JP5813204B2 - 太陽電池の製造方法 - Google Patents
太陽電池の製造方法 Download PDFInfo
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- JP5813204B2 JP5813204B2 JP2014502444A JP2014502444A JP5813204B2 JP 5813204 B2 JP5813204 B2 JP 5813204B2 JP 2014502444 A JP2014502444 A JP 2014502444A JP 2014502444 A JP2014502444 A JP 2014502444A JP 5813204 B2 JP5813204 B2 JP 5813204B2
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- texturing
- etching
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- 238000004519 manufacturing process Methods 0.000 title description 13
- 239000000758 substrate Substances 0.000 claims description 118
- 238000000034 method Methods 0.000 claims description 102
- 238000001020 plasma etching Methods 0.000 claims description 40
- 238000005530 etching Methods 0.000 claims description 24
- 238000001039 wet etching Methods 0.000 claims description 22
- 238000005520 cutting process Methods 0.000 claims description 12
- 239000005368 silicate glass Substances 0.000 claims description 11
- 239000006117 anti-reflective coating Substances 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 229910021478 group 5 element Inorganic materials 0.000 claims description 4
- 238000010329 laser etching Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000008569 process Effects 0.000 description 71
- 238000002955 isolation Methods 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 239000000243 solution Substances 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 7
- 238000002310 reflectometry Methods 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 239000003929 acidic solution Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Description
2)ドーピング(PN接合(PN Junction)形成)工程
3)酸化膜(PSG:phosphor silicate glass)除去工程
4)反射防止膜(ARC:antireflective coating)形成工程
5)金属化(metallizing)工程
6)エッジアイソレーション(edge isolation:エッジ分離)測定
2)RIE工程
3)DRE工程
4)Doping工程
5)PSG除去工程
6)以降、従来の太陽電池の工程と同様
ii)ピラミッド構造の角度がα=45゜の場合、入射光は2回反射する。
iii)ピラミッド構造の角度がα=60゜の場合、入射光は3回反射する。
β 反射および/または入射角度
a 第1光景路
b 第2光景路
c1、c2 反射点
30 基板
32 エミッタ層
34 反射防止膜
36 後面電極
38 前面電極
39 後面電界層
40 エッジ部分
Claims (6)
- 基板を切断した後、SDR(sawing damage removal)により前記基板の表面からダメージを除去する段階と、
RIE(reactive ion etching)により前記基板の表面を構造化する(texturing)段階と、
前記基板の表面を、前記基板を構成する物質とは異なる物質でドーピングする段階と、
前記基板表面からダメージおよび酸化膜(PSG(phosphoric silicate glass))を同時に除去する段階と、
前記基板の表面上に反射防止膜(anti-reflective coating)を形成する段階と、
レーザエッチング方式により前記基板のエッジにレーザを照射して前記反射防止膜(antireflective coating)とエッジを分離させる段階と、
前記基板の前面および後面に前面電極および後面電極を形成するように基板を金属化する段階と、を含み、
前記基板表面からダメージおよび酸化膜(PSG(phosphoric silicate glass))を同時に除去する段階が、低濃度のKOHまたはNH 4 OH/H 2 O/H 2 O 2 溶液を用いて前記基板の表面からダメージを除去する段階と、HCl/HF溶液を用いて前記基板の表面をクリーニングする段階とを含み、一つのウェットエッチング装置で行われることを特徴とする、太陽電池の製造方法。 - 前記基板を切断した後、SDR(sawing damage removal)により前記基板の表面からダメージを除去する段階において、ダメージの除去が、酸性テクスチャリング(acid texturing)またはアルカリ性SDR(sawing damage removal)を利用し、前記酸性テクスチャリングにおいて、前記基板のSDR(sawing damage removal)と前記基板の表面の構造化とを同時に行うことを特徴とする、請求項1に記載の方法。
- 前記基板が、3族元素または5族元素から選択される不純物でドーピングされることを特徴とする、請求項1に記載の方法。
- 基板を切断した後、SDR(sawing damage removal)により前記基板の表面からダメージを除去する段階と、
RIE(reactive ion etching)により前記基板の表面を構造化する(texturing)段階と、
前記基板の表面を、前記基板を構成する物質とは異なる物質でドーピングする段階と、
第1に前記基板の表面からダメージおよび酸化膜(PSG(phosphoric silicate glass))を除去する段階と、
第2に前記基板の表面からダメージおよび酸化膜(PSG(phosphoric silicate glass))の残渣を除去し、前記基板をバックサイドエッチング(Back side Etch)する段階と、
前記基板の表面上に前記反射防止膜(anti-reflective coating)を形成する段階と、
前記基板の前面および後面に前面電極および後面電極を形成するように基板を金属化する段階と、
前記反射防止膜(anti-reflective coating)と前記基板のエッジを分離させるためにHNO 3 /H 2 SO 2 /H 2 O 2 溶液を用いて前記基板の裏面(back side)をエッチング段階と、
低濃度のKOHまたはNH 4 OH/H 2 O/H 2 O 2 溶液を用いて前記基板の表面から前記ダメージを除去する段階と、
HCl/HF溶液を用いて前記基板の表面をクリーニングする段階と、を含み、
第1に前記基板表面からダメージおよび酸化膜(PSG(phosphoric silicate glass))を同時に除去する段階、および第2に前記基板の表面からダメージおよび酸化膜の残渣を除去し、前記基板をバックサイドエッチング(Back side Etch)する段階が、一つのウェットエッチング装置で行われることを特徴とする、方法。 - 前記基板を切断した後、SDR(sawing damage removal)により前記基板の表面からダメージを除去する段階において、ダメージの除去が、酸性テクスチャリング(acid texturing)およびアルカリ性SDR(saw damage removal)を利用し、前記酸性テクスチャリングでは、前記基板の切断ダメージ除去(sawing damage removal)と前記基板の表面の構造化(texturing)を同時に行うことを特徴とする、請求項4に記載の方法。
- 前記基板は、3族元素または5族元素から選択される不純物でドーピングされることを特徴とする、請求項4に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110028770A KR101668402B1 (ko) | 2011-03-30 | 2011-03-30 | 태양 전지 제조 방법 |
KR10-2011-0028770 | 2011-03-30 | ||
PCT/KR2012/001410 WO2012134062A2 (en) | 2011-03-30 | 2012-02-24 | Method for manufacturing solar cell |
Publications (2)
Publication Number | Publication Date |
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JP2014511038A JP2014511038A (ja) | 2014-05-01 |
JP5813204B2 true JP5813204B2 (ja) | 2015-11-17 |
Family
ID=46932037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014502444A Expired - Fee Related JP5813204B2 (ja) | 2011-03-30 | 2012-02-24 | 太陽電池の製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9093580B2 (ja) |
EP (1) | EP2691989B1 (ja) |
JP (1) | JP5813204B2 (ja) |
KR (1) | KR101668402B1 (ja) |
CN (1) | CN103460397B (ja) |
WO (1) | WO2012134062A2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2014179366A1 (en) * | 2013-04-29 | 2014-11-06 | Soiexel, Inc. | Annealing for damage free laser processing for high efficiency solar cells |
US9466754B2 (en) * | 2014-07-30 | 2016-10-11 | Sunpower Corporation | Grain growth for solar cells |
CN105702800A (zh) * | 2014-11-27 | 2016-06-22 | 上海神舟新能源发展有限公司 | 一种n型双面太阳电池及其制备方法 |
CN104835875A (zh) * | 2015-04-20 | 2015-08-12 | 上海大族新能源科技有限公司 | 一种晶体硅太阳电池的制备方法及其侧边激光隔离方法 |
CN104993019A (zh) * | 2015-07-09 | 2015-10-21 | 苏州阿特斯阳光电力科技有限公司 | 一种局部背接触太阳能电池的制备方法 |
CN106784129A (zh) * | 2015-11-20 | 2017-05-31 | 上海神舟新能源发展有限公司 | 背发射结背面隧道氧化钝化接触高效电池的制作方法 |
WO2018021584A1 (ko) * | 2016-07-25 | 2018-02-01 | 주식회사 코윈디에스티 | 웨이퍼 표면 가공방법 |
KR102054977B1 (ko) * | 2019-04-05 | 2019-12-12 | 엘지전자 주식회사 | 태양전지의 제조 방법 |
KR20230065623A (ko) | 2021-11-05 | 2023-05-12 | 와이아이테크(주) | 선택적 에칭을 통한 TOPCon 셀의 랩 어라운드 폴리막 제거방법 |
DE102021129460A1 (de) * | 2021-11-11 | 2023-05-11 | Hanwha Q Cells Gmbh | Solarzelle und Verfahren zur Herstellung einer Solarzelle |
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JP2001284445A (ja) * | 2000-03-29 | 2001-10-12 | Toshiba Corp | 半導体装置およびその製造方法 |
JP4186584B2 (ja) * | 2002-10-23 | 2008-11-26 | 三菱電機株式会社 | 太陽電池生産方法 |
WO2006087786A1 (ja) | 2005-02-17 | 2006-08-24 | Mitsubishi Denki Kabushiki Kaisha | 太陽電池の製造方法 |
JP2006310368A (ja) | 2005-04-26 | 2006-11-09 | Shin Etsu Handotai Co Ltd | 太陽電池の製造方法及び太陽電池 |
KR20080100057A (ko) | 2007-05-11 | 2008-11-14 | 주성엔지니어링(주) | 결정질 실리콘 태양전지의 제조방법과 그 제조장치 및시스템 |
KR101444709B1 (ko) * | 2007-11-16 | 2014-09-30 | 주성엔지니어링(주) | 기판형 태양전지 및 그 제조방법 |
KR20090054732A (ko) * | 2007-11-27 | 2009-06-01 | 엘지전자 주식회사 | 태양전지의 제조방법 |
KR20090091562A (ko) * | 2008-02-25 | 2009-08-28 | 엘지전자 주식회사 | 태양전지 및 그 제조방법 |
KR101010286B1 (ko) * | 2008-08-29 | 2011-01-24 | 엘지전자 주식회사 | 태양 전지의 제조 방법 |
KR20100055070A (ko) * | 2008-11-17 | 2010-05-26 | 주식회사 효성 | 금속 산화방식을 이용한 태양전지 제조방법 및 그 태양전지 |
KR101254565B1 (ko) * | 2009-07-06 | 2013-04-15 | 엘지전자 주식회사 | 태양 전지용 기판의 텍스처링 방법 및 태양 전지의 제조 방법 |
KR100990108B1 (ko) * | 2010-04-14 | 2010-10-29 | 엘지전자 주식회사 | 태양 전지 및 그 제조 방법 |
-
2011
- 2011-03-30 KR KR1020110028770A patent/KR101668402B1/ko active IP Right Grant
-
2012
- 2012-02-24 EP EP12763636.3A patent/EP2691989B1/en active Active
- 2012-02-24 US US14/008,007 patent/US9093580B2/en active Active
- 2012-02-24 JP JP2014502444A patent/JP5813204B2/ja not_active Expired - Fee Related
- 2012-02-24 CN CN201280015438.6A patent/CN103460397B/zh not_active Expired - Fee Related
- 2012-02-24 WO PCT/KR2012/001410 patent/WO2012134062A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP2691989A4 (en) | 2014-11-26 |
WO2012134062A3 (en) | 2012-12-13 |
JP2014511038A (ja) | 2014-05-01 |
KR20120111784A (ko) | 2012-10-11 |
EP2691989B1 (en) | 2023-05-03 |
CN103460397A (zh) | 2013-12-18 |
WO2012134062A2 (en) | 2012-10-04 |
US20140017847A1 (en) | 2014-01-16 |
US9093580B2 (en) | 2015-07-28 |
CN103460397B (zh) | 2015-08-26 |
EP2691989A2 (en) | 2014-02-05 |
KR101668402B1 (ko) | 2016-10-28 |
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