JP5758303B2 - ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ - Google Patents

ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ Download PDF

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Publication number
JP5758303B2
JP5758303B2 JP2011545140A JP2011545140A JP5758303B2 JP 5758303 B2 JP5758303 B2 JP 5758303B2 JP 2011545140 A JP2011545140 A JP 2011545140A JP 2011545140 A JP2011545140 A JP 2011545140A JP 5758303 B2 JP5758303 B2 JP 5758303B2
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Japan
Prior art keywords
thread groove
fixing member
cylindrical fixing
divided piece
divided
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JP2011545140A
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Japanese (ja)
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JPWO2011070856A1 (ja
Inventor
三輪田　透
透 三輪田
坂口　祐幸
祐幸 坂口
好伸 大立
好伸 大立
靖 前島
靖 前島
勉 高阿田
勉 高阿田
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EDWARDSJAPAN LIMITED
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EDWARDSJAPAN LIMITED
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Priority to JP2011545140A priority Critical patent/JP5758303B2/ja
Publication of JPWO2011070856A1 publication Critical patent/JPWO2011070856A1/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2011545140A 2009-12-11 2010-10-19 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ Active JP5758303B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011545140A JP5758303B2 (ja) 2009-12-11 2010-10-19 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009281985 2009-12-11
JP2009281985 2009-12-11
JP2011545140A JP5758303B2 (ja) 2009-12-11 2010-10-19 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
PCT/JP2010/068313 WO2011070856A1 (ja) 2009-12-11 2010-10-19 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ

Publications (2)

Publication Number Publication Date
JPWO2011070856A1 JPWO2011070856A1 (ja) 2013-04-22
JP5758303B2 true JP5758303B2 (ja) 2015-08-05

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JP2011545140A Active JP5758303B2 (ja) 2009-12-11 2010-10-19 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ

Country Status (4)

Country Link
JP (1) JP5758303B2 (zh)
KR (1) KR101773632B1 (zh)
CN (1) CN102667169B (zh)
WO (1) WO2011070856A1 (zh)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2650544B1 (en) * 2010-12-10 2020-06-03 Edwards Japan Limited Vacuum pump
KR101883026B1 (ko) * 2011-06-17 2018-07-27 에드워즈 가부시키가이샤 진공 펌프와 그 로터
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ
DE102013207269A1 (de) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
JP6174398B2 (ja) 2013-07-05 2017-08-02 エドワーズ株式会社 真空ポンプ
WO2015045748A1 (ja) * 2013-09-30 2015-04-02 エドワーズ株式会社 ネジ溝ポンプ機構、該ネジ溝ポンプ機構を用いた真空ポンプ、並びに前記ネジ溝ポンプ機構に用いられるロータ、外周側ステータ及び内周側ステータ
JP6331491B2 (ja) * 2013-12-27 2018-05-30 株式会社島津製作所 真空ポンプ
JP2016166594A (ja) * 2015-03-10 2016-09-15 株式会社島津製作所 真空ポンプ
JP6390479B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 ターボ分子ポンプ
JP6413926B2 (ja) * 2015-05-20 2018-10-31 株式会社島津製作所 真空ポンプおよび質量分析装置
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
CN105909538B (zh) * 2016-06-28 2018-06-26 东北大学 一种采用分段式结构牵引级的复合分子泵
JP7098882B2 (ja) * 2017-04-03 2022-07-12 株式会社島津製作所 真空ポンプ
EP3657021B1 (de) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2020186687A (ja) * 2019-05-15 2020-11-19 エドワーズ株式会社 真空ポンプとそのネジ溝ポンプ部の固定部品
EP3670924B1 (de) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vakuumpumpe und verfahren zur herstellung einer solchen
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵
EP4194700A1 (de) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie
EP4273405A1 (de) * 2023-09-20 2023-11-08 Pfeiffer Vacuum Technology AG Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183280A (ja) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu
JPH03138484A (ja) * 1989-07-20 1991-06-12 Leybold Ag 鐘状ロータを備えた摩擦ポンプ
JPH0673395U (ja) * 1993-03-19 1994-10-18 セイコー精機株式会社 排気ポンプ
JPH08511071A (ja) * 1993-05-03 1996-11-19 ライボルト アクチエンゲゼルシヤフト 異なる構成のポンプ区分を備えた摩擦真空ポンプ
JP2001032789A (ja) * 1999-07-23 2001-02-06 Anelva Corp 分子ポンプ
JP2002155891A (ja) * 2000-11-22 2002-05-31 Seiko Instruments Inc 真空ポンプ
JP2004003501A (ja) * 2003-06-27 2004-01-08 Hitachi Koki Co Ltd ドライターボ真空ポンプ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
JP2000291586A (ja) * 1999-03-31 2000-10-17 Seiko Seiki Co Ltd 真空ポンプ
JP2003172290A (ja) * 2001-12-07 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183280A (ja) * 1975-01-18 1976-07-21 Mitsubishi Heavy Ind Ltd Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu
JPH03138484A (ja) * 1989-07-20 1991-06-12 Leybold Ag 鐘状ロータを備えた摩擦ポンプ
JPH0673395U (ja) * 1993-03-19 1994-10-18 セイコー精機株式会社 排気ポンプ
JPH08511071A (ja) * 1993-05-03 1996-11-19 ライボルト アクチエンゲゼルシヤフト 異なる構成のポンプ区分を備えた摩擦真空ポンプ
JP2001032789A (ja) * 1999-07-23 2001-02-06 Anelva Corp 分子ポンプ
JP2002155891A (ja) * 2000-11-22 2002-05-31 Seiko Instruments Inc 真空ポンプ
JP2004003501A (ja) * 2003-06-27 2004-01-08 Hitachi Koki Co Ltd ドライターボ真空ポンプ

Also Published As

Publication number Publication date
CN102667169B (zh) 2016-03-02
JPWO2011070856A1 (ja) 2013-04-22
KR20120115204A (ko) 2012-10-17
KR101773632B1 (ko) 2017-08-31
CN102667169A (zh) 2012-09-12
WO2011070856A1 (ja) 2011-06-16

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