JP5845542B2 - 露光用ｌｅｄ光源モジュール、露光用ｌｅｄ光源装置及び露光用ｌｅｄ光源装置管理システム - Google Patents

露光用ｌｅｄ光源モジュール、露光用ｌｅｄ光源装置及び露光用ｌｅｄ光源装置管理システム Download PDF

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JP5845542B2
JP5845542B2 JP2014510267A JP2014510267A JP5845542B2 JP 5845542 B2 JP5845542 B2 JP 5845542B2 JP 2014510267 A JP2014510267 A JP 2014510267A JP 2014510267 A JP2014510267 A JP 2014510267A JP 5845542 B2 JP5845542 B2 JP 5845542B2
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Japan
Prior art keywords
light source
led light
exposure
led
lens
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Japanese (ja)
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JP2014519053A (ja
Inventor
イ、ジェギョン
オ、ソヨン
シム、ヒョンチャン
ユン、ドンギル
キム、ドンヨン
イム、サンギュン
チョン、ソンヨン
ソ、ジェイン
パク、ジョンシク
チェ、ファンヨン
シン、ミソン
キム、ハニョン
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インフィテック． カンパニー、 リミテッド
インフィテック． カンパニー、 リミテッド
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0006—Coupling light into the fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Planar Illumination Modules (AREA)
JP2014510267A 2011-10-19 2012-10-17 露光用ｌｅｄ光源モジュール、露光用ｌｅｄ光源装置及び露光用ｌｅｄ光源装置管理システム Active JP5845542B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020110106834A KR101344037B1 (ko) 2011-10-19 2011-10-19 노광용 ｌｅｄ 광원 모듈, 노광용 ｌｅｄ 광원 장치 및 노광용 ｌｅｄ 광원장치 관리시스템
KR10-2011-0106834 2011-10-19
PCT/KR2012/008498 WO2013058552A1 (ko) 2011-10-19 2012-10-17 노광용 ｌｅｄ 광원 모듈, 노광용 ｌｅｄ 광원 장치 및 노광용 ｌｅｄ 광원장치 관리시스템

Publications (2)

Publication Number Publication Date
JP2014519053A JP2014519053A (ja) 2014-08-07
JP5845542B2 true JP5845542B2 (ja) 2016-01-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014510267A Active JP5845542B2 (ja) 2011-10-19 2012-10-17 露光用ｌｅｄ光源モジュール、露光用ｌｅｄ光源装置及び露光用ｌｅｄ光源装置管理システム

Country Status (4)

Country Link
JP (1) JP5845542B2 (ko)
KR (1) KR101344037B1 (ko)
CN (1) CN103502723B (ko)
WO (1) WO2013058552A1 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101532352B1 (ko) * 2013-10-30 2015-06-29 주식회사 인피테크 노광용 led 광원 장치 및 노광용 led 광원장치 관리시스템
KR101761279B1 (ko) 2015-08-12 2017-08-04 주식회사 인피테크 대면적 패턴 노광용 led어레이광원모듈 및 그 제어장치
US10234769B2 (en) 2017-05-22 2019-03-19 Cymer, Llc Monitoring system for an optical lithography system
JP6921150B2 (ja) * 2019-07-24 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス 追加露光装置およびパターン形成方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260684A (ja) * 1999-03-08 2000-09-22 Nikon Corp 露光装置、及び照明装置
JP2001135560A (ja) * 1999-11-04 2001-05-18 Nikon Corp 照明光学装置、該照明光学装置を備えた露光装置、および該露光装置を用いたマイクロデバイス製造方法
US7022960B2 (en) * 2002-02-12 2006-04-04 Konica Corporation Photographic film image reading apparatus with film density detection
JP2005353927A (ja) * 2004-06-14 2005-12-22 Dainippon Screen Mfg Co Ltd パターン描画装置
US6945674B2 (en) * 2002-07-16 2005-09-20 Ccs, Inc. Light irradiating unit
JP4119329B2 (ja) * 2002-07-16 2008-07-16 シーシーエス株式会社 光照射装置
WO2004077533A1 (ja) * 2003-02-28 2004-09-10 Kabushiki Kaisha Hayashi Soken 露光装置
JP2007194583A (ja) * 2005-12-21 2007-08-02 Ａｒｋ Ｔｅｃｈ株式会社 周辺露光用光源装置
DE102006009444A1 (de) * 2006-03-01 2007-09-13 Texmag Gmbh Vertriebsgesellschaft Gmbh Vorrichtung zur Emission von linienartigem Licht
JP2007292999A (ja) * 2006-04-25 2007-11-08 Y E Data Inc 露光装置の光源
CN201159832Y (zh) * 2008-02-27 2008-12-03 芯硕半导体（中国）有限公司 具有超高强度led光源的无掩膜直写光刻机
JP2010114054A (ja) 2008-11-05 2010-05-20 Tozai Denko Co Ltd 光源装置
JP5345443B2 (ja) * 2009-04-21 2013-11-20 株式会社日立ハイテクノロジーズ 露光装置、露光光照射方法、及び表示用パネル基板の製造方法
KR101073671B1 (ko) * 2009-11-26 2011-10-14 (주)와이티에스 노광용 ｌｅｄ 램프 및 이를 이용한 노광장치

Also Published As

Publication number Publication date
KR20130042766A (ko) 2013-04-29
CN103502723A (zh) 2014-01-08
KR101344037B1 (ko) 2013-12-24
WO2013058552A1 (ko) 2013-04-25
CN103502723B (zh) 2016-01-06
JP2014519053A (ja) 2014-08-07

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