CN114341602B - 分光测定装置 - Google Patents

分光测定装置 Download PDF

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Publication number
CN114341602B
CN114341602B CN202080061774.9A CN202080061774A CN114341602B CN 114341602 B CN114341602 B CN 114341602B CN 202080061774 A CN202080061774 A CN 202080061774A CN 114341602 B CN114341602 B CN 114341602B
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CN
China
Prior art keywords
light
axis direction
optical system
phase shifter
interference
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CN202080061774.9A
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English (en)
Chinese (zh)
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CN114341602A (zh
Inventor
石丸伊知郎
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Kagawa University NUC
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Kagawa University NUC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4531—Devices without moving parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G01J2003/045—Sequential slits; Multiple slits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J2003/4538—Special processing

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN202080061774.9A 2019-09-03 2020-08-28 分光测定装置 Active CN114341602B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019160764 2019-09-03
JP2019-160764 2019-09-03
PCT/JP2020/032689 WO2021044979A1 (ja) 2019-09-03 2020-08-28 分光測定装置

Publications (2)

Publication Number Publication Date
CN114341602A CN114341602A (zh) 2022-04-12
CN114341602B true CN114341602B (zh) 2024-04-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080061774.9A Active CN114341602B (zh) 2019-09-03 2020-08-28 分光测定装置

Country Status (5)

Country Link
US (1) US12235157B2 (https=)
EP (1) EP4027121A4 (https=)
JP (1) JP7669039B2 (https=)
CN (1) CN114341602B (https=)
WO (1) WO2021044979A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12158417B1 (en) 2021-09-14 2024-12-03 National University Corporation Kagawa University Spectrometry device
CN121678547A (zh) * 2026-02-09 2026-03-17 上海默乐光检科技有限公司 一种拉曼光谱仪系统及拉曼光谱分析方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006071381A (ja) * 2004-08-31 2006-03-16 Omron Corp 薄膜計測装置
JP2008309706A (ja) * 2007-06-15 2008-12-25 Kagawa Univ 分光計測装置及び分光計測方法
CN104704333A (zh) * 2012-10-05 2015-06-10 国立大学法人香川大学 分光特性测量装置
JP2016142522A (ja) * 2015-01-29 2016-08-08 国立大学法人 香川大学 分光特性測定装置
WO2017007024A1 (ja) * 2015-07-08 2017-01-12 国立大学法人香川大学 分光測定装置
WO2017150062A1 (ja) * 2016-03-02 2017-09-08 国立大学法人香川大学 分光測定装置
WO2018067243A1 (en) * 2016-10-04 2018-04-12 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
CN108627247A (zh) * 2017-03-23 2018-10-09 罗伯特·博世有限公司 傅里叶变换光谱仪和用于运行傅里叶变换光谱仪的方法

Family Cites Families (7)

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US20010021024A1 (en) * 1998-04-10 2001-09-13 Mary Bliss Method and apparatus for fourier transform spectrometry
JP5317298B2 (ja) * 2010-09-08 2013-10-16 国立大学法人 香川大学 分光計測装置及び分光計測方法
US9482576B2 (en) * 2012-10-05 2016-11-01 National University Corporation Kagawa University Spectroscopic measurement device having transmissive optical member with a sloped face
US20150153156A1 (en) * 2013-12-03 2015-06-04 Mvm Electronics, Inc. High spatial and spectral resolution snapshot imaging spectrometers using oblique dispersion
DE102015208796A1 (de) * 2015-05-12 2016-11-17 Technische Universität München Statisches Fourier-Transformations-Spektrometer
JP7182243B2 (ja) 2018-06-13 2022-12-02 国立大学法人 香川大学 分光測定装置及び分光測定方法
EP4657036A1 (en) * 2018-06-13 2025-12-03 National University Corporation Kagawa University Spectrometer and spectroscopic method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006071381A (ja) * 2004-08-31 2006-03-16 Omron Corp 薄膜計測装置
JP2008309706A (ja) * 2007-06-15 2008-12-25 Kagawa Univ 分光計測装置及び分光計測方法
CN104704333A (zh) * 2012-10-05 2015-06-10 国立大学法人香川大学 分光特性测量装置
JP2016142522A (ja) * 2015-01-29 2016-08-08 国立大学法人 香川大学 分光特性測定装置
WO2017007024A1 (ja) * 2015-07-08 2017-01-12 国立大学法人香川大学 分光測定装置
WO2017150062A1 (ja) * 2016-03-02 2017-09-08 国立大学法人香川大学 分光測定装置
WO2018067243A1 (en) * 2016-10-04 2018-04-12 Kla-Tencor Corporation Expediting spectral measurement in semiconductor device fabrication
CN108627247A (zh) * 2017-03-23 2018-10-09 罗伯特·博世有限公司 傅里叶变换光谱仪和用于运行傅里叶变换光谱仪的方法

Non-Patent Citations (9)

* Cited by examiner, † Cited by third party
Title
Correction of Spectral Interference of Ethanol and Glucose for Rice Wine Evaluation;Satoru Suzuki, Satsuki Hosono;《International Journal of Chemical Engineering and Applications》;全文 *
Enhanced interference-pattern visibility using multislit optical superposition method for imaging-type two-dimensional Fourier spectroscopy;WEI QI;《Applied Optics》;正文第6255-6259页，图1-12 *
Nonstaining Blood Flow Imaging Using Optical Interference Due to Doppler Shift and Near-Infrared Imaging of Molecular Distribution in Developing Fish Egg Embryos;Mika Ishigaki，Paralee Puangchit;《Analytical chemistry》;全文 *
Proposal of One-Shot-type Spectroscopic-Tomography for Noninvasive Medical-measurement;Shun SATO;《European Conference on Biomedical Optics》;图3 *
Quantitative Evaluation of the Object Color without Influence from the Light Source Color under Unstructured Environment ―A Background Correction Method Using Polarization Properties―;Satsuki HOSONO, Kengo AIZAWA;《Optical Nanostructures and Advanced Materials for Photovoltaics》;全文 *
Signal Improvement in Imaging Type Two- Dimensional Fourier Spectroscopy for Wild-Field Internal Non-Destructive Inspection;Pradeep K. W. Abeygunawardhana;《International Journal of Pharma Medicine and Biological Sciences》;全文 *
Spectroscopic imaging of blood vessels only near the skin surface for non-invasive blood glucose measurement;Masaru FUJIWARA;《Proc. of SPIE-OSA》;全文 *
Ultraminiature one-shot Fourier-spectroscopic tomography;Shun Sato，Wei Q;《Optical Engineering》;全文 *
WEI QI.Enhanced interference-pattern visibility using multislit optical superposition method for imaging-type two-dimensional Fourier spectroscopy.《Applied Optics》.2015,正文第6255-6259页，图1-12. *

Also Published As

Publication number Publication date
WO2021044979A1 (ja) 2021-03-11
EP4027121A1 (en) 2022-07-13
CN114341602A (zh) 2022-04-12
JPWO2021044979A1 (https=) 2021-03-11
EP4027121A4 (en) 2022-10-12
US20220316945A1 (en) 2022-10-06
US12235157B2 (en) 2025-02-25
JP7669039B2 (ja) 2025-04-28

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