JP5962900B2 - 物理量センサーおよび電子機器 - Google Patents

物理量センサーおよび電子機器 Download PDF

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Publication number
JP5962900B2
JP5962900B2 JP2012084156A JP2012084156A JP5962900B2 JP 5962900 B2 JP5962900 B2 JP 5962900B2 JP 2012084156 A JP2012084156 A JP 2012084156A JP 2012084156 A JP2012084156 A JP 2012084156A JP 5962900 B2 JP5962900 B2 JP 5962900B2
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JP
Japan
Prior art keywords
physical quantity
fixed
fixed electrode
quantity sensor
axis
Prior art date
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Expired - Fee Related
Application number
JP2012084156A
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English (en)
Japanese (ja)
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JP2013213735A (ja
JP2013213735A5 (enExample
Inventor
田中　悟
悟 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012084156A priority Critical patent/JP5962900B2/ja
Priority to US13/853,437 priority patent/US9470711B2/en
Priority to CN201310113208.XA priority patent/CN103364588B/zh
Publication of JP2013213735A publication Critical patent/JP2013213735A/ja
Publication of JP2013213735A5 publication Critical patent/JP2013213735A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2012084156A 2012-04-02 2012-04-02 物理量センサーおよび電子機器 Expired - Fee Related JP5962900B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012084156A JP5962900B2 (ja) 2012-04-02 2012-04-02 物理量センサーおよび電子機器
US13/853,437 US9470711B2 (en) 2012-04-02 2013-03-29 Physical quantity sensor and electronic apparatus
CN201310113208.XA CN103364588B (zh) 2012-04-02 2013-04-02 物理量传感器以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012084156A JP5962900B2 (ja) 2012-04-02 2012-04-02 物理量センサーおよび電子機器

Publications (3)

Publication Number Publication Date
JP2013213735A JP2013213735A (ja) 2013-10-17
JP2013213735A5 JP2013213735A5 (enExample) 2015-05-07
JP5962900B2 true JP5962900B2 (ja) 2016-08-03

Family

ID=49233081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012084156A Expired - Fee Related JP5962900B2 (ja) 2012-04-02 2012-04-02 物理量センサーおよび電子機器

Country Status (3)

Country Link
US (1) US9470711B2 (enExample)
JP (1) JP5962900B2 (enExample)
CN (1) CN103364588B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017506343A (ja) * 2014-02-19 2017-03-02 アトランティック・イナーシャル・システムズ・リミテッドＡｔｌａｎｔｉｃ Ｉｎｅｒｔｉａｌ Ｓｙｓｔｅｍｓ Ｌｉｍｉｔｅｄ 加速度計

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9083300B2 (en) 2010-09-01 2015-07-14 Qualcomm Mems Technologies, Inc. Electromechanical systems piezoelectric contour mode differential resonators and filters
JP2016042074A (ja) * 2014-08-13 2016-03-31 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6481294B2 (ja) * 2014-09-05 2019-03-13 セイコーエプソン株式会社 物理量センサー素子、物理量センサー、電子機器および移動体
JP6303074B2 (ja) 2014-12-25 2018-03-28 ゴルテック．インク 慣性計測モジュール及び３軸加速度計
CN104597287B (zh) * 2015-01-30 2017-09-05 歌尔股份有限公司 惯性测量模块及三轴加速度计
CN105158511B (zh) * 2015-06-29 2018-11-30 歌尔股份有限公司 一种mems三轴加速度计
JP2017020897A (ja) * 2015-07-10 2017-01-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6485260B2 (ja) * 2015-07-10 2019-03-20 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
JP6575187B2 (ja) * 2015-07-10 2019-09-18 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
JP6911444B2 (ja) * 2017-03-27 2021-07-28 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
WO2019107311A1 (ja) * 2017-12-01 2019-06-06 浜松ホトニクス株式会社 アクチュエータ装置
JP6585147B2 (ja) 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
JP2021006794A (ja) * 2019-06-28 2021-01-21 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7188311B2 (ja) 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP7123881B2 (ja) * 2019-08-28 2022-08-23 株式会社東芝 センサ
EP4047375B1 (en) * 2021-02-22 2024-07-17 Murata Manufacturing Co., Ltd. Anchor structure for reducing temperature-based error
JP2023121379A (ja) * 2022-02-21 2023-08-31 セイコーエプソン株式会社 物理量センサー、慣性計測装置及び製造方法
JP7592664B2 (ja) * 2022-05-19 2024-12-02 東京エレクトロン株式会社 測定システム、測定器および測定方法
US12072350B2 (en) * 2022-06-23 2024-08-27 Knowles Electronics, Llc Suspension for a mems vibration sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19639946B4 (de) 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
JP4734756B2 (ja) 2001-05-14 2011-07-27 アイシン精機株式会社 加速度センサ
DE602004031938D1 (de) * 2004-08-13 2011-05-05 St Microelectronics Srl Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen
EP1640726B1 (en) * 2004-09-22 2009-09-09 STMicroelectronics S.r.l. Micro-electromechanical structure with self-compensation of the thermal drifts caused by thermomechanical stress
JP2007139505A (ja) 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
JP4310325B2 (ja) * 2006-05-24 2009-08-05 日立金属株式会社 角速度センサ
US7637160B2 (en) * 2006-06-30 2009-12-29 Freescale Semiconductor, Inc. MEMS suspension and anchoring design
FR2905457B1 (fr) * 2006-09-01 2008-10-17 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives.
US8056415B2 (en) * 2008-05-30 2011-11-15 Freescale Semiconductor, Inc. Semiconductor device with reduced sensitivity to package stress
DE102008054553B4 (de) * 2008-12-12 2022-02-17 Robert Bosch Gmbh Beschleunigungssensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017506343A (ja) * 2014-02-19 2017-03-02 アトランティック・イナーシャル・システムズ・リミテッドＡｔｌａｎｔｉｃ Ｉｎｅｒｔｉａｌ Ｓｙｓｔｅｍｓ Ｌｉｍｉｔｅｄ 加速度計

Also Published As

Publication number Publication date
JP2013213735A (ja) 2013-10-17
US20130255382A1 (en) 2013-10-03
US9470711B2 (en) 2016-10-18
CN103364588B (zh) 2017-09-01
CN103364588A (zh) 2013-10-23

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