JP5959979B2 - 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 - Google Patents

貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP5959979B2
JP5959979B2 JP2012171252A JP2012171252A JP5959979B2 JP 5959979 B2 JP5959979 B2 JP 5959979B2 JP 2012171252 A JP2012171252 A JP 2012171252A JP 2012171252 A JP2012171252 A JP 2012171252A JP 5959979 B2 JP5959979 B2 JP 5959979B2
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JP
Japan
Prior art keywords
etching
substrate
stop layer
liquid
region
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Application number
JP2012171252A
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English (en)
Japanese (ja)
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JP2014030923A5 (enExample
JP2014030923A (ja
Inventor
坂井　稔康
稔康 坂井
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Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012171252A priority Critical patent/JP5959979B2/ja
Priority to US13/944,006 priority patent/US8865009B2/en
Publication of JP2014030923A publication Critical patent/JP2014030923A/ja
Publication of JP2014030923A5 publication Critical patent/JP2014030923A5/ja
Application granted granted Critical
Publication of JP5959979B2 publication Critical patent/JP5959979B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14467—Multiple feed channels per ink chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012171252A 2012-08-01 2012-08-01 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 Active JP5959979B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012171252A JP5959979B2 (ja) 2012-08-01 2012-08-01 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法
US13/944,006 US8865009B2 (en) 2012-08-01 2013-07-17 Processes for producing substrate with piercing aperture, substrate for liquid ejection head and liquid ejection head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012171252A JP5959979B2 (ja) 2012-08-01 2012-08-01 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014030923A JP2014030923A (ja) 2014-02-20
JP2014030923A5 JP2014030923A5 (enExample) 2015-09-10
JP5959979B2 true JP5959979B2 (ja) 2016-08-02

Family

ID=50024457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012171252A Active JP5959979B2 (ja) 2012-08-01 2012-08-01 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US8865009B2 (enExample)
JP (1) JP5959979B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6987497B2 (ja) * 2016-01-08 2022-01-05 キヤノン株式会社 液体吐出モジュールおよび液体吐出ヘッド

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4217434B2 (ja) * 2002-07-04 2009-02-04 キヤノン株式会社 スルーホールの形成方法及びこれを用いたインクジェットヘッド
US6821450B2 (en) * 2003-01-21 2004-11-23 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for fluid ejection device
US6883903B2 (en) * 2003-01-21 2005-04-26 Martha A. Truninger Flextensional transducer and method of forming flextensional transducer
KR100474423B1 (ko) 2003-02-07 2005-03-09 삼성전자주식회사 버블 잉크젯 프린트 헤드 및 그 제조방법
JP2007230100A (ja) * 2006-03-01 2007-09-13 Seiko Epson Corp シリコン基板の加工方法及びノズルプレートの製造方法
JP4259554B2 (ja) * 2006-08-29 2009-04-30 セイコーエプソン株式会社 液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法
US20080156780A1 (en) * 2006-12-29 2008-07-03 Sergei Voronov Substrate markings
US7926909B2 (en) * 2007-01-09 2011-04-19 Canon Kabushiki Kaisha Ink-jet recording head, method for manufacturing ink-jet recording head, and semiconductor device
US8496842B2 (en) * 2011-09-12 2013-07-30 Texas Instruments Incorporated MEMS device fabricated with integrated circuit

Also Published As

Publication number Publication date
US8865009B2 (en) 2014-10-21
JP2014030923A (ja) 2014-02-20
US20140034604A1 (en) 2014-02-06

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