JP2014030923A5 - - Google Patents
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- Publication number
- JP2014030923A5 JP2014030923A5 JP2012171252A JP2012171252A JP2014030923A5 JP 2014030923 A5 JP2014030923 A5 JP 2014030923A5 JP 2012171252 A JP2012171252 A JP 2012171252A JP 2012171252 A JP2012171252 A JP 2012171252A JP 2014030923 A5 JP2014030923 A5 JP 2014030923A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- stop layer
- etching
- liquid
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 46
- 238000005530 etching Methods 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 238000001312 dry etching Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 4
- 238000009623 Bosch process Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000009751 slip forming Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012171252A JP5959979B2 (ja) | 2012-08-01 | 2012-08-01 | 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 |
| US13/944,006 US8865009B2 (en) | 2012-08-01 | 2013-07-17 | Processes for producing substrate with piercing aperture, substrate for liquid ejection head and liquid ejection head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012171252A JP5959979B2 (ja) | 2012-08-01 | 2012-08-01 | 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014030923A JP2014030923A (ja) | 2014-02-20 |
| JP2014030923A5 true JP2014030923A5 (enExample) | 2015-09-10 |
| JP5959979B2 JP5959979B2 (ja) | 2016-08-02 |
Family
ID=50024457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012171252A Active JP5959979B2 (ja) | 2012-08-01 | 2012-08-01 | 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8865009B2 (enExample) |
| JP (1) | JP5959979B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6987497B2 (ja) * | 2016-01-08 | 2022-01-05 | キヤノン株式会社 | 液体吐出モジュールおよび液体吐出ヘッド |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4217434B2 (ja) * | 2002-07-04 | 2009-02-04 | キヤノン株式会社 | スルーホールの形成方法及びこれを用いたインクジェットヘッド |
| US6821450B2 (en) * | 2003-01-21 | 2004-11-23 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
| US6883903B2 (en) * | 2003-01-21 | 2005-04-26 | Martha A. Truninger | Flextensional transducer and method of forming flextensional transducer |
| KR100474423B1 (ko) | 2003-02-07 | 2005-03-09 | 삼성전자주식회사 | 버블 잉크젯 프린트 헤드 및 그 제조방법 |
| JP2007230100A (ja) * | 2006-03-01 | 2007-09-13 | Seiko Epson Corp | シリコン基板の加工方法及びノズルプレートの製造方法 |
| JP4259554B2 (ja) * | 2006-08-29 | 2009-04-30 | セイコーエプソン株式会社 | 液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 |
| US20080156780A1 (en) * | 2006-12-29 | 2008-07-03 | Sergei Voronov | Substrate markings |
| US7926909B2 (en) * | 2007-01-09 | 2011-04-19 | Canon Kabushiki Kaisha | Ink-jet recording head, method for manufacturing ink-jet recording head, and semiconductor device |
| US8496842B2 (en) * | 2011-09-12 | 2013-07-30 | Texas Instruments Incorporated | MEMS device fabricated with integrated circuit |
-
2012
- 2012-08-01 JP JP2012171252A patent/JP5959979B2/ja active Active
-
2013
- 2013-07-17 US US13/944,006 patent/US8865009B2/en active Active
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