DE112011102900B4 - Abbildungssystem - Google Patents

Abbildungssystem Download PDF

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Publication number
DE112011102900B4
DE112011102900B4 DE112011102900.4T DE112011102900T DE112011102900B4 DE 112011102900 B4 DE112011102900 B4 DE 112011102900B4 DE 112011102900 T DE112011102900 T DE 112011102900T DE 112011102900 B4 DE112011102900 B4 DE 112011102900B4
Authority
DE
Germany
Prior art keywords
reflector
imaging system
light
reflective surface
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112011102900.4T
Other languages
German (de)
English (en)
Other versions
DE112011102900T5 (de
Inventor
Azmi Kadkly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of DE112011102900T5 publication Critical patent/DE112011102900T5/de
Application granted granted Critical
Publication of DE112011102900B4 publication Critical patent/DE112011102900B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0085—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with both a detector and a source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
DE112011102900.4T 2010-09-01 2011-08-30 Abbildungssystem Active DE112011102900B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/873,387 2010-09-01
US12/873,387 US8223443B2 (en) 2010-09-01 2010-09-01 Collection optics
PCT/US2011/049757 WO2012030837A2 (en) 2010-09-01 2011-08-30 Collection optics

Publications (2)

Publication Number Publication Date
DE112011102900T5 DE112011102900T5 (de) 2013-06-13
DE112011102900B4 true DE112011102900B4 (de) 2021-01-14

Family

ID=45696951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112011102900.4T Active DE112011102900B4 (de) 2010-09-01 2011-08-30 Abbildungssystem

Country Status (4)

Country Link
US (1) US8223443B2 (enExample)
JP (1) JP5871929B2 (enExample)
DE (1) DE112011102900B4 (enExample)
WO (1) WO2012030837A2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9329373B2 (en) * 2013-02-13 2016-05-03 Canon Kabushiki Kaisha Catadioptric optical system with multi-reflection element for high numerical aperture imaging
US9933604B1 (en) * 2016-09-05 2018-04-03 Weimin Lu Compact catadioptric lenses and lens systems with improved image quality and methods of using same
US10133043B1 (en) 2016-09-05 2018-11-20 Telelens LLC. Compact telephoto lens camera suitable for use in smart phones and similar devices, and methods of using same
DE102017202244A1 (de) 2017-02-13 2018-01-11 Carl Zeiss Smt Gmbh Optische Baugruppe und optische Anordnung damit
JP2019066691A (ja) * 2017-10-02 2019-04-25 株式会社目白６７ 検査装置
US10823943B2 (en) * 2018-07-31 2020-11-03 Kla Corporation Plasma source with lamp house correction

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040246595A1 (en) * 2001-05-15 2004-12-09 Beach Allan David Optical imaging system with aberration correcting means

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2327947A (en) * 1941-02-20 1943-08-24 Taylor Taylor & Hobson Ltd Optical objective
JPS51148440A (en) * 1975-06-14 1976-12-20 Olympus Optical Co Ltd Microscopic reflecting oriective-lens
US4523816A (en) 1983-08-12 1985-06-18 Vivitar Corporation Catadioptric lens
US5089910A (en) 1990-06-28 1992-02-18 Lookheed Missiles & Space Company, Inc. Infrared catadioptric zoom relay telescope with an asperic primary mirror
JPH0820359B2 (ja) 1990-07-26 1996-03-04 日本分光株式会社 全反射測定方法及び装置
JP4509559B2 (ja) 2001-11-13 2010-07-21 パナソニック株式会社 広角撮像光学系とこれを備えた広角撮像装置、監視用撮像装置、車載用撮像装置、及び投写装置
JP4588324B2 (ja) * 2002-04-05 2010-12-01 マサチユセツツ・インスチチユート・オブ・テクノロジイ 組織測定用プローブ
JP2003307680A (ja) 2002-04-17 2003-10-31 Nikon Corp 反射屈折光学系
US7158215B2 (en) 2003-06-30 2007-01-02 Asml Holding N.V. Large field of view protection optical system with aberration correctability for flat panel displays
WO2007041458A2 (en) 2005-10-03 2007-04-12 The Salk Institute For Biological Studies Maximal-aperture reflecting objective
WO2009046137A1 (en) * 2007-10-02 2009-04-09 Kla-Tencor Corporation Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040246595A1 (en) * 2001-05-15 2004-12-09 Beach Allan David Optical imaging system with aberration correcting means

Also Published As

Publication number Publication date
DE112011102900T5 (de) 2013-06-13
US20120050890A1 (en) 2012-03-01
JP5871929B2 (ja) 2016-03-01
JP2013536947A (ja) 2013-09-26
WO2012030837A3 (en) 2012-05-18
WO2012030837A2 (en) 2012-03-08
US8223443B2 (en) 2012-07-17

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Representative=s name: REICHERT & LINDNER PARTNERSCHAFT PATENTANWAELT, DE

R012 Request for examination validly filed
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01N0021330000

Ipc: G02B0017000000

R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final