JP2013539346A5 - - Google Patents

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Publication number
JP2013539346A5
JP2013539346A5 JP2013530567A JP2013530567A JP2013539346A5 JP 2013539346 A5 JP2013539346 A5 JP 2013539346A5 JP 2013530567 A JP2013530567 A JP 2013530567A JP 2013530567 A JP2013530567 A JP 2013530567A JP 2013539346 A5 JP2013539346 A5 JP 2013539346A5
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JP
Japan
Prior art keywords
voltage
current
standing wave
acoustic standing
feedback element
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JP2013530567A
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English (en)
Japanese (ja)
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JP2013539346A (ja
JP5833658B2 (ja
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Priority claimed from DE102010047280A external-priority patent/DE102010047280A1/de
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Publication of JP2013539346A5 publication Critical patent/JP2013539346A5/ja
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Publication of JP5833658B2 publication Critical patent/JP5833658B2/ja
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JP2013530567A 2010-10-01 2011-09-28 超音波モータのためのアクチュエータを電気的に励起する方法及び装置 Active JP5833658B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010047280.8 2010-10-01
DE102010047280A DE102010047280A1 (de) 2010-10-01 2010-10-01 Verfahren und Vorrichtung zur elektrischen Erregung eines Aktors für einen Ultraschallmotor
PCT/DE2011/050037 WO2012048691A2 (de) 2010-10-01 2011-09-28 Verfahren und vorrichtung zur elektrischen erregung eines aktors für einen ultraschallmotor

Publications (3)

Publication Number Publication Date
JP2013539346A JP2013539346A (ja) 2013-10-17
JP2013539346A5 true JP2013539346A5 (enExample) 2014-08-14
JP5833658B2 JP5833658B2 (ja) 2015-12-16

Family

ID=45540689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013530567A Active JP5833658B2 (ja) 2010-10-01 2011-09-28 超音波モータのためのアクチュエータを電気的に励起する方法及び装置

Country Status (5)

Country Link
US (1) US9479088B2 (enExample)
EP (1) EP2622726B1 (enExample)
JP (1) JP5833658B2 (enExample)
DE (1) DE102010047280A1 (enExample)
WO (1) WO2012048691A2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2960522A1 (en) * 2014-06-27 2015-12-30 Alcatel Lucent Apparatus and method for operating an oscillation blade device and a system comprising the apparatus
US10883486B1 (en) * 2017-11-21 2021-01-05 Huilin Zhou Forced surface traveling wave-driven microfluidic pump
KR20210155633A (ko) 2020-06-16 2021-12-23 엘지이노텍 주식회사 초음파 리니어 모터 및 이의 구동 방법
CN115040200B (zh) * 2022-05-20 2023-11-03 以诺康医疗科技（苏州）有限公司 超声手术工具、其频率跟踪方法、其目标相位差确定方法及超声波换能器等效电路
CN117471150B (zh) * 2023-10-26 2024-04-30 南京航达超控科技有限公司 一种超声电机孤极归一化整定电路

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0442469B1 (en) 1990-02-14 1995-07-26 Nikon Corporation Driving device for ultrasonic wave motor
JP2863280B2 (ja) 1990-07-04 1999-03-03 アスモ株式会社 超音波モータの駆動方法
KR100204460B1 (ko) 1992-12-16 1999-06-15 모리시타 요이찌 초음파모터의 속도제어방법
EP0789937B1 (de) 1994-10-31 2000-05-17 Pi Ceramic GmbH Piezoelektrischer motor
JP4499877B2 (ja) * 2000-06-13 2010-07-07 セイコーインスツル株式会社 超音波モータおよび超音波モータ付き電子機器
US7218029B2 (en) * 2001-05-22 2007-05-15 Texas Instruments Incorporated Adjustable compensation of a piezo drive amplifier depending on mode and number of elements driven
US6794795B2 (en) * 2001-12-19 2004-09-21 Caterpillar Inc Method and apparatus for exciting a piezoelectric material
DE10218565A1 (de) * 2002-04-26 2003-11-06 Philips Intellectual Property Startprozess-Steuerung für den Anlauf eines Piezomotors
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
DE102005039358B4 (de) * 2005-08-19 2016-12-08 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer Aktor für einen Ultraschallmotor
DE102006042695B4 (de) * 2006-01-18 2012-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Selbsterregender PWM-Controller für einen Einphasenultraschallmotor
DE102006025991B4 (de) * 2006-06-02 2012-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Selbsterregender Niederspannungscontroller zur Steuerung eines oder mehrerer Ultraschallmikromotoren
DE102006054597B4 (de) * 2006-11-20 2012-03-01 Physik Instrumente (Pi) Gmbh & Co. Kg Steuervorrichtung eines Ultraschallmotors
DE102007016642B4 (de) * 2007-04-05 2015-12-17 Austriamicrosystems Ag Elektromechanisches System und Verfahren zum Betrieb eines elektromechanischen Systems
DE102008012992A1 (de) * 2008-03-07 2009-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
IT1393824B1 (it) * 2009-04-20 2012-05-11 Zobele Holding Spa Atomizzatore di liquidi con dispositivo di vibrazione piezoelettrico a circuito elettronico di controllo perfezionato e relativo metodo di azionamento.
CN102025339B (zh) * 2009-09-18 2014-07-16 株式会社村田制作所 压电致动器驱动电路
US20110260988A1 (en) * 2010-01-20 2011-10-27 Northwestern University Method and apparatus for increasing magnitude and frequency of forces applied to a bare finger on a haptic surface

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