JP5845542B2 - LED light source module for exposure, LED light source device for exposure, and LED light source device management system for exposure - Google Patents
LED light source module for exposure, LED light source device for exposure, and LED light source device management system for exposure Download PDFInfo
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
- G02B6/0006—Coupling light into the fibre
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
- G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre
Description
本発明は、半導体ウエハ又はディスプレイパネルの露光用光源装置に関する。特に、半導体ウエハ、ディスプレイパネル等、多様な大きさと種類の露光対象物及び多様な性質のフォトレジスト（Ｐｈｏｔｏ ｒｅｓｉｓｔ、ＰＲ）を一つの光源で露光することができるように、ＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）を光源とする光源ユニットを多数個含む単一光源モジュールを提供し、これを効率的に制御及び管理することができる装置及び管理システムを提供することにより、露光光源の強度を細密かつ簡便に調節して、露光対象物を正確かつ早く露光することができ、障害に対する迅速かつ簡便な処理が可能な露光用ＬＥＤ光源モジュール、露光用ＬＥＤ光源装置、及び露光用ＬＥＤ光源装置管理システムに関する。 The present invention relates to a light source device for exposure of a semiconductor wafer or a display panel. In particular, LEDs (Light Emitting Diodes) such as semiconductor wafers and display panels can be exposed to various sizes and types of exposure objects and various properties of photoresist (Photo resist, PR) with a single light source. By providing a single light source module that includes a large number of light source units each having a light source, and an apparatus and management system that can efficiently control and manage the light source module, the intensity of the exposure light source can be precisely and easily adjusted. The present invention relates to an exposure LED light source module, an exposure LED light source device, and an exposure LED light source device management system that can expose an exposure target accurately and quickly and can perform a quick and simple process for an obstacle.
半導体（Ｓｅｍｉｃｏｎｄｕｃｔｏｒ）に使用されるウエハ（Ｗａｆｅｒ）及びＰＤＰ（Ｐｌａｓｍａ Ｄｉｓｐｌａｙ Ｐａｎｅｌ）、ＬＣＤ（ｌｉｑｕｉｄ Ｃｒｙｓｔａｌ Ｄｉｓｐｌａｙ）等の平板ディスプレイ装置（Ｆｌａｔ ｐａｎｅｌ Ｄｉｓｐｌａｙ：ＦＰＤ）に使用される基板の製造工程において、ウエハ及び基板の縁にコーティングされたＰＲを選択的に除去する露光作業は、ウエハ及び基板等の露光対象物をハンドリングするために縁にコーティングされたＰＲを除去する前処理工程と、ＰＲを選択的に除去して微細パターンを形成するフォトリソグラフィ工程等がある。 In a manufacturing process of a wafer used for a semiconductor (Semiconductor) and a substrate used for a flat panel display (FPD) such as a PDP (Plasma Display Panel), LCD (Liquid Crystal Display), etc., The exposure operation for selectively removing the PR coated on the edge of the substrate includes a pre-processing step for removing the PR coated on the edge in order to handle an object to be exposed such as a wafer and a substrate, and a selective PR. There is a photolithography process or the like for removing and forming a fine pattern.
このようなウエハや基板の露光のための光源には、超高圧水銀ランプ、ハロゲンランプをはじめとして最近はＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）等が使用されている。 As a light source for exposure of such a wafer or substrate, an LED (Light Emitting Diode) or the like has recently been used such as an ultra-high pressure mercury lamp and a halogen lamp.
このうち、超高圧水銀ランプ、ハロゲンランプ等の従来の露光用光源は、高圧のガスを充填し、高電圧の陽極と陰極を供給して起きるアーク放電によって露光用の光を発生させる。 Among these, conventional exposure light sources such as an ultra-high pressure mercury lamp and a halogen lamp are filled with a high-pressure gas and generate exposure light by arc discharge generated by supplying a high voltage anode and cathode.
ウエハ及び基板の縁を露光するためには、必要なだけの一定の幅を正確に露光するための均一なプロファイルを有する光が露光領域に提供されなければならず、同様に、微細パターンを形成するためには、均一なプロファイルと共に十分な強度を有する光が最小限の時間提供されなければならない。 In order to expose the edge of the wafer and the substrate, light having a uniform profile to accurately expose a constant width as necessary must be provided to the exposed area, as well as form a fine pattern In order to do so, light with sufficient intensity along with a uniform profile must be provided for a minimum amount of time.
しかし超高圧水銀ランプ、ハロゲンランプ等のような従来の光源は、製造工程の特性上、２４時間持続的にオン状態を維持しなければならないのに、ランプの寿命が短いため頻繁に定期的に交換しなければならない問題点がある。特に、このようなランプの交換は、生産ラインを停止させた状態で約１時間程度が所要されるため、製品製造の収率を著しく低下させるようになる。 However, conventional light sources such as ultra-high pressure mercury lamps and halogen lamps have to be kept on continuously for 24 hours due to the characteristics of the manufacturing process. There are problems that must be exchanged. In particular, such replacement of the lamp requires about one hour with the production line stopped, so that the yield of product manufacture is significantly reduced.
また、水銀ランプ等を放電させるためには高電圧を必要とし、ランプのオン／オフ時に一定の発光強度の紫外線を放出するようになるまで時間がかかる問題点があった。 In addition, a high voltage is required to discharge a mercury lamp or the like, and there is a problem that it takes time until ultraviolet rays having a constant light emission intensity are emitted when the lamp is turned on / off.
また、水銀ランプは大きくて重いため、光源装置を露光のための位置から離隔した位置に配置しなければならず、これによって露光対象物が位置した露光位置までランプによる紫外線を集光して誘導するための光ケーブル等の多様な付属が必要なので費用が高価にならざるを得ない問題点もある。 In addition, since the mercury lamp is large and heavy, the light source device must be arranged at a position separated from the position for exposure, thereby condensing and guiding the ultraviolet rays from the lamp to the exposure position where the exposure object is located. Since various attachments such as an optical cable are necessary, there is a problem that the cost must be high.
さらに、ランプに使用される水銀が人体に有害な物質であるオゾン（Ｏ３）を発生させて製造ラインの作業環境を悪化させ、ランプが高温高圧状態で稼動するため、より高い爆発のおそれが常にあり、寿命が尽きた水銀ランプの交換及び廃棄の際には、水銀のような環境汚染物質に対する処理が難しいという問題点も誘発される。 In addition, mercury used in the lamp generates ozone (O3), a substance harmful to the human body, deteriorating the working environment of the production line, and the lamp operates at high temperature and high pressure. In addition, when replacing or disposing of a mercury lamp that has reached the end of its life, it is also difficult to treat environmental pollutants such as mercury.
したがって、最近はＬＥＤを光源として利用した露光装置が開発されているが、大韓民国登録特許第１０−０９６００８３号（２０１０年５月１９日登録）及び公開特許第１０−２０１１−００５８５０１号（２０１１年６月１日公開）等に、露光用ＬＥＤ及びこれを利用した露光用光源装置についての技術が開示されている。 Therefore, although an exposure apparatus using an LED as a light source has been developed recently, Korean Patent No. 10-0960083 (registered on May 19, 2010) and Published Patent No. 10-2011-0058501 (June 2011) (Published on Monday, January 1) and the like disclose a technique for an exposure LED and an exposure light source device using the same.
先行技術によれば、従来の水銀ランプ等を利用した技術に比べて、露光用紫外線ランプの寿命を向上させることにより、露光用紫外線ランプの交換に伴う所要費用を節減し、露光用紫外線ランプの交換時に工程ラインを一定時間止めなければならない等の損失を防止することができるようにＬＥＤを光源として使用している。 According to the prior art, compared with the technology using a conventional mercury lamp or the like, the life of the ultraviolet ray lamp for exposure is improved, thereby reducing the necessary costs associated with the replacement of the ultraviolet ray lamp for exposure. The LED is used as a light source so as to prevent loss such as having to stop the process line for a certain time at the time of replacement.
しかし、このような最近のＬＥＤを光源とする露光用光源装置は、半導体ウエハのエッジ部を露光する場合と、ディスプレイ用基板の縁及び微細パターンを露光するにおいて、供給されるべき光の強度が互いに異なり、要求される波長が使用されたＰＲによって多様であるため、露光対象物とＰＲに応じて別個の光源装置を使用しなければならない不便さがある。 However, in such an exposure light source device using a recent LED as a light source, the intensity of light to be supplied in the case where the edge portion of the semiconductor wafer is exposed and the edge and the fine pattern of the display substrate are exposed. Since the required wavelengths are different from each other depending on the PR used, there is inconvenience that a separate light source device must be used according to the exposure object and the PR.
また、前述の先行技術のうちの一部では、ＰＣＢ基板にＬＥＤ素子を配列し、ＬＥＤから発生する不安定な光源を均一に変化させるためにフライアイレンズを使用しているが、このように、アレイ形態のＬＥＤ素子群によって発生する光源は、それぞれのＬＥＤ素子の発生する光が相互の間に干渉を起こしてプロファイルが均一でない光を発生させる問題点がある。 Further, in some of the above-mentioned prior arts, LED elements are arranged on a PCB substrate, and fly-eye lenses are used to uniformly change unstable light sources generated from the LEDs. The light source generated by the LED element group in the array form has a problem in that light generated by each LED element causes interference between the light sources to generate light having a non-uniform profile.
したがって、前述のように、従来の水銀ランプ等を利用した露光用光源装置の問題点を解決し、最近のＬＥＤを光源として利用した露光用光源装置の問題点を改善するために本発明を創案することになった。 Therefore, as described above, the present invention was devised to solve the problems of the conventional exposure light source apparatus using a mercury lamp or the like and to improve the problems of the recent exposure light source apparatus using an LED as a light source. Decided to do.
このための本発明の目的は、半導体ウエハ、ディスプレイパネル等の多様な大きさと種類の露光対象物、及び多様な性質のＰＲを一つの光源で露光することができる露光用ＬＥＤ光源モジュールを提供することにある。 Accordingly, an object of the present invention is to provide an exposure LED light source module that can expose various sizes and types of exposure objects such as semiconductor wafers and display panels, and various types of PR with a single light source. There is.
また、本発明の他の目的は、半導体ウエハ、ディスプレイパネル等の多様な大きさと種類の露光対象物、及び多様な性質のＰＲを一つの光源で露光することができるように、ＬＥＤを光源とする光源ユニットを多数個含む単一光源モジュールを効率的に制御して露光光源の強度を細密かつ簡便に調節することにより、露光対象物を正確かつ早く露光することができる露光用ＬＥＤ光源装置を提供することにある。 Another object of the present invention is to use an LED as a light source so that exposure objects of various sizes and types, such as semiconductor wafers and display panels, and PRs of various properties can be exposed with one light source. An exposure LED light source device capable of accurately and quickly exposing an exposure object by efficiently controlling a single light source module including a large number of light source units to adjust the intensity of the exposure light source in a precise and simple manner It is to provide.
また、本発明のまた他の目的は、ウエハ、ディスプレイパネル等の多様な大きさと種類の露光対象物、及び多様な性質のＰＲを一つの光源で露光することができるように、ＬＥＤを光源とする光源ユニットを多数個含む単一光源モジュールを効率的に制御する露光用ＬＥＤ光源装置を遠隔で統合的に制御及び管理し、異常発生の際に迅速かつ簡便に処理することができる露光用ＬＥＤ光源装置管理システムを提供することにある。 Another object of the present invention is to use LEDs as a light source so that exposure objects of various sizes and types, such as wafers and display panels, and PRs of various properties can be exposed with one light source. LED light source device for exposure that efficiently controls a single light source module including a large number of light source units to be remotely integrated and controlled, and can be processed quickly and easily when an abnormality occurs It is to provide a light source device management system.
上述した課題を達成するための本発明による露光用ＬＥＤ光源モジュールは、供給電流に応じて強度が制御された光を発生させる一つ以上のＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）を含む一つ以上の露光用ＬＥＤ光源ユニットと、前記ＬＥＤから発生する光によって露光される露光領域の模様を決定する端面を有し、前記ＬＥＤ光源ユニットから放射される光を統合し、前記統合された光のプロファイルを均一に整列して前記端面の形態で放出するロッドレンズ（Ｒｏｄ ｌｅｎｓ）とを含むことを特徴とする。 An LED light source module for exposure according to the present invention for achieving the above-described problem is for one or more exposures including at least one LED (Light Emitting Diode) that generates light whose intensity is controlled according to a supply current. An LED light source unit and an end face that determines a pattern of an exposure area exposed by light generated from the LED, and integrates the light emitted from the LED light source unit to make the integrated light profile uniform A rod lens that is aligned and emitted in the form of the end face.
この際、本発明による露光用ＬＥＤ光源モジュールの前記露光用ＬＥＤ光源ユニットは、前記一つ以上のＬＥＤ光源ユニットから放出される光をそれぞれ前記ロッドレンズに伝達する光ファイバをさらに含むことを特徴とする。 At this time, the LED light source unit for exposure of the LED light source module for exposure according to the present invention further includes an optical fiber that transmits light emitted from the one or more LED light source units to the rod lens, respectively. To do.
また、本発明による露光用ＬＥＤ光源モジュールの前記露光用ＬＥＤ光源ユニットは、前記ロッドレンズから放出される光を受ける受光レンズと、前記受光レンズで受けた光を前記露光領域に集める集光レンズとを収容して、前記ロッドレンズから放出される光が前記露光領域に到達するようにガイドするガイドレンズ系をさらに含むことを特徴とする。 The exposure LED light source unit of the exposure LED light source module according to the present invention includes a light receiving lens that receives light emitted from the rod lens, and a condenser lens that collects light received by the light receiving lens in the exposure region. And a guide lens system for guiding the light emitted from the rod lens to reach the exposure area.
また、本発明による露光用ＬＥＤ光源モジュールの前記露光用ＬＥＤ光源ユニットは、前記ＬＥＤと、前記ＬＥＤで発生した光の転写パターンを決定するスリットが形成されたマスクを収容し、前記ＬＥＤで発生した熱を放熱する複数の放熱ピンを外周面に形成した鏡筒と、前記ＬＥＤと前記マスクの間に位置して、前記ＬＥＤで発生した光を集光する複数のレンズで構成される集光光学系とをさらに含むことを特徴とする。 Further, the LED light source unit for exposure of the LED light source module for exposure according to the present invention accommodates the LED and a mask in which a slit for determining a transfer pattern of light generated by the LED is formed, and is generated by the LED. Condensing optics comprising a lens barrel having a plurality of radiating pins for radiating heat on the outer peripheral surface, and a plurality of lenses that are positioned between the LED and the mask and condense light generated by the LED And a system.
また、本発明による露光用ＬＥＤ光源モジュールは、前記一つ以上の露光用ＬＥＤ光源ユニットと、前記ロッドレンズ及び前記ガイドレンズ系とがそれぞれ分離及び組立てが可能なことを特徴とする。 The exposure LED light source module according to the present invention is characterized in that the one or more exposure LED light source units, the rod lens and the guide lens system can be separated and assembled.
また、本発明による露光用ＬＥＤ光源モジュールの前記ガイドレンズ系は、前記受光レンズと前記集光レンズの距離を調節して前記露光領域の大きさ及び光密度を変更することを特徴とする。 Further, the guide lens system of the LED light source module for exposure according to the present invention is characterized in that the size of the exposure area and the light density are changed by adjusting the distance between the light receiving lens and the condenser lens.
この際、本発明による露光用ＬＥＤ光源モジュールの前記ガイドレンズ系は、前記集光レンズで集光された光の強度を調節する絞りをさらに備えることを特徴とする。 At this time, the guide lens system of the LED light source module for exposure according to the present invention further includes a diaphragm for adjusting the intensity of the light condensed by the condenser lens.
また、上述した課題を達成するための本発明による露光用ＬＥＤ光源装置は、供給電流に応じて強度が制御された光を発生させる一つ以上のＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）を含む一つ以上のＬＥＤ光源ユニットと、前記ＬＥＤから発生する光によって露光される露光領域の模様を決定する端面を有し、前記ＬＥＤ光源ユニットから放射される光を統合し、前記統合された光のプロファイルを均一に整列して前記端面の形態で放出するロッドレンズ（Ｒｏｄ ｌｅｎｓ）とを含むＬＥＤ光源モジュールと、前記ＬＥＤ光源モジュールの前記ＬＥＤ光源ユニットに供給される電流の大きさをそれぞれ制御して前記露光領域に到達する光の強度を決定し、前記電流の供給及び中断を制御する制御部と、前記制御部の制御によって前記ＬＥＤ光源ユニットに電流を供給する電源供給部と、前記ＬＥＤ光源モジュールのそれぞれの動作状態及び供給電流値を使用者に表示する表示部と、前記ＬＥＤ光源ユニットに供給される電流の大きさを制御するように前記制御部に使用者の外部命令を入力するキー操作部とを含むことを特徴とする。 In addition, an LED light source device for exposure according to the present invention for achieving the above-described problems includes one or more LEDs (Light Emitting Diodes) that generate light whose intensity is controlled according to a supply current. An LED light source unit and an end face that determines a pattern of an exposure area exposed by light generated from the LED, and integrates the light emitted from the LED light source unit to make the integrated light profile uniform An LED light source module including a rod lens that is aligned and emitted in the form of the end surface, and a magnitude of a current supplied to the LED light source unit of the LED light source module are respectively controlled in the exposure area. A control unit that determines the intensity of the light that reaches and controls the supply and interruption of the current, and the control of the control unit. A power supply unit that supplies current to the LED light source unit, a display unit that displays each operating state and supply current value of the LED light source module to a user, and a magnitude of current supplied to the LED light source unit. And a key operation unit for inputting a user's external command to the control unit so as to control.
この際、本発明による露光用ＬＥＤ光源装置は、前記ＬＥＤ光源モジュールそれぞれの動作状態及び供給電流値を外部の運用端末に伝送し、前記運用端末を利用した管理者の操作命令を受信するための第１通信部をさらに含むことを特徴とする。 At this time, the LED light source device for exposure according to the present invention transmits an operation state and a supply current value of each of the LED light source modules to an external operation terminal, and receives an operation command of an administrator using the operation terminal. A first communication unit is further included.
また、本発明による露光用ＬＥＤ光源装置は、露光装備の状況に応じて前記ＬＥＤ光源ユニットに供給される電流を供給及び中断するように前記露光装備から装備状態信号を受信する第２通信部をさらに備えることを特徴とする。 The exposure LED light source device according to the present invention further includes a second communication unit that receives an equipment state signal from the exposure equipment so as to supply and interrupt the current supplied to the LED light source unit according to the situation of the exposure equipment. It is further provided with the feature.
また、上述した課題を達成するための本発明による露光用ＬＥＤ光源装置管理システムは、供給電流に応じて強度が制御された光を発生させる一つ以上のＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）を含む一つ以上のＬＥＤ光源ユニットと、前記ＬＥＤから発生する光によって露光される露光領域の模様を決定する端面を有し、前記ＬＥＤ光源ユニットから放射される光を統合し、前記統合された光のプロファイルを均一に整列して前記端面の形態で放出するロッドレンズ（Ｒｏｄ ｌｅｎｓ）とを含むＬＥＤ光源モジュールと、前記ＬＥＤ光源モジュールの前記ＬＥＤ光源ユニットに供給される電流の大きさをそれぞれ制御して前記露光領域に到達する光の強度を決定し、前記電流の供給及び中断を制御する制御部と、前記制御部の制御によって前記ＬＥＤ光源ユニットに電流を供給する電源供給部と、前記ＬＥＤ光源モジュールのそれぞれの動作状態及び供給電流値を使用者に表示する表示部と、前記ＬＥＤ光源ユニットに供給される電流の大きさを制御するように前記制御部に使用者の外部命令を入力するキー操作部、及び前記ＬＥＤ光源モジュールそれぞれの動作状態及び供給電流値を外部に伝送する第１通信部を含む露光用ＬＥＤ光源装置と、多数の露光装備にそれぞれ設置される前記露光用ＬＥＤ光源装置を有／無線通信網を介して遠隔で統合制御及び管理する中央管理サーバとを含むことを特徴とする。 In addition, an LED light source device management system for exposure according to the present invention for achieving the above-described problem includes one or more LEDs (Light Emitting Diodes) that generate light whose intensity is controlled according to a supply current. The LED light source unit described above has an end face that determines a pattern of an exposure area exposed by light generated from the LED, and the light emitted from the LED light source unit is integrated, and the integrated light profile is obtained. The LED light source module including a rod lens (Rod lens) that is uniformly aligned and emitted in the form of the end surface, and the exposure is performed by controlling the magnitude of the current supplied to the LED light source unit of the LED light source module. A control unit that determines the intensity of light reaching the region and controls supply and interruption of the current; and A power supply unit that supplies current to the LED light source unit by control, a display unit that displays each operating state and supply current value of the LED light source module to a user, and a magnitude of current supplied to the LED light source unit LED light source for exposure including a key operation unit for inputting a user's external command to the control unit so as to control the operation, and a first communication unit for transmitting the operation state and supply current value of each of the LED light source modules to the outside And a central management server for remotely controlling and managing the LED light source device for exposure, which is installed in each of a plurality of exposure equipments, via a wired / wireless communication network.
この際、本発明による露光用ＬＥＤ光源装置管理システムは、前記露光用ＬＥＤ光源装置の前記第１通信部から伝送された前記ＬＥＤ光源モジュールそれぞれの動作状態及び供給電流値を表示する表示手段と、前記ＬＥＤ光源モジュールそれぞれの動作状態に応じて前記ＬＥＤ光源モジュールそれぞれの供給電流値を管理者が設定できるように制御データ及び制御命令の入力を受ける入力手段と、前記入力手段から入力された制御データ及び制御命令に従って前記露光用ＬＥＤ光源装置を離隔した位置で制御する制御手段を備え、前記露光用ＬＥＤ光源装置に１：１で接続され前記有／無線通信網を介して前記中央管理サーバに前記露光用ＬＥＤ光源装置を遠隔接続させる運用端末とをさらに含むことを特徴とする。 At this time, the LED light source device management system for exposure according to the present invention includes a display means for displaying an operation state and a supply current value of each of the LED light source modules transmitted from the first communication unit of the LED light source device for exposure, Input means for receiving an input of control data and a control command so that an administrator can set a supply current value of each of the LED light source modules according to an operation state of each of the LED light source modules, and control data input from the input means And a control means for controlling the LED light source device for exposure at a separated position in accordance with a control command, and connected to the LED light source device for exposure at a ratio of 1: 1 to the central management server via the wired / wireless communication network. And an operation terminal for remotely connecting the LED light source device for exposure.
上述したように、本発明は、従来の水銀ランプより寿命が長く、大きさが小さくて軽く、低価で、使用が簡便な長所がある。 As described above, the present invention has advantages that it has a longer life than a conventional mercury lamp, a small size and a light weight, a low price, and is easy to use.
また、本発明は、ＬＥＤ光源ユニットが分離及び組立てが可能であるため、光源の迅速な交換が可能で、交換が必要な部分だけ交換することにより所要費用を節減する効果がある。 In addition, since the LED light source unit can be separated and assembled, the present invention can quickly replace the light source, and has an effect of reducing the required cost by exchanging only the part that needs to be replaced.
これにより、本発明は、交換周期が長く、必要な際に迅速な交換が可能なだけでなく、多数のＬＥＤ光源ユニットを単一ＬＥＤ光源にモジュール化することにより、工程ラインを止めなくとも障害処理が可能な長所があり、工程ラインを停止させることに伴う損失を防止することができる。 As a result, the present invention has a long replacement period and can be replaced quickly when necessary, and it is possible to troubleshoot without stopping the process line by modularizing a large number of LED light source units into a single LED light source. There is an advantage that processing is possible, and loss due to stopping the process line can be prevented.
また、本発明は、半導体ウエハ、ディスプレイパネル等の多様な大きさと種類の露光対象物、及び多様な性質のＰＲを単一光源モジュールで露光することができる長所がある。 Further, the present invention has an advantage that a single light source module can expose various sizes and types of exposure objects such as semiconductor wafers and display panels, and various properties of PR.
また、本発明は、ＬＥＤ光源の露光強度を細密かつ簡便に調節することができるため、露光対象物を正確かつ早く露光することができる長所がある。 In addition, the present invention can finely and easily adjust the exposure intensity of the LED light source, and therefore has an advantage that the exposure object can be exposed accurately and quickly.
また、本発明は、露光用ＬＥＤ光源装置を遠隔で統合的に制御及び管理することにより、障害に対する迅速かつ簡便な処理が可能な長所がある。 In addition, the present invention has an advantage that a rapid and simple process for a failure can be performed by remotely controlling and managing the LED light source device for exposure in an integrated manner.
以下、本発明の望ましい実施例の詳細な説明を、添付された図面を参照して説明する。図面のうち同一な構成は、可能な限りどの図でも同一の符号で示していることに留意しなければならない。下記の説明で具体的な特定事項が示されているが、これは本発明のより全般的な理解を助けるために提供されたものである。そして本発明を説明するにおいて、関連する公知技能あるいは構成についての具体的な説明が、本発明の要旨を不要に不明瞭にし得ると判断される場合、その詳細な説明は省略する。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be noted that the same components in the drawings are denoted by the same reference numerals in all the drawings whenever possible. Specific details are set forth in the following description, which is provided to aid in a more general understanding of the invention. In describing the present invention, if it is determined that a specific description of a related known skill or configuration can unnecessarily obscure the gist of the present invention, a detailed description thereof will be omitted.
後述の詳細な説明では、上述した技術的課題をなすための本発明において代表的な実施例を提示する。また、本発明の説明の便宜のために、実施例に使用されるＬＥＤの個数、ＬＥＤの駆動に使用される電圧、電流及び周波数を一定範囲内に限定して説明するが、このような個数及び数値の限定が本発明の範囲を限定するものではなく、類似の技術的背景を有する場合、該当回路の状況に適切に変形して適用可能なことは勿論である。 In the detailed description to be described later, typical examples are presented in the present invention for achieving the above-described technical problems. For convenience of explanation of the present invention, the number of LEDs used in the embodiment, the voltage, current, and frequency used for driving the LEDs will be limited to a certain range. Of course, the limitation of the numerical values does not limit the scope of the present invention, and if it has a similar technical background, it can be applied by appropriately modifying the situation of the corresponding circuit.
図１は本発明による露光用ＬＥＤ光源装置管理システムのブロック構成図であり、まず図１を参照して本発明による露光用ＬＥＤ光源装置管理システムの全体構成について説明する。 FIG. 1 is a block diagram of an exposure LED light source device management system according to the present invention. First, an overall configuration of an exposure LED light source device management system according to the present invention will be described with reference to FIG.
図１に示されたように、本発明による露光用ＬＥＤ光源装置管理システムは、露光対象物１０を露光する露光装備２０それぞれに設置されている、本発明による露光用ＬＥＤ光源モジュール１１０を含む露光用ＬＥＤ光源装置１００と、この露光用ＬＥＤ光源装置１００を個別的に制御、管理及び運用する運用端末２００及び、有／無線ネットワーク３０を介して遠隔地で露光用ＬＥＤ光源装置１００を全体的に管理する中央管理サーバ３００とを含む。 As shown in FIG. 1, the LED light source device management system for exposure according to the present invention includes an exposure LED light source module 110 according to the present invention installed in each of the exposure equipment 20 that exposes an exposure object 10. LED light source apparatus 100, operation terminal 200 that individually controls, manages, and operates this exposure LED light source apparatus 100, and exposure LED light source apparatus 100 at a remote location via wired / wireless network 30 as a whole And a central management server 300 for management.
前記露光対象物１０は、多様な大きさと種類の半導体ウエハ及びディスプレイパネル等がなることができる。前記露光対象物１０は、フォトレジストリ工程によってＰＲ膜が塗布された半導体ウエハ又はディスプレイパネルである。 The exposure object 10 can be a variety of sizes and types of semiconductor wafers, display panels, and the like. The exposure object 10 is a semiconductor wafer or a display panel coated with a PR film by a photoregistry process.
前記露光装備２０は、前記露光対象物１０の表面に塗布されたＡｒＦ ＰＲ、ＤＵＶ ＰＲ、Ｉ−Ｌｉｎｅ ＰＲ等の多様なＰＲを除去するのに使用される露光機であって、下記で図２を参照して詳しく説明する本発明による露光用ＬＥＤ光源装置１００がそれぞれ配置されて露光対象物１０を露光する。 The exposure equipment 20 is an exposure machine used to remove various PRs such as ArF PR, DUV PR, and I-Line PR applied to the surface of the exposure object 10, which will be described below with reference to FIG. The LED light source device 100 for exposure according to the present invention, which will be described in detail with reference to FIG.
前記運用端末２００は、ＰＣ形態のコンピューター端末又は現場管理者の携帯型モバイル端末がなることができ、露光用ＬＥＤ光源装置１００にそれぞれ有無線連結される。 The operation terminal 200 can be a computer terminal in the form of a PC or a portable mobile terminal of a field manager, and is connected to the LED light source device 100 for exposure via a wire.
前記運用端末２００は、対応する露光用ＬＥＤ光源装置１００から伝送された自身のＬＥＤ光源モジュール１１０それぞれの動作状態及び供給電流値を表示するモニター等の表示手段を備える。また、運用端末２００は、対応するＬＥＤ光源装置１００のＬＥＤ光源モジュール１１０それぞれの動作状態に応じてＬＥＤ光源モジュール１１０それぞれの供給電流値を管理者が設定することができるように、制御データ及び制御命令の入力を受けるキーボード等のような入力手段を備える。これによって、運用端末２００は制御手段を備えて、入力手段から入力された制御データ及び制御命令に従って露光用ＬＥＤ光源装置１００を離隔した位置で制御する。前記運用端末２００は、本発明による露光用ＬＥＤ光源装置１００それぞれに１：１で接続され、前記有／無線ネットワーク３０を介して中央管理サーバ３００に対応する露光用ＬＥＤ光源装置１００を遠隔接続させる。一方、前記運用端末２００は選択的に使用されることができ、運用端末２００が使用されない場合には、前記露光用ＬＥＤ光源装置１００が直接有／無線ネットワーク３０を介して前記中央管理サーバ３００に接続する。 The operation terminal 200 includes display means such as a monitor for displaying the operation state and supply current value of each of the LED light source modules 110 transmitted from the corresponding LED light source device 100 for exposure. In addition, the operation terminal 200 controls the control data and the control so that the administrator can set the supply current value of each LED light source module 110 according to the operation state of each LED light source module 110 of the corresponding LED light source device 100. An input means such as a keyboard for receiving an instruction is provided. As a result, the operation terminal 200 includes a control unit, and controls the exposure LED light source device 100 at a separated position in accordance with the control data and the control command input from the input unit. The operation terminal 200 is connected 1: 1 to each of the LED light source devices for exposure 100 according to the present invention, and remotely connects the LED light source device for exposure 100 corresponding to the central management server 300 via the wired / wireless network 30. . On the other hand, the operation terminal 200 can be selectively used. When the operation terminal 200 is not used, the exposure LED light source device 100 is directly connected to the central management server 300 via the wired / wireless network 30. Connecting.
前記中央管理サーバ３００は、有／無線ネットワーク３０を介して接続された運用端末２００及び露光用ＬＥＤ光源装置１００を統合的に制御及び管理して、管理者が多数の露光用ＬＥＤ光源装置１００を遠隔地からでも総合的に状態を把握して障害を管理できるように使用者インターフェースを提供する。 The central management server 300 controls and manages the operation terminal 200 and the exposure LED light source device 100 connected via the wired / wireless network 30 in an integrated manner. A user interface is provided so that the user can comprehensively understand the condition and manage faults even from a remote location.
本発明による前記露光用ＬＥＤ光源装置１００の詳細な構成を図２に示した。図２は、本発明による露光用ＬＥＤ光源装置のブロック構成図で、図示されたように、装置の構成部を全体的に制御する制御部１２０と、前記制御部１２０の制御によって露光対象物１０を露光する露光用ＬＥＤ光源モジュール１１０と、前記制御部１２０の制御によって前記露光用ＬＥＤ光源モジュール１１０に指定された電流を供給する電源供給部１３０と、前記ＬＥＤ光源モジュール１１０のそれぞれの動作状態及び供給電流値を使用者に表示する表示部１４０と、前記ＬＥＤ光源モジュール１１０に供給される電流の大きさを制御するように前記制御部１２０に使用者の外部命令を入力するキー操作部１５０と、前記ＬＥＤ光源モジュール１１０それぞれの動作状態及び供給電流値を外部の運用端末２００に伝送し、前記運用端末２００を利用した管理者の操作命令を受信するための第１通信部１６０、及び露光装備２０の状況に応じて前記ＬＥＤ光源モジュール１１０に供給される電流を供給及び中断するように前記露光装備２０から装備状態信号を受信する第２通信部１７０とを含む。 The detailed structure of the LED light source device 100 for exposure according to the present invention is shown in FIG. FIG. 2 is a block diagram of an LED light source device for exposure according to the present invention. As shown in the figure, a control unit 120 that controls the overall components of the apparatus, and an exposure object 10 under the control of the control unit 120. The LED light source module 110 for exposure, the power supply unit 130 for supplying the current specified to the LED light source module 110 for exposure under the control of the control unit 120, and the operation states of the LED light source module 110, A display unit 140 for displaying a supplied current value to the user, a key operation unit 150 for inputting a user's external command to the control unit 120 so as to control the magnitude of the current supplied to the LED light source module 110; The operation state and the supply current value of each of the LED light source modules 110 are transmitted to the external operation terminal 200, and the operation terminal 2 The first communication unit 160 for receiving the operation command of the administrator using 0, and the exposure equipment 20 so as to supply and interrupt the current supplied to the LED light source module 110 according to the situation of the exposure equipment 20 And a second communication unit 170 that receives the equipment state signal from the second communication unit 170.
前記露光用ＬＥＤ光源モジュール１１０は、電源供給部１３０の供給電流に応じて強度が制御された光を発生させる一つ以上のＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）を含む一つ以上のＬＥＤ光源ユニットを含む。前記露光用ＬＥＤ光源モジュール１１０については、下記で図３を参照して詳しく説明する。 The LED light source module 110 for exposure includes one or more LED light source units including one or more LEDs (Light Emitting Diode) that generate light whose intensity is controlled according to a supply current of the power supply unit 130. The LED light source module 110 for exposure will be described in detail below with reference to FIG.
前記制御部１２０は、前記露光用ＬＥＤ光源モジュール１１０のＬＥＤ光源ユニット１１１に供給される電流の大きさをそれぞれ制御して、露光対象物１０の露光領域に到達する光の強度を決定し、前記電源供給部１３０を制御して電流の供給及び中断を制御する。 The controller 120 controls the magnitude of the current supplied to the LED light source unit 111 of the exposure LED light source module 110 to determine the intensity of light reaching the exposure area of the exposure object 10, and The power supply unit 130 is controlled to control current supply and interruption.
制御部１２０は、露光装備２０から入力される露光用ＬＥＤ光源モジュール１１０のオン／オフ制御命令又は露光対象物１０に照射される光源の強度測定結果を受信して、露光用ＬＥＤ光源モジュール１１０をオン／オフしたり強度を調節するためのＰＷＭ信号を生成して出力する。 The control unit 120 receives the on / off control command for the LED light source module 110 for exposure input from the exposure equipment 20 or the measurement result of the intensity of the light source irradiated to the exposure object 10, and sets the LED light source module 110 for exposure. Generates and outputs a PWM signal for turning on / off or adjusting the intensity.
前記第１通信部１６０は、露光装備２０から印加される露光用ＬＥＤ光源モジュール１１０の制御命令又は測定結果を受信するために露光設備２０と通信するために備えられたもので、Ｄ−ｓｕｂ、Ｉｄｃ、Ｇｐｉｂ、Ｇｐｉｏポート等で具現されることができる。 The first communication unit 160 is provided to communicate with the exposure equipment 20 in order to receive a control command or measurement result of the LED light source module 110 for exposure applied from the exposure equipment 20, and includes a D-sub, It can be implemented with an Idc, Gpib, Gpio port or the like.
前記第２通信部１７０は、運営端末２００からの露光用ＬＥＤ光源モジュール１１０制御命令を受信し、露光用ＬＥＤ光源モジュール１１０の動作に関する各種情報を運営端末２００に伝送するためにＲＳ２３２、ＲＳ４８５ポート等で具現されることができ、伝送された情報及びデータは、運営端末２００に保存及び維持され、遠隔地の中央管理サーバ３００に伝送される。 The second communication unit 170 receives an exposure LED light source module 110 control command from the operation terminal 200, and transmits various information related to the operation of the exposure LED light source module 110 to the operation terminal 200, such as RS232 and RS485 ports. The transmitted information and data are stored and maintained in the operation terminal 200 and transmitted to the remote central management server 300.
前記キー操作部１５０は、一つ又は複数のキー又はタッチスクリーン等によってなり、露光用ＬＥＤ光源装置１００のオン／オフ及び露光用ＬＥＤ光源モジュール１１０の個別的なオン／オフと、発生する光の強度制御のための操作を行う。 The key operation unit 150 includes one or a plurality of keys, a touch screen, or the like, and turns on and off the exposure LED light source device 100 and turns on and off the exposure LED light source module 110 individually. Perform operations for strength control.
前記表示部１４０は、前記キー操作部１５０によってなされた使用者の操作、露光用ＬＥＤ光源装置１００の各構成部の動作状況、露光装備２０からの制御命令等を視覚的に表示する。本発明の一実施例による前記表示部１４０は、ＬＣＤパネルだけではなく、緑色ＬＥＤ及び赤色ＬＥＤを含むことができ、いずれか一つ又は複数のＬＥＤのオン／オフ、持続的な発光及び点滅に対する制御情報を表示することができる。 The display unit 140 visually displays a user operation performed by the key operation unit 150, operation states of each component of the LED light source device 100 for exposure, control commands from the exposure equipment 20, and the like. The display unit 140 according to an exemplary embodiment of the present invention may include a green LED and a red LED as well as an LCD panel. Control information can be displayed.
図３は本発明による露光用ＬＥＤ光源モジュールのブロック構成図で、図４は図３の露光用ＬＥＤ光源モジュールの斜視図であり、図５は図４の露光用ＬＥＤ光源モジュールの分離斜視図である。また、図６のａないしｃは、図５の露光用ＬＥＤ光源モジュールの各分離部の断面図で、図７は図６のａの光源部の他の実施例を示した斜視図である。 3 is a block diagram of the LED light source module for exposure according to the present invention, FIG. 4 is a perspective view of the LED light source module for exposure of FIG. 3, and FIG. 5 is an exploded perspective view of the LED light source module for exposure of FIG. is there. FIGS. 6A to 6C are cross-sectional views of the separation portions of the LED light source module for exposure shown in FIG. 5, and FIG. 7 is a perspective view showing another embodiment of the light source portion shown in FIG.
以下図３ないし図７を参照すれば、まず図３及び図４に示されたように、本発明による露光用ＬＥＤ光源モジュール１１０は、その役割によって大きく光源部１１０ａ、レンズ部１１０ｂ、及びマスク部１１０ｃに区分することができ、図５に示されたように、分離及び結合が可能である。ここで、光ファイバ１１３は、ＬＥＤ光源ユニット１１１の変形によって省略可能であり、この場合ＬＥＤ光源ユニット１１１は、それぞれ個別的な多数のユニットで構成されず、必要な個数のＬＥＤのみがロッドレンズ１１５に直接連結されてＬＥＤで放出される光が直接ロッドレンズ１１５に入射する。 3 to 7, first, as shown in FIGS. 3 and 4, the LED light source module 110 for exposure according to the present invention is largely divided into a light source part 110 a, a lens part 110 b, and a mask part depending on its role. 110c, and can be separated and combined as shown in FIG. Here, the optical fiber 113 can be omitted by deformation of the LED light source unit 111. In this case, the LED light source unit 111 is not composed of a large number of individual units, and only a necessary number of LEDs are rod lenses 115. The light emitted directly from the LED and emitted from the LED directly enters the rod lens 115.
まず、図３に示されたように、本発明による露光用ＬＥＤ光源モジュール１１０を構成する光源部１１０ａは、多数の露光用ＬＥＤ光源ユニット１１１と、光源部ボディー１１２内で多数の露光用ＬＥＤ光源ユニット１１１それぞれから放出される光を一つに集める多数の光ファイバ１１３（Ｏｐｔｉｃａｌ Ｆｉｂｅｒ）を含む。レンズ部１１０ｂは、ロッドレンズ１１４（Ｒｏｄ Ｌｅｎｓ）を含み、マスク部１１０ｃは、下記で図６のｃを参照して説明するガイドレンズ系（Ｇｕｉｄｅ Ｌｅｎｓ）を構成する。図３に示した本発明による露光用ＬＥＤ光源モジュール１１０の結合及び分離斜視図を図４及び図５にそれぞれ示し、図６のａないしｃに露光用ＬＥＤ光源モジュール１１０の各分離部についての詳細な断面図を図示し、図７に図６のａに示した露光用ＬＥＤ光源モジュール１１０の光源部１１０ａについての他の実施例を示した。 First, as shown in FIG. 3, the light source unit 110 a constituting the exposure LED light source module 110 according to the present invention includes a plurality of exposure LED light source units 111 and a plurality of exposure LED light sources in the light source unit body 112. It includes a large number of optical fibers 113 (Optical Fiber) that collect light emitted from each of the units 111 together. The lens unit 110b includes a rod lens 114 (Rod Lens), and the mask unit 110c configures a guide lens system (Guide Lens) described below with reference to FIG. FIG. 4 and FIG. 5 show perspective views of coupling and separation of the LED light source module 110 for exposure according to the present invention shown in FIG. 3, respectively. FIGS. 6A to 6C show details of each separation part of the LED light source module 110 for exposure. FIG. 7 shows another embodiment of the light source unit 110a of the exposure LED light source module 110 shown in FIG. 6a.
本発明による露光用ＬＥＤ光源モジュール１１０の露光用ＬＥＤ光源ユニット１１１は、供給電流に応じて強度が制御された光を発生させる一つ以上のＬＥＤ（Ｌｉｇｈｔ Ｅｍｉｔｔｉｎｇ Ｄｉｏｄｅ）を含む。前記露光用ＬＥＤ光源ユニット１１１についての詳細な説明は、図８を参照して下記で詳しく説明する。 The exposure LED light source unit 111 of the exposure LED light source module 110 according to the present invention includes one or more LEDs (Light Emitting Diode) that generate light whose intensity is controlled according to a supply current. Details of the LED light source unit 111 for exposure will be described in detail below with reference to FIG.
まず図６のａを参照すれば、光源部１１０ａは多数の露光用ＬＥＤ光源ユニット１１１を上部に収容し、それぞれのユニットから放出される光を１ヶ所に集めるための光ファイバ１１３が光源部ボディー１１２に内蔵される。前記光源部１１０ａは、図７に示されたように、円形の光源部ボディー１１２で具現することもでき、多数の露光用ＬＥＤ光源ユニット１１１が円形に配置される。 First, referring to FIG. 6a, the light source unit 110a accommodates a number of LED light source units 111 for exposure at the top, and an optical fiber 113 for collecting light emitted from each unit in one place is a light source unit body. 112. As shown in FIG. 7, the light source unit 110a may be implemented by a circular light source unit body 112, and a plurality of exposure LED light source units 111 are arranged in a circular shape.
図６のｂを参照すれば、ロッドレンズ１１４は、前記露光用ＬＥＤ光源ユニット１１１のＬＥＤから発生する光によって露光される露光対象物１０の露光領域の模様を決定する端面を有し、前記ＬＥＤ光源ユニット１１１から放射される光を統合して前記統合された光のプロファイルを均一に整列して前記端面の形態で放出する。前記ロッドレンズ１１４は均質化ロッド（Ｈｏｍｏｇｅｎｉｚｉｎｇ ｒｏｄ）ともいい、端面が円形、三角形、四角形、六角形、両端の直径が互いに異なるテーパーとなった形態で多様な形態で使用され、光の全反射の原理を利用して中心が明るく周辺部が暗いＬＥＤ光源を均一にする。 Referring to FIG. 6 b, the rod lens 114 has an end face that determines a pattern of an exposure area of the exposure object 10 exposed by light generated from the LED of the exposure LED light source unit 111. The light emitted from the light source unit 111 is integrated, and the integrated light profile is uniformly aligned and emitted in the form of the end face. The rod lens 114 is also referred to as a homogenizing rod, and is used in various forms such as a circular shape, a triangular shape, a quadrangular shape, a hexagonal shape, and tapered shapes with different diameters at both ends. Utilizing the principle, the LED light source having a bright center and a dark periphery is made uniform.
すなわち、複数のＬＥＤから出る光を直接又は前記光ファイバ１１３を使用して、１ヶ所で発光するもののように製作し、ロッドレンズ１１４を介して結像するようになれば、ファイバーコアを露光領域に結像するようになる。上述したテーパーとなったロッドレンズは、入射される光の発散角度を減らす効果を得ることができ、四角と六角のロッドレンズは、角度を減らす効果はないが光を混ぜる役割をすることができる。 That is, if the light emitted from a plurality of LEDs is produced directly or by using the optical fiber 113 as if it emits light at one place, and imaged through the rod lens 114, the fiber core is exposed to the exposure region. To form an image. The tapered rod lens described above can obtain the effect of reducing the divergence angle of the incident light, and the square and hexagonal rod lenses do not have the effect of reducing the angle but can serve to mix light. .
前記光ファイバ１１３は、前記一つ以上のＬＥＤ光源ユニット１１１から放出される光をそれぞれ前記ロッドレンズ１１４に伝達する。光ファイバ１１３は、それぞれのＬＥＤから放出される光を前記ロッドレンズ１１４に集光させるために光ファイバの束を利用する。これによって、アレイ形態のＬＥＤで、ＬＥＤとＬＥＤの間に存在するからの空間によって集光が難しかった問題点を解決して、放出される光を均一な一つの光源に集光させることができる。 The optical fiber 113 transmits light emitted from the one or more LED light source units 111 to the rod lens 114, respectively. The optical fiber 113 uses a bundle of optical fibers to collect the light emitted from each LED on the rod lens 114. As a result, the LED in the array form can solve the problem that it is difficult to collect light due to the space between the LEDs, and the emitted light can be condensed into one uniform light source. .
前記ガイド部１１０ｃは、ロッドレンズ１１４の出射面を露光対象物１０の希望の露光領域に結像させるガイド機能を行うところ、ガイドレンズ系と称することができ、この役割はロッドレンズ１１４から均一に分布された光を希望の大きさで希望の位置に伝送する役割をすることになる。 The guide portion 110c performs a guide function of forming an image of the exit surface of the rod lens 114 in a desired exposure region of the exposure target 10, and can be referred to as a guide lens system. The distributed light is transmitted to a desired position in a desired size.
ガイドレンズ系は、レンズの収差特性及び光学的要因によって像の品質が決定するため、良質の像を得るために複数個の多様なレンズを使用して最適の結像条件を得るための設計がされ、図６のｃにその詳細な構造を示した。 Since the quality of an image is determined by the aberration characteristics of the lens and optical factors, the guide lens system is designed to obtain optimal imaging conditions using a plurality of various lenses in order to obtain a good image. The detailed structure is shown in FIG.
図６のｃを参照すれば、ガイド部１１０ｃは、ロッドレンズ１１４から放出される光を受ける受光レンズ１１５と、前記受光レンズ１１５で受けた光を露光領域に集める集光レンズ１１６とを収容して、ロッドレンズ１１４から放出される光が露光領域に到達するようにガイドする。ガイドレンズ系の大きさは、ロッドレンズ１１４の出射面の大きさと目標露光領域の大きさによって倍率が決まり、（ロッドレンズの大きさ／露光領域面積）で求められる。ガイド部１１０ｃは、前記受光レンズ１１５と集光レンズ１１６との距離を調節して露光領域の大きさ及び光密度を変更することもできる。 Referring to FIG. 6 c, the guide part 110 c accommodates a light receiving lens 115 that receives light emitted from the rod lens 114 and a condenser lens 116 that collects the light received by the light receiving lens 115 in an exposure region. Thus, the light emitted from the rod lens 114 is guided so as to reach the exposure region. The magnification of the guide lens system is determined by the size of the exit surface of the rod lens 114 and the size of the target exposure area, and is determined by (rod lens size / exposure area area). The guide part 110c can also change the size and light density of the exposure region by adjusting the distance between the light receiving lens 115 and the condenser lens 116.
また、ガイド部１１０ｃは、集光レンズ１１６から集光された光の量を調節する絞り１１７をさらに備えることができ、下部にスリット１１９を備えたマスク１１８を備えて最終的に露光領域に到達する光の転写パターンを決定することができる。 In addition, the guide part 110c can further include a diaphragm 117 that adjusts the amount of light collected from the condenser lens 116, and a mask 118 having a slit 119 in the lower part, and finally reaches the exposure region. The transfer pattern of light to be determined can be determined.
前記露光用ＬＥＤ光源ユニット１１１は、図３ないし図７に示されたように、本発明による露光用ＬＥＤ光源モジュール１１０に多数個備えられ、個別的に供給電流が制御されることにより、本発明による露光用ＬＥＤ光源モジュール１１０の出力を制御して３６５ｎｍ、４０５ｎｍ、４３０ｎｍ、４６０ｎｍ、４６５ｎｍ等の多様な波長帯域で反応する各種ＰＲを要求される深さに露光することができるようにする。これによって、本発明による露光用ＬＥＤ光源モジュール１１０は、単一モジュールを使用して交換なしに多様な大きさと形態を有する半導体ウエハ及びディスプレイパネルで要求される多様な出力を組み合わせることができるため、多様なＰＲに対して要求される深さと幅で露光が可能である。 As shown in FIGS. 3 to 7, the exposure LED light source unit 111 is provided in the exposure LED light source module 110 according to the present invention, and the supply current is individually controlled. By controlling the output of the LED light source module 110 for exposure, various PRs that react in various wavelength bands such as 365 nm, 405 nm, 430 nm, 460 nm, and 465 nm can be exposed to the required depth. As a result, the LED light source module 110 for exposure according to the present invention can combine various outputs required for semiconductor wafers and display panels having various sizes and shapes without replacement using a single module. Exposure is possible with the depth and width required for various PRs.
前記露光用ＬＥＤ光源ユニット１１１は、図８に示されたように、ＬＥＤ１１と、前記ＬＥＤ１１から発生した光の転写パターンを決定するスリットが形成されたマスク１３とを収容し、前記ＬＥＤ１１で発生した熱を効率的に放熱する複数の放熱ピン１７ａ、１７ｂを外周面に形成した鏡筒１５、及びＬＥＤ１１とマスク１３の間に位置して、ＬＥＤ１１で発生した光を集光する複数のレンズで構成される集光光学系１９を含む。 As shown in FIG. 8, the exposure LED light source unit 111 accommodates the LED 11 and a mask 13 in which a slit for determining a transfer pattern of light generated from the LED 11 is formed, and is generated by the LED 11. A lens barrel 15 having a plurality of heat dissipation pins 17a and 17b for efficiently dissipating heat, and a plurality of lenses that are positioned between the LED 11 and the mask 13 and condense light generated by the LED 11 The condensing optical system 19 is included.
図８は、本発明による露光用ＬＥＤ光源ユニットの断面図で、図面を参照すれば、ＬＥＤ１１は、３６５ｎｍ又は３８５ｎｍの波長の光を放出するＬＥＤであることができる。 FIG. 8 is a cross-sectional view of an exposure LED light source unit according to the present invention. Referring to the drawing, the LED 11 may be an LED that emits light having a wavelength of 365 nm or 385 nm.
鏡筒１５は、内部に収容しているＬＥＤ１１、マスク１３及び集光光学系１９別に分離組立てが可能な形態で具現され、後段部には外部からＬＥＤ１１を駆動するための電源の入力を受けるための電源ケーブル（図示なし）が配置される。 The lens barrel 15 is embodied in a form that can be separated and assembled separately from the LED 11, the mask 13, and the condensing optical system 19 accommodated therein, and receives an input of a power source for driving the LED 11 from the outside at the rear stage. Power cables (not shown) are arranged.
集光光学系１９は、複数のレンズからなることができ、ＬＥＤ１１で放出する光を集光するためのレンズ、及び集光された紫外線のビームプロファイルを希望の形態に変形させるためのビームプロファイル変形レンズ等とを含む。ビームプロファイル変形レンズによって変形されたビームプロファイルは、発光された紫外線の損失を最小化するために、スリットの形態とほぼ一致するように変形されることが望ましい。 The condensing optical system 19 can be composed of a plurality of lenses, a lens for condensing the light emitted from the LED 11, and a beam profile deformation for deforming the collected ultraviolet beam profile into a desired form. Including lenses. The beam profile deformed by the beam profile deforming lens is desirably deformed so as to substantially match the shape of the slit in order to minimize the loss of emitted ultraviolet light.
ここで、ＬＥＤ１１で発生する光は方向性を持たずに拡散するため、このような光を効率的に集光して理想的に小さな一つの点にすることができないので、幾何光学（Ｒａｙ Ｏｐｔｉｃｓ）的な観点から光線を集光するために複雑な非球面レンズや多数のレンズの組合が適用される。 Here, since the light generated by the LED 11 is diffused without directivity, such light cannot be efficiently collected into an ideal small point. Therefore, geometric optics (Ray Optics) is used. In order to collect light from a general viewpoint, a complex aspherical lens or a combination of many lenses is applied.
上述したように、本発明による露光用ＬＥＤ光源モジュール、露光用ＬＥＤ光源装置及び露光用ＬＥＤ光源装置管理システムは、多数のＬＥＤ光源ユニットを単一ＬＥＤ光源でモジュール化することにより、工程ラインを止めなくても半導体ウエハ、ディスプレイパネル等の多様な大きさと種類の露光対象物及び多様な性質のＰＲを露光することができる。 As described above, the exposure LED light source module, the exposure LED light source device, and the exposure LED light source device management system according to the present invention stop the process line by modularizing a number of LED light source units with a single LED light source. Without exposure, various sizes and types of exposure objects such as semiconductor wafers and display panels and various types of PR can be exposed.
また、本発明による露光用ＬＥＤ光源モジュール、露光用ＬＥＤ光源装置及び露光用ＬＥＤ光源装置管理システムは、ＬＥＤ光源の露光強度を細密かつ簡便に調節することができるため、露光対象物を正確かつ早く露光することができ、遠隔で統合的に制御及び管理することにより、障害に対する迅速かつ簡便な処理が可能である。 In addition, the exposure LED light source module, the exposure LED light source device, and the exposure LED light source device management system according to the present invention can finely and easily adjust the exposure intensity of the LED light source. Exposure can be performed, and remote and integrated control and management enables quick and simple processing for obstacles.
一方、本発明の詳細な説明では具体的な実施例に関して説明したが、本発明の範囲から逸脱しない限度内で様々な変形が可能なことは勿論である。ゆえに、本発明の範囲は、説明された実施例に限定されて決められてはならず、後述する特許請求の範囲のみならず、この特許請求の範囲と均等なもの等によっても決められる。 On the other hand, in the detailed description of the present invention, specific embodiments have been described. However, it goes without saying that various modifications can be made without departing from the scope of the present invention. Therefore, the scope of the present invention should not be determined by being limited to the embodiments described, but can be determined not only by the claims described later, but also by the equivalents of the claims.
Claims (9)
前記ＬＥＤから発生する光によって露光される露光領域の模様を決定する端面を有し、前記複数個のＬＥＤ光源ユニットから放射される光を統合し、前記統合された光のプロファイルを均一に整列して前記端面の形態で放出するロッドレンズ（Ｒｏｄ ｌｅｎｓ）と、
前記複数個のＬＥＤ光源ユニットから放出される光をそれぞれ前記ロッドレンズに伝達する光ファイバと、
前記ロッドレンズから放出される光を受ける受光レンズと、前記受光レンズで受けた光を前記露光領域に集める集光レンズとを収容して、前記ロッドレンズから放出される光が前記露光領域に到達するようにガイドするガイドレンズ系と
を含み、
前記ＬＥＤと前記マスクと前記集光光学系とが、それぞれ分離及び組立ての可能なことを特徴とする、露光用ＬＥＤ光源モジュール。 One or more LEDs for generating light whose intensity is controlled according to a supply current, a mask for determining a transfer pattern of light generated by the LEDs, and a plurality of heat dissipations for radiating heat generated by the LEDs Condensing composed of a lens barrel having pins formed on the outer peripheral surface, and a plurality of lenses positioned between the LED and the mask and adjustable for adjusting the output and uniformity of the light generated by the LED. A plurality of exposure LED light source units each including an optical system ;
An end face for determining a pattern of an exposure area exposed by light generated from the LEDs, and integrating light emitted from the plurality of LED light source units, and uniformly aligning the integrated light profiles. A rod lens that emits in the form of the end face ;
An optical fiber for transmitting light emitted from the plurality of LED light source units to the rod lens, respectively.
A light receiving lens that receives light emitted from the rod lens and a condenser lens that collects the light received by the light receiving lens in the exposure region are accommodated, and the light emitted from the rod lens reaches the exposure region. Guide lens system to guide
Including
The LED light source module for exposure, wherein the LED, the mask, and the condensing optical system can be separated and assembled, respectively .
前記複数個の露光用ＬＥＤ光源ユニットと、前記ロッドレンズ及び前記ガイドレンズ系がそれぞれ分離及び組立てが可能なことを特徴とする、請求項１に記載の露光用ＬＥＤ光源モジュール。 The LED light source module for exposure is
2. The LED light source module for exposure according to claim 1 , wherein the plurality of LED light source units for exposure and the rod lens and the guide lens system can be separated and assembled.
前記受光レンズと前記集光レンズの距離を調節して前記露光領域の大きさ及び光密度を変更することを特徴とする、請求項１に記載の露光用ＬＥＤ光源モジュール。 The guide lens system is
2. The LED light source module for exposure according to claim 1 , wherein a size and a light density of the exposure region are changed by adjusting a distance between the light receiving lens and the condenser lens.
前記集光レンズで集光された光の強度を調節する絞りと、
前記露光領域に到達する光の転写パターンを決定するためのマスクと
をさらに備えたことを特徴とする、請求項３に記載の露光用ＬＥＤ光源モジュール。 The guide lens system is
A diaphragm for adjusting the intensity of light collected by the condenser lens ;
A mask for determining a transfer pattern of light reaching the exposure area;
The LED light source module for exposure according to claim 3 , further comprising:
前記ＬＥＤ光源モジュールの前記複数個のＬＥＤ光源ユニットに供給される電流の大きさをそれぞれ制御して前記露光領域に到達する光の強度を決定し、前記電流の供給及び中断を制御する制御部と、
前記制御部の制御によって前記複数個のＬＥＤ光源ユニットに電流を供給する電源供給部と、
前記ＬＥＤ光源モジュールのそれぞれの動作状態及び供給電流値を使用者に表示する表示部と、
前記複数個のＬＥＤ光源ユニットに供給される電流の大きさを制御するように前記制御部に使用者の外部命令を入力するキー操作部と
を含み、
前記ＬＥＤと前記マスクと前記集光光学系とが、それぞれ分離及び組立ての可能なことを特徴とする、露光用ＬＥＤ光源装置。 One or more LEDs for generating light whose intensity is controlled according to a supply current, a mask for determining a transfer pattern of light generated by the LEDs, and a plurality of heat dissipations for radiating heat generated by the LEDs Condensing composed of a lens barrel having pins formed on the outer peripheral surface, and a plurality of lenses positioned between the LED and the mask and adjustable for adjusting the output and uniformity of the light generated by the LED. A plurality of LED light source units each including an optical system, and an end face for determining a pattern of an exposure area exposed by light generated from the LEDs, and integrating light emitted from the plurality of LED light source units; A rod lens that uniformly aligns the integrated light profile and emits the light in the form of the end face; and light emitted from the plurality of LED light source units. An optical fiber that transmits to the rod lens; a light receiving lens that receives light emitted from the rod lens; and a condensing lens that collects the light received by the light receiving lens in the exposure region; An LED light source module including a guide lens system for guiding the light emitted from the light to reach the exposure area ;
A controller for controlling the supply and interruption of the current by determining the intensity of light reaching the exposure area by controlling the magnitude of the current supplied to the plurality of LED light source units of the LED light source module; ,
A power supply unit that supplies current to the plurality of LED light source units under the control of the control unit;
A display unit for displaying the operating state and supply current value of each of the LED light source modules to the user;
A key operation unit for inputting a user's external command to the control unit so as to control the magnitude of current supplied to the plurality of LED light source units ;
Including
The LED light source device for exposure, wherein the LED, the mask, and the condensing optical system can be separated and assembled, respectively .
多数の露光装備にそれぞれ設置される前記露光用ＬＥＤ光源装置を有／無線通信網を介して遠隔で統合制御及び管理する中央管理サーバと
を含み、
前記ＬＥＤと前記マスクと前記集光光学系とが、それぞれ分離及び組立ての可能なことを特徴とする、露光用ＬＥＤ光源装置管理システム。 One or more LEDs for generating light whose intensity is controlled according to a supply current, a mask for determining a transfer pattern of light generated by the LEDs, and a plurality of heat dissipations for radiating heat generated by the LEDs Condensing composed of a lens barrel having pins formed on the outer peripheral surface, and a plurality of lenses positioned between the LED and the mask and adjustable for adjusting the output and uniformity of the light generated by the LED. A plurality of LED light source units each including an optical system, and an end face for determining a pattern of an exposure area exposed by light generated from the LEDs, and integrating light emitted from the plurality of LED light source units; A rod lens that uniformly aligns the integrated light profile and emits the light in the form of the end face; and light emitted from the plurality of LED light source units. An optical fiber that transmits to the rod lens; a light receiving lens that receives light emitted from the rod lens; and a condensing lens that collects the light received by the light receiving lens in the exposure region; An LED light source module including a guide lens system for guiding light emitted from the LED light source to reach the exposure area, and controlling the magnitude of current supplied to the plurality of LED light source units of the LED light source module. A control unit that determines the intensity of light reaching the exposure region and controls supply and interruption of the current; and a power supply unit that supplies current to the plurality of LED light source units under the control of the control unit; a display unit for displaying the respective operating state and the supply current of the LED light source module to the user, the plurality of LED light source unit A key operation unit for inputting a user's external command to the control unit to control the magnitude of the supplied current, and a first communication unit for transmitting the operating state and supply current value of each of the LED light source modules to the outside An LED light source device for exposure comprising:
A central management server for remotely controlling and managing the LED light source devices for exposure, which are respectively installed in a number of exposure equipment, via a wired / wireless communication network ;
Including
The LED light source device management system for exposure, wherein the LED, the mask, and the condensing optical system can be separated and assembled, respectively .
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| KR1020110106834A KR101344037B1 (en) | 2011-10-19 | 2011-10-19 | ＬＥＤ light source module, ＬＥＤ light source apparatus and ＬＥＤ light source apparatus management system for exposure resist |
| KR10-2011-0106834 | 2011-10-19 | ||
| PCT/KR2012/008498 WO2013058552A1 (en) | 2011-10-19 | 2012-10-17 | Led light source module for light exposure, led light source apparatus for light exposure, and system for managing led light source apparatus for light exposure |
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