JP5763653B2 - 基板の表面を処理する方法及び装置 - Google Patents
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Description
Claims (24)
- 平坦な基板の基板表面を基板の下面においてプロセス媒質によって処理する方法であって、プロセス媒質は基板表面に対する除去又はエッチング効果を有し、前記基板は、内部にプロセス媒質を有するタンクの上方を基板の搬送経路の一方から他方へ移動すると共に、水平に配置された方式により、下方からプロセス媒質によって湿潤される、方法において、
上向きの基板上面に対して作用する又はこれに到達するプロセス媒質又はそのガス放出に対する保護として、水又は対応する保護液体により、前記基板上面の全体を湿潤又はカバーし、
前記水又は対応する保護液体を、前記基板が前記タンクの上方を移動する前に前記基板上面に塗布することを特徴とする方法。 - 保護液体は、基板下面がプロセス媒質によって湿潤される前に基板上面に塗布されることを特徴とする請求項1に記載の方法。
- 保護液体は、移動する基板又は基板上面に連続して塗布されることを特徴とする請求項1又は2に記載の方法。
- 保護液体は、時間間隔を有するように、基板上面に幾重にも塗布されるか、或いは、新たに塗布されることを特徴とする請求項1に記載の方法。
- 保護液体は、基板上面に対して一回塗布されることを特徴とする請求項1に記載の方法。
- 保護液体は、基板が塗布装置の下方に位置した際のみにおける塗布の開始により、且つ、基板が依然として塗布装置の下方に位置している際に停止することにより、基板上面に対してのみ塗布されるように制御された状態において基板上面に対して塗布されることを特徴とする請求項1に記載の方法。
- 供給される基板の位置を検出し、且つ、これに応じて塗布装置が制御されることを特徴とする請求項6に記載の方法。
- 保護液体は、噴霧ノズルにより、二次元的に分布したプロファイルを有するように基板上面に対して塗布されることを特徴とする請求項1〜5のいずれか一項に記載の方法。
- 保護液体は、前記基板上面の全体をカバーするために、点状の方式で基板上面に対して塗布された後、流れることを特徴とする請求項1〜3、6及び7のいずれか一項に記載の方法。
- 基板下面がプロセス媒質によって湿潤された際に、少なくとも10℃の温度上昇を伴う発熱反応が発生し、且つ、保護液体の層が基板上面に対して形成されることを特徴とする請求項1〜9のいずれか一項に記載の方法。
- 前記保護液体が少なくとも1mmの厚みを有することを特徴とする請求項10に記載の方法。
- 基板下面がプロセス媒質によって湿潤された際に、温度上昇は無視され、且つ、基板上面上の保護液体の層の厚さは、50μm〜200μmであることを特徴とする請求項1〜11のいずれか一項に記載の方法。
- 基板がプロセス媒質の表面に浮いた状態で、基板下面はその内部にプロセス媒質を有するタンク内のプロセス媒質の液体レベルに接触することを特徴とする請求項1〜12のいずれか一項に記載の方法。
- 基板はプロセス媒質による処理の後に洗い流され、保護液体も基板上面から洗い流されるか又は除去されることを特徴とする請求項1〜13のいずれか一項に記載の方法。
- 保護液体は、水よりも大きな粘度を有する液体、PEG又は燐酸であることを特徴とする請求項1〜14のいずれかに記載の方法。
- 貫通孔又は穿孔を有する基板が処理されることを特徴とする請求項1〜15のいずれか一項に記載の方法。
- いくつかの塗布装置が、基板の連続的通過経路を横断する方向において互いに隣接した状態で配置され、且つ、基板は、列をなして互いに前後に連続的通過経路上に導入され、且つ、それぞれ個別に、1つの塗布装置の真下において連続することを特徴とする請求項1〜16のいずれかに記載の方法。
- その内部にプロセス媒質を有するタンクの上方におけるプロセス媒質による基板下面の処理のために搬送される基板の連続的通過経路の上方において、少なくとも1つの塗布装置が、水又は対応する保護液体を上向きの基板上面に塗布するために設けられ、
前記基板は、内部にプロセス媒質を有するタンクの上方を基板の搬送経路の一方から他方へ移動し、
前記水又は対応する保護液体は、前記基板が前記タンクの上方を移動する前に前記基板上面に塗布されることを特徴とする請求項1に記載の方法を実行する装置。 - 塗布装置は、その内部にプロセス媒質を有するタンクから基板の搬送経路の上流の方向に離れて配置されることを特徴とする請求項18に記載の装置。
- 塗布装置は、基板の搬送経路の上流の方向にのみタンクから離れて配置されることを特徴とする請求項19に記載の装置。
- 少なくとも1つの塗布装置が、その内部にプロセス媒質を有するタンクの上方に配置され、更なる塗布装置がタンクから基板の搬送経路の上流の方向に離れて配置されることを特徴とする請求項18〜20の何れか一項に記載の装置。
- 塗布装置は、塗布装置よりも高いところに位置した供給タンクに対して接続されることを特徴とする請求項18〜21の何れか一項に記載の装置。
- 塗布装置の単一の列が、個々の塗布装置が互いに距離をおいた状態で、基板の連続的通過経路を横断する方向において設けられていることを特徴とする請求項22に記載の装置。
- 基板の連続的通過経路に沿って観察した際に、接近する基板の検出と、通過する基板の検出とのために、基板センサが塗布装置の上流に設けられることを特徴とする請求項18〜23のいずれか一項に記載の装置。
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Application Number | Priority Date | Filing Date | Title |
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DE102009050845A DE102009050845A1 (de) | 2009-10-19 | 2009-10-19 | Verfahren und Vorrichtung zur Behandlung einer Substratoberfläche eines Substrats |
DE102009050845.7 | 2009-10-19 | ||
PCT/EP2010/060985 WO2011047894A1 (de) | 2009-10-19 | 2010-07-28 | Verfahren und vorrichtung zur behandlung einer substratoberfläche eines substrats |
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JP2013508957A JP2013508957A (ja) | 2013-03-07 |
JP5763653B2 true JP5763653B2 (ja) | 2015-08-12 |
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US (1) | US8685864B2 (ja) |
EP (1) | EP2491584B2 (ja) |
JP (1) | JP5763653B2 (ja) |
KR (1) | KR101719287B1 (ja) |
CN (1) | CN102754198B (ja) |
AU (1) | AU2010310049A1 (ja) |
CA (1) | CA2778207C (ja) |
DE (1) | DE102009050845A1 (ja) |
ES (1) | ES2536480T5 (ja) |
IL (1) | IL219322A0 (ja) |
MX (1) | MX2012004536A (ja) |
MY (1) | MY155130A (ja) |
PL (1) | PL2491584T3 (ja) |
TW (1) | TWI514452B (ja) |
WO (1) | WO2011047894A1 (ja) |
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JP7021312B2 (ja) | 2020-09-02 | 2022-02-16 | Ntn株式会社 | 焼結軸受 |
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DE102005062528A1 (de) * | 2005-12-16 | 2007-06-21 | Gebr. Schmid Gmbh & Co. | Vorrichtung und Verfahren zur Oberflächenbehandlung von Substraten |
DE102005062527A1 (de) | 2005-12-16 | 2007-06-21 | Gebr. Schmid Gmbh & Co. | Vorrichtung und Verfahren zur Oberflächenbehandlung von Substraten |
JP2007335791A (ja) * | 2006-06-19 | 2007-12-27 | Febacs:Kk | 基板処理装置 |
CN100541730C (zh) | 2007-07-16 | 2009-09-16 | 无锡尚德太阳能电力有限公司 | 半导体基板表面的化学处理方法及其装置 |
DE102007063202A1 (de) | 2007-12-19 | 2009-06-25 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Behandlung von Silizium-Wafern |
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2009
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7021312B2 (ja) | 2020-09-02 | 2022-02-16 | Ntn株式会社 | 焼結軸受 |
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ES2536480T5 (es) | 2019-03-06 |
DE102009050845A1 (de) | 2011-04-21 |
EP2491584B2 (de) | 2018-10-03 |
MY155130A (en) | 2015-09-15 |
WO2011047894A1 (de) | 2011-04-28 |
KR20120093301A (ko) | 2012-08-22 |
TWI514452B (zh) | 2015-12-21 |
CN102754198A (zh) | 2012-10-24 |
IL219322A0 (en) | 2012-06-28 |
US8685864B2 (en) | 2014-04-01 |
CN102754198B (zh) | 2015-09-16 |
US20120234793A1 (en) | 2012-09-20 |
ES2536480T3 (es) | 2015-05-25 |
EP2491584A1 (de) | 2012-08-29 |
AU2010310049A1 (en) | 2012-05-17 |
EP2491584B1 (de) | 2015-03-25 |
MX2012004536A (es) | 2012-10-15 |
JP2013508957A (ja) | 2013-03-07 |
CA2778207C (en) | 2019-02-26 |
PL2491584T3 (pl) | 2015-08-31 |
TW201128693A (en) | 2011-08-16 |
KR101719287B1 (ko) | 2017-03-23 |
CA2778207A1 (en) | 2011-04-28 |
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