JP5833658B2 - 超音波モータのためのアクチュエータを電気的に励起する方法及び装置 - Google Patents

超音波モータのためのアクチュエータを電気的に励起する方法及び装置 Download PDF

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JP5833658B2
JP5833658B2 JP2013530567A JP2013530567A JP5833658B2 JP 5833658 B2 JP5833658 B2 JP 5833658B2 JP 2013530567 A JP2013530567 A JP 2013530567A JP 2013530567 A JP2013530567 A JP 2013530567A JP 5833658 B2 JP5833658 B2 JP 5833658B2
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voltage
current
piezoelectric
actuator
generator
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Japanese (ja)
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JP2013539346A5 (enExample
JP2013539346A (ja
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ビシュネウスキー、ウラディミール
ビシュネウスキー、アレクセイ
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Physik Instrumente(PI)SE & Co.KG
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Physik Instrumente(PI)SE & Co.KG
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
JP2013530567A 2010-10-01 2011-09-28 超音波モータのためのアクチュエータを電気的に励起する方法及び装置 Active JP5833658B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010047280.8 2010-10-01
DE102010047280A DE102010047280A1 (de) 2010-10-01 2010-10-01 Verfahren und Vorrichtung zur elektrischen Erregung eines Aktors für einen Ultraschallmotor
PCT/DE2011/050037 WO2012048691A2 (de) 2010-10-01 2011-09-28 Verfahren und vorrichtung zur elektrischen erregung eines aktors für einen ultraschallmotor

Publications (3)

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JP2013539346A JP2013539346A (ja) 2013-10-17
JP2013539346A5 JP2013539346A5 (enExample) 2014-08-14
JP5833658B2 true JP5833658B2 (ja) 2015-12-16

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JP2013530567A Active JP5833658B2 (ja) 2010-10-01 2011-09-28 超音波モータのためのアクチュエータを電気的に励起する方法及び装置

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US (1) US9479088B2 (enExample)
EP (1) EP2622726B1 (enExample)
JP (1) JP5833658B2 (enExample)
DE (1) DE102010047280A1 (enExample)
WO (1) WO2012048691A2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2960522A1 (en) * 2014-06-27 2015-12-30 Alcatel Lucent Apparatus and method for operating an oscillation blade device and a system comprising the apparatus
US10883486B1 (en) * 2017-11-21 2021-01-05 Huilin Zhou Forced surface traveling wave-driven microfluidic pump
KR20210155633A (ko) 2020-06-16 2021-12-23 엘지이노텍 주식회사 초음파 리니어 모터 및 이의 구동 방법
CN115040200B (zh) * 2022-05-20 2023-11-03 以诺康医疗科技（苏州）有限公司 超声手术工具、其频率跟踪方法、其目标相位差确定方法及超声波换能器等效电路
CN117471150B (zh) * 2023-10-26 2024-04-30 南京航达超控科技有限公司 一种超声电机孤极归一化整定电路

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0442469B1 (en) 1990-02-14 1995-07-26 Nikon Corporation Driving device for ultrasonic wave motor
JP2863280B2 (ja) 1990-07-04 1999-03-03 アスモ株式会社 超音波モータの駆動方法
KR100204460B1 (ko) 1992-12-16 1999-06-15 모리시타 요이찌 초음파모터의 속도제어방법
EP0789937B1 (de) 1994-10-31 2000-05-17 Pi Ceramic GmbH Piezoelektrischer motor
JP4499877B2 (ja) * 2000-06-13 2010-07-07 セイコーインスツル株式会社 超音波モータおよび超音波モータ付き電子機器
US7218029B2 (en) * 2001-05-22 2007-05-15 Texas Instruments Incorporated Adjustable compensation of a piezo drive amplifier depending on mode and number of elements driven
US6794795B2 (en) * 2001-12-19 2004-09-21 Caterpillar Inc Method and apparatus for exciting a piezoelectric material
DE10218565A1 (de) * 2002-04-26 2003-11-06 Philips Intellectual Property Startprozess-Steuerung für den Anlauf eines Piezomotors
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
DE102005039358B4 (de) * 2005-08-19 2016-12-08 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer Aktor für einen Ultraschallmotor
DE102006042695B4 (de) * 2006-01-18 2012-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Selbsterregender PWM-Controller für einen Einphasenultraschallmotor
DE102006025991B4 (de) * 2006-06-02 2012-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Selbsterregender Niederspannungscontroller zur Steuerung eines oder mehrerer Ultraschallmikromotoren
DE102006054597B4 (de) * 2006-11-20 2012-03-01 Physik Instrumente (Pi) Gmbh & Co. Kg Steuervorrichtung eines Ultraschallmotors
DE102007016642B4 (de) * 2007-04-05 2015-12-17 Austriamicrosystems Ag Elektromechanisches System und Verfahren zum Betrieb eines elektromechanischen Systems
DE102008012992A1 (de) * 2008-03-07 2009-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
IT1393824B1 (it) * 2009-04-20 2012-05-11 Zobele Holding Spa Atomizzatore di liquidi con dispositivo di vibrazione piezoelettrico a circuito elettronico di controllo perfezionato e relativo metodo di azionamento.
CN102025339B (zh) * 2009-09-18 2014-07-16 株式会社村田制作所 压电致动器驱动电路
US20110260988A1 (en) * 2010-01-20 2011-10-27 Northwestern University Method and apparatus for increasing magnitude and frequency of forces applied to a bare finger on a haptic surface

Also Published As

Publication number Publication date
WO2012048691A3 (de) 2012-05-24
US9479088B2 (en) 2016-10-25
JP2013539346A (ja) 2013-10-17
US20130307440A1 (en) 2013-11-21
DE102010047280A1 (de) 2012-04-05
WO2012048691A2 (de) 2012-04-19
EP2622726B1 (de) 2016-03-09
EP2622726A2 (de) 2013-08-07

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