JP5834431B2 - アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置 - Google Patents
アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置 Download PDFInfo
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- JP5834431B2 JP5834431B2 JP2011058556A JP2011058556A JP5834431B2 JP 5834431 B2 JP5834431 B2 JP 5834431B2 JP 2011058556 A JP2011058556 A JP 2011058556A JP 2011058556 A JP2011058556 A JP 2011058556A JP 5834431 B2 JP5834431 B2 JP 5834431B2
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- insulating layer
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- support
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 description 8
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- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011058556A JP5834431B2 (ja) | 2011-03-16 | 2011-03-16 | アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置 |
| US13/358,768 US8797625B2 (en) | 2011-03-16 | 2012-01-26 | Actuator, method for manufacturing actuator, and optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011058556A JP5834431B2 (ja) | 2011-03-16 | 2011-03-16 | アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012192494A JP2012192494A (ja) | 2012-10-11 |
| JP2012192494A5 JP2012192494A5 (enExample) | 2014-04-24 |
| JP5834431B2 true JP5834431B2 (ja) | 2015-12-24 |
Family
ID=46828240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011058556A Expired - Fee Related JP5834431B2 (ja) | 2011-03-16 | 2011-03-16 | アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8797625B2 (enExample) |
| JP (1) | JP5834431B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9650238B2 (en) | 2013-09-03 | 2017-05-16 | Electronics And Telecommunications Research Institute | Vibration device including support portion |
| US9738511B2 (en) * | 2013-09-13 | 2017-08-22 | Invensense, Inc. | Reduction of chipping damage to MEMS structure |
| US20150274517A1 (en) * | 2014-03-25 | 2015-10-01 | Invensense, Inc. | Method to improve surface roughness and eliminate sharp corners on an actuator layer of a mems device |
| US9761557B2 (en) | 2014-04-28 | 2017-09-12 | Invensense, Inc. | CMOS-MEMS integration by sequential bonding method |
| JP6696777B2 (ja) | 2016-01-21 | 2020-05-20 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| CN110031966B (zh) * | 2019-05-16 | 2021-12-07 | 苏州知芯传感技术有限公司 | 一种微镜及其制造方法 |
| JP7292469B2 (ja) * | 2020-04-23 | 2023-06-16 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2722314B2 (ja) | 1993-12-20 | 1998-03-04 | 日本信号株式会社 | プレーナー型ガルバノミラー及びその製造方法 |
| US6831765B2 (en) * | 2001-02-22 | 2004-12-14 | Canon Kabushiki Kaisha | Tiltable-body apparatus, and method of fabricating the same |
| JP3815363B2 (ja) * | 2002-04-09 | 2006-08-30 | 株式会社デンソー | 光デバイスの製造方法 |
| JP4062225B2 (ja) | 2003-09-30 | 2008-03-19 | ブラザー工業株式会社 | 光スキャナおよびそれを備えた画像形成装置 |
| JP4161950B2 (ja) * | 2004-02-27 | 2008-10-08 | セイコーエプソン株式会社 | マイクロメカニカル静電アクチュエータ |
| US7619802B2 (en) * | 2007-04-26 | 2009-11-17 | Microvision, Inc. | Suspension for maintaining mirror flatness of a MEMS device in a scanner system or the like |
| JP2009069341A (ja) * | 2007-09-12 | 2009-04-02 | Seiko Epson Corp | アクチュエータ、光スキャナ、および画像形成装置 |
| JP5354162B2 (ja) * | 2008-10-24 | 2013-11-27 | セイコーエプソン株式会社 | 光学デバイス、光スキャナ及び画像形成装置 |
| JP2010165613A (ja) | 2009-01-19 | 2010-07-29 | Seiko Epson Corp | リフレクター、光源モジュール、画像形成装置、及びリフレクターの製造方法 |
| JP2010171164A (ja) | 2009-01-22 | 2010-08-05 | Seiko Epson Corp | リフレクター、光源モジュール、画像形成装置、及びリフレクターの製造方法 |
| JP2011048074A (ja) * | 2009-08-26 | 2011-03-10 | Seiko Epson Corp | 光偏向器の製造方法 |
-
2011
- 2011-03-16 JP JP2011058556A patent/JP5834431B2/ja not_active Expired - Fee Related
-
2012
- 2012-01-26 US US13/358,768 patent/US8797625B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20120236383A1 (en) | 2012-09-20 |
| US8797625B2 (en) | 2014-08-05 |
| JP2012192494A (ja) | 2012-10-11 |
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