JP5955574B2 - 立体形状計測装置 - Google Patents

立体形状計測装置 Download PDF

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Publication number
JP5955574B2
JP5955574B2 JP2012022189A JP2012022189A JP5955574B2 JP 5955574 B2 JP5955574 B2 JP 5955574B2 JP 2012022189 A JP2012022189 A JP 2012022189A JP 2012022189 A JP2012022189 A JP 2012022189A JP 5955574 B2 JP5955574 B2 JP 5955574B2
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Japan
Prior art keywords
aperture plate
optical axis
axis direction
confocal
transparent
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JP2012022189A
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English (en)
Japanese (ja)
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JP2013160612A (ja
JP2013160612A5 (OSRAM
Inventor
満宏 石原
満宏 石原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takaoka Toko Co Ltd
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Takaoka Toko Co Ltd
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Publication date
Application filed by Takaoka Toko Co Ltd filed Critical Takaoka Toko Co Ltd
Priority to JP2012022189A priority Critical patent/JP5955574B2/ja
Priority to US13/610,052 priority patent/US9041940B2/en
Priority to TW101136679A priority patent/TWI507659B/zh
Priority to KR1020120118657A priority patent/KR101409644B1/ko
Priority to CN201210487146.4A priority patent/CN103245302B/zh
Publication of JP2013160612A publication Critical patent/JP2013160612A/ja
Publication of JP2013160612A5 publication Critical patent/JP2013160612A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Surgery (AREA)
  • Ophthalmology & Optometry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2012022189A 2012-02-03 2012-02-03 立体形状計測装置 Active JP5955574B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012022189A JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置
US13/610,052 US9041940B2 (en) 2012-02-03 2012-09-11 Three-dimensional shape measuring apparatus
TW101136679A TWI507659B (zh) 2012-02-03 2012-10-04 三維形狀測量裝置
KR1020120118657A KR101409644B1 (ko) 2012-02-03 2012-10-24 입체 형상 계측 장치
CN201210487146.4A CN103245302B (zh) 2012-02-03 2012-11-26 三维形状测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012022189A JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置

Publications (3)

Publication Number Publication Date
JP2013160612A JP2013160612A (ja) 2013-08-19
JP2013160612A5 JP2013160612A5 (OSRAM) 2015-02-12
JP5955574B2 true JP5955574B2 (ja) 2016-07-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012022189A Active JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置

Country Status (5)

Country Link
US (1) US9041940B2 (OSRAM)
JP (1) JP5955574B2 (OSRAM)
KR (1) KR101409644B1 (OSRAM)
CN (1) CN103245302B (OSRAM)
TW (1) TWI507659B (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI920070B (zh) 2020-04-02 2026-04-01 大陸商元素光電智能科技(蘇州)有限公司 表面輪廓測量系統

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Publication number Priority date Publication date Assignee Title
TWI920070B (zh) 2020-04-02 2026-04-01 大陸商元素光電智能科技(蘇州)有限公司 表面輪廓測量系統

Also Published As

Publication number Publication date
US9041940B2 (en) 2015-05-26
TWI507659B (zh) 2015-11-11
TW201333420A (zh) 2013-08-16
CN103245302B (zh) 2015-11-25
KR20130090313A (ko) 2013-08-13
US20130201488A1 (en) 2013-08-08
KR101409644B1 (ko) 2014-06-18
JP2013160612A (ja) 2013-08-19
CN103245302A (zh) 2013-08-14

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