JP5967876B2 - 液体吐出ヘッド及びその製造方法 - Google Patents

液体吐出ヘッド及びその製造方法 Download PDF

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Publication number
JP5967876B2
JP5967876B2 JP2011161866A JP2011161866A JP5967876B2 JP 5967876 B2 JP5967876 B2 JP 5967876B2 JP 2011161866 A JP2011161866 A JP 2011161866A JP 2011161866 A JP2011161866 A JP 2011161866A JP 5967876 B2 JP5967876 B2 JP 5967876B2
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JP
Japan
Prior art keywords
liquid
substrate
etching
discharge head
liquid supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011161866A
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English (en)
Japanese (ja)
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JP2012086553A5 (enExample
JP2012086553A (ja
Inventor
岡野　明彦
明彦 岡野
亮二 柬理
亮二 柬理
久保田　雅彦
雅彦 久保田
福本　能之
能之 福本
将文 森末
将文 森末
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011161866A priority Critical patent/JP5967876B2/ja
Publication of JP2012086553A publication Critical patent/JP2012086553A/ja
Publication of JP2012086553A5 publication Critical patent/JP2012086553A5/ja
Application granted granted Critical
Publication of JP5967876B2 publication Critical patent/JP5967876B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2011161866A 2010-09-21 2011-07-25 液体吐出ヘッド及びその製造方法 Active JP5967876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011161866A JP5967876B2 (ja) 2010-09-21 2011-07-25 液体吐出ヘッド及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010211139 2010-09-21
JP2010211139 2010-09-21
JP2011161866A JP5967876B2 (ja) 2010-09-21 2011-07-25 液体吐出ヘッド及びその製造方法

Publications (3)

Publication Number Publication Date
JP2012086553A JP2012086553A (ja) 2012-05-10
JP2012086553A5 JP2012086553A5 (enExample) 2014-08-28
JP5967876B2 true JP5967876B2 (ja) 2016-08-10

Family

ID=45817374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011161866A Active JP5967876B2 (ja) 2010-09-21 2011-07-25 液体吐出ヘッド及びその製造方法

Country Status (2)

Country Link
US (1) US8419168B2 (enExample)
JP (1) JP5967876B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5800534B2 (ja) * 2011-03-09 2015-10-28 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP6157184B2 (ja) * 2012-04-10 2017-07-05 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6223033B2 (ja) * 2013-07-17 2017-11-01 キヤノン株式会社 基板の加工方法
JP6604740B2 (ja) * 2014-05-30 2019-11-13 キヤノン株式会社 半導体基板および液体吐出ヘッド用基板の作製方法
TW201714757A (zh) * 2015-10-19 2017-05-01 精工愛普生股份有限公司 電子裝置、液體噴出頭、液體噴出裝置及電子裝置之製造方法
JP2018094845A (ja) 2016-12-15 2018-06-21 キヤノン株式会社 液体吐出ヘッド

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6555480B2 (en) 2001-07-31 2003-04-29 Hewlett-Packard Development Company, L.P. Substrate with fluidic channel and method of manufacturing
JP2004209741A (ja) * 2002-12-27 2004-07-29 Canon Inc インクジェット記録ヘッド
CN1968815B (zh) 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP2006130868A (ja) 2004-11-09 2006-05-25 Canon Inc インクジェット記録ヘッド及びその製造方法
JP4981491B2 (ja) 2007-03-15 2012-07-18 キヤノン株式会社 インクジェットヘッド製造方法及び貫通電極の製造方法
JP2009226660A (ja) * 2008-03-21 2009-10-08 Fujifilm Corp ドライエッチングによるパターニング方法及びそれに用いるモールド並びにインクジェットヘッドの製造方法

Also Published As

Publication number Publication date
US8419168B2 (en) 2013-04-16
US20120069094A1 (en) 2012-03-22
JP2012086553A (ja) 2012-05-10

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