JP2013256707A5 - - Google Patents

Download PDF

Info

Publication number
JP2013256707A5
JP2013256707A5 JP2012134933A JP2012134933A JP2013256707A5 JP 2013256707 A5 JP2013256707 A5 JP 2013256707A5 JP 2012134933 A JP2012134933 A JP 2012134933A JP 2012134933 A JP2012134933 A JP 2012134933A JP 2013256707 A5 JP2013256707 A5 JP 2013256707A5
Authority
JP
Japan
Prior art keywords
lens
film
film forming
lens holder
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012134933A
Other languages
English (en)
Japanese (ja)
Other versions
JP5921351B2 (ja
JP2013256707A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012134933A priority Critical patent/JP5921351B2/ja
Priority claimed from JP2012134933A external-priority patent/JP5921351B2/ja
Publication of JP2013256707A publication Critical patent/JP2013256707A/ja
Publication of JP2013256707A5 publication Critical patent/JP2013256707A5/ja
Application granted granted Critical
Publication of JP5921351B2 publication Critical patent/JP5921351B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012134933A 2012-06-14 2012-06-14 成膜装置 Expired - Fee Related JP5921351B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012134933A JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012134933A JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Publications (3)

Publication Number Publication Date
JP2013256707A JP2013256707A (ja) 2013-12-26
JP2013256707A5 true JP2013256707A5 (enrdf_load_stackoverflow) 2015-08-06
JP5921351B2 JP5921351B2 (ja) 2016-05-24

Family

ID=49953376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012134933A Expired - Fee Related JP5921351B2 (ja) 2012-06-14 2012-06-14 成膜装置

Country Status (1)

Country Link
JP (1) JP5921351B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105549343B (zh) * 2016-03-08 2019-02-01 佛山市国星半导体技术有限公司 一种光刻装置
CN105549342B (zh) * 2016-03-08 2019-01-08 佛山市国星半导体技术有限公司 一种紫外激光光刻方法
JP7171270B2 (ja) 2018-07-02 2022-11-15 キヤノン株式会社 成膜装置およびそれを用いた成膜方法
CN111235539B (zh) * 2020-03-10 2021-04-20 摩科斯新材料科技(苏州)有限公司 一种小孔内壁薄膜沉积方法及装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4345869B2 (ja) * 1997-05-16 2009-10-14 Ｈｏｙａ株式会社 スパッタ成膜用の膜厚補正機構
CN100354673C (zh) * 1997-05-16 2007-12-12 Hoya株式会社 将光学镜片底料设定于支座上的机构
US5996792A (en) * 1997-07-23 1999-12-07 Eastman Kodak Company Optical lens tray
JP4474109B2 (ja) * 2003-03-10 2010-06-02 キヤノン株式会社 スパッタ装置
JP2004315014A (ja) * 2003-04-15 2004-11-11 Hitachi Maxell Ltd トレイならびに光学品の処理方法
JP2006328485A (ja) * 2005-05-26 2006-12-07 Olympus Corp 膜厚予測方法及び成膜方法
JP2006328488A (ja) * 2005-05-27 2006-12-07 Olympus Corp 膜厚予測方法及び成膜方法
WO2012133468A1 (ja) * 2011-03-28 2012-10-04 コニカミノルタアドバンストレイヤー株式会社 対物レンズの製造方法

Similar Documents

Publication Publication Date Title
JP2013256707A5 (enrdf_load_stackoverflow)
JP2012083755A5 (enrdf_load_stackoverflow)
JP2012115757A5 (enrdf_load_stackoverflow)
JP2015519472A5 (enrdf_load_stackoverflow)
JP2020502491A5 (enrdf_load_stackoverflow)
CN104570168A (zh) 镜片、镜头及镜片的制造方法
JP2017125837A5 (enrdf_load_stackoverflow)
EP4258325A3 (en) Optoelectronic device
JP2013049924A5 (enrdf_load_stackoverflow)
WO2009001614A1 (ja) 成膜装置
JP2014109274A5 (enrdf_load_stackoverflow)
JP2014163974A5 (enrdf_load_stackoverflow)
WO2012115907A3 (en) Edge ring for a thermal processing chamber
JP2015067856A5 (enrdf_load_stackoverflow)
WO2012162643A3 (en) Method and apparatus for coating a complex object and composite comprising the coated object
JP2013147743A5 (enrdf_load_stackoverflow)
JP2018003122A (ja) 蒸着装置及び蒸発源
JP2011223036A5 (ja) 露光装置及びデバイス製造方法
JP2016527559A5 (enrdf_load_stackoverflow)
JP6761449B2 (ja) コーティング膜の製造方法およびコーティング膜を有するオプトエレクトロニクス半導体部品
JP2011149086A5 (ja) スパッタリング装置
JP2012123145A5 (enrdf_load_stackoverflow)
GB2467243A (en) Steel gobo with non-reflective heat resistant coating
PT2586888T (pt) Fonte de evaporação por arco tendo uma velocidade de formação de película elevada, dispositivo de formação de película e processo de fabrico de película de revestimento usando a fonte de evaporação por arco
TWI265202B (en) Tool and device for dedicate coating a photochemical film on a substrate