JP5881675B2 - 太陽光発電装置及びその製造方法 - Google Patents
太陽光発電装置及びその製造方法 Download PDFInfo
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- JP5881675B2 JP5881675B2 JP2013501193A JP2013501193A JP5881675B2 JP 5881675 B2 JP5881675 B2 JP 5881675B2 JP 2013501193 A JP2013501193 A JP 2013501193A JP 2013501193 A JP2013501193 A JP 2013501193A JP 5881675 B2 JP5881675 B2 JP 5881675B2
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- layer
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- barrier film
- back electrode
- power generation
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- 238000010248 power generation Methods 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title description 18
- 239000000872 buffer Substances 0.000 claims description 93
- 230000004888 barrier function Effects 0.000 claims description 59
- 230000031700 light absorption Effects 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 35
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 18
- 239000011787 zinc oxide Substances 0.000 claims description 9
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 6
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000010949 copper Substances 0.000 description 8
- 229910052733 gallium Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 229910052738 indium Inorganic materials 0.000 description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 239000011669 selenium Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- -1 electrode Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- YNLHHZNOLUDEKQ-UHFFFAOYSA-N copper;selanylidenegallium Chemical compound [Cu].[Se]=[Ga] YNLHHZNOLUDEKQ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 150000003346 selenoethers Chemical class 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Engineering & Computer Science (AREA)
- Sustainable Energy (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Description
Claims (4)
- 支持基板と、
前記支持基板上に配置され、第1裏面電極及び前記第1裏面電極の側面に配置される第2裏面電極で構成され、前記第1及び第2裏面電極の間に第1貫通溝を含む裏面電極層と、
前記第1裏面電極上に配置され、前記第1貫通溝から延長される光吸収部と、
前記光吸収部上に配置されるバッファ層であって、前記光吸収部上に配置される第1バッファと、前記第1バッファ上に配置される第2バッファとを含むバッファ層と、
前記第2バッファ上に配置されるウィンドウ層と、
前記ウィンドウ層から延長され、前記第2裏面電極に接続される接続部と、
前記第1バッファから延長され、前記光吸収部の側面に配置される第1バリヤー膜と、
前記第1バリヤー膜から前記裏面電極層の上面に沿って延長される第1ダミー部と、
前記第2バッファから延長される第2バリヤー膜と、
前記第2バリヤー膜から前記裏面電極層の上面に沿って延長される第2ダミー部と、を含み、
前記第2バリヤー膜と前記第2ダミー部は、前記ウィンドウ層から延長される接続部と接触する太陽光発電装置。 - 前記第1バリヤー膜は、前記第1バッファと一体に形成され、前記第2バリヤー膜は前記第2バッファと一体に形成される請求項1に記載の太陽光発電装置。
- 前記第1バリヤー膜は、硫化カドミウムを含み、
前記第2バリヤー膜は、不純物がドーピングされてない酸化亜鉛を含む請求項1に記載の太陽光発電装置。 - 前記バリヤー膜は、前記バッファよりさらに厚い請求項1に記載の太陽光発電装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020100026380A KR101210168B1 (ko) | 2010-03-24 | 2010-03-24 | 태양광 발전장치 및 이의 제조방법 |
KR10-2010-0026380 | 2010-03-24 | ||
PCT/KR2011/002046 WO2011119001A2 (ko) | 2010-03-24 | 2011-03-24 | 태양광 발전장치 및 이의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013522927A JP2013522927A (ja) | 2013-06-13 |
JP5881675B2 true JP5881675B2 (ja) | 2016-03-09 |
Family
ID=44673774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013501193A Expired - Fee Related JP5881675B2 (ja) | 2010-03-24 | 2011-03-24 | 太陽光発電装置及びその製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8962984B2 (ja) |
EP (1) | EP2439788B1 (ja) |
JP (1) | JP5881675B2 (ja) |
KR (1) | KR101210168B1 (ja) |
CN (1) | CN102844879B (ja) |
ES (1) | ES2580854T3 (ja) |
WO (1) | WO2011119001A2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8592246B2 (en) * | 2011-06-07 | 2013-11-26 | Electronics And Telecommunications Research Institute | Methods of manufacturing a solar cell module |
KR101283053B1 (ko) | 2011-10-18 | 2013-07-05 | 엘지이노텍 주식회사 | 태양광 발전장치 및 이의 제조방법 |
DE102012205378A1 (de) * | 2012-04-02 | 2013-10-02 | Robert Bosch Gmbh | Verfahren zur Herstellung von Dünnschichtsolarmodulen sowie nach diesem Verfahren erhältliche Dünnschichtsolarmodule |
KR101349417B1 (ko) * | 2012-04-18 | 2014-01-10 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
CN104350609B (zh) * | 2012-06-04 | 2016-11-23 | Lg化学株式会社 | 多层膜和光伏模块 |
KR101405639B1 (ko) * | 2012-07-27 | 2014-06-11 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조 방법 |
WO2014152556A1 (en) * | 2013-03-15 | 2014-09-25 | First Solar, Inc. | Photovoltaic device interconnection and method of manufacturing |
KR102098100B1 (ko) | 2013-09-17 | 2020-04-08 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조 방법 |
CN104143517A (zh) * | 2014-06-20 | 2014-11-12 | 苏州瑞晟纳米科技有限公司 | 一种两阶段式制备硫化镉缓冲层的工艺 |
JP7058460B2 (ja) * | 2016-06-30 | 2022-04-22 | ソーラーフロンティア株式会社 | 光電変換モジュール |
EP3493274A1 (de) * | 2017-12-04 | 2019-06-05 | Bengbu Design & Research Institute for Glass Industry | Dünnschichtsolarmodul mit verbessertem shunt-widerstand |
US11329177B2 (en) | 2018-11-08 | 2022-05-10 | Swift Solar Inc | Stable perovskite module interconnects |
US11631777B2 (en) * | 2019-03-11 | 2023-04-18 | Swift Solar Inc. | Integration of bypass diodes within thin film photovoltaic module interconnects |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS4826977A (ja) | 1971-08-13 | 1973-04-09 | ||
JPS59220979A (ja) * | 1983-05-31 | 1984-12-12 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
JPH11312815A (ja) * | 1998-04-28 | 1999-11-09 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
JP2002094089A (ja) | 2000-09-11 | 2002-03-29 | Honda Motor Co Ltd | 化合物薄膜太陽電池の製造方法 |
US7141863B1 (en) * | 2002-11-27 | 2006-11-28 | University Of Toledo | Method of making diode structures |
US20070079866A1 (en) | 2005-10-07 | 2007-04-12 | Applied Materials, Inc. | System and method for making an improved thin film solar cell interconnect |
KR100656738B1 (ko) * | 2005-12-14 | 2006-12-14 | 한국과학기술원 | 집적형 박막 태양전지 및 그 제조 방법 |
CN1866546A (zh) | 2006-05-18 | 2006-11-22 | 威海蓝星玻璃股份有限公司 | 一种太阳能电池及其制备方法 |
US8575478B2 (en) * | 2008-03-07 | 2013-11-05 | Showa Shell Sekiyu K.K. | Integrated structure of CIS based solar cell |
JP5366154B2 (ja) | 2008-03-21 | 2013-12-11 | 独立行政法人産業技術総合研究所 | 太陽電池及びその製造方法 |
KR101011228B1 (ko) | 2008-08-27 | 2011-01-26 | 주식회사 티지솔라 | 태양전지 및 그 제조방법 |
KR101144808B1 (ko) | 2008-09-01 | 2012-05-11 | 엘지전자 주식회사 | 박막형 태양전지 제조방법 및 이를 이용한 박막형 태양전지 |
EP2200097A1 (en) * | 2008-12-16 | 2010-06-23 | Saint-Gobain Glass France S.A. | Method of manufacturing a photovoltaic device and system for patterning an object |
JP5245034B2 (ja) | 2009-02-20 | 2013-07-24 | 昭和シェル石油株式会社 | Cis系太陽電池の製造方法 |
-
2010
- 2010-03-24 KR KR1020100026380A patent/KR101210168B1/ko not_active IP Right Cessation
-
2011
- 2011-03-24 US US13/381,778 patent/US8962984B2/en not_active Expired - Fee Related
- 2011-03-24 WO PCT/KR2011/002046 patent/WO2011119001A2/ko active Application Filing
- 2011-03-24 ES ES11759750.0T patent/ES2580854T3/es active Active
- 2011-03-24 JP JP2013501193A patent/JP5881675B2/ja not_active Expired - Fee Related
- 2011-03-24 CN CN201180015276.1A patent/CN102844879B/zh not_active Expired - Fee Related
- 2011-03-24 EP EP11759750.0A patent/EP2439788B1/en not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
EP2439788A4 (en) | 2014-01-08 |
US20130008496A1 (en) | 2013-01-10 |
CN102844879B (zh) | 2015-12-02 |
CN102844879A (zh) | 2012-12-26 |
KR20110107171A (ko) | 2011-09-30 |
EP2439788B1 (en) | 2016-03-02 |
ES2580854T3 (es) | 2016-08-29 |
US8962984B2 (en) | 2015-02-24 |
EP2439788A2 (en) | 2012-04-11 |
JP2013522927A (ja) | 2013-06-13 |
WO2011119001A3 (ko) | 2012-03-15 |
WO2011119001A2 (ko) | 2011-09-29 |
KR101210168B1 (ko) | 2012-12-07 |
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