JP5875936B2 - 分光センサ - Google Patents

分光センサ Download PDF

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Publication number
JP5875936B2
JP5875936B2 JP2012114336A JP2012114336A JP5875936B2 JP 5875936 B2 JP5875936 B2 JP 5875936B2 JP 2012114336 A JP2012114336 A JP 2012114336A JP 2012114336 A JP2012114336 A JP 2012114336A JP 5875936 B2 JP5875936 B2 JP 5875936B2
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JP
Japan
Prior art keywords
filter
filter region
region
layer
light
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Application number
JP2012114336A
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English (en)
Japanese (ja)
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JP2013242177A (ja
JP2013242177A5 (enExample
Inventor
笠原　隆
隆 笠原
柴山　勝己
勝己 柴山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2012114336A priority Critical patent/JP5875936B2/ja
Priority to US14/400,702 priority patent/US9671286B2/en
Priority to DE112013002560.4T priority patent/DE112013002560B4/de
Priority to CN201380023041.6A priority patent/CN104272069B/zh
Priority to PCT/JP2013/062953 priority patent/WO2013172234A1/ja
Publication of JP2013242177A publication Critical patent/JP2013242177A/ja
Publication of JP2013242177A5 publication Critical patent/JP2013242177A5/ja
Application granted granted Critical
Publication of JP5875936B2 publication Critical patent/JP5875936B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0213—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using attenuators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1234—Continuously variable IF [CVIF]; Wedge type

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP2012114336A 2012-05-18 2012-05-18 分光センサ Active JP5875936B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012114336A JP5875936B2 (ja) 2012-05-18 2012-05-18 分光センサ
US14/400,702 US9671286B2 (en) 2012-05-18 2013-05-08 Spectroscopic sensor having a wire connected to a substrate through a hole of a filter region
DE112013002560.4T DE112013002560B4 (de) 2012-05-18 2013-05-08 Spektralsensor
CN201380023041.6A CN104272069B (zh) 2012-05-18 2013-05-08 分光传感器
PCT/JP2013/062953 WO2013172234A1 (ja) 2012-05-18 2013-05-08 分光センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012114336A JP5875936B2 (ja) 2012-05-18 2012-05-18 分光センサ

Publications (3)

Publication Number Publication Date
JP2013242177A JP2013242177A (ja) 2013-12-05
JP2013242177A5 JP2013242177A5 (enExample) 2015-05-28
JP5875936B2 true JP5875936B2 (ja) 2016-03-02

Family

ID=49583641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012114336A Active JP5875936B2 (ja) 2012-05-18 2012-05-18 分光センサ

Country Status (5)

Country Link
US (1) US9671286B2 (enExample)
JP (1) JP5875936B2 (enExample)
CN (1) CN104272069B (enExample)
DE (1) DE112013002560B4 (enExample)
WO (1) WO2013172234A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013104968B4 (de) * 2013-05-14 2020-12-31 ams Sensors Germany GmbH Sensoranordnung mit einem siliziumbasierten optischen Sensor und einem Substrat für funktionelle Schichtsysteme
JP6290594B2 (ja) * 2013-10-31 2018-03-07 浜松ホトニクス株式会社 光検出装置
JP6390117B2 (ja) * 2014-02-26 2018-09-19 セイコーエプソン株式会社 光学モジュール、及び電子機器
JP6671860B2 (ja) * 2015-04-28 2020-03-25 浜松ホトニクス株式会社 光検出装置
WO2017057372A1 (ja) * 2015-10-02 2017-04-06 浜松ホトニクス株式会社 光検出装置
JP7039160B2 (ja) * 2016-03-09 2022-03-22 浜松ホトニクス株式会社 光検出装置
FR3116899B1 (fr) 2020-11-30 2023-07-21 Silios Tech Imageur multispectral à domaine spectral élargi.
JP7737732B2 (ja) * 2021-09-03 2025-09-11 国立大学法人東北大学 分光機能付き撮像素子及びその製造方法、並びにピクセル化光フィルタアレイの製造方法及び分光機能付き撮像素子を備えた製品。

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JP5641220B2 (ja) 2010-11-12 2014-12-17 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置
JP5707107B2 (ja) 2010-11-22 2015-04-22 浜松ホトニクス株式会社 分光センサ
JP5634836B2 (ja) 2010-11-22 2014-12-03 浜松ホトニクス株式会社 分光センサの製造方法
EP2793329A4 (en) * 2011-12-06 2015-09-02 Konica Minolta Inc OPTICAL SEMICONDUCTOR HOUSING, MICHELSON INTERFEROMETER, AND FOURIER TRANSFORMED SPECTROSCOPIC ANALYSIS APPARATUS
JP5926610B2 (ja) 2012-05-18 2016-05-25 浜松ホトニクス株式会社 分光センサ
JP6119325B2 (ja) 2013-03-14 2017-04-26 セイコーエプソン株式会社 干渉フィルター、干渉フィルターの製造方法、光学モジュール、電子機器、及び接合基板
JP6390090B2 (ja) 2013-11-19 2018-09-19 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器

Also Published As

Publication number Publication date
JP2013242177A (ja) 2013-12-05
DE112013002560T5 (de) 2015-02-05
DE112013002560B4 (de) 2023-01-05
CN104272069B (zh) 2016-04-06
US20150138560A1 (en) 2015-05-21
WO2013172234A1 (ja) 2013-11-21
US9671286B2 (en) 2017-06-06
CN104272069A (zh) 2015-01-07

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