JP5758303B2 - ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ - Google Patents
ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ Download PDFInfo
- Publication number
- JP5758303B2 JP5758303B2 JP2011545140A JP2011545140A JP5758303B2 JP 5758303 B2 JP5758303 B2 JP 5758303B2 JP 2011545140 A JP2011545140 A JP 2011545140A JP 2011545140 A JP2011545140 A JP 2011545140A JP 5758303 B2 JP5758303 B2 JP 5758303B2
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- Prior art keywords
- thread groove
- fixing member
- cylindrical fixing
- divided piece
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011545140A JP5758303B2 (ja) | 2009-12-11 | 2010-10-19 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009281985 | 2009-12-11 | ||
JP2009281985 | 2009-12-11 | ||
JP2011545140A JP5758303B2 (ja) | 2009-12-11 | 2010-10-19 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
PCT/JP2010/068313 WO2011070856A1 (ja) | 2009-12-11 | 2010-10-19 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011070856A1 JPWO2011070856A1 (ja) | 2013-04-22 |
JP5758303B2 true JP5758303B2 (ja) | 2015-08-05 |
Family
ID=44145409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011545140A Active JP5758303B2 (ja) | 2009-12-11 | 2010-10-19 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5758303B2 (ko) |
KR (1) | KR101773632B1 (ko) |
CN (1) | CN102667169B (ko) |
WO (1) | WO2011070856A1 (ko) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2650544B1 (en) * | 2010-12-10 | 2020-06-03 | Edwards Japan Limited | Vacuum pump |
EP2722527B1 (en) * | 2011-06-17 | 2019-05-22 | Edwards Japan Limited | Vacuum pump and rotor therefor |
DE102011118661A1 (de) * | 2011-11-16 | 2013-05-16 | Pfeiffer Vacuum Gmbh | Reibungsvakuumpumpe |
JP6077804B2 (ja) * | 2012-09-06 | 2017-02-08 | エドワーズ株式会社 | 固定側部材及び真空ポンプ |
DE102013207269A1 (de) | 2013-04-22 | 2014-10-23 | Pfeiffer Vacuum Gmbh | Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe |
JP6174398B2 (ja) * | 2013-07-05 | 2017-08-02 | エドワーズ株式会社 | 真空ポンプ |
KR102185479B1 (ko) * | 2013-09-30 | 2020-12-02 | 에드워즈 가부시키가이샤 | 나사 홈 펌프 기구, 상기 나사 홈 펌프 기구를 이용한 진공 펌프, 및 상기 나사 홈 펌프 기구에 이용되는 로터, 외주측 스테이터 및 내주측 스테이터 |
JP6331491B2 (ja) * | 2013-12-27 | 2018-05-30 | 株式会社島津製作所 | 真空ポンプ |
JP2016166594A (ja) * | 2015-03-10 | 2016-09-15 | 株式会社島津製作所 | 真空ポンプ |
JP6390479B2 (ja) * | 2015-03-18 | 2018-09-19 | 株式会社島津製作所 | ターボ分子ポンプ |
JP6413926B2 (ja) * | 2015-05-20 | 2018-10-31 | 株式会社島津製作所 | 真空ポンプおよび質量分析装置 |
JP6692635B2 (ja) * | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | 連結型ネジ溝スペーサ、および真空ポンプ |
CN105909538B (zh) * | 2016-06-28 | 2018-06-26 | 东北大学 | 一种采用分段式结构牵引级的复合分子泵 |
JP7098882B2 (ja) * | 2017-04-03 | 2022-07-12 | 株式会社島津製作所 | 真空ポンプ |
EP3657021B1 (de) * | 2018-11-21 | 2020-11-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP2020186687A (ja) * | 2019-05-15 | 2020-11-19 | エドワーズ株式会社 | 真空ポンプとそのネジ溝ポンプ部の固定部品 |
EP3670924B1 (de) * | 2019-11-19 | 2021-11-17 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und verfahren zur herstellung einer solchen |
CN112160919A (zh) * | 2020-09-28 | 2021-01-01 | 东北大学 | 涡轮分子泵和包括该分子泵的复合分子泵 |
EP4155549A1 (de) | 2022-11-14 | 2023-03-29 | Pfeiffer Vacuum Technology AG | Vakuumpumpe mit verbessertem saugvermögen der holweck-pumpstufe |
EP4194700A1 (de) * | 2023-04-18 | 2023-06-14 | Pfeiffer Vacuum Technology AG | Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie |
EP4273405A1 (de) * | 2023-09-20 | 2023-11-08 | Pfeiffer Vacuum Technology AG | Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5183280A (ja) * | 1975-01-18 | 1976-07-21 | Mitsubishi Heavy Ind Ltd | Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu |
JPH03138484A (ja) * | 1989-07-20 | 1991-06-12 | Leybold Ag | 鐘状ロータを備えた摩擦ポンプ |
JPH0673395U (ja) * | 1993-03-19 | 1994-10-18 | セイコー精機株式会社 | 排気ポンプ |
JPH08511071A (ja) * | 1993-05-03 | 1996-11-19 | ライボルト アクチエンゲゼルシヤフト | 異なる構成のポンプ区分を備えた摩擦真空ポンプ |
JP2001032789A (ja) * | 1999-07-23 | 2001-02-06 | Anelva Corp | 分子ポンプ |
JP2002155891A (ja) * | 2000-11-22 | 2002-05-31 | Seiko Instruments Inc | 真空ポンプ |
JP2004003501A (ja) * | 2003-06-27 | 2004-01-08 | Hitachi Koki Co Ltd | ドライターボ真空ポンプ |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
JP2000291586A (ja) * | 1999-03-31 | 2000-10-17 | Seiko Seiki Co Ltd | 真空ポンプ |
JP2003172290A (ja) * | 2001-12-07 | 2003-06-20 | Boc Edwards Technologies Ltd | 真空ポンプ |
-
2010
- 2010-10-19 JP JP2011545140A patent/JP5758303B2/ja active Active
- 2010-10-19 WO PCT/JP2010/068313 patent/WO2011070856A1/ja active Application Filing
- 2010-10-19 CN CN201080053910.6A patent/CN102667169B/zh active Active
- 2010-10-19 KR KR1020127003659A patent/KR101773632B1/ko active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5183280A (ja) * | 1975-01-18 | 1976-07-21 | Mitsubishi Heavy Ind Ltd | Choenshinbunrikyokaitendoondobunpuseigyogatabunshihonpu |
JPH03138484A (ja) * | 1989-07-20 | 1991-06-12 | Leybold Ag | 鐘状ロータを備えた摩擦ポンプ |
JPH0673395U (ja) * | 1993-03-19 | 1994-10-18 | セイコー精機株式会社 | 排気ポンプ |
JPH08511071A (ja) * | 1993-05-03 | 1996-11-19 | ライボルト アクチエンゲゼルシヤフト | 異なる構成のポンプ区分を備えた摩擦真空ポンプ |
JP2001032789A (ja) * | 1999-07-23 | 2001-02-06 | Anelva Corp | 分子ポンプ |
JP2002155891A (ja) * | 2000-11-22 | 2002-05-31 | Seiko Instruments Inc | 真空ポンプ |
JP2004003501A (ja) * | 2003-06-27 | 2004-01-08 | Hitachi Koki Co Ltd | ドライターボ真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
WO2011070856A1 (ja) | 2011-06-16 |
CN102667169B (zh) | 2016-03-02 |
KR20120115204A (ko) | 2012-10-17 |
CN102667169A (zh) | 2012-09-12 |
KR101773632B1 (ko) | 2017-08-31 |
JPWO2011070856A1 (ja) | 2013-04-22 |
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