JP5865470B1 - Electronic component conveyor - Google Patents

Abstract

An electronic component transfer device is provided that can arrange a stage and a structure facing each other across a transfer path without losing the advantages of high-speed transfer in an electronic component transfer device of a chuck outer periphery type rotary transfer method. A turret table 21 having a circular shape having the same radius over the entire circumference and a fixed position above a trajectory through which the outermost diameter portion of the turret table 21 passes, and a chuck 22 is attached to a stage / lower contact 412. An advance / retreat drive unit 25 for lowering is provided. An upper contact 411 is provided above the stage / lower contact 412 so as to leave room for the chuck 22 to enter. The chucks 22 are provided at the outer edge of the turret table 21 at a pitch that is twice the rotation angle of one pitch of the table, and extend horizontally toward the outside of the table. In the stop position 24, the retracted position 41 a of the chuck 22 is set next to the stage / lower contact 412 and the upper contact 411. [Selection] Figure 2

Description

  The present invention relates to an electronic component transport apparatus that transports electronic components.

  Electronic parts are subjected to various inspection items during the manufacturing process, and non-defective products are screened and packaged for shipment. The inspection item is typically measurement of electrical characteristics. An electrical characteristic is a response to a voltage, current, resistance, frequency, or logic signal of an electronic component. In the measurement of electrical characteristics, a current-carrying contact called a contact is applied to an electrode of an electronic component, and current injection, voltage application, or logic signal input is performed. Then, the output is analyzed to determine a non-defective product.

  There is an electronic component having electrodes for external connection on both front and back surfaces. For example, an insulated gate bipolar transistor or SiC bipolar transistor used as a power semiconductor element for switching high voltage or large current. In an electrical characteristic measurement unit for an electronic component having a double-sided electrode, a stage-cum-lower contact and an upper contact are arranged opposite to each other at an interval so that the upper contact can be lowered. The stage / lower contact places an electronic component and makes electrical contact with the lower electrode (see, for example, Patent Document 1).

  In addition, in order to receive various inspection items, the electronic components are taken out from the trays and wafers and transported. A typical example of the transporting application is a rotary transporting type electronic component transporting apparatus. Among them, there is an electronic component conveying apparatus of a chuck outer periphery type rotational conveying system in which suction chucks and the like are arranged on the outer periphery of the turret table at equal circumferential positions and the electronic components are aligned and conveyed by intermittent rotation of the turret table (for example, , See Patent Document 2). This chuck outer peripheral installation type rotary conveyance method has an advantage that electronic components can be received and discharged from the conveyance path by the chuck by itself while achieving high-speed conveyance by the rotation conveyance method.

  This electronic component transport apparatus arranges units for each inspection item along a transport path formed by the turret table, so that the electronic component transport apparatus receives each inspection item while transporting the electronic component. Each unit is arranged immediately below the chuck stop position due to intermittent rotation of the turret table, and the chuck places electronic components on each unit by lowering and causes the electronic components to receive inspection items. That is, an advancing / retreating drive unit that pushes down the chuck is fixedly installed immediately above each stop position, in other words, immediately above the stage of the unit.

JP 2010-276621 A JP 2010-135398 A

  The electronic component conveying device of the chuck outer peripheral type rotational conveying system has brought about a dramatic improvement in the production efficiency of electronic components by high-speed conveying and self-supplying and discharging to the conveying path. However, conventionally, an electrical characteristic measuring unit for measuring electrical characteristics of the electronic components of the double-sided electrode cannot be incorporated in the transport path formed by the electronic component transport apparatus.

  That is, the turret table has a disk shape and includes a chuck on the outer edge. When the stage of the electrical characteristic measurement unit is arranged immediately below the chuck stop position, the outer edge of the turret table always exists between the upper contact and the stage / lower contact. Therefore, the upper contact cannot be lowered toward the electronic component placed on the stage / lower contact.

  In addition to the outer edge of the turret table, an advancing / retreating drive unit is fixedly installed at the chuck stop position. The height from the lower end of the chuck to the upper end of the advance / retreat driving unit exceeds the height of the space between the upper contact and the stage / lower contact. For this reason, it is physically impossible to dispose an electrical characteristic measurement unit in which the upper contact and the stage / lower contact are disposed opposite to each other in the transport path. Even if the space between the upper contact and the stage / lower contact is expanded, the upper contact cannot be lowered if the forward / backward drive unit and the turret table are always present.

  An electronic component is temporarily unloaded from a conveyance path constituted by an electronic component conveyance apparatus of a chuck outer peripheral type rotary conveyance method, and the electronic component is reciprocated between the conveyance path and the electrical characteristic measurement unit by a shuttle or the like. Can be considered. However, it is difficult to match the shuttle's reciprocation with the high speed of the turret table. If this method is adopted, all the movements of the electronic component transport device are limited by the shuttle speed. In other words, the advantage of high-speed conveyance that the chuck outer peripheral type rotary conveyance type electronic component conveyance device has is lost.

  The present invention has been proposed in order to solve the above-described problems. In the electronic device conveying apparatus of the chuck outer periphery type rotary conveying method, the electric components of the double-sided electrode electronic component are not lost without losing the advantage of high-speed conveying. The purpose is to make it possible to measure characteristics.

  In addition to the electrical property measurement unit, if the stage and the structure must be placed facing each other across the transport path, it is also incorporated into a chuck outer peripheral type rotary transport system electronic component transport device. Will be difficult. Accordingly, the present invention further provides an electronic component transfer that can arrange the stage and the structure opposite to each other across the transfer path without losing the advantages of high-speed transfer in an electronic component transfer apparatus of the chuck outer periphery type rotary transfer method. An object is to provide an apparatus.

A first aspect of an electronic component conveying apparatus according to the present invention is an electronic component conveying apparatus that conveys an electronic component, has a circular shape having the same radius over the entire circumference, and has a predetermined rotation angle in the circumferential direction. A turret table that rotates intermittently, a chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, and that extends radially toward the outside of the table and holds electronic components; and the turret table Are set at respective points divided by the rotation angle of the turret table on the same circumference and are arranged at at least one of the stop positions where the chuck stops and the stop positions of the chuck. a stage on which an electronic component is to be placed by the chuck, and the low-side activation contact that contacts the lower surface electrode of the electronic component that is mounted on the stage, the stage The chuck is opposed spaced room entering towards an upper conductive contact in contact with the upper surface electrode of the electronic component to be placed on the stage, having said upper conducting contact and a lower conducting contact, An electrical property measurement unit that lowers the upper energization contact and measures electrical characteristics of the electronic component placed on the stage, and is set next to the stage and the upper energization contact among the chuck stop positions. The chuck includes a retraction position where the chuck retreats from the stage and the upper energizing contact while the electrical characteristics of the electronic component are measured on the stage.

A second aspect of the electronic component transport apparatus according to the present invention is an electronic component transport apparatus for transporting an electronic component, the turret table rotating intermittently at a predetermined rotation angle in the circumferential direction, and the turret table. On the outer edge of the turret, the chuck is provided at a pitch of twice the rotation angle, extends radially toward the outside of the table and holds an electronic component, and a circle having the same center as the turret table. A stage set at each point divided by the rotation angle of the table and arranged at at least one of the stop positions where the chuck stops and each stop position of the chuck; a low-side activation contact that contacts the lower electrode of the mounting electronic component on the stage, above the trajectory outermost diameter portion of said turret table passes Is a constant established, contact with the advancing drive unit for lowering towards the chuck to the stage, said chuck above the stage is opposite spaced room for entering, the upper surface electrode of the electronic component to be placed on the stage An upper energizing contact , an upper energizing contact and a lower energizing contact, and an electric characteristic measuring unit for lowering the upper energizing contact and measuring an electric characteristic of an electronic component placed on the stage; The chuck is retracted from the stage and the upper energized contact while the electrical characteristics of the electronic component are measured at the stage, which is set next to the stage and the upper energized contact among the stop positions of the chuck. And a retreat position.

It may be further provided with a processing unit that is disposed at least at every other stop position counted from the retracted position, and whose electrical characteristics at the stage are different from the measurement .

Each stop position is at least one other position counted from the installation position of the stage and the upper energizing contact , and the chuck does not perform the different processing only for picking up or removing the electronic component. The different processes that are at least one other position counted from the stop position of the seed and the retreat position, and that are longer than the time required for pick-up or separation at the first stop position and less than the processing time at the stage. It is also possible to include a second type stop position where

A plurality of sets of the stage and the upper energizing contact are provided, and each set is installed at any one of the stop positions counted from one set, and the retracted position is adjacent to each set. You may make it have.

The upper energizing contact may be lowered toward the electronic component of the stage, and at a return position from the lowered position, the upper energizing contact may be stationary with a room for the chuck to enter.

  The processing unit of the different processing is an appearance inspection unit that inspects the appearance of the electronic component, an inspection support unit that corrects the attitude of the electronic component, or a storage unit that stores the electronic component and determines the appropriateness of the storage. Also good.

The chuck has an L-shape that extends downward from the turret table and bends horizontally in the middle, and the bending position is provided at a height between the upper energizing contact and the stage. May be.

  According to the present invention, the stage and the structure can be arranged to face each other across the transport path of the electronic component. Therefore, without losing the high-speed transportability of the electronic component, the stage and the structure can be attached to the electronic component. Processing is possible.

It is a side view of the electrical property measurement unit concerning this embodiment. It is a figure which shows the whole structure of the electronic component conveying apparatus which concerns on this embodiment. It is the elements on larger scale which looked at the electronic component conveying apparatus concerning this embodiment from the side. It is a transition diagram which shows the routine first half of the measurement of the electrical property of the electronic component which concerns on this embodiment. It is a transition diagram which shows the routine latter half of the measurement of the electrical property of the electronic component which concerns on this embodiment. The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state diagram which shows a 1st state, (b) is a time chart which shows the stop time of a 1st state. The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 2nd state, (b) is a time chart which shows the stop time of a 2nd state. The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 3rd state, (b) is a time chart which shows the stop time of a 3rd state. The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 4th state, (b) is a time chart which shows the stop time of a 4th state. The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 5th state, (b) is a time chart which shows the stop time of a 5th state.

(Electrical characteristic measurement unit)
First, an electrical property measurement unit provided in the electronic component transport device according to the present embodiment will be described in detail with reference to FIG. As shown in FIG. 1, the electrical characteristic measurement unit 41 measures electrical characteristics of the electronic component W. The electrical characteristic measurement unit 41 is in electrical contact with the electrodes of the electronic component W, applies voltage or current injection to the electronic component W, and inspects the electrical characteristics. The electrical characteristics include the voltage, current, resistance, or frequency of the electronic component W with respect to current injection or voltage application to the electronic component W, an output signal with respect to a logic signal, and the like.

  The electronic component W is a component used for an electrical product, and is formed by packaging a semiconductor element or the like. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, capacitors, resistors, and integrated circuits. This electronic component W has a double-sided electrode package provided with electrodes for external connection on both sides.

  The electrical characteristic measuring unit 41 for the electronic component W having double-sided electrodes includes a stage / lower contact 412 and an upper contact 411. The stage / lower contact 412 has the electronic component W placed thereon, and electrically contacts the bottom electrode of the electronic component W as an energizing contact. The stage / lower contact 412 has a stage on which the electronic component W is placed and a lower contact in contact with the lower surface electrode, and the lower contact may be inserted from the back of the stage.

  The upper contact 411 is an energizing contact that contacts the upper surface electrode of the electronic component W. The upper contact 411 is supported by an upper base 413 that is taller than the stage / lower contact 412. The upper contact 411 protrudes from the upper base 413 toward the conveyance path 2 (see FIG. 2) side of the electronic component W, and extends to a position directly above the stage / lower contact 412.

  The upper contact 411 can be raised and lowered. The upper contact 411 approaches and separates from the stage / lower contact 412 by moving up and down. In other words, the electrical characteristic measurement unit 41 includes a lifting drive unit 414 that lifts and lowers the upper contact 411. The elevating drive unit 414 is a drive source and transmission mechanism module that converts rotational motion into linear motion of the upper contact 411.

  The lifting drive unit 414 includes a tension spring 415, a motor 416, a cam 417, and a cam follower 418. The tension spring 415 biases the upper base 413 so that the upper contact 411 moves toward the stage / lower contact 412. The motor 416 has a rotating shaft that extends horizontally. Horizontal is a direction orthogonal to the arrangement of the upper contact 411 and the stage / lower contact 412. The cam 417 is supported by the rotating shaft of the motor 416, has a flat shape, and forms a cam surface on the peripheral surface. The cam follower 418 is fixed to the bottom surface of the upper base 413, contacts the cam 417 from the upper side, and follows the cam surface.

  When the cam follower 418 is driven toward the short diameter portion of the cam 417, the downward biasing force of the tension spring 415 is effective, and the upper contact 411 is lowered toward the stage / lower contact 412. When the cam follower 418 is driven toward the long diameter portion of the cam 417, the upper contact 411 is lifted upward against the tension spring 415, and is separated from the stage / lower contact 412 so as to maintain a constant distance.

  The electrical characteristic measuring unit 41 lowers the upper contact 411 when the electronic component W is placed on the stage / lower contact 412. Then, the stage / lower contact 412 is brought into contact with the lower electrode, the upper contact 411 is brought into contact with the upper electrode, current injection, voltage application, or input of a logic signal is performed, and the output signal is analyzed.

(Configuration of electronic component transport device)
FIG. 2 is an overall configuration diagram of an electronic component transport apparatus including the electrical characteristic measurement unit. FIG. 3 is a partially enlarged view of the electronic component transport device viewed from the side. 2 and 3 conveys an electronic component W for measurement of various inspection items including measurement of electrical characteristics. The electronic component transport apparatus 1 constitutes a transport path 2 for electronic components W, and various units are arranged along the transport path 2. The various units are a supply unit 3, various inspection units including an electrical characteristic measurement unit 41, an inspection support unit 5, a discharge container 6, and a storage unit 7. In the present embodiment, an appearance inspection unit 42 is further provided as an inspection unit.

  The conveyance path 2 includes a turret table 21 and a chuck 22. The turret table 21 is a circular disk extending in the horizontal direction and having the same radius over the entire circumference. The drive source of the turret table 21 is a direct drive motor 23. The direct drive motor 23 is connected to the bottom surface of the turret table 21, supports the turret table 21, and intermittently rotates the turret table 21 by a predetermined angle in the circumferential direction.

  The chuck 22 is attached to the outer edge of the turret table 21. Therefore, the chuck 22 sequentially stops at each stop position 24 by intermittent rotation of the turret table 21. In other words, the stop position 24 is provided at each point divided by the rotation angle of one pitch of the turret table 21 on the circumference having the same center as the turret table 21. The chuck 22 extends horizontally from the outer edge of the turret table 21. The chuck 22 holds the electronic component W at a tip away from the turret table 21. That is, the conveyance path 2 is a trajectory through which the tip of the chuck 22 passes, and is formed around the turret table 21. The type of the chuck 22 is not particularly limited, but the chuck 22 is, for example, a suction chuck.

  The chuck 22 which is a suction chuck has a hollow tube inside. The tip of the chuck 22 has an opening 22a facing downward, and the opening 22a is connected to the hollow tube. The hollow tube communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector on the side opposite to the opening 22a. When the negative pressure is generated in the pneumatic circuit, the chuck 22 sucks the electronic component W through the opening 22a, and when the vacuum breaks or is released to the atmosphere, the chuck 22 loses the suction force and removes the electronic component from the opening 22a.

  The chuck 22 is attached to the outer edge of the turret table 21 via a bearing or a slider and can be moved up and down. The chuck 22 receives the electronic component W from the supply unit 3 by moving up and down, and exchanges the electronic component W with the inspection support unit 5, the electrical characteristic measurement unit 41, and the appearance inspection unit 42. In particular, the chuck 22 places an electronic component W whose electrical characteristics have not been measured on the stage / lower contact 412 of the electrical characteristic measuring unit 41, and the electronic component whose electrical characteristics have been measured from the stage / lower contact 412 is finished. W is collected.

  The chuck 22 is lowered by being pushed down by the advance / retreat drive unit 25. The advance / retreat drive unit 25 is installed immediately above the outer edge of the turret table 21. The base end of the chuck 22 exists on a vertical line extending from the advance / retreat drive unit 25. The advance / retreat drive unit 25 and the turret table 21 have no fixed relationship, and the advance / retreat drive unit 25 does not move. The advance / retreat drive unit 25 includes a motor, a cam mechanism, and a rod, and converts the rotational force of the motor into a linear motion by the cam mechanism and transmits the linear motion to the rod. The rod extends toward the stop position 24 of the chuck 22, contacts the base end of the chuck 22 existing at the stop position 24 from above, and further pushes down the chuck 22 downward.

  The arrangement relationship among the units 3, 41, 42, 5, 6, 7, the chuck 22, the advance / retreat drive unit 25, and the turret table 21 will be described. As shown in FIG. 3, the chuck 22 extends while maintaining a height that enters between the upper contact 411 and the stage / lower contact 412 of the electrical characteristic measurement unit 41. In other words, the upper contact 411 and the stage / lower contact 412 are installed on the outer edge of the turret table 21 and on the outer side in the table radial direction with respect to the advance / retreat driving unit 25, and between the upper contact 411 and the stage / lower contact 412. The outer edge of the turret table 21 and the advance / retreat drive unit 25 are not provided.

  If the space between the upper contact 411 and the stage / lower contact 412 does not match the height of the turret table 21, the chuck 2 extends downward from the base end and bent outward in the middle. By adopting the shape, it can be extended to the height of the space.

  In addition, as shown in FIG. 2, the number of stop positions 24 of the chuck 22 is twice the number of chucks 22 arranged. That is, the chucks 22 are arranged at equal circumferential positions around the turret table 21, and when the arrangement interval is an angle 2a, the direct drive motor 23 rotates the turret table 21 by an angle a per pitch. For example, 32 stop positions 24 are set for 16 chucks 22.

  Each unit 3, 41, 42, 5, 6, 7 is installed at any one of the stop positions 24 of the chuck 22. The electronic component transport apparatus 1 transports the electronic component W along the transport path 2, stops at least each of the units 3, 41, 42, 5, 6, and 7, and stops each unit 3, 41, 42, 5 , 6 and 7 cause the electronic component W to be processed.

  Two electrical characteristic measuring units 41 are provided, and one stop position 24 is provided, and each is arranged at the stop position 24. The stop position 24 adjacent to each of the two electrical property measurement units 41 is a retreat position 41a of the chuck 22 in the electrical property measurement time zone, and the unit is not disposed. For example, the retreat position 41 a is set on the downstream side in the transport direction of the electrical characteristic measurement unit 41.

  The appearance inspection unit 42, the inspection support unit 5 and the storage unit 7 are arranged at any one of the stop positions 24 counted from the retreat position 41a. The supply unit 3 and the discharge container 6 are arranged at any one stop position 24 counted from the arrangement position of the electrical characteristic measurement unit 41. That is, when the stop position 24 is provided at an even number, the appearance inspection unit 42, the inspection support unit 5, and the housing unit 7 are placed at the odd-numbered stop position 24 counted from the electrical characteristic measurement unit 41 at the supply unit 3 and the discharge container 6. Are arranged at even-numbered stop positions 24.

  Here, the supply unit 3 supplies the electronic component W to the transport path 2. The supply unit 3 is a unit that does not perform processing on the electronic component W, such as a sliding movement device, a tray movement device, or a wafer holder device. The sliding movement device aligns and conveys a large number of electronic components W accommodated in a mortar-like container and moves them to the entrance of the conveyance path 2. The tray moving device moves the tray in two orthogonal axes. The tray is partitioned in a lattice shape, and the electronic component W is accommodated in each lattice. The electronic components W in each lattice are moved to the entrance of the transport path 2 by moving the tray in the two orthogonal axes along the spreading plane of the tray. The wafer holder device moves the wafer ring in two orthogonal axes. The wafer ring is formed by arranging electronic components W in an array. Each electronic component W is moved to the entrance of the conveyance path 2 by moving the wafer ring in two orthogonal axes along the spreading plane of the wafer ring. A rotary pickup that relays the electronic component W may be installed between the supply unit 3 and the transport path W.

  The discharge container 6 is a unit that only receives an electronic component W that has not been tested well and does not perform processing on the electronic component W. Moreover, the accommodation unit 7 accommodates the electronic component W whose test result is good. The accommodation unit 7 is, for example, a taping device, a tube device, a tray moving device, a wafer holder device, or the like, and is a unit that includes a determination process of whether accommodation is appropriate. The taping device is a device for running a tape in which pockets are arranged along the longitudinal direction of the band, and moves each pocket to the exit of the conveyance path 2. The tube device moves a tube that accommodates the electronic component W.

  The inspection support unit 5 performs a process of correcting the posture of the electronic component W to be inspected in advance in order to improve the inspection accuracy. The inspection support unit 5 has an XYθ stage on which the electronic component W is placed. The XYθ stage moves in two orthogonal axes along the stage plane, and rotates on an axis perpendicular to the stage plane. The inspection support unit 5 corrects the orientation and position of the electronic component W by placing the electronic component W passed from the transport path 2 on the XYθ stage and moving and rotating the XYθ stage. The inspection support unit 5 includes a camera that images the electronic component W, and analyzes the direction and position of the electronic component W in the image to control the movement amount and the rotation amount of the XYθ stage.

  The appearance inspection unit 42 photographs the electronic component W with a camera, analyzes the image of the electronic component W, and detects the presence or absence of surface scratches or dirt.

  Among these units 3, 41, 42, 5, 6, 7, A is the measurement time by the electrical characteristic measurement unit 41, and B is the longest processing time by the appearance inspection unit 42, the inspection support unit 5 and the storage unit 7. Assuming that the longest processing time by the unit 3 and the discharge container 6 is C, A ≧ B> C. That is, in general, the measurement time by the electrical characteristic measurement unit 41 is long. Supply and discharge of the electronic component W to the transport path 2 are completed in a relatively short time. The appearance inspection of the electronic component W, the posture correction of the electronic component W, and the accommodation of the electronic component W take longer than the supply and discharge to the transport path 2, but do not reach the measurement time by the electrical characteristic measurement unit 41.

  That is, in the electronic component transport apparatus 1, the units 42, 5, and 7 that complete the processing in such a medium time B are arranged at every other stop position 24 counted from the retreat position 41a. The units 3 and 6 that complete processing in a short time C are arranged at every other stop position 24 counting from the arrangement position of the electrical characteristic measurement unit 41. However, if the stop position 24 has a margin, the units that complete processing in the short time C may be arranged at every other stop position 24 counting from the retreat position 41a.

(Electrical characteristic measurement control)
The control aspect of such an electronic component conveying apparatus 1 will be described. As shown in FIGS. 4 and 5, the electronic component transport apparatus 1 is configured such that the electronic components W whose electrical characteristics have not been measured are arranged in the two electrical characteristics measuring units 41 (in the drawings, from stage (a) to stage (d The electronic component W is placed on the stage / lower stage 412 (step (e) in the figure). At this time, the chuck 22 is interposed between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41 (step (e) in the figure).

  Next, both chucks 22 on which the electronic component W is placed move by one pitch and move to the retreat position 41a (step (f) in the figure). At this time, the chuck 22 is separated from the space between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41, and the structure is not interposed except for the electronic component W (in the drawing). Step (f)). Accordingly, the electrical characteristic measuring unit 41 starts measuring electrical characteristics when both chucks 22 have moved to the retracted position 41a (step (g) in the figure). That is, the electrical characteristic measuring unit 41 brings the upper contact 411 closer to the stage / lower contact 412, contacts the upper surface electrode with the upper contact 411, and contacts the lower electrode with the stage / lower contact 412, Voltage application is started and an output signal from the electronic component W is analyzed.

  When the measurement of the electrical characteristics is completed, the upper contacts 411 are raised, and both chucks 22 on which the electronic component W is placed move back by one pitch and move from the retracted position 41a to the electrical characteristics measurement unit 41 (step (h )), Receiving the electronic component W whose electrical characteristics have been measured (step (i) in the figure). Then, the chuck 22 holding the electronic component W for which the measurement of electrical characteristics has been completed moves away from the electrical characteristics measurement unit 41 (step (j) in the figure).

  The next pair of the chucks 22 holding the electronic parts W whose electrical characteristics are not measured, after the previous pair has undergone the step (g), the steps (a) to (j) are repeated in order and conveyed. The electrical characteristics of the electronic component W are measured. In other words, the turret table 21 repeats a rotation routine for moving the chuck 22 forward by 3 pitches and then retracting it by 1 pitch. When the N electric characteristic unit 41 is installed, one rotation routine is composed of 2N + 1 forward movements and one backward movement.

(Overall control)
Furthermore, each stop time included in this rotation routine is different. First, as shown in FIG. 6, the first type of stop time when the leading chuck 22A holding the electronic component W whose electrical characteristics have not been measured arrives at the first electrical property measuring unit 41 is as follows. This is the shortest time C that can be supplied to or discharged from the transport path 2.

  When the leading chuck 22A arrives at the first electrical characteristic measurement unit 41, the leading chuck 22A continues to stand still while holding the electronic component W. On the other hand, the other chuck 22B arrives at the supply unit 3, and the other chucks 22F and 22G arrive at the discharge container 6, and pick up the electronic component W and discharge the electronic component W, respectively. That is, the shortest stop time is the later of the series of steps of lowering the chuck 22B, holding the electronic component, and raising the chuck 22B, or detaching the electronic component W by the chucks 22F and 22G. In general, the series of steps of the chuck 22B is slower.

  The inspection support unit 5, the appearance inspection unit 42, and the accommodation unit 7 on the transport path 2 are installed at every other stop position 24 counting from the retreat position 41 a adjacent to the electrical characteristic measurement unit 41. Since these units 5, 42, 7 do not operate, the first type of stop time is not restricted by the processing time of these units 5, 42, 7.

  When the first type of stop time has elapsed, the entire chuck 22 moves by one pitch as shown in FIG. Then, the leading chuck 22A holding the electronic component W whose electrical characteristics have not been measured arrives at the retracted position 41a adjacent to the first electrical characteristics measuring unit 41. The second type of stop time at this timing is the longest time of the inspection support unit 5, the appearance inspection unit 42, or the housing unit 7, and is a time B shorter than the measurement time of the electrical characteristics.

  That is, at this timing, the other chucks 22 </ b> B, 22 </ b> G, and 22 </ b> F arrive at the inspection support unit 5, the appearance inspection unit 52, and the housing unit 7 while holding the electronic component W. In the inspection support unit 5, the chuck 22B is lowered, the electronic component W is detached from the XYθ stage, the chuck 22B is raised, the XYθ stage is changed, the chuck 22B is lowered again, the electronic component W is picked up from the XYθ stage, and A series of steps for re-raising the chuck 22B is performed. In the appearance inspection unit 42, the electronic component W is imaged. In the housing unit 7, a series of steps of lowering the chuck 22 </ b> F, detaching the electronic component W to the housing location, inspecting the success or failure of proper housing, and raising the chuck 22 </ b> F are performed. Each of these series of processes takes longer than the shortest time C, and the stop time B is the longest time of each series of these processes.

  After the second type of stop time has elapsed, as shown in FIG. 8, the chuck 22 again moves by one pitch. Then, the pair of chucks 22 </ b> A and 22 </ b> B holding the electronic component W whose electrical characteristics are not measured arrives at each electrical characteristic measurement unit 41. The stop time at this timing may be the same as the first type stop time. At this timing, the pair of chucks 22 </ b> A and 22 </ b> B only places the electronic component W on the electrical property measurement unit 41, and the process by the electrical property measurement unit 41 is not performed. In addition, none of the chucks 22 has arrived at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7. Only the chucks 22 </ b> A, 22 </ b> B, 22 </ b> C, 22 </ b> G, and 22 </ b> H are present in the supply unit 3, the discharge container 6, and the electrical characteristic measurement unit 41. Therefore, in the electrical property transport apparatus 1, only the electronic component W is picked up, placed on the stage / lower contact 412 and discharged.

  At this timing, the pickup of the electronic component W from the supply unit 3 may not be executed. This is because the same situation occurs at the second stop timing. Rather than picking up the electronic component W at this timing, picking up the electronic component W at the second stop timing reduces the number of intermittent movements of the electronic component W in the transport path 2, resulting in sudden stop and acceleration. Since the number of times of receiving the inertial force is reduced, the possibility that the electronic component W is displaced is reduced.

  As shown in FIG. 9, when the chuck 22 is further moved by 1 pitch, and the chucks 22A and 22B on which the electronic component W is placed on the electrical characteristic measurement unit 41 are moved to the retreat position 41a, the third type of stop time is This is the longest time A in which electrical characteristics can be measured. At this timing, the chucks 22A and 22B on which the electronic component W is placed on the stage / lower contact 412 are present at the retracted position 41a, so that a structure is formed between the upper contact 411 and the stage / lower contact 412. The body is absent, and the upper contact 411 is lowered to be able to contact the upper electrode.

  Therefore, the electrical characteristics are measured at this timing. On the other hand, at this timing, the chucks 22 </ b> C, 22 </ b> H, and 22 </ b> G arrive at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7 while holding the electronic component W. Therefore, inspection support, appearance inspection, and accommodation are also performed at this timing. However, since these inspection support, appearance inspection, and accommodation are shorter than the measurement of electrical characteristics, the longest time A is stopped at this timing.

  The third type of stop time accompanied by the measurement of electrical characteristics has elapsed, and the chucks 22A and 22B are moved back to the electrical characteristics measurement unit 41 again as shown in FIG. Then, the chucks 22 </ b> A and 22 </ b> B hold the electronic component W whose electrical characteristics have been measured again. The stop time at this timing may be the same as the first type stop time. At this timing, the pair of chucks only picks up the electronic component W from the electrical characteristic measurement unit 41. Further, only the electronic component W that has been subjected to the inspection support and the appearance inspection is returned to the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7.

  If the chuck 22C has not picked up the electronic component W from the supply unit at the timing when the electronic component W is aligned with the electrical characteristic measuring unit 41, it may be picked up at this timing.

(Function and effect)
As described above, the electronic component transport apparatus 1 may adopt a chuck outer periphery type rotary transport system in which the turret table 21 constituting the transport path 2 has the same radius over the entire circumference. In the electronic component transport apparatus 1, the chucks 22 that hold the electronic components W are extended horizontally in the radial direction toward the outside of the table. Thus, even if the upper contact 411 is disposed above the stage / lower contact 412 on which the electronic component W is placed by the chuck 22, only the chuck 22 is interposed between the stage / lower contact 412 and the upper contact 411. Since the upper contact 411 and the turret table 21 do not come into contact with each other, the electronic component W can be placed on the stage / lower contact 412.

  Further, the chuck 22 is provided on the outer edge of the turret table 21 at a pitch twice the intermittent rotation angle of the turret table 21, and a retracting position 41 a for retracting the chuck 22 is set next to the stage / lower contact 412 and the upper contact 411. did. This prevents the chuck 22 from interfering with the processing of the stage / lower contact 412 and the upper contact 411 for the electronic component W. In particular, the upper contact 411 can be lowered to contact the upper surface electrode of the electronic component W without being obstructed by the chuck 22.

  Therefore, according to this electronic component transport apparatus 1, even if the turret table 21 constituting the transport path 2 adopts the chuck outer peripheral installation type rotary transport system having the same radius over the entire circumference, the electrical characteristic measuring unit 41 is provided. The turret table 21 can be installed in the transport path 2, and the electrical characteristics of the electronic component W having double-sided electrodes can be measured on the transport path 2. That is, it is possible to measure the electrical characteristics of the electronic component W having double-sided electrodes on the transport path 2 configured only by the chuck outer periphery type rotary transport format. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.

  If the turret table 21 has a star shape in which the arms extend radially, the turret table 21 may be absent between the stage and the lower contact 412 and the upper contact 411 between the arms. However, the electronic component conveying apparatus 1 includes an advance / retreat driving unit 25 that lowers the chuck 22 toward the stage / lower contact 412 in order to place the electronic component W on the stage / lower contact 412. May be fixedly installed above the trajectory through which the outermost diameter portion passes. Also in this case, by making the chuck 22 extend radially toward the outside of the table, the upper contact 411 and the advance / retreat drive unit 25 are not contacted, and the electronic component W is placed on the stage / lower contact 412. Can be placed.

  Therefore, also in the electronic component transport apparatus 1 having the advance / retreat driving unit 25, the electrical characteristics of the electronic component W having double-sided electrodes can be measured by the transport path 2 configured only by the rotational transport type. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.

  In addition to the electrical characteristic measurement unit 41, there is an example in which a stage is installed on the lower side and the structure is disposed so as to face the stage. For example, there is a case where it is desired to take an image of an electronic component with a camera from directly above the stage. That is, in addition to the upper contact 411, other structures such as a laser marking device and a camera may exist above the stage. Even when it is necessary to dispose such a structure other than the upper contact 411 above the stage, the electronic component transport apparatus 1 needs to be temporarily detached from the transport path 2 configured by the turret table 21. In addition, the action of the structure can be imparted to the electronic component W on the conveyance path 2 constituted by the turret table 21, and the high-speed conveyance that is the advantage of the rotary conveyance type can be exhibited, and the production efficiency can be improved. .

  Further, the retreat position 41a may be disposed next to the downstream side in the transport direction as viewed from the electrical characteristic measurement unit 41, or may be disposed next to the upstream side in the transport direction. In addition to the chuck, the chuck 22 may be an electrostatic chuck, a Bernoulli chuck, or a chuck that has a pinch and is mechanically pinched.

  Further, since the arrangement of the chucks 22 is doubled with respect to the pitch of the intermittent rotation angle of the turret table 21, the groups of every other stop position 24 counted from the electrical characteristic measuring unit 41 and the retracted position 41a are counted. Every other stop position 24 group. In the electronic component conveying apparatus 1, the processing units 5, 42, and 7 of processing different from the electrical characteristic measuring unit 41 are arranged at every other stop position 24 counted from the retreat position 41a.

  The stop time when the chuck 22 on which the electronic component W is placed on the electrical property measuring unit 41 is present at the retracted position 41a is C due to the regulation of electrical property measurement. According to the electronic component transport apparatus 1, when the C is stopped for a long time due to the measurement of the electrical characteristics, other processing can be performed by the processing units 5, 42, and 7 in which the other chucks 22 are stopped. In other words, at the timing when only the electronic component W is placed on the electrical characteristic measurement unit 41, other processing is not performed, and the stop time at this timing can be shortened. Even when the measurement of electrical characteristics is included in the inspection item, the transportation of the electronic component W by the electronic component transportation apparatus 1 can be further speeded up, and the production efficiency can be further improved.

  As processing units for different processes, an appearance inspection unit 42 that inspects the appearance of the electronic component W, an inspection support unit 5 that corrects the attitude of the electronic component W, and a storage unit that stores the electronic component W and determines the appropriateness of the storage. 7 was mentioned. In addition to this, in the case of a processing unit that performs processing that takes more time than picking up and discharging the electronic component W, it may be placed at every other stop position 24 counting from the retreat position 41a.

  On the other hand, at every other stop position 24 counted from the installation position of the electrical characteristic measurement unit 41, no processing is performed, the supply unit 3 and the discharge container 6 are installed, and the chuck 22 only picks up or removes the electronic component W. It is good. This is because the electronic component W is placed by the electrical characteristic measurement unit 41, so that the pickup or removal of the electronic component W by the chuck 22 does not affect the stop time. On the other hand, the enlargement of the turret table 21 can be avoided by utilizing this stop position.

  Further, two electrical property measuring units 41 are provided, and each electrical property measuring unit 41 is installed at any one of the other stop positions 24 counted from one electrical property measuring unit 41, and the retracted position 41a. Is provided next to each electrical characteristic measuring unit 41. In this aspect, it is possible to measure the electrical characteristics at a time after the electronic components W are aligned in all the electrical characteristics measuring units 41.

  Thus, since the measurement of two electronic components W is completed in one measurement of electrical characteristics, the number of times that the measurement of electrical characteristics occurs before the electronic components W are supplied to the transport path 2 and discharged. As a result, the transport speed of the electronic component transport apparatus 1 is improved.

  In addition, the electrical property measuring unit 41 is not limited to two devices, and a plurality of devices can be installed, and the number of occurrences of electrical property measurement is reduced in inverse proportion to the number of installed devices, thereby improving the transport speed of the electronic component W. Can do. Further, even if the processing unit is other than the electrical characteristic measurement unit 41, a plurality of the same type may be installed, and the processing may be performed after the electronic components W are arranged in all the processing units.

(Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

1 Electronic Component Transfer Device 2 Transfer Path 21 Turret Table 22 Chuck 22a Opening 23 Direct Drive Motor 24 Stop Position 25 Advance / Retreat Drive Unit 3 Supply Unit 41 Electrical Characteristic Measurement Unit 41a Retraction Position 411 Upper Contact 412 Stage / Lower Contact 413 Upper Base 414 Lifting drive unit 415 Tension spring 416 Motor 417 Cam 418 Cam follower 42 Appearance inspection unit 5 Inspection support unit 6 Discharge container 7 Storage unit W Electronic component

Claims (8)

An electronic component transport device for transporting electronic components,
A turret table having a circular shape having the same radius over the entire circumference, and intermittently rotating by a predetermined rotation angle in the circumferential direction;
A chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, extends radially toward the outside of the table, and holds electronic components;
Each stop position that is set at each point divided by the rotation angle of the turret table on a circle having the same center as the turret table, and where the chuck stops,
A stage disposed at at least one of the stop positions of the chuck, on which an electronic component is placed by the chuck;
A lower energizing contact that contacts the lower surface electrode of the electronic component placed on the stage;
An upper energizing contact that is disposed opposite to the room above the stage with a room for the chuck to enter, and is in contact with the upper surface electrode of the electronic component placed on the stage ;
An electrical property measuring unit that has the upper conductive contact and the lower conductive contact, lowers the upper conductive contact, and measures electrical properties on an electronic component placed on the stage;
Among chuck stop positions, the chuck is retracted from the stage and the upper energizing contact while being set next to the stage and the upper energizing contact and measuring the electrical characteristics of the electronic component on the stage. A retracted position;
Providing
An electronic component conveying device characterized by the above. An electronic component transport device for transporting electronic components,
A turret table that rotates intermittently by a predetermined rotation angle in the circumferential direction;
A chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, extends radially toward the outside of the table, and holds electronic components;
Each stop position that is set at each point divided by the rotation angle of the turret table on a circle having the same center as the turret table, and where the chuck stops,
A stage disposed at at least one of the stop positions of the chuck, on which an electronic component is placed by the chuck;
A lower energizing contact that contacts the lower surface electrode of the electronic component placed on the stage;
An advancing / retreating drive unit that is fixedly installed above a trajectory through which the outermost diameter portion of the turret table passes, and that lowers the chuck toward the stage;
An upper energizing contact that is disposed opposite to the room above the stage with a room for the chuck to enter, and is in contact with the upper surface electrode of the electronic component placed on the stage ;
An electrical property measuring unit that has the upper conductive contact and the lower conductive contact, lowers the upper conductive contact, and measures electrical properties of an electronic component placed on the stage;
Among chuck stop positions, the chuck is retracted from the stage and the upper energizing contact while being set next to the stage and the upper energizing contact and measuring the electrical characteristics of the electronic component on the stage. A retracted position;
Providing
An electronic component conveying device characterized by the above. Further provided with a processing unit that is disposed in at least one of the stop positions every other position counted from the retracted position, and whose electrical characteristics at the stage are different from the measurement ;
The electronic component carrying device according to claim 1 or 2. Each stop position is
It is at least one other place counted from the installation position of the stage and the upper energizing contact ,
A first type of stop position in which the chuck does not perform the different processing only to pick up or remove the electronic component;
A second type in which the different processes are performed at least every other place counted from the retreat position, and the time required for the pickup or separation at the first type stop position is longer than the processing time on the stage. Stop position of
Including
The electronic component conveying apparatus according to claim 3. A plurality of sets of the stage and the upper energizing contact are provided,
Each set is installed at any one of the other stop positions counted from one set,
Having the retraction position next to each set;
The electronic component conveying apparatus according to claim 1, wherein The upper energizing contact is
While descending toward the electronic component of the stage, at the return position from the descent, leaving a space for the chuck to enter,
Electronic component conveying device according to any one of claims 1 to 5, characterized in. The processing unit of the different processing is
It is an appearance inspection unit that inspects the appearance of an electronic component, an inspection support unit that corrects the attitude of the electronic component, or a storage unit that stores electronic components and determines the appropriateness of storage,
The electronic component carrying apparatus according to claim 3 or 4. The chuck has an L-shape that extends downward from the turret table and bends horizontally in the middle.
The bending position is provided at a height between the upper energizing contact and the stage;
Electronic component conveying device according to any one of claims 1 to 7, characterized in.

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