaluating wear resistance, and B or higher mainly under test condition 2 for evaluating fracture resistance. there were.
  • the overall evaluation of samples Nos. 1 to 14 of the invention is BB or higher, and it can be seen that both wear resistance and fracture resistance are superior to those of samples Nos. 15 to 18 of comparative products.
  • an ISO standard SEKN1203AGTN insert-shaped cemented carbide equivalent to P20 was prepared.
  • a metal evaporation source of a metal component having the composition of each layer shown in Table 6 was placed in the reaction vessel of the arc ion plating apparatus.
  • the prepared base material was fixed to the fixture of the turntable in the reaction vessel. Thereafter, vacuuming was performed until the pressure in the reaction vessel became a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less.
  • the substrate was heated with a heater in the reaction vessel until the temperature of the substrate reached 500 ° C. After heating, Ar gas was introduced so that the pressure in the reaction vessel was 5.0 Pa.
  • a base material bias voltage of ⁇ 1000 V is applied to the base material
  • a current of 10 A is applied to the tungsten filament in the reaction vessel
  • ions of Ar gas are applied to the surface of the base material. Bombardment treatment was performed for 30 minutes.
  • the sample numbers 19, 21, 23, 25, 26, 27, 30, 32, and 34 are evacuated until the pressure in the reaction vessel becomes a vacuum of 5.0 ⁇ 10 ⁇ 3 Pa or less. did.
  • nitrogen gas was introduced into the reaction vessel, and the inside of the reaction vessel was brought to a nitrogen gas atmosphere at a pressure of 3.0 Pa.
  • a substrate bias voltage of -50V is applied to the substrate, and arc discharge with an arc current of 150A is performed on the metal evaporation source, and the lower part until a predetermined layer thickness is reached. A layer was formed.
  • sample numbers 19, 21, 23, and 25 after forming the lower layer, for sample numbers 20, 22, and 24, the surface of the substrate was subjected to ion bombardment treatment, and then the pressure in the reaction vessel was 5.0. Vacuum was drawn until a vacuum of ⁇ 10 ⁇ 3 Pa or less was reached. Next, nitrogen gas was introduced into the reaction vessel, and the inside of the reaction vessel was brought to a nitrogen gas atmosphere with a pressure of 3.0 Pa. The substrate was heated to the temperature shown in Table 1 with a heater. A base material bias voltage shown in Table 5 is applied to the base material, and the metal evaporation source is subjected to intermittent discharge that alternately repeats arc discharge and stop shown in Table 5 until it reaches a predetermined layer thickness. A layer was formed. Table 5 shows the arc current, discharge time, and stop time of intermittent discharge.
  • the cross section in the vicinity of the position of 50 ⁇ m from the cutting edge of the surface facing the metal evaporation source of the coated cutting tool toward the center of the surface is measured at three locations using SEM. The average value was calculated.
  • the composition of each layer of the obtained sample was measured using an EDS for a cross section in the vicinity of a position of 50 ⁇ m from the cutting edge of the surface facing the metal evaporation source of the coated cutting tool toward the center of the surface.
  • the results are shown in Table 6.
  • the composition ratio of the metal component of each layer in Table 6 indicates the atomic ratio of each metal element to the entire metal element.
  • the obtained sample was mirror-polished using diamond paste and colloidal silica until the hard phase irregularities disappeared from the surface of the hard layer or from the interface between the upper layer and the hard layer to the inside.
  • a structure obtained by removing droplets having a diameter of 100 nm or more from the cross-sectional structure of the hard layer obtained by mirror polishing is observed using EBSD, and the diameter of a circle having an area equal to the area of the hard layer particle is determined by the grain size of the particle.
  • the EBSD was set such that a boundary having a step size of 0.01 ⁇ m, a measurement range of 2 ⁇ m ⁇ 2 ⁇ m, and an orientation difference of 5 ° or more was regarded as a grain boundary.
  • Table 7 shows the particle size distribution of the cross-sectional structure of the hard layer. Table 7 also shows the area ratio of the particle size of 1 to less than 300 nm and the area ratio of the particle size of 300 nm or more.
  • the particle size distribution of the inventive product whether or not there is a peak in each of the particle size of 1 to less than 300 nm and the particle size of 300 nm or more, the particle size distribution of the sample numbers 19 to 22, 24, and 25 of the invention product is There is one peak at a particle size of 100 nm or more and less than 200 nm, and another peak at a particle size of 500 nm or more and less than 600 nm.
  • the particle size distribution of Sample No. 23 of the invention product has one peak at a particle size of 100 nm or more and less than 200 nm, and another peak at a particle size of 400 nm or more and less than 500 nm.
  • Table 8 shows the machining lengths up to the tool life under test conditions 3 and 4.
  • the machining length was evaluated as C when the processing length was 0.0 m or more and less than 5.0 m, B as 5.0 m or more and less than 10.0 m, and A as 10.0 m or more.
  • a and A are AA
  • a and B are AB
  • B and B are BB
  • B and C are BC
  • C and C are CC.
  • a comprehensive evaluation was performed. In this comprehensive evaluation, the order is (excellent) AA> AB> BB> BC> CC (inferior).
  • samples Nos. 19 to 25 of the invention products are A or more mainly under test condition 3 for evaluating wear resistance, and A or more under test condition 4 for mainly evaluating fracture resistance. there were.
  • the overall evaluation of the inventive sample numbers 19 to 25 is AA or higher, and it can be seen that both the wear resistance and the fracture resistance are superior to the comparative sample numbers 26 to 34.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)

Abstract

L'invention concerne un outil de coupe revêtu présentant des propriétés de longue durée de vie d'outil et de résistance à l'abrasion et de résistance à la détérioration supérieures, l'outil de coupe revêtu comportant : un matériau de base et des couches de revêtement formées sur une surface du matériau de base ; au moins une couche des couches de revêtement est une couche dure comprenant un composé qui est constitué par au moins un type d'élément sélectionné dans le groupe constitué par Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, et Y, et au moins un type d'élément sélectionné dans le groupe constitué par C, N, B, et O ; et, lorsque les diamètres de particules sont mesurés dans une structure transversale d'un plan de couche dure qui est parallèle à la surface du matériau de base, les particules de couche dure ayant un diamètre de particules inférieur à 1 à 300 nm représentent 10 à 80 % de la surface de la structure transversale entière de couche dure, les particules de couche dure ayant un diamètre de particules de 300 à 1 000 nm représentent 20 à 90 % de la surface de la structure transversale entière de couche dure, et au total ces particules représentent 100 % de la surface.
PCT/JP2014/065415 2013-06-11 2014-06-11 Outil de coupe revêtu WO2014200005A1 (fr)

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JP6102571B2 (ja) * 2013-06-28 2017-03-29 三菱マテリアル株式会社 表面被覆切削工具

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JP2011224716A (ja) * 2010-04-20 2011-11-10 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具
JP2011224767A (ja) * 2010-03-29 2011-11-10 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具
JP2012020381A (ja) * 2010-07-16 2012-02-02 Mitsubishi Materials Corp ダイヤモンド被覆切削工具
JP2012166295A (ja) * 2011-02-14 2012-09-06 Mitsubishi Materials Corp 耐摩耗性と切屑排出性に優れた表面被覆ドリル

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JP2011224767A (ja) * 2010-03-29 2011-11-10 Mitsubishi Materials Corp 硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具
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JP6004366B1 (ja) * 2015-04-27 2016-10-05 株式会社タンガロイ 被覆切削工具
WO2016175166A1 (fr) * 2015-04-27 2016-11-03 株式会社タンガロイ Outil de coupe revêtu
CN107530786A (zh) * 2015-04-27 2018-01-02 株式会社泰珂洛 被覆切削工具
CN107530786B (zh) * 2015-04-27 2020-05-05 株式会社泰珂洛 被覆切削工具

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