JPWO2021044979A5 - - Google Patents
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- JPWO2021044979A5 JPWO2021044979A5 JP2021543742A JP2021543742A JPWO2021044979A5 JP WO2021044979 A5 JPWO2021044979 A5 JP WO2021044979A5 JP 2021543742 A JP2021543742 A JP 2021543742A JP 2021543742 A JP2021543742 A JP 2021543742A JP WO2021044979 A5 JPWO2021044979 A5 JP WO2021044979A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical system
- planar
- phase shifter
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 claims description 34
- 238000005259 measurement Methods 0.000 claims description 19
- 238000003384 imaging method Methods 0.000 claims description 9
- 230000004907 flux Effects 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 claims description 3
- 230000001131 transforming effect Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 10
- 238000000605 extraction Methods 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019160764 | 2019-09-03 | ||
| JP2019160764 | 2019-09-03 | ||
| PCT/JP2020/032689 WO2021044979A1 (ja) | 2019-09-03 | 2020-08-28 | 分光測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021044979A1 JPWO2021044979A1 (https=) | 2021-03-11 |
| JPWO2021044979A5 true JPWO2021044979A5 (https=) | 2023-08-10 |
| JP7669039B2 JP7669039B2 (ja) | 2025-04-28 |
Family
ID=74852938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021543742A Active JP7669039B2 (ja) | 2019-09-03 | 2020-08-28 | 分光測定装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12235157B2 (https=) |
| EP (1) | EP4027121A4 (https=) |
| JP (1) | JP7669039B2 (https=) |
| CN (1) | CN114341602B (https=) |
| WO (1) | WO2021044979A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12158417B1 (en) | 2021-09-14 | 2024-12-03 | National University Corporation Kagawa University | Spectrometry device |
| CN121678547A (zh) * | 2026-02-09 | 2026-03-17 | 上海默乐光检科技有限公司 | 一种拉曼光谱仪系统及拉曼光谱分析方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010021024A1 (en) * | 1998-04-10 | 2001-09-13 | Mary Bliss | Method and apparatus for fourier transform spectrometry |
| JP2006071381A (ja) * | 2004-08-31 | 2006-03-16 | Omron Corp | 薄膜計測装置 |
| JP5120873B2 (ja) * | 2007-06-15 | 2013-01-16 | 国立大学法人 香川大学 | 分光計測装置及び分光計測方法 |
| JP5317298B2 (ja) * | 2010-09-08 | 2013-10-16 | 国立大学法人 香川大学 | 分光計測装置及び分光計測方法 |
| US9482576B2 (en) * | 2012-10-05 | 2016-11-01 | National University Corporation Kagawa University | Spectroscopic measurement device having transmissive optical member with a sloped face |
| EP2982949B1 (en) * | 2012-10-05 | 2020-04-15 | National University Corporation Kagawa University | Spectroscopic measurement device |
| US20150153156A1 (en) * | 2013-12-03 | 2015-06-04 | Mvm Electronics, Inc. | High spatial and spectral resolution snapshot imaging spectrometers using oblique dispersion |
| JP6385288B2 (ja) * | 2015-01-29 | 2018-09-05 | 国立大学法人 香川大学 | 分光特性測定装置 |
| DE102015208796A1 (de) * | 2015-05-12 | 2016-11-17 | Technische Universität München | Statisches Fourier-Transformations-Spektrometer |
| JP6732339B2 (ja) * | 2015-07-08 | 2020-07-29 | 国立大学法人 香川大学 | 分光測定装置 |
| JP6744005B2 (ja) * | 2016-03-02 | 2020-08-19 | 国立大学法人 香川大学 | 分光測定装置 |
| US10761034B2 (en) * | 2016-10-04 | 2020-09-01 | Kla-Tencor Corporation | Expediting spectral measurement in semiconductor device fabrication |
| DE102017204888B4 (de) * | 2017-03-23 | 2020-11-19 | Robert Bosch Gmbh | Fourier-Transform-Spektrometer und Verfahren zum Betreiben eines Fourier-Transform-Spektrometers |
| JP7182243B2 (ja) | 2018-06-13 | 2022-12-02 | 国立大学法人 香川大学 | 分光測定装置及び分光測定方法 |
| EP4657036A1 (en) * | 2018-06-13 | 2025-12-03 | National University Corporation Kagawa University | Spectrometer and spectroscopic method |
-
2020
- 2020-08-28 WO PCT/JP2020/032689 patent/WO2021044979A1/ja not_active Ceased
- 2020-08-28 EP EP20861438.8A patent/EP4027121A4/en active Pending
- 2020-08-28 US US17/640,225 patent/US12235157B2/en active Active
- 2020-08-28 JP JP2021543742A patent/JP7669039B2/ja active Active
- 2020-08-28 CN CN202080061774.9A patent/CN114341602B/zh active Active
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