JP2013536947A5 - - Google Patents
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- Publication number
- JP2013536947A5 JP2013536947A5 JP2013527225A JP2013527225A JP2013536947A5 JP 2013536947 A5 JP2013536947 A5 JP 2013536947A5 JP 2013527225 A JP2013527225 A JP 2013527225A JP 2013527225 A JP2013527225 A JP 2013527225A JP 2013536947 A5 JP2013536947 A5 JP 2013536947A5
- Authority
- JP
- Japan
- Prior art keywords
- planar reflector
- reflector
- imaging system
- light
- front planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims 34
- 230000003287 optical effect Effects 0.000 claims 3
- 238000005286 illumination Methods 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/873,387 US8223443B2 (en) | 2010-09-01 | 2010-09-01 | Collection optics |
| US12/873,387 | 2010-09-01 | ||
| PCT/US2011/049757 WO2012030837A2 (en) | 2010-09-01 | 2011-08-30 | Collection optics |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013536947A JP2013536947A (ja) | 2013-09-26 |
| JP2013536947A5 true JP2013536947A5 (enExample) | 2014-08-21 |
| JP5871929B2 JP5871929B2 (ja) | 2016-03-01 |
Family
ID=45696951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013527225A Active JP5871929B2 (ja) | 2010-09-01 | 2011-08-30 | 集光光学系 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8223443B2 (enExample) |
| JP (1) | JP5871929B2 (enExample) |
| DE (1) | DE112011102900B4 (enExample) |
| WO (1) | WO2012030837A2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9329373B2 (en) * | 2013-02-13 | 2016-05-03 | Canon Kabushiki Kaisha | Catadioptric optical system with multi-reflection element for high numerical aperture imaging |
| US10133043B1 (en) | 2016-09-05 | 2018-11-20 | Telelens LLC. | Compact telephoto lens camera suitable for use in smart phones and similar devices, and methods of using same |
| US9933604B1 (en) * | 2016-09-05 | 2018-04-03 | Weimin Lu | Compact catadioptric lenses and lens systems with improved image quality and methods of using same |
| DE102017202244A1 (de) | 2017-02-13 | 2018-01-11 | Carl Zeiss Smt Gmbh | Optische Baugruppe und optische Anordnung damit |
| JP2019066691A (ja) * | 2017-10-02 | 2019-04-25 | 株式会社目白６７ | 検査装置 |
| US10823943B2 (en) * | 2018-07-31 | 2020-11-03 | Kla Corporation | Plasma source with lamp house correction |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2327947A (en) * | 1941-02-20 | 1943-08-24 | Taylor Taylor & Hobson Ltd | Optical objective |
| JPS51148440A (en) * | 1975-06-14 | 1976-12-20 | Olympus Optical Co Ltd | Microscopic reflecting oriective-lens |
| US4523816A (en) | 1983-08-12 | 1985-06-18 | Vivitar Corporation | Catadioptric lens |
| US5089910A (en) | 1990-06-28 | 1992-02-18 | Lookheed Missiles & Space Company, Inc. | Infrared catadioptric zoom relay telescope with an asperic primary mirror |
| JPH0820359B2 (ja) | 1990-07-26 | 1996-03-04 | 日本分光株式会社 | 全反射測定方法及び装置 |
| WO2002093230A1 (en) * | 2001-05-15 | 2002-11-21 | Industrial Research Limited | High etendue optical imaging system |
| JP4509559B2 (ja) * | 2001-11-13 | 2010-07-21 | パナソニック株式会社 | 広角撮像光学系とこれを備えた広角撮像装置、監視用撮像装置、車載用撮像装置、及び投写装置 |
| JP4588324B2 (ja) * | 2002-04-05 | 2010-12-01 | マサチユセツツ・インスチチユート・オブ・テクノロジイ | 組織測定用プローブ |
| JP2003307680A (ja) | 2002-04-17 | 2003-10-31 | Nikon Corp | 反射屈折光学系 |
| US7158215B2 (en) | 2003-06-30 | 2007-01-02 | Asml Holding N.V. | Large field of view protection optical system with aberration correctability for flat panel displays |
| US7643226B2 (en) | 2005-10-03 | 2010-01-05 | Salk Institute For Biological Studies | Maximal-aperture reflecting objective |
| EP2203777B1 (en) * | 2007-10-02 | 2018-12-05 | KLA-Tencor Corporation | Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths |
-
2010
- 2010-09-01 US US12/873,387 patent/US8223443B2/en active Active
-
2011
- 2011-08-30 JP JP2013527225A patent/JP5871929B2/ja active Active
- 2011-08-30 DE DE112011102900.4T patent/DE112011102900B4/de active Active
- 2011-08-30 WO PCT/US2011/049757 patent/WO2012030837A2/en not_active Ceased
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