JP7669039B2 - 分光測定装置 - Google Patents

分光測定装置 Download PDF

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Publication number
JP7669039B2
JP7669039B2 JP2021543742A JP2021543742A JP7669039B2 JP 7669039 B2 JP7669039 B2 JP 7669039B2 JP 2021543742 A JP2021543742 A JP 2021543742A JP 2021543742 A JP2021543742 A JP 2021543742A JP 7669039 B2 JP7669039 B2 JP 7669039B2
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Japan
Prior art keywords
light
light beam
optical system
axis direction
phase shifter
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JP2021543742A
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English (en)
Japanese (ja)
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JPWO2021044979A5 (https=
JPWO2021044979A1 (https=
Inventor
伊知郎 石丸
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Kagawa University NUC
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Kagawa University NUC
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Publication of JPWO2021044979A5 publication Critical patent/JPWO2021044979A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4531—Devices without moving parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G01J2003/045—Sequential slits; Multiple slits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J2003/4538—Special processing

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021543742A 2019-09-03 2020-08-28 分光測定装置 Active JP7669039B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019160764 2019-09-03
JP2019160764 2019-09-03
PCT/JP2020/032689 WO2021044979A1 (ja) 2019-09-03 2020-08-28 分光測定装置

Publications (3)

Publication Number Publication Date
JPWO2021044979A1 JPWO2021044979A1 (https=) 2021-03-11
JPWO2021044979A5 JPWO2021044979A5 (https=) 2023-08-10
JP7669039B2 true JP7669039B2 (ja) 2025-04-28

Family

ID=74852938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021543742A Active JP7669039B2 (ja) 2019-09-03 2020-08-28 分光測定装置

Country Status (5)

Country Link
US (1) US12235157B2 (https=)
EP (1) EP4027121A4 (https=)
JP (1) JP7669039B2 (https=)
CN (1) CN114341602B (https=)
WO (1) WO2021044979A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12158417B1 (en) 2021-09-14 2024-12-03 National University Corporation Kagawa University Spectrometry device
CN121678547A (zh) * 2026-02-09 2026-03-17 上海默乐光检科技有限公司 一种拉曼光谱仪系统及拉曼光谱分析方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016142522A (ja) 2015-01-29 2016-08-08 国立大学法人 香川大学 分光特性測定装置
WO2017007024A1 (ja) 2015-07-08 2017-01-12 国立大学法人香川大学 分光測定装置
WO2017150062A1 (ja) 2016-03-02 2017-09-08 国立大学法人香川大学 分光測定装置
JP2019215262A (ja) 2018-06-13 2019-12-19 国立大学法人 香川大学 分光測定装置及び分光測定方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010021024A1 (en) * 1998-04-10 2001-09-13 Mary Bliss Method and apparatus for fourier transform spectrometry
JP2006071381A (ja) * 2004-08-31 2006-03-16 Omron Corp 薄膜計測装置
JP5120873B2 (ja) * 2007-06-15 2013-01-16 国立大学法人 香川大学 分光計測装置及び分光計測方法
JP5317298B2 (ja) * 2010-09-08 2013-10-16 国立大学法人 香川大学 分光計測装置及び分光計測方法
US9482576B2 (en) * 2012-10-05 2016-11-01 National University Corporation Kagawa University Spectroscopic measurement device having transmissive optical member with a sloped face
EP2982949B1 (en) * 2012-10-05 2020-04-15 National University Corporation Kagawa University Spectroscopic measurement device
US20150153156A1 (en) * 2013-12-03 2015-06-04 Mvm Electronics, Inc. High spatial and spectral resolution snapshot imaging spectrometers using oblique dispersion
DE102015208796A1 (de) * 2015-05-12 2016-11-17 Technische Universität München Statisches Fourier-Transformations-Spektrometer
US10761034B2 (en) * 2016-10-04 2020-09-01 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
DE102017204888B4 (de) * 2017-03-23 2020-11-19 Robert Bosch Gmbh Fourier-Transform-Spektrometer und Verfahren zum Betreiben eines Fourier-Transform-Spektrometers
EP4657036A1 (en) * 2018-06-13 2025-12-03 National University Corporation Kagawa University Spectrometer and spectroscopic method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016142522A (ja) 2015-01-29 2016-08-08 国立大学法人 香川大学 分光特性測定装置
WO2017007024A1 (ja) 2015-07-08 2017-01-12 国立大学法人香川大学 分光測定装置
WO2017150062A1 (ja) 2016-03-02 2017-09-08 国立大学法人香川大学 分光測定装置
JP2019215262A (ja) 2018-06-13 2019-12-19 国立大学法人 香川大学 分光測定装置及び分光測定方法

Also Published As

Publication number Publication date
WO2021044979A1 (ja) 2021-03-11
EP4027121A1 (en) 2022-07-13
CN114341602A (zh) 2022-04-12
CN114341602B (zh) 2024-04-02
JPWO2021044979A1 (https=) 2021-03-11
EP4027121A4 (en) 2022-10-12
US20220316945A1 (en) 2022-10-06
US12235157B2 (en) 2025-02-25

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