JP2013015681A5 - - Google Patents
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- Publication number
- JP2013015681A5 JP2013015681A5 JP2011148463A JP2011148463A JP2013015681A5 JP 2013015681 A5 JP2013015681 A5 JP 2013015681A5 JP 2011148463 A JP2011148463 A JP 2011148463A JP 2011148463 A JP2011148463 A JP 2011148463A JP 2013015681 A5 JP2013015681 A5 JP 2013015681A5
- Authority
- JP
- Japan
- Prior art keywords
- scanning confocal
- confocal observation
- reflecting
- rotating member
- observation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011148463A JP5726656B2 (ja) | 2011-07-04 | 2011-07-04 | ディスク走査型共焦点観察装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011148463A JP5726656B2 (ja) | 2011-07-04 | 2011-07-04 | ディスク走査型共焦点観察装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013015681A JP2013015681A (ja) | 2013-01-24 |
| JP2013015681A5 true JP2013015681A5 (enExample) | 2014-07-17 |
| JP5726656B2 JP5726656B2 (ja) | 2015-06-03 |
Family
ID=47688411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011148463A Active JP5726656B2 (ja) | 2011-07-04 | 2011-07-04 | ディスク走査型共焦点観察装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5726656B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9733462B2 (en) | 2014-12-17 | 2017-08-15 | Olympus Corporation | Scanning apparatus, confocal observation apparatus and disk scanning apparatus |
| JP6579618B2 (ja) * | 2014-12-17 | 2019-09-25 | オリンパス株式会社 | 走査装置、共焦点観察装置、及びディスク走査装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5386317A (en) * | 1992-05-13 | 1995-01-31 | Prometrix Corporation | Method and apparatus for imaging dense linewidth features using an optical microscope |
| JP4315794B2 (ja) * | 2002-12-27 | 2009-08-19 | オリンパス株式会社 | 共焦点顕微鏡 |
| JP4086664B2 (ja) * | 2003-01-07 | 2008-05-14 | 三菱電機株式会社 | 照明光学系構造及び投写型表示装置 |
| JP2005195739A (ja) * | 2004-01-05 | 2005-07-21 | Nikon Corp | 共焦点光学系及び高さ測定装置 |
-
2011
- 2011-07-04 JP JP2011148463A patent/JP5726656B2/ja active Active
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