JP5871929B2 - 集光光学系 - Google Patents

集光光学系 Download PDF

Info

Publication number
JP5871929B2
JP5871929B2 JP2013527225A JP2013527225A JP5871929B2 JP 5871929 B2 JP5871929 B2 JP 5871929B2 JP 2013527225 A JP2013527225 A JP 2013527225A JP 2013527225 A JP2013527225 A JP 2013527225A JP 5871929 B2 JP5871929 B2 JP 5871929B2
Authority
JP
Japan
Prior art keywords
katahan
reflector
light
imaging system
itay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013527225A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013536947A5 (enExample
JP2013536947A (ja
Inventor
アズミ カドクライ
アズミ カドクライ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Corp filed Critical KLA Corp
Publication of JP2013536947A publication Critical patent/JP2013536947A/ja
Publication of JP2013536947A5 publication Critical patent/JP2013536947A5/ja
Application granted granted Critical
Publication of JP5871929B2 publication Critical patent/JP5871929B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0085—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with both a detector and a source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
JP2013527225A 2010-09-01 2011-08-30 集光光学系 Active JP5871929B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/873,387 US8223443B2 (en) 2010-09-01 2010-09-01 Collection optics
US12/873,387 2010-09-01
PCT/US2011/049757 WO2012030837A2 (en) 2010-09-01 2011-08-30 Collection optics

Publications (3)

Publication Number Publication Date
JP2013536947A JP2013536947A (ja) 2013-09-26
JP2013536947A5 JP2013536947A5 (enExample) 2014-08-21
JP5871929B2 true JP5871929B2 (ja) 2016-03-01

Family

ID=45696951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013527225A Active JP5871929B2 (ja) 2010-09-01 2011-08-30 集光光学系

Country Status (4)

Country Link
US (1) US8223443B2 (enExample)
JP (1) JP5871929B2 (enExample)
DE (1) DE112011102900B4 (enExample)
WO (1) WO2012030837A2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9329373B2 (en) * 2013-02-13 2016-05-03 Canon Kabushiki Kaisha Catadioptric optical system with multi-reflection element for high numerical aperture imaging
US10133043B1 (en) 2016-09-05 2018-11-20 Telelens LLC. Compact telephoto lens camera suitable for use in smart phones and similar devices, and methods of using same
US9933604B1 (en) * 2016-09-05 2018-04-03 Weimin Lu Compact catadioptric lenses and lens systems with improved image quality and methods of using same
DE102017202244A1 (de) 2017-02-13 2018-01-11 Carl Zeiss Smt Gmbh Optische Baugruppe und optische Anordnung damit
JP2019066691A (ja) * 2017-10-02 2019-04-25 株式会社目白６７ 検査装置
US10823943B2 (en) * 2018-07-31 2020-11-03 Kla Corporation Plasma source with lamp house correction

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2327947A (en) * 1941-02-20 1943-08-24 Taylor Taylor & Hobson Ltd Optical objective
JPS51148440A (en) * 1975-06-14 1976-12-20 Olympus Optical Co Ltd Microscopic reflecting oriective-lens
US4523816A (en) 1983-08-12 1985-06-18 Vivitar Corporation Catadioptric lens
US5089910A (en) 1990-06-28 1992-02-18 Lookheed Missiles & Space Company, Inc. Infrared catadioptric zoom relay telescope with an asperic primary mirror
JPH0820359B2 (ja) 1990-07-26 1996-03-04 日本分光株式会社 全反射測定方法及び装置
WO2002093230A1 (en) * 2001-05-15 2002-11-21 Industrial Research Limited High etendue optical imaging system
JP4509559B2 (ja) * 2001-11-13 2010-07-21 パナソニック株式会社 広角撮像光学系とこれを備えた広角撮像装置、監視用撮像装置、車載用撮像装置、及び投写装置
JP4588324B2 (ja) * 2002-04-05 2010-12-01 マサチユセツツ・インスチチユート・オブ・テクノロジイ 組織測定用プローブ
JP2003307680A (ja) 2002-04-17 2003-10-31 Nikon Corp 反射屈折光学系
US7158215B2 (en) 2003-06-30 2007-01-02 Asml Holding N.V. Large field of view protection optical system with aberration correctability for flat panel displays
US7643226B2 (en) 2005-10-03 2010-01-05 Salk Institute For Biological Studies Maximal-aperture reflecting objective
EP2203777B1 (en) * 2007-10-02 2018-12-05 KLA-Tencor Corporation Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths

Also Published As

Publication number Publication date
DE112011102900B4 (de) 2021-01-14
WO2012030837A2 (en) 2012-03-08
US20120050890A1 (en) 2012-03-01
US8223443B2 (en) 2012-07-17
DE112011102900T5 (de) 2013-06-13
WO2012030837A3 (en) 2012-05-18
JP2013536947A (ja) 2013-09-26

Similar Documents

Publication Publication Date Title
US5220454A (en) Cata-dioptric reduction projection optical system
JP5871929B2 (ja) 集光光学系
JP4804704B2 (ja) 特にマイクロリソグラフィ用の照明光学系
JP5678354B2 (ja) レフラキシコン装置およびその組立方法
JP4693947B2 (ja) カタディオプトリック光学系およびそれを有する露光装置
TWI782331B (zh) 用於投影微影的照明光學單元、光瞳琢面反射鏡、光學系統、照明系統、投影曝光裝置、用以產生一微結構組件之方法以及微結構組件
CN104977720B (zh) 一种扩束准直光学系统及其制备方法
US6331710B1 (en) Reflective optical systems for EUV lithography
JPH11326768A (ja) アナモフィック光束整形光学系および整形方法
CN101221281B (zh) 一种全反射投影光学系统
WO2014136287A1 (ja) 結合光学系
JP2014013380A (ja) 高開口数結像に対して全反射を用いる反射屈折光学系
US20250093770A1 (en) Illumination optical unit for a mask inspection system
US6231198B1 (en) Reflective optical integrator
JP2004170869A (ja) 結像光学系、露光装置および露光方法
CN114415358B (zh) 折反射式光学系统
JP2004295042A (ja) 画像投影装置
CN1825210B (zh) 离轴投影光学系统和使用该系统的超紫外线光刻装置
US7554728B1 (en) Modified gregorian astronomical telescope
CN120891626B (zh) 一种深紫外球面折反射式检测物镜
CN118859646B (zh) 一种反射式光刻镜头
JP2008536166A (ja) 非球面を使用した小型で超高ｎａの反射屈折対物レンズ
KR20250172840A (ko) 물체 필드를 이미지 필드로 이미징하기 위한 euv 이미징 광학 유닛
JP2004510344A (ja) 特にマイクロリソグラフィ用の照明光学系
KR20250112635A (ko) 투영 광학계 및 노광 장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140701

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140701

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150210

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150212

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150501

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150605

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20150702

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150807

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20151215

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160112

R150 Certificate of patent or registration of utility model

Ref document number: 5871929

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250