JP5743697B2 - 計測装置 - Google Patents

計測装置 Download PDF

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Publication number
JP5743697B2
JP5743697B2 JP2011103788A JP2011103788A JP5743697B2 JP 5743697 B2 JP5743697 B2 JP 5743697B2 JP 2011103788 A JP2011103788 A JP 2011103788A JP 2011103788 A JP2011103788 A JP 2011103788A JP 5743697 B2 JP5743697 B2 JP 5743697B2
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JP
Japan
Prior art keywords
light
optical system
path length
measurement
optical path
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Expired - Fee Related
Application number
JP2011103788A
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English (en)
Japanese (ja)
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JP2012233828A5 (https=
JP2012233828A (ja
Inventor
寛之 結城
寛之 結城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011103788A priority Critical patent/JP5743697B2/ja
Priority to US13/459,962 priority patent/US20120281233A1/en
Publication of JP2012233828A publication Critical patent/JP2012233828A/ja
Publication of JP2012233828A5 publication Critical patent/JP2012233828A5/ja
Application granted granted Critical
Publication of JP5743697B2 publication Critical patent/JP5743697B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2011103788A 2011-05-06 2011-05-06 計測装置 Expired - Fee Related JP5743697B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011103788A JP5743697B2 (ja) 2011-05-06 2011-05-06 計測装置
US13/459,962 US20120281233A1 (en) 2011-05-06 2012-04-30 Measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011103788A JP5743697B2 (ja) 2011-05-06 2011-05-06 計測装置

Publications (3)

Publication Number Publication Date
JP2012233828A JP2012233828A (ja) 2012-11-29
JP2012233828A5 JP2012233828A5 (https=) 2014-06-05
JP5743697B2 true JP5743697B2 (ja) 2015-07-01

Family

ID=47090033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011103788A Expired - Fee Related JP5743697B2 (ja) 2011-05-06 2011-05-06 計測装置

Country Status (2)

Country Link
US (1) US20120281233A1 (https=)
JP (1) JP5743697B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7799490B2 (ja) * 2022-01-06 2026-01-15 株式会社ディスコ 計測装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198540B1 (en) * 1997-03-26 2001-03-06 Kowa Company, Ltd. Optical coherence tomography have plural reference beams of differing modulations
FR2783323B1 (fr) * 1998-09-10 2000-10-13 Suisse Electronique Microtech Dispositif interferometrique pour relever les caracteristiques de reflexion et/ou de transmission optiques en profondeur d'un objet
JP4464519B2 (ja) * 2000-03-21 2010-05-19 オリンパス株式会社 光イメージング装置
US7050171B1 (en) * 2002-11-04 2006-05-23 The United States Of America As Represneted By The Secretary Of The Army Single-exposure interferometer with no moving parts
JP3889697B2 (ja) * 2002-11-22 2007-03-07 日本電信電話株式会社 光バンドパスフィルタ
KR100578140B1 (ko) * 2004-10-07 2006-05-10 삼성전자주식회사 변위 측정을 위한 간섭계 시스템 및 이를 이용한 노광 장치
EP1812772A4 (en) * 2004-11-18 2011-04-27 Morgan Res Corp MINIATURE SPECTROPHOTOMETER WITH FOURIER TRANSFORMATION
JP2006242570A (ja) * 2005-02-28 2006-09-14 Fuji Xerox Co Ltd 表面形状測定装置
JP4987359B2 (ja) * 2006-06-13 2012-07-25 浜松ホトニクス株式会社 表面形状計測装置
DE102007010389B4 (de) * 2007-03-03 2011-03-10 Polytec Gmbh Vorrichtung zur optischen Vermessung eines Objekts
JP5663824B2 (ja) * 2008-03-18 2015-02-04 株式会社豊田中央研究所 距離測定装置

Also Published As

Publication number Publication date
US20120281233A1 (en) 2012-11-08
JP2012233828A (ja) 2012-11-29

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