JP5728119B1 - 異種ナノ粒子の同時製造方法 - Google Patents
異種ナノ粒子の同時製造方法 Download PDFInfo
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- Physical Vapour Deposition (AREA)
- Glanulating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
2 真空排気系
3 不活性ガス導入系
4 イオン源
5 蒸着源
6 蒸着物質
7 撹拌槽
8 プロペラ
9 モーター
10 粉体
11 シャッター
12 開口部
13 モーター
14 被蒸着部
15 被蒸着体
16 スクリュー
17 矢印(粉体の流れ)
Claims (1)
- 真空排気系、不活性ガス導入系、蒸着源、及び、被蒸着部を有する物理蒸着槽において、前記蒸着源には、二カ所以上にそれぞれ異なる材料が備えられ、前記被蒸着部には被蒸着体である粉体及びプロペラを有するスクリューが備えられ、前記プロペラを有する前記スクリューによって前記粉体を上下移動させると同時に、前記蒸着源と前記被蒸着部との間に設けられた、回転数を制御可能で開口部を有する板状のシャッターを回転させることによって、前記被蒸着体が二カ所以上の前記蒸着源から放出される蒸着物質に一種類ずつ順次0.2秒以下の時間曝されることを特徴とする異種ナノ粒子の同時製造方法。
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Cited By (1)
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CN113564565A (zh) * | 2021-07-22 | 2021-10-29 | 江苏微导纳米科技股份有限公司 | 粉体镀膜装置及方法 |
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JP2018134589A (ja) * | 2017-02-21 | 2018-08-30 | 株式会社ジーエル・マテリアルズホールディングス | 電解水の製造原料及びそれを用いた電解液、並びに、その製造原料、その電解液、及び、その電解水の製造方法 |
KR102241509B1 (ko) * | 2018-02-02 | 2021-04-16 | 고석근 | 유동성 기판을 이용한 나노 입자 제조 방법 및 이를 위한 장치 |
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JPH1060639A (ja) * | 1996-08-19 | 1998-03-03 | Nippon Telegr & Teleph Corp <Ntt> | 積層薄膜製造装置及び積層薄膜製造方法 |
JP2004256843A (ja) * | 2003-02-25 | 2004-09-16 | Jeol Ltd | 真空蒸着装置 |
JP2005211730A (ja) * | 2004-01-28 | 2005-08-11 | Masayoshi Murata | ナノ粒子製造方法およびナノ粒子製造装置 |
JP2005230631A (ja) * | 2004-02-18 | 2005-09-02 | Masayoshi Murata | ナノ粒子製造方法およびナノ粒子製造装置 |
JP2005246339A (ja) * | 2004-03-08 | 2005-09-15 | Masayoshi Murata | ナノ粒子製造方法及びナノ粒子製造装置 |
JP2007254762A (ja) * | 2006-03-20 | 2007-10-04 | Ulvac Japan Ltd | ナノ粒子製造方法 |
JP2009511754A (ja) * | 2005-10-26 | 2009-03-19 | ピー アンド アイ コーポレーション | 金属、合金及びセラミックスのナノ粒子を均一に真空蒸着させたパウダーの製造方法、及びその製造装置 |
-
2014
- 2014-09-30 JP JP2014200424A patent/JP5728119B1/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1060639A (ja) * | 1996-08-19 | 1998-03-03 | Nippon Telegr & Teleph Corp <Ntt> | 積層薄膜製造装置及び積層薄膜製造方法 |
JP2004256843A (ja) * | 2003-02-25 | 2004-09-16 | Jeol Ltd | 真空蒸着装置 |
JP2005211730A (ja) * | 2004-01-28 | 2005-08-11 | Masayoshi Murata | ナノ粒子製造方法およびナノ粒子製造装置 |
JP2005230631A (ja) * | 2004-02-18 | 2005-09-02 | Masayoshi Murata | ナノ粒子製造方法およびナノ粒子製造装置 |
JP2005246339A (ja) * | 2004-03-08 | 2005-09-15 | Masayoshi Murata | ナノ粒子製造方法及びナノ粒子製造装置 |
JP2009511754A (ja) * | 2005-10-26 | 2009-03-19 | ピー アンド アイ コーポレーション | 金属、合金及びセラミックスのナノ粒子を均一に真空蒸着させたパウダーの製造方法、及びその製造装置 |
JP2007254762A (ja) * | 2006-03-20 | 2007-10-04 | Ulvac Japan Ltd | ナノ粒子製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113564565A (zh) * | 2021-07-22 | 2021-10-29 | 江苏微导纳米科技股份有限公司 | 粉体镀膜装置及方法 |
CN113564565B (zh) * | 2021-07-22 | 2023-12-15 | 江苏微导纳米科技股份有限公司 | 粉体镀膜装置及方法 |
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