JP5828627B2 - 超音波診断装置用プローブ及びその製造方法 - Google Patents
超音波診断装置用プローブ及びその製造方法 Download PDFInfo
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- JP5828627B2 JP5828627B2 JP2010229963A JP2010229963A JP5828627B2 JP 5828627 B2 JP5828627 B2 JP 5828627B2 JP 2010229963 A JP2010229963 A JP 2010229963A JP 2010229963 A JP2010229963 A JP 2010229963A JP 5828627 B2 JP5828627 B2 JP 5828627B2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/42—Details of probe positioning or probe attachment to the patient
- A61B8/4272—Details of probe positioning or probe attachment to the patient involving the acoustic interface between the transducer and the tissue
- A61B8/4281—Details of probe positioning or probe attachment to the patient involving the acoustic interface between the transducer and the tissue characterised by sound-transmitting media or devices for coupling the transducer to the tissue
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Veterinary Medicine (AREA)
- Molecular Biology (AREA)
- Biophysics (AREA)
- Medical Informatics (AREA)
- Biomedical Technology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Public Health (AREA)
- Radiology & Medical Imaging (AREA)
- Heart & Thoracic Surgery (AREA)
- Mechanical Engineering (AREA)
- Multimedia (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
成される。
)と第1の連結部140を1回のボンディング作業で相互連結させる(S40)。このとき、第1の連結部140は、音響整合層130のみと相互連結される。前記のようなボンディング作業は、伝導性又は非伝導性接着剤を用いて行われる。
Claims (6)
- 装着溝部を備える音響整合層と、
一方の片面が前記装着溝部に装着される圧電体と、
前記音響整合層と相互連結される第1の連結部と、
前記圧電体と相互連結される第2の連結部と、
を備え、
前記装着溝部には、前記圧電体と前記第1の連結部のうちの少なくとも一つと対向するように第1の電極が設置され、
前記圧電体の前記一方の片面には、前記第1の電極と電気的に連結される第2の電極が形成され、
前記装着溝部は、
前記圧電体の前記一方の片面と並行して形成され、前記圧電体の前記一方の片面と接触する接触部と、
前記接触部から前記第1の連結部に向かって延長され、前記圧電体から離隔するように前記圧電体の外側に配置される延長部と、を備え、
前記第1の電極は、前記接触部と前記延長部とを含む前記装着溝部の全体にわたって設けられ、
前記第1の連結部は、前記音響整合層と、前記第2の連結部との間に配置され、前記圧電体と接触しないように配置され、前記延長部のみと相互連結され、
前記第2の連結部は、前記圧電体の前記一方の片面の反対側の他方の片面と接触するように配置されることを特徴とする超音波診断装置用プローブ。 - 前記装着溝部は、「コ」の字形状に形成されることを特徴とする、請求項1に記載の超音波診断装置用プローブ。
- 前記第1の連結部及び前記第2の連結部は、フレキシブル印刷回路基板であることを特徴とする、請求項1または2に記載の超音波診断装置用プローブ。
- 2つの第1の連結部、第2の連結部、圧電体および装着溝部を有する音響整合層を備える超音波診断装置用プローブの製造方法であって、
前記第2の連結部に前記2つの第1の連結部を積層し、
前記第2の連結部のうち前記2つの第1の連結部の間に位置する第2の連結部に前記圧電体を積層し、
前記圧電体が前記装着溝部に挿入されるように前記圧電体及び前記第1の連結部に、一方の側に電極が形成された前記音響整合層を積層し、
前記圧電体と前記第2の連結部、前記圧電体と前記音響整合層、及び前記音響整合層と前記第1の連結部を1回のボンディング作業で電気的、音響的に相互連結させることを特徴とする超音波診断装置用プローブの製造方法。 - 前記1回のボンディング作業で電気的、音響的に相互連結させるとき、
前記第1の連結部は、前記音響整合層のみと相互連結されることを特徴とする、請求項4に記載の超音波診断装置用プローブの製造方法。 - 前記電極は、高伝導性金属からなり、
前記音響整合層の前記一方の側に、蒸着、スパッタリング、めっき又はスプレーのうち少なくとも一つの方法を用いて、前記電極を形成するステップを含むことを特徴とする、請求項4または5に記載の超音波診断装置用プローブの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2009-0103771 | 2009-10-29 | ||
KR1020090103771A KR101145152B1 (ko) | 2009-10-29 | 2009-10-29 | 초음파 진단장치용 프로브 및 그 제조방법 |
Publications (3)
Publication Number | Publication Date |
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JP2011097582A JP2011097582A (ja) | 2011-05-12 |
JP2011097582A5 JP2011097582A5 (ja) | 2012-02-02 |
JP5828627B2 true JP5828627B2 (ja) | 2015-12-09 |
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JP2010229963A Expired - Fee Related JP5828627B2 (ja) | 2009-10-29 | 2010-10-12 | 超音波診断装置用プローブ及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9414809B2 (ja) |
EP (1) | EP2316343B1 (ja) |
JP (1) | JP5828627B2 (ja) |
KR (1) | KR101145152B1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101354603B1 (ko) * | 2012-01-02 | 2014-01-23 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
KR101299517B1 (ko) * | 2012-01-04 | 2013-09-10 | (주)엘라켐 | 굴곡면을 가지는 재료의 초음파 비파괴검사가 가능한 고분자재료 기반 유연한 위상배열 초음파 탐촉자 |
KR101354604B1 (ko) * | 2012-01-16 | 2014-01-23 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
KR101403905B1 (ko) * | 2012-01-19 | 2014-06-11 | 삼성메디슨 주식회사 | 초음파 진단장치용 프로브 및 그 제조방법 |
KR101435011B1 (ko) * | 2012-02-20 | 2014-08-27 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
KR101387176B1 (ko) * | 2012-02-24 | 2014-04-21 | 경북대학교 산학협력단 | 2차원 배열 초음파 트랜스듀서의 후면층 주조 방법 |
KR20150006519A (ko) * | 2013-07-08 | 2015-01-19 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
KR102293575B1 (ko) * | 2014-09-04 | 2021-08-26 | 삼성메디슨 주식회사 | 초음파 영상장치용 프로브 및 그 제조방법 |
US10265729B2 (en) * | 2015-02-06 | 2019-04-23 | Olympus Scientific Solutions Americas Inc. | Phased array ultrasonic transducers with solderless stack bonding assembly |
KR102627726B1 (ko) * | 2016-05-10 | 2024-01-23 | 삼성메디슨 주식회사 | 초음파 프로브 |
KR102058441B1 (ko) | 2019-06-18 | 2020-02-07 | 박성근 | 조류퇴치기능을 가지는 경관조명등 |
TWM585905U (zh) * | 2019-08-16 | 2019-11-01 | 詠業科技股份有限公司 | 超音波傳感器 |
KR20210105023A (ko) | 2020-02-18 | 2021-08-26 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
KR102623559B1 (ko) * | 2021-02-10 | 2024-01-11 | 주식회사 에프씨유 | 초음파 프로브 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3401979A1 (de) * | 1984-01-20 | 1985-07-25 | Pepperl & Fuchs Gmbh & Co Kg, 6800 Mannheim | Ultraschall-wandler |
EP0498015B1 (de) * | 1991-02-07 | 1993-10-06 | Siemens Aktiengesellschaft | Verfahren zur Herstellung von Ultraschallwandlern |
JPH04347146A (ja) * | 1991-05-27 | 1992-12-02 | Toshiba Corp | 超音波プローブ |
JP3595755B2 (ja) * | 2000-03-28 | 2004-12-02 | 松下電器産業株式会社 | 超音波探触子 |
JP3656016B2 (ja) * | 2000-03-29 | 2005-06-02 | 松下電器産業株式会社 | 超音波探触子 |
JP4468599B2 (ja) * | 2001-02-20 | 2010-05-26 | オリンパス株式会社 | 超音波探触子 |
DE10201873A1 (de) * | 2002-01-18 | 2003-07-31 | Contitech Luftfedersyst Gmbh | Ultraschallwandler-Einrichtung mit Elektroden aus elektrisch leitenden Kunststoffen |
JP4551111B2 (ja) * | 2004-04-16 | 2010-09-22 | 日本電波工業株式会社 | 超音波探触子 |
JP4347146B2 (ja) | 2004-06-28 | 2009-10-21 | Hoya株式会社 | 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法 |
JP4336799B2 (ja) | 2005-03-28 | 2009-09-30 | 日本電気株式会社 | 携帯電子機器、携帯電子機器の電源の制御回路及び制御方法 |
JP4801989B2 (ja) * | 2005-12-22 | 2011-10-26 | 株式会社東芝 | 超音波プローブ |
US8319399B2 (en) * | 2006-11-08 | 2012-11-27 | Panasonic Corporation | Ultrasound probe |
JP5031450B2 (ja) * | 2007-06-12 | 2012-09-19 | 富士フイルム株式会社 | 複合圧電材料、超音波探触子、超音波内視鏡、及び、超音波診断装置 |
JP5132333B2 (ja) * | 2008-01-22 | 2013-01-30 | 株式会社東芝 | 超音波探触子及び超音波探触子の製造方法 |
EP2206466A1 (en) * | 2009-01-12 | 2010-07-14 | Medison Co., Ltd. | Probe for ultrasonic diagnostic apparatus and method of manufacturing the same |
US8207652B2 (en) * | 2009-06-16 | 2012-06-26 | General Electric Company | Ultrasound transducer with improved acoustic performance |
-
2009
- 2009-10-29 KR KR1020090103771A patent/KR101145152B1/ko active IP Right Grant
-
2010
- 2010-10-11 EP EP10187084.8A patent/EP2316343B1/en active Active
- 2010-10-12 JP JP2010229963A patent/JP5828627B2/ja not_active Expired - Fee Related
- 2010-10-26 US US12/912,656 patent/US9414809B2/en active Active
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Publication number | Publication date |
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US9414809B2 (en) | 2016-08-16 |
US20110105906A1 (en) | 2011-05-05 |
EP2316343A1 (en) | 2011-05-04 |
EP2316343B1 (en) | 2014-10-01 |
KR101145152B1 (ko) | 2012-05-15 |
JP2011097582A (ja) | 2011-05-12 |
KR20110047019A (ko) | 2011-05-06 |
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