JP5921351B2 - 成膜装置 - Google Patents

成膜装置 Download PDF

Info

Publication number
JP5921351B2
JP5921351B2 JP2012134933A JP2012134933A JP5921351B2 JP 5921351 B2 JP5921351 B2 JP 5921351B2 JP 2012134933 A JP2012134933 A JP 2012134933A JP 2012134933 A JP2012134933 A JP 2012134933A JP 5921351 B2 JP5921351 B2 JP 5921351B2
Authority
JP
Japan
Prior art keywords
lens
film
lens holder
target
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012134933A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013256707A (ja
JP2013256707A5 (enrdf_load_stackoverflow
Inventor
矢崎　陽一
陽一 矢崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012134933A priority Critical patent/JP5921351B2/ja
Publication of JP2013256707A publication Critical patent/JP2013256707A/ja
Publication of JP2013256707A5 publication Critical patent/JP2013256707A5/ja
Application granted granted Critical
Publication of JP5921351B2 publication Critical patent/JP5921351B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP2012134933A 2012-06-14 2012-06-14 成膜装置 Expired - Fee Related JP5921351B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012134933A JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012134933A JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Publications (3)

Publication Number Publication Date
JP2013256707A JP2013256707A (ja) 2013-12-26
JP2013256707A5 JP2013256707A5 (enrdf_load_stackoverflow) 2015-08-06
JP5921351B2 true JP5921351B2 (ja) 2016-05-24

Family

ID=49953376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012134933A Expired - Fee Related JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Country Status (1)

Country Link
JP (1) JP5921351B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105549343B (zh) * 2016-03-08 2019-02-01 佛山市国星半导体技术有限公司 一种光刻装置
CN105549342B (zh) * 2016-03-08 2019-01-08 佛山市国星半导体技术有限公司 一种紫外激光光刻方法
JP7171270B2 (ja) 2018-07-02 2022-11-15 キヤノン株式会社 成膜装置およびそれを用いた成膜方法
CN111235539B (zh) * 2020-03-10 2021-04-20 摩科斯新材料科技(苏州)有限公司 一种小孔内壁薄膜沉积方法及装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4345869B2 (ja) * 1997-05-16 2009-10-14 Ｈｏｙａ株式会社 スパッタ成膜用の膜厚補正機構
CN100354673C (zh) * 1997-05-16 2007-12-12 Hoya株式会社 将光学镜片底料设定于支座上的机构
US5996792A (en) * 1997-07-23 1999-12-07 Eastman Kodak Company Optical lens tray
JP4474109B2 (ja) * 2003-03-10 2010-06-02 キヤノン株式会社 スパッタ装置
JP2004315014A (ja) * 2003-04-15 2004-11-11 Hitachi Maxell Ltd トレイならびに光学品の処理方法
JP2006328485A (ja) * 2005-05-26 2006-12-07 Olympus Corp 膜厚予測方法及び成膜方法
JP2006328488A (ja) * 2005-05-27 2006-12-07 Olympus Corp 膜厚予測方法及び成膜方法
WO2012133468A1 (ja) * 2011-03-28 2012-10-04 コニカミノルタアドバンストレイヤー株式会社 対物レンズの製造方法

Also Published As

Publication number Publication date
JP2013256707A (ja) 2013-12-26

Similar Documents

Publication Publication Date Title
JP5921351B2 (ja) 成膜装置
JP4474109B2 (ja) スパッタ装置
JP3290999B2 (ja) 光学レンズ基材のホルダ設置機構
JP4936333B2 (ja) 真空蒸着装置
JP7237489B2 (ja) 反射防止膜、光学素子及び反射防止膜の成膜方法
WO2012033198A1 (ja) スパッタ装置
WO2020179189A1 (ja) 反射防止膜、光学素子及び反射防止膜の成膜方法
JPH11310875A (ja) 基板の被覆のための装置
JP2008007806A (ja) スパッタリング成膜装置、封止膜の製造方法及び有機ｅｌ素子
JP2009003348A (ja) 減光フィルタの成膜方法、減光フィルタの製造装置及びこれを用いた減光フィルタ並びに撮像光量絞り装置
JP4345869B2 (ja) スパッタ成膜用の膜厚補正機構
JP4755475B2 (ja) スパッタ装置
CN100478488C (zh) 渐变式光学薄膜镀制装置及其治工具套环
JP2011084760A (ja) 成膜方法
JP2009001889A (ja) 減光フィルタの成膜方法及びこれを用いた減光フィルタ並びに撮像光量絞り装置
WO2011077892A1 (ja) 光学部品の製造方法及び光学部品
JP2013249489A (ja) スパッタリング装置
JP2009102718A (ja) 光学フィルタの成膜方法、光学フィルタの製造装置及び光学フィルタ並びに撮像光量調整装置
JP6714399B2 (ja) 光学素子及び光学薄膜の成膜方法
JP6053179B2 (ja) 光学素子、光学薄膜形成装置、及び光学薄膜形成方法
JP7433884B2 (ja) 成膜装置およびそれを用いた成膜方法
JP2020122193A (ja) 成膜装置
JP5654255B2 (ja) 蒸着装置
JP2013227625A (ja) 成膜方法及び成膜装置
KR200354762Y1 (ko) 스퍼터 방법을 이용한 광학박막의 제작장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150615

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150615

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160226

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160315

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160412

R151 Written notification of patent or utility model registration

Ref document number: 5921351

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees