JP5737490B2 - トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 - Google Patents
トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 Download PDFInfo
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- JP5737490B2 JP5737490B2 JP2010188741A JP2010188741A JP5737490B2 JP 5737490 B2 JP5737490 B2 JP 5737490B2 JP 2010188741 A JP2010188741 A JP 2010188741A JP 2010188741 A JP2010188741 A JP 2010188741A JP 5737490 B2 JP5737490 B2 JP 5737490B2
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- Prior art keywords
- acoustic wave
- surface acoustic
- saw
- electrode
- frequency
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- 238000010897 surface acoustic wave method Methods 0.000 title claims description 215
- 239000000758 substrate Substances 0.000 claims description 55
- 239000010453 quartz Substances 0.000 claims description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
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- 238000004519 manufacturing process Methods 0.000 description 12
- 238000004088 simulation Methods 0.000 description 9
- 239000004020 conductor Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
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- 229910052782 aluminium Inorganic materials 0.000 description 4
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- 230000007613 environmental effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
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- 229910045601 alloy Inorganic materials 0.000 description 3
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- 230000032683 aging Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
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- 230000009977 dual effect Effects 0.000 description 1
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- JCCNYMKQOSZNPW-UHFFFAOYSA-N loratadine Chemical compound C1CN(C(=O)OCC)CCC1=C1C2=NC=CC=C2CCC2=CC(Cl)=CC=C21 JCCNYMKQOSZNPW-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010188741A JP5737490B2 (ja) | 2010-08-25 | 2010-08-25 | トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010188741A JP5737490B2 (ja) | 2010-08-25 | 2010-08-25 | トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014238239A Division JP2015084535A (ja) | 2014-11-25 | 2014-11-25 | トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012049716A JP2012049716A (ja) | 2012-03-08 |
| JP2012049716A5 JP2012049716A5 (https=) | 2013-10-17 |
| JP5737490B2 true JP5737490B2 (ja) | 2015-06-17 |
Family
ID=45904113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010188741A Expired - Fee Related JP5737490B2 (ja) | 2010-08-25 | 2010-08-25 | トランスバーサル型弾性表面波デバイス、弾性表面波発振器および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5737490B2 (https=) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6192011A (ja) * | 1984-10-11 | 1986-05-10 | Nec Kansai Ltd | 弾性表面波素子の製造方法 |
| JP3126416B2 (ja) * | 1991-06-26 | 2001-01-22 | キンセキ株式会社 | 弾性表面波装置 |
| JP2000216632A (ja) * | 1999-01-20 | 2000-08-04 | Kubota Corp | 表面弾性波発振器 |
| JP3897229B2 (ja) * | 2001-04-27 | 2007-03-22 | 株式会社村田製作所 | 表面波フィルタ |
| JP2006203408A (ja) * | 2005-01-19 | 2006-08-03 | Epson Toyocom Corp | 弾性表面波デバイス |
| JP2007288812A (ja) * | 2005-09-30 | 2007-11-01 | Epson Toyocom Corp | 弾性表面波デバイス、モジュール装置、発振回路および弾性表面波デバイスの製造方法 |
| JP2007259414A (ja) * | 2006-02-24 | 2007-10-04 | Seiko Epson Corp | 弾性表面波装置の温度特性調整方法および弾性表面波装置の製造方法、弾性表面波装置 |
| JP2007300287A (ja) * | 2006-04-28 | 2007-11-15 | Epson Toyocom Corp | 弾性表面波素子および弾性表面波デバイス並びに電子機器 |
| JP4591800B2 (ja) * | 2008-02-20 | 2010-12-01 | エプソントヨコム株式会社 | 弾性表面波デバイスおよび弾性表面波発振器 |
-
2010
- 2010-08-25 JP JP2010188741A patent/JP5737490B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012049716A (ja) | 2012-03-08 |
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