JP5785380B2 - チップスケールの原子時計内の垂直共振器面発光レーザー(vcsel)を熱的に安定させる設計および方法 - Google Patents
チップスケールの原子時計内の垂直共振器面発光レーザー(vcsel)を熱的に安定させる設計および方法 Download PDFInfo
- Publication number
- JP5785380B2 JP5785380B2 JP2010250738A JP2010250738A JP5785380B2 JP 5785380 B2 JP5785380 B2 JP 5785380B2 JP 2010250738 A JP2010250738 A JP 2010250738A JP 2010250738 A JP2010250738 A JP 2010250738A JP 5785380 B2 JP5785380 B2 JP 5785380B2
- Authority
- JP
- Japan
- Prior art keywords
- vcsel
- cage
- base
- isothermal
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02257—Out-coupling of light using windows, e.g. specially adapted for back-reflecting light to a detector inside the housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02453—Heating, e.g. the laser is heated for stabilisation against temperature fluctuations of the environment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02208—Mountings; Housings characterised by the shape of the housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02476—Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
Description
米国政府は、米国空軍との契約FA8650−01−C−1125により、本発明に関して一定の権利を有することがある。
一実施形態において、チップスケール原子時計は、垂直共振器面発光レーザー(VCSEL)と、VCSELのベースに連結される熱ブロックと、光検出器と、気相セルと、を有する。気相セルは、VCSELと光検出器との間のレーザー光の光通路の少なくとも一部を画定するチャンバを含む。このチップスケール原子時計はさらに、VCSELをすべての面上で囲む等温ケージを有し、等温ケージは熱伝導性通路を介してヒーターブロックに連結される。
Claims (3)
- 垂直共振器面発光レーザー(VCSEL)アセンブリであって、前記アセンブリは、
垂直共振器面発光レーザー(VCSEL)110と、
前記VCSEL110のベースに連結されるヒーターブロック111と、を有し、前記ヒーターブロック111は、前記VCSEL110の前記ベースに熱エネルギーを提供し、
前記アセンブリはさらに、前記VCSEL110の全ての側部を囲む等温ケージ170を有し、前記等温ケージ170は、熱伝導経路を介して前記ヒーターブロック111に連結され、
前記等温ケージ170はさらに、ケージベース256と、少なくとも1つのケージ壁272と、ケージ天井273と、を有し、
前記少なくとも1つのケージ壁272およびケージ天井273は、伝導経路を介して前記ケージベース256を通って熱的に前記ヒーターブロック111に連結され、
前記等温ケージ170はさらに、前記VCSEL110に整合するオリフィス266を有し、前記オリフィス266は、前記VCSEL110から発されるレーザー光112のための前記等温ケージ170を出る光学経路を提供する、アセンブリ。 - 請求項1に記載のアセンブリであって、さらに、
前記VCSEL110、210および前記ヒーターブロック111、211を物理パッケージ102内で支持するように構成される第1台部材250を有し、前記第1台部材250は、第1支持部材252を有し、
前記第1支持部材252は、前記ヒーターブロック111、211に連結される第1表面253と、前記ケージベース256に連結される第2表面254と、を有し、前記ケージベース256は、伝導経路を介して前記第1支持部材252を通って前記ヒーターブロック111に熱的に連結される、アセンブリ。 - 請求項1に記載のアセンブリであって、前記第1支持部材252および前記ケージベース256は第1シリコンウェハから形成され、前記少なくとも1つのケージ壁272およびケージ天井273は第2シリコンウェハから形成される、アセンブリ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US30149710P | 2010-02-04 | 2010-02-04 | |
US61/301,497 | 2010-02-04 | ||
US12/884,489 US8218590B2 (en) | 2010-02-04 | 2010-09-17 | Designs and processes for thermally stabilizing a vertical cavity surface emitting laser (vcsel) in a chip-scale atomic clock |
US12/884,489 | 2010-09-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011238893A JP2011238893A (ja) | 2011-11-24 |
JP5785380B2 true JP5785380B2 (ja) | 2015-09-30 |
Family
ID=43769119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010250738A Active JP5785380B2 (ja) | 2010-02-04 | 2010-11-09 | チップスケールの原子時計内の垂直共振器面発光レーザー(vcsel)を熱的に安定させる設計および方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8218590B2 (ja) |
EP (1) | EP2355271B1 (ja) |
JP (1) | JP5785380B2 (ja) |
IL (1) | IL209174A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10396810B2 (en) | 2016-03-29 | 2019-08-27 | Seiko Epson Corporation | Quantum interference device, atomic oscillator, electronic apparatus, and moving object |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8299860B2 (en) | 2010-02-04 | 2012-10-30 | Honeywell International Inc. | Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells |
US8941442B2 (en) | 2010-02-04 | 2015-01-27 | Honeywell International Inc. | Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells |
US8624682B2 (en) | 2011-06-13 | 2014-01-07 | Honeywell International Inc. | Vapor cell atomic clock physics package |
US8837540B2 (en) | 2011-06-29 | 2014-09-16 | Honeywell International Inc. | Simple, low power microsystem for saturation spectroscopy |
US20130341502A1 (en) * | 2012-06-22 | 2013-12-26 | Alan Cowie | Method and apparatus for two point calibration of a tunable diode laser analyzer |
JP6119294B2 (ja) * | 2013-02-18 | 2017-04-26 | セイコーエプソン株式会社 | 量子干渉装置、原子発振器および移動体 |
JP2015119149A (ja) * | 2013-12-20 | 2015-06-25 | セイコーエプソン株式会社 | 面発光レーザーおよび原子発振器 |
JP6264876B2 (ja) * | 2013-12-20 | 2018-01-24 | セイコーエプソン株式会社 | 量子干渉装置、原子発振器、および電子機器 |
JP6299955B2 (ja) * | 2013-12-20 | 2018-03-28 | セイコーエプソン株式会社 | 面発光レーザーおよび原子発振器 |
JP2015119143A (ja) * | 2013-12-20 | 2015-06-25 | セイコーエプソン株式会社 | 面発光レーザーおよび原子発振器 |
JP2016207695A (ja) | 2015-04-15 | 2016-12-08 | セイコーエプソン株式会社 | 原子セル、原子セルの製造方法、量子干渉装置、原子発振器、電子機器および移動体 |
CN105137741A (zh) * | 2015-10-21 | 2015-12-09 | 成都天奥电子股份有限公司 | 一种抗振型的芯片原子钟物理系统 |
US10749539B2 (en) | 2018-03-26 | 2020-08-18 | Honeywell International Inc. | Apparatus and method for a vapor cell atomic frequency reference |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58114061U (ja) * | 1982-01-29 | 1983-08-04 | キヤノン株式会社 | 光ビ−ム発生装置 |
JPH06203403A (ja) * | 1992-10-22 | 1994-07-22 | Matsushita Electron Corp | 半導体レーザ装置および光ピックアップ装置 |
US6172570B1 (en) * | 1999-08-23 | 2001-01-09 | Datum, Inc. | Laser light quantum system |
JP4192517B2 (ja) * | 2002-07-18 | 2008-12-10 | ソニー株式会社 | 光半導体装置及びその製造方法 |
US7356057B2 (en) * | 2002-10-31 | 2008-04-08 | Finisar Corporation | Wide temperature range vertical cavity surface emitting laser |
US7075962B2 (en) * | 2003-06-27 | 2006-07-11 | Finisar Corporation | VCSEL having thermal management |
US7292111B2 (en) * | 2004-04-26 | 2007-11-06 | Northrop Grumman Corporation | Middle layer of die structure that comprises a cavity that holds an alkali metal |
US20060022213A1 (en) * | 2004-08-02 | 2006-02-02 | Posamentier Joshua D | TO-can heater on flex circuit |
US7750356B2 (en) * | 2005-05-04 | 2010-07-06 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Silicon optical package with 45 degree turning mirror |
JP5228275B2 (ja) * | 2005-12-28 | 2013-07-03 | セイコーエプソン株式会社 | 原子周波数取得装置および原子時計 |
JP5375279B2 (ja) * | 2008-06-18 | 2013-12-25 | セイコーエプソン株式会社 | 原子発振器 |
US8067991B2 (en) * | 2010-02-04 | 2011-11-29 | Honeywell International Inc. | Chip-scale atomic clock with two thermal zones |
-
2010
- 2010-09-17 US US12/884,489 patent/US8218590B2/en active Active
- 2010-11-02 EP EP10189741.1A patent/EP2355271B1/en active Active
- 2010-11-07 IL IL209174A patent/IL209174A/en not_active IP Right Cessation
- 2010-11-09 JP JP2010250738A patent/JP5785380B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10396810B2 (en) | 2016-03-29 | 2019-08-27 | Seiko Epson Corporation | Quantum interference device, atomic oscillator, electronic apparatus, and moving object |
Also Published As
Publication number | Publication date |
---|---|
EP2355271A2 (en) | 2011-08-10 |
US20110188524A1 (en) | 2011-08-04 |
IL209174A0 (en) | 2011-04-28 |
IL209174A (en) | 2015-05-31 |
JP2011238893A (ja) | 2011-11-24 |
EP2355271A3 (en) | 2017-03-15 |
EP2355271B1 (en) | 2020-08-19 |
US8218590B2 (en) | 2012-07-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5785380B2 (ja) | チップスケールの原子時計内の垂直共振器面発光レーザー(vcsel)を熱的に安定させる設計および方法 | |
JP5616752B2 (ja) | 2つの熱領域をそなえるチップスケール原子時計 | |
JP5623250B2 (ja) | チップスケール原子時計のvcselを安定化させる設計および方法 | |
US10651624B2 (en) | Optoelectronic modules having features for improved alignment and reduced tilt | |
TW202033937A (zh) | 用來產生光圖案之照明投影器模組及製造照明投影器模組之方法 | |
CN111595441B (zh) | 光源模块 | |
JP2013011589A (ja) | 飽和分光法のための単純な低電力マイクロシステム | |
JP5309567B2 (ja) | 原子発振器 | |
JP2021144041A (ja) | 分光検出器 | |
TW403835B (en) | The method of temperature measurement used in calibration regardless of the emitting rate and the apparatus thereof | |
US9093813B2 (en) | Mounting base for a laser system | |
KR101709557B1 (ko) | 칩 스케일 원자시계를 위한 전기 광학 기능이 구비된 증기셀 | |
Liu et al. | Development of non-magnetic VCSEL module for compact atomic magnetometer | |
JP2007324234A (ja) | 発光モジュール | |
JP2004153176A (ja) | 波長ロッカー | |
JP2007287969A (ja) | 基板アニール装置用の基板支持装置 | |
KR101927663B1 (ko) | 온도조절부를 구비한 적분구 | |
JP5812609B2 (ja) | 加熱装置 | |
US7706418B2 (en) | Structured submount for tuner assembly with optional phase adjust | |
JP4603009B2 (ja) | 波長ロッカー | |
JP5275203B2 (ja) | 波長ロッカー | |
JP2012184969A (ja) | 熱型赤外線センサ | |
JP2008197301A (ja) | ファイバブラッググレーティング装置 | |
JP2007335937A (ja) | 原子発振器及び原子発振器の温度制御方法 | |
JPH0479391A (ja) | 半導体レーザモジュール |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131107 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140312 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141119 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150128 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150625 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150724 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5785380 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |