JP5876059B2 - 大面積上に高秩序化ナノピラーまたはナノホール構造を作製するための方法 - Google Patents

大面積上に高秩序化ナノピラーまたはナノホール構造を作製するための方法 Download PDF

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JP5876059B2
JP5876059B2 JP2013533128A JP2013533128A JP5876059B2 JP 5876059 B2 JP5876059 B2 JP 5876059B2 JP 2013533128 A JP2013533128 A JP 2013533128A JP 2013533128 A JP2013533128 A JP 2013533128A JP 5876059 B2 JP5876059 B2 JP 5876059B2
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substrate
etching
nil
nanoparticles
nanocones
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JP2014502035A (ja
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モルハルド、クリストフ
パッハオルスキー、クラウディア
スパッツ、ヨアヒム・ピー．
ブルンナー、ロベルト
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マツクス−プランク−ゲゼルシャフト ツール フエルデルング デル ヴイツセンシャフテン エー フアウ
マツクス−プランク−ゲゼルシャフト ツール フエルデルング デル ヴイツセンシャフテン エー フアウ
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/009—Manufacturing the stamps or the moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/002—Component parts, details or accessories; Auxiliary operations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147—Film patterning
    • B81C2201/0149—Forming nanoscale microstructures using auto-arranging or self-assembling material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2013533128A 2010-10-13 2011-10-12 大面積上に高秩序化ナノピラーまたはナノホール構造を作製するための方法 Active JP5876059B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10013595 2010-10-13
EP10013595.3 2010-10-13
PCT/EP2011/005122 WO2012048870A2 (fr) 2010-10-13 2011-10-12 Procédé de fabrication de structures hautement ordonnées de nanopiliers ou de nanotrous sur de grandes surfaces

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Publication Number Publication Date
JP2014502035A JP2014502035A (ja) 2014-01-23
JP5876059B2 true JP5876059B2 (ja) 2016-03-02

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JP2013533128A Active JP5876059B2 (ja) 2010-10-13 2011-10-12 大面積上に高秩序化ナノピラーまたはナノホール構造を作製するための方法

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US (1) US20130284690A1 (fr)
EP (1) EP2627605B1 (fr)
JP (1) JP5876059B2 (fr)
CN (1) CN103402908B (fr)
WO (1) WO2012048870A2 (fr)

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US9469083B2 (en) * 2012-07-09 2016-10-18 Massachusetts Institute Of Technology Inverted nanocone structures for multifunctional surface and its fabrication process
US20140318657A1 (en) * 2013-04-30 2014-10-30 The Ohio State University Fluid conveying apparatus with low drag, anti-fouling flow surface and methods of making same
CN103576449A (zh) * 2013-11-06 2014-02-12 无锡英普林纳米科技有限公司 一种用于纳米压印的复合模板及其制备方法
CN103576448A (zh) * 2013-11-06 2014-02-12 无锡英普林纳米科技有限公司 一种利用纳米压印制备多孔减反射薄膜的方法
CN104310304A (zh) * 2014-10-22 2015-01-28 上海大学 可控尺寸及表面结构的纳米柱阵列制备方法
EP3130559A1 (fr) 2015-08-14 2017-02-15 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Fabrication de substrats nanostructurés comprenant une pluralité de gradients de nanostructures sur un substrat unique
CN105399046A (zh) * 2015-11-02 2016-03-16 中国科学院重庆绿色智能技术研究院 无机微光学元件批量化制作方法
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AU2018262130B2 (en) * 2017-05-03 2021-11-11 Nanotech Security Corp. Methods for micro and nano fabrication by selective template removal
CN110799858B (zh) * 2017-06-21 2022-04-29 株式会社尼康 具有疏水和防雾性质的纳米结构化透明制品及其制造方法
CN108046211B (zh) * 2017-11-23 2019-05-31 中国科学院合肥物质科学研究院 一种硅基多刺状纳米锥有序阵列的制备方法及其应用
DE102018203213A1 (de) * 2018-03-05 2019-09-05 Robert Bosch Gmbh Verfahren zum Herstellen zumindest einer eine Nanostruktur aufweisenden Schicht auf zumindest einem Elektronikelement eines Leiterplatten-Nutzens für ein Kamerasystem und Spritzgießvorrichtung mit einer Strukturplatte mit zumindest einer Nanonegativstruktur zum Herstellen einer eine Nanostruktur aufweisenden Schicht
CN108693700B (zh) * 2018-05-17 2021-04-09 京东方科技集团股份有限公司 一种压印模板及其制备方法
US20210268693A1 (en) * 2018-07-10 2021-09-02 B.G. Negev Technologies And Applications Ltd., At Ben-Gurion University A nanocomposite mold for thermal nanoimprinting and method for producing the same
CN112638612A (zh) * 2018-08-31 2021-04-09 东北泰克诺亚奇股份有限公司 成形模及透镜
EP3685715B1 (fr) * 2019-01-24 2022-11-30 Société des Produits Nestlé S.A. Distributeur de boissons comprenant des composants autonettoyants
CN111258093B (zh) * 2020-01-19 2020-12-01 湖北民族大学 一种二维plzst反铁电光子晶体及制备方法
CN112018213B (zh) * 2020-07-20 2022-03-29 烟台南山学院 一种与基底表面具有高粘附力的直立Au纳米锥的制备方法
WO2022144773A1 (fr) * 2020-12-31 2022-07-07 3M Innovative Properties Company Appareil et procédé de reproduction et de transfert structurés
CN113985501B (zh) * 2021-10-27 2023-09-01 北京工业大学 一种利用热压印制备大面积纳米金属光子晶体的方法
GB202208279D0 (en) 2022-06-06 2022-07-20 Provost Fellows Scholars And Other Members Of Board Of Trinity College Dublin Method for fabricating nanopatterned substrates
CN115159446B (zh) * 2022-06-17 2024-07-12 燕山大学 硅微/纳米柱的制备方法

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Also Published As

Publication number Publication date
CN103402908A (zh) 2013-11-20
JP2014502035A (ja) 2014-01-23
WO2012048870A2 (fr) 2012-04-19
EP2627605B1 (fr) 2017-12-20
EP2627605A2 (fr) 2013-08-21
US20130284690A1 (en) 2013-10-31
WO2012048870A3 (fr) 2012-06-28
CN103402908B (zh) 2016-08-31

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