JP5813649B2 - 液処理装置、液処理方法 - Google Patents
液処理装置、液処理方法 Download PDFInfo
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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Description
以下、図面を参照しての実施形態に係る液処理装置について詳細に説明する。以下に説明する実施形態では、半導体ウエハ(以下、単にウエハと記す)にめっき処理を行う液処理装置に適用した場合について示す。図1は本発明の実施形態に係る液処理装置の概略構成を示す平面図、図2は図1のII−II線に沿った正面側の断面図、図3は図1のIII−III線に沿った側面側の断面図である。
続いて、図4ないし図6を参照して、この実施形態の液処理ユニット22について詳細に説明する。図4に示すように、液処理ユニット22は、アウターチャンバ210、インナーチャンバ220、スピンチャック230、第1・第2の流体供給部240・250、ガス供給部260、バックプレート265を備えている。
ここで、図6を参照して流体供給装置300について詳細に説明する。流体供給装置300は、第1・第2の流体供給部240・250に処理流体を供給する。図6に示すように、流体供給装置300は、第1のタンク310、第2のタンク320、第3のタンク330、および、第4のタンク340を含んでいる。
ここで、図7を参照して第1の流体供給部240の第1のアーム242について詳細に説明する。図7は、第1のアーム242の構成を示す模式図である。図7に示すように、第1のアーム242は、温度調節器245、供給機構246aと吸い戻し機構246bとカップリング機構246cとを有するポンプ機構246、および、保温器247を有している。すなわち、この実施形態に係る液処理ユニット22は、図6に示す温度調節部334を、第1のアーム242に配設された温度調節器245および保温器247により構成している。
次に、図1ないし図8を参照して、この実施形態に係る液処理ユニット22の動作を説明する。図8は、この実施形態に係る液処理ユニット22の動作、特に、めっき処理動作について説明するフローチャートである。図8に示すように、この実施形態の液処理ユニット22は、前洗浄工程(図中「A」)、めっき処理工程(同「B」)、後洗浄工程(同「C」)、裏面・端面洗浄工程(同「D」)、および乾燥工程(同「E」)の5つの工程を実現する。
次に、図9Aおよび図10を参照して、この実施形態の液処理ユニットにおける温度調節用流体供給器450(流体供給器450)について詳細に説明する。図9Aに示すように、この実施形態の流体供給器450は、バルブ601a〜602c、開閉弁制御器603、加熱タンク604a、ポンプ605aおよび605b、加熱器(加熱部)606aを有している。
続いて、図8、図9Aおよび図10を参照して、この実施形態の流体供給器450の動作を説明する。図8に示す前洗浄工程Aが開始されると、プロセスコントローラ51は、加熱器606aを起動して加熱タンク604aに貯留した流体LHTを加熱する(S610)。
ここで、図9Bを参照して、実施形態に係る流体供給器の変形例を説明する。以下の説明において、図9Aに示す流体供給器450と共通する構成については共通する符号を付して示し、重複する説明を省略する。
ここで、図7ないし図12を参照して、図9Aないし図10に示す流体供給器450(450a)の作用について説明する。図12は、還元剤としてDMAB(ジメチルアミンボラン)を使用しためっき処理において、めっき液の加温時間とめっき液中に生ずるパーティクルの数の関係を示している。
ここで、図12および図13を参照して、実施形態に係る流体供給器450によるめっき液を冷却する温度と時間について説明する。図13は、めっき処理の処理温度とめっき膜厚の関係を示している。
Claims (7)
- 複数の基板に連続してめっき処理を施す液処理装置であって、
めっき液を収容する温度調節用容器と、
前記温度調節用容器に収容された前記めっき液の温度を制御する温度制御部と、
前記基板を1枚ずつ所定位置に保持する保持部と、
前記温度調節用容器に収容され温度制御された前記めっき液を、前記保持部により保持された前記基板の処理面に吐出する供給孔を有するノズルと、
前記温度調節用容器に収容され温度制御された前記めっき液を、前記ノズルの前記供給孔に向けて送り出す送り出し機構と、
前記送り出し機構が前記めっき液を送り出すタイミングを制御する供給制御部と、を具備し、
前記温度制御部は、前記送り出し機構が前記めっき液を送り出すタイミングに基づいて、前記温度調節用容器に収容された前記めっき液の温度を制御し、
前記温度制御部は、前記めっき液が前記ノズルの前記供給孔に向けて送り出されている間は、前記温度調節用容器に収容されているめっき液を、常温よりも高いめっき処理温度に制御し、前記めっき液の前記ノズルの前記供給孔に向けた送り出しが一定時間中断された場合には、前記温度調節用容器に収容された前記めっき液を、前記めっき処理温度よりも低い温度に冷却制御することを特徴とする液処理装置。 - 前記温度制御部は、前記冷却制御の際、前記温度調節用容器に収容された前記めっき液を常温まで冷却することを特徴とする請求項1記載の液処理装置。
- 前記温度制御部は、前記送り出し機構が前記めっき液を送り出すタイミングに基づいて高温流体または低温流体のいずれかを前記温度調節用容器に供給するよう構成された流体供給器を有し、
前記温度調節用容器は、前記流体供給器から供給される高温流体または低温流体を用いて、収容されているめっき液を加温または冷却する熱交換器を含む
ことを特徴とする請求項1に記載の液処理装置。 - 前記流体供給器は、
前記高温流体が生成されるよう流体を加熱する加熱部と、
前記低温流体が生成されるよう流体を冷却する冷却部と、
前記高温流体または前記低温流体のいずれかを前記温度調節用容器に供給する供給部と、を備えた
ことを特徴とする請求項3に記載の液処理装置。 - 前記温度調節用容器に収容されるめっき液の量が、1枚の基板処理に必要な所定量に対応している、または、1枚の基板処理に必要な所定量よりも少なくなっている
ことを特徴とする請求項1に記載の液処理装置。 - 複数の基板に連続してめっき処理を施す液処理方法であって、
めっき液を温度調節用容器に収容する収容ステップと、
前記温度調節用容器に収容した前記めっき液を所定の温度に加温する加温ステップと、
前記温度調節用容器に収容しためっき液を基板の処理面にめっき液を吐出する供給孔に向けて送り出すタイミング情報を生成するタイミング生成ステップと、
前記タイミング情報に基づいて、前記温度調節用容器に収容された前記めっき液を冷却する冷却ステップと
を具備し、
前記加温ステップは、前記温度調節用容器に収容されているめっき液を、常温よりも高いめっき処理温度に制御し、
前記冷却ステップは、前記温度調節用容器に収容されためっき液が所定時間前記供給孔に向けて送り出されない場合に前記めっき液を前記めっき処理温度よりも低い温度に冷却することを特徴とする液処理方法。 - 前記温度調節用容器に収容されるめっき液の量が、1枚の基板処理に必要な所定量に対応している、または、1枚の基板処理に必要な所定量よりも少なくなっている
ことを特徴とする請求項6に記載の液処理方法。
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