JP5926610B2 - 分光センサ - Google Patents

分光センサ Download PDF

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Publication number
JP5926610B2
JP5926610B2 JP2012114340A JP2012114340A JP5926610B2 JP 5926610 B2 JP5926610 B2 JP 5926610B2 JP 2012114340 A JP2012114340 A JP 2012114340A JP 2012114340 A JP2012114340 A JP 2012114340A JP 5926610 B2 JP5926610 B2 JP 5926610B2
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JP
Japan
Prior art keywords
filter
filter region
layer
region
light
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JP2012114340A
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English (en)
Japanese (ja)
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JP2013242178A5 (https=
JP2013242178A (ja
Inventor
笠原　隆
隆 笠原
柴山　勝己
勝己 柴山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2012114340A priority Critical patent/JP5926610B2/ja
Priority to DE112013002559.0T priority patent/DE112013002559B4/de
Priority to PCT/JP2013/062919 priority patent/WO2013172231A1/ja
Priority to CN201380023137.2A priority patent/CN104272070B/zh
Priority to US14/400,686 priority patent/US9273999B2/en
Publication of JP2013242178A publication Critical patent/JP2013242178A/ja
Publication of JP2013242178A5 publication Critical patent/JP2013242178A5/ja
Application granted granted Critical
Publication of JP5926610B2 publication Critical patent/JP5926610B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
JP2012114340A 2012-05-18 2012-05-18 分光センサ Active JP5926610B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012114340A JP5926610B2 (ja) 2012-05-18 2012-05-18 分光センサ
DE112013002559.0T DE112013002559B4 (de) 2012-05-18 2013-05-08 Spektralsensor
PCT/JP2013/062919 WO2013172231A1 (ja) 2012-05-18 2013-05-08 分光センサ
CN201380023137.2A CN104272070B (zh) 2012-05-18 2013-05-08 分光传感器
US14/400,686 US9273999B2 (en) 2012-05-18 2013-05-08 Spectroscopic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012114340A JP5926610B2 (ja) 2012-05-18 2012-05-18 分光センサ

Publications (3)

Publication Number Publication Date
JP2013242178A JP2013242178A (ja) 2013-12-05
JP2013242178A5 JP2013242178A5 (https=) 2015-06-11
JP5926610B2 true JP5926610B2 (ja) 2016-05-25

Family

ID=49583638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012114340A Active JP5926610B2 (ja) 2012-05-18 2012-05-18 分光センサ

Country Status (5)

Country Link
US (1) US9273999B2 (https=)
JP (1) JP5926610B2 (https=)
CN (1) CN104272070B (https=)
DE (1) DE112013002559B4 (https=)
WO (1) WO2013172231A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5875936B2 (ja) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
JP5988690B2 (ja) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
BR112015028910A2 (pt) * 2013-07-09 2017-07-25 Halliburton Energy Services Inc elementos computacionais integrados com filtros espectrais lateralmente distribuídos
CN104597550B (zh) * 2015-02-02 2017-05-31 上海理工大学 一种线性渐变滤光片中间楔形谐振腔层的制备方法
EP4467942A3 (en) * 2015-10-02 2025-01-22 Hamamatsu Photonics K.K. Light detection device
JP6778134B2 (ja) 2017-03-14 2020-10-28 浜松ホトニクス株式会社 光モジュール及びその実装方法
CN110418994B (zh) * 2017-03-14 2022-04-19 浜松光子学株式会社 光模块
US11561388B2 (en) 2017-03-14 2023-01-24 Hamamatsu Photonics K.K. Light module
US11513339B2 (en) 2017-03-14 2022-11-29 Hamamatsu Photonics K.K. Optical module

Family Cites Families (30)

* Cited by examiner, † Cited by third party
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US4054389A (en) 1976-09-23 1977-10-18 International Business Machines Corporation Spectrophotometer with photodiode array
JPS57151830A (en) * 1981-03-13 1982-09-20 Union Giken:Kk Spectrophotometer
JPS58195127A (ja) 1982-05-10 1983-11-14 Japan Spectroscopic Co マルチチヤネル検知器及びマルチチヤネル分光測定装置
JPS5972861A (ja) * 1982-10-19 1984-04-24 Canon Inc 画像読取り装置
JPS62170647U (https=) 1986-04-17 1987-10-29
JPH0814509B2 (ja) * 1986-05-15 1996-02-14 ミノルタ株式会社 分光測定センサ
JPS6435325A (en) * 1987-07-31 1989-02-06 Shimadzu Corp Spectral sensor
US4957371A (en) 1987-12-11 1990-09-18 Santa Barbara Research Center Wedge-filter spectrometer
JPH076839B2 (ja) 1991-03-29 1995-01-30 株式会社島津製作所 分光光度計
US5784507A (en) 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JP3375147B2 (ja) * 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JPH06120462A (ja) 1992-10-01 1994-04-28 Matsushita Electron Corp 固体撮像装置
JP2713838B2 (ja) 1992-10-15 1998-02-16 浜松ホトニクス株式会社 分光イメージングセンサ
JPH1078353A (ja) * 1996-09-02 1998-03-24 Yokogawa Electric Corp 分光装置および分光装置のダイクロイックミラーアレイの製造方法
US6785002B2 (en) * 2001-03-16 2004-08-31 Optical Coating Laboratory, Inc. Variable filter-based optical spectrometer
US7015457B2 (en) * 2002-03-18 2006-03-21 Honeywell International Inc. Spectrally tunable detector
JPWO2003091676A1 (ja) * 2002-04-23 2005-09-02 前田　弘 小型パッケージ分光センサーユニット
JP2005037762A (ja) 2003-07-17 2005-02-10 Sun Tec Kk 光学素子、波長可変光フィルタ、光アドドロップモジュールおよび波長可変光源
US7310153B2 (en) 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
JP2006284474A (ja) 2005-04-04 2006-10-19 Nikon Corp フォトセンサ
CN1888833A (zh) 2005-06-30 2007-01-03 天津麦索特科技发展有限公司 全光谱、双cmos线性成像传感器检测装置及其检测方法
WO2008104928A1 (en) 2007-03-01 2008-09-04 Philips Intellectual Property & Standards Gmbh Optical detector device
JP2008232843A (ja) 2007-03-20 2008-10-02 Casio Comput Co Ltd 分光強度測定素子
EP2132542A4 (en) * 2007-04-03 2014-01-08 Mutoh Ind Ltd Spectrophotometer and corresponding method
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5074291B2 (ja) 2008-05-15 2012-11-14 浜松ホトニクス株式会社 分光モジュール
JP5998426B2 (ja) 2010-03-05 2016-09-28 セイコーエプソン株式会社 光学センサー及び電子機器
JP5609542B2 (ja) * 2010-10-28 2014-10-22 セイコーエプソン株式会社 光測定装置
JP5634836B2 (ja) * 2010-11-22 2014-12-03 浜松ホトニクス株式会社 分光センサの製造方法
JP5707107B2 (ja) * 2010-11-22 2015-04-22 浜松ホトニクス株式会社 分光センサ

Also Published As

Publication number Publication date
DE112013002559B4 (de) 2022-09-15
US9273999B2 (en) 2016-03-01
CN104272070A (zh) 2015-01-07
JP2013242178A (ja) 2013-12-05
DE112013002559T5 (de) 2015-02-05
CN104272070B (zh) 2016-03-09
WO2013172231A1 (ja) 2013-11-21
US20150131101A1 (en) 2015-05-14

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