JPWO2021044979A5 - - Google Patents

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Publication number
JPWO2021044979A5
JPWO2021044979A5 JP2021543742A JP2021543742A JPWO2021044979A5 JP WO2021044979 A5 JPWO2021044979 A5 JP WO2021044979A5 JP 2021543742 A JP2021543742 A JP 2021543742A JP 2021543742 A JP2021543742 A JP 2021543742A JP WO2021044979 A5 JPWO2021044979 A5 JP WO2021044979A5
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Japan
Prior art keywords
light
optical system
planar
phase shifter
axis direction
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JP2021543742A
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English (en)
Japanese (ja)
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JPWO2021044979A1 (https=
JP7669039B2 (ja
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Priority claimed from PCT/JP2020/032689 external-priority patent/WO2021044979A1/ja
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JP2021543742A 2019-09-03 2020-08-28 分光測定装置 Active JP7669039B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019160764 2019-09-03
JP2019160764 2019-09-03
PCT/JP2020/032689 WO2021044979A1 (ja) 2019-09-03 2020-08-28 分光測定装置

Publications (3)

Publication Number Publication Date
JPWO2021044979A1 JPWO2021044979A1 (https=) 2021-03-11
JPWO2021044979A5 true JPWO2021044979A5 (https=) 2023-08-10
JP7669039B2 JP7669039B2 (ja) 2025-04-28

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JP2021543742A Active JP7669039B2 (ja) 2019-09-03 2020-08-28 分光測定装置

Country Status (5)

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US (1) US12235157B2 (https=)
EP (1) EP4027121A4 (https=)
JP (1) JP7669039B2 (https=)
CN (1) CN114341602B (https=)
WO (1) WO2021044979A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12158417B1 (en) 2021-09-14 2024-12-03 National University Corporation Kagawa University Spectrometry device
CN121678547A (zh) * 2026-02-09 2026-03-17 上海默乐光检科技有限公司 一种拉曼光谱仪系统及拉曼光谱分析方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010021024A1 (en) * 1998-04-10 2001-09-13 Mary Bliss Method and apparatus for fourier transform spectrometry
JP2006071381A (ja) * 2004-08-31 2006-03-16 Omron Corp 薄膜計測装置
JP5120873B2 (ja) * 2007-06-15 2013-01-16 国立大学法人 香川大学 分光計測装置及び分光計測方法
JP5317298B2 (ja) * 2010-09-08 2013-10-16 国立大学法人 香川大学 分光計測装置及び分光計測方法
US9482576B2 (en) * 2012-10-05 2016-11-01 National University Corporation Kagawa University Spectroscopic measurement device having transmissive optical member with a sloped face
EP2982949B1 (en) * 2012-10-05 2020-04-15 National University Corporation Kagawa University Spectroscopic measurement device
US20150153156A1 (en) * 2013-12-03 2015-06-04 Mvm Electronics, Inc. High spatial and spectral resolution snapshot imaging spectrometers using oblique dispersion
JP6385288B2 (ja) * 2015-01-29 2018-09-05 国立大学法人 香川大学 分光特性測定装置
DE102015208796A1 (de) * 2015-05-12 2016-11-17 Technische Universität München Statisches Fourier-Transformations-Spektrometer
JP6732339B2 (ja) * 2015-07-08 2020-07-29 国立大学法人 香川大学 分光測定装置
JP6744005B2 (ja) * 2016-03-02 2020-08-19 国立大学法人 香川大学 分光測定装置
US10761034B2 (en) * 2016-10-04 2020-09-01 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
DE102017204888B4 (de) * 2017-03-23 2020-11-19 Robert Bosch Gmbh Fourier-Transform-Spektrometer und Verfahren zum Betreiben eines Fourier-Transform-Spektrometers
JP7182243B2 (ja) 2018-06-13 2022-12-02 国立大学法人 香川大学 分光測定装置及び分光測定方法
EP4657036A1 (en) * 2018-06-13 2025-12-03 National University Corporation Kagawa University Spectrometer and spectroscopic method

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