JP5726656B2 - ディスク走査型共焦点観察装置 - Google Patents
ディスク走査型共焦点観察装置 Download PDFInfo
- Publication number
- JP5726656B2 JP5726656B2 JP2011148463A JP2011148463A JP5726656B2 JP 5726656 B2 JP5726656 B2 JP 5726656B2 JP 2011148463 A JP2011148463 A JP 2011148463A JP 2011148463 A JP2011148463 A JP 2011148463A JP 5726656 B2 JP5726656 B2 JP 5726656B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning confocal
- confocal observation
- illumination light
- light source
- rotating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 238000005286 illumination Methods 0.000 claims description 108
- 230000003287 optical effect Effects 0.000 claims description 57
- 238000009987 spinning Methods 0.000 description 72
- 238000010586 diagram Methods 0.000 description 11
- 238000004064 recycling Methods 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011148463A JP5726656B2 (ja) | 2011-07-04 | 2011-07-04 | ディスク走査型共焦点観察装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011148463A JP5726656B2 (ja) | 2011-07-04 | 2011-07-04 | ディスク走査型共焦点観察装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013015681A JP2013015681A (ja) | 2013-01-24 |
| JP2013015681A5 JP2013015681A5 (enExample) | 2014-07-17 |
| JP5726656B2 true JP5726656B2 (ja) | 2015-06-03 |
Family
ID=47688411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011148463A Active JP5726656B2 (ja) | 2011-07-04 | 2011-07-04 | ディスク走査型共焦点観察装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5726656B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9733462B2 (en) | 2014-12-17 | 2017-08-15 | Olympus Corporation | Scanning apparatus, confocal observation apparatus and disk scanning apparatus |
| JP6579618B2 (ja) * | 2014-12-17 | 2019-09-25 | オリンパス株式会社 | 走査装置、共焦点観察装置、及びディスク走査装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5386317A (en) * | 1992-05-13 | 1995-01-31 | Prometrix Corporation | Method and apparatus for imaging dense linewidth features using an optical microscope |
| JP4315794B2 (ja) * | 2002-12-27 | 2009-08-19 | オリンパス株式会社 | 共焦点顕微鏡 |
| JP4086664B2 (ja) * | 2003-01-07 | 2008-05-14 | 三菱電機株式会社 | 照明光学系構造及び投写型表示装置 |
| JP2005195739A (ja) * | 2004-01-05 | 2005-07-21 | Nikon Corp | 共焦点光学系及び高さ測定装置 |
-
2011
- 2011-07-04 JP JP2011148463A patent/JP5726656B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013015681A (ja) | 2013-01-24 |
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