JP5723740B2 - Blade lubrication mechanism and blade lubrication method of dicing apparatus - Google Patents

Description

  The present invention relates to a blade lubrication mechanism and a blade lubrication method for a dicing apparatus, and in particular, accurately supplies a lubricating or cooling liquid to the peripheral surface of a blade that rubs against a workpiece even when the blade rotates at high speed. The present invention relates to a blade lubrication mechanism and a blade lubrication method of a dicing apparatus capable of performing the above.

Conventionally, when cutting a workpiece for dicing with a blade that rotates at high speed,
Cutting was performed while supplying a cooling liquid to the cutting point. However, a material having low mechanical strength on the workpiece is peeled off due to friction between the blade and the workpiece during the cutting process, and a material having a low melting point is melted and welded to the blade. Friction at the time of machining may occur at a cutting point where cutting proceeds, but mainly occupies an element that generates a large amount of frictional heat caused by rubbing the side surface of the blade against the workpiece. When such frictional heat is generated, the workpiece at the cutting point is further softened, and the blade bites into the workpiece and the workpiece is thermally deformed or deteriorated, or the mechanical strength is low. In the material, problems such as peeling of the material itself occurred. Furthermore, the problem of frictional heat also promotes wear of the blade itself, shortening the blade life.

  In order to avoid such a problem, many methods for supplying cooling water to the blade surface have been disclosed. However, when a large amount of water is supplied, the following problems occur. As shown in FIG. 7, even when a large mass of water hits the blade 25 during the cutting of the workpiece 24, all of the water bounces without adapting to the surface of the blade 25 rotating at high speed. Even if some water droplets adhere to the surface of the blade 25, the blade 25 is rotated at a high speed, so that it is immediately blown off by centrifugal force.

  Furthermore, when the blade has heat, the cooling water locally evaporates in the vicinity of the blade, so the surface tension of the water rises apparently. May form water droplets. When water droplets are formed, the result is a certain mass and weight, which is eventually blown away by centrifugal force.

  On the other hand, when water is supplied in the form of a mist like a spray spray, it does not reach the blade surface but is blown off as it is due to the wind pressure generated by the rotation of the blade. Therefore, various problems arise in order to supply cooling water independently from the outside of the blade to effectively act on the blade surface.

  For example, the following dicing apparatuses are known as conventional techniques related to the above problems. The dicing apparatus according to the prior art includes a cutting apparatus that rotationally drives a cutting blade, a support table that supports a workpiece and is moved relative to the cutting apparatus, and a workpiece that is fixed to the apparatus body and is being cut. First cleaning water spraying means for spraying cleaning water toward the material, and second cleaning water spraying means fixed to the support table and spraying the cleaning water toward the workpiece being cut. Furthermore, the cutting device is provided with cutting water jetting means for supplying cutting water toward the end surface of the cutting blade, and provided on both side surfaces of the cutting blade, toward the cutting portion of the workpiece by the cutting blade. Cooling water injection means for supplying cooling water is provided, and the injection direction of the wash water injected from the first wash water injection means and the injection direction of the wash water injected from the second wash water injection means are provided. Blown away by the cutting blade Blow-off of the cutting water and cooling water is set to a direction not countered the direction.

  Since the entire surface of the workpiece being cut is covered with the cleaning water by the first cleaning water spraying means fixed to the apparatus main body and the second cleaning water spraying means fixed to the support table, the wafer Can be prevented, and contamination of the workpiece can be prevented. Further, the cutting device is provided with the cutting water injection means and the cooling water injection means, so that the workpiece can be cut well (for example, see Patent Document 1).

  Further, as another conventional technique related to a blade lubrication mechanism in a dicing apparatus, for example, the following dicing apparatus is known. In this prior art, in a dicing apparatus that performs grooving or cutting on a workpiece with a rotating blade, a cooling water nozzle for supplying cooling water to the blade and the workpiece is provided, and the blade is sandwiched between the cooling water nozzles. A plurality of pairs of jets arranged are formed, and the jets of the cooling water jetted from the jets toward the blades are not perpendicular to the surface of the blades, and are in order with respect to the rotation direction of the blades. It is formed so as to inject at a predetermined angle with respect to the surface of the blade in the direction.

  And since the injection direction of the cooling water injected toward the blade is not perpendicular to the surface of the blade, it is injected in a forward direction with respect to the rotation direction of the blade and having a predetermined angle with respect to the surface of the blade. An increase in rotational load resistance of the spindle to which the blade is attached is suppressed (see, for example, Patent Document 2).

  Further, as another conventional technique, for example, the following is known. In this prior art, pure water is allowed to flow from a nozzle opened in the vicinity of the blade, thereby removing frictional heat during dicing to improve lubricity and removing cutting waste. However, when cooling the blade, a large amount of pure water is required, and not all of the supplied pure water effectively contributes to cooling and lubrication of the blade.

  In particular, when supplying with a nozzle, even when trying to supply a very small amount of water to the blade, water and other liquids have very large surface tension, so water droplets are formed, resulting in intermittent supply. An extremely small amount of liquid cannot be efficiently supplied to the blade surface. In particular, in the case of a highly viscous liquid, the surface tension also increases concomitantly, so the droplets must be very large, and very large droplets are supplied intermittently. In particular, when large droplets are supplied to the blade surface, the entire droplet is blown away by the centrifugal force generated by the high-speed rotation of the blade. As a result, most of the liquid is wasted without adhering to the blade surface. (See, for example, Patent Document 3).

  As another conventional technique, for example, the following is known. In this prior art, the spindle shaft has an axial hole and a radial hole, and the coolant is continuously jetted from the coolant jet port toward the tip of the blade by centrifugal force. However, when sprayed radially, the circumferential direction of the blade is not necessarily uniform, and there is a variation between a portion where a large amount of cooling liquid flows in the radial direction and a portion where it does not. If the liquid is not supplied uniformly in the circumferential direction of the blade, the friction varies in the circumferential direction and induces minute vibrations.Therefore, there is a concern that the blade life may be shortened by the uneven liquid supply. Yes (see, for example, Patent Document 4).

JP 2007-188974 A JP 2006-339372 A Japanese Patent Laid-Open No. 5-335412 JP-A-6-71653

  In the prior art described in Patent Document 1, cutting water is supplied from the cutting water jetting unit toward the end face of the cutting blade, and from the both side surfaces of the cutting blade to the cutting portion of the workpiece by the cooling water jetting unit. It is configured to supply cooling water. However, since the cutting water and the cooling water by the cutting water injection means and the cooling water injection means are rebounded by the cutting blade rotating at high speed or blown off by centrifugal force, the cutting water and cooling water are applied to the peripheral side surface of the cutting blade that rubs against the workpiece It is difficult to supply efficiently.

  In the prior art described in Patent Document 2, the injection direction of the cooling water injected from the cooling water nozzle is a forward direction with respect to the rotation direction of the blade and is injected with a predetermined angle with respect to the surface of the blade. It is configured. However, since the cooling water sprayed from the cooling water nozzle is rebounded by the blade rotating at high speed or blown off by centrifugal force, it is efficiently supplied to the peripheral side surface of the blade that rubs against the workpiece. In that respect, it is difficult as above.

  In the prior art described in Patent Document 3, pure water is allowed to flow from the nozzle to the vicinity of the blade, thereby removing frictional heat during dicing and improving lubricity. However, a large amount of pure water is required to cool the blade, and the pure water supplied from the nozzle is rebounded by the blade rotating at high speed or blown off by centrifugal force as described above. Not all of the supplied pure water effectively contributes to cooling and lubrication of the blade. Therefore, the waste of pure water becomes very large.

  In the prior art described in Patent Document 4, the coolant is continuously sprayed from the coolant spray port on the spindle shaft toward the tip of the blade by centrifugal force. However, in this cooling liquid injection method, the cooling liquid may not be supplied uniformly in the circumferential direction of the blade, causing friction in the circumferential direction and inducing the blade to vibrate slightly, shortening the life of the blade. There are concerns.

  Therefore, the liquid for lubrication or cooling supplied to the blade rotating at high speed is surely transferred without waste to the blade peripheral surface that rubs against the workpiece without being bounced off or blown off by centrifugal force. The cooling liquid is thinly extended and supplied to the peripheral side of the blade to efficiently lubricate and cool the cutting point with a very small amount of liquid, and even if the blade side is in a slightly complicated space, the nozzle The required amount of lubricating or cooling liquid is reliably transferred to the peripheral surface of the blade without being affected by the discharge pressure or the gravity applied to the liquid, and the lubricating or cooling liquid has a high viscosity. It is stable and continuous without interruption, and it is continuously supplied pinpoint to the peripheral side surface of the blade for unnecessary useless lubrication or cooling. Friction that occurs at the friction point between the blade peripheral surface and the workpiece while facilitating the evaporation of heat by evaporating heat by supplying the liquid to the blade peripheral surface efficiently and thinly without using a body. A technical problem to be solved in order to remove heat and further extend the life of the blade arises, and the present invention aims to solve this problem.

The present invention has been proposed in order to achieve the above object, and the invention according to claim 1 is characterized in that a blade rotating at a required rotational speed is used to cut a workpiece into a piece moving relative to the blade. In the blade lubrication mechanism of the dicing apparatus provided with a lubrication mechanism for supplying a liquid for lubrication or cooling to the peripheral side surface of the blade, the lubrication mechanism is formed from a capillary structure member formed of a soft linear member. The capillary structure member is bent in the longitudinal direction of the capillary structure member, the tip portion of the capillary structure member in the longitudinal direction is brought into contact with the peripheral surface of the blade, and the capillary structure member spreads uniformly in the capillary structure member the liquid, the blade lubricating mechanism of the capillary structure of the distal end transport and supplies dicing apparatus by utilizing the interfacial tension to the blade peripheral surface from Hisage To.

  According to this configuration, the lubricating or cooling liquid supplied from the liquid supply means to the capillary structure member spreads uniformly in the capillary structure member by the capillary phenomenon, and reaches the peripheral surface of the blade at the tip of the capillary structure member. Transfer to be smeared. That is, a mechanism for transferring and supplying liquid from solid to solid by utilizing interfacial tension is provided.

  The method of supplying the liquid from the liquid supply means to the capillary structure member may be intermittent, for example, supplied in the form of dripping. When a liquid for lubrication or cooling is supplied to the capillary structure member, it automatically spreads within the capillary structure member, and when it is supplied so as to be transferred from the tip of the capillary structure member to the peripheral side of the blade, it is thinly stretched. Thus, the blade is continuously supplied to the peripheral side surface of the blade.

  By doing so, lubrication or cooling of the cutting point is performed with a very small amount without using a large amount of lubricating or cooling liquid. Further, since the thin film is efficiently stretched thinly, evaporation of the supplied liquid is promoted, and heat accumulated in the blade can be removed by heat of vaporization due to evaporation.

Even if the lubricating or cooling liquid to be used has a high viscosity, the inside of the capillary structure member is uniformly dispersed by the capillary phenomenon, and the liquid is transferred from the solid as the capillary structure member to the solid as the blade. When supplying the liquid for lubrication or cooling, the liquid can be supplied smoothly, continuously and minimally while utilizing the interfacial tension acting between the solid and the liquid. Therefore, it is possible to supply liquid with almost no waste. In the present specification, cutting refers to both cutting (half-cut) processing and cutting (full-cut) processing for cutting. In addition, by using a capillary structure composed of soft linear members, the blade side surface is not excessively damaged even if it contacts the side surface of the blade that rotates at high speed, and the air spindle that rotates the blade is greatly damaged. There is no load. Moreover, the tip of the capillary structure member can be brought into contact with the blade with an extremely light constant pressure by bringing the capillary structure into contact with the peripheral surface of the blade while bending the capillary structure.

According to a second aspect of the invention, the capillary structure member, brush-like member provides a blade lubrication mechanism of the dicing device constructed in either Fudejo member Neu deviation.

According to this configuration, specifically, the capillary structure member is constituted by either a brush-like member or a brush-like member, so that a very small amount of liquid can be smoothly transferred to the peripheral side surface of the blade that rotates at high speed by capillary action. Can be supplied. Further, even if the blade side surface is in a slightly complicated portion as described above, the tip of the capillary structure member can be given to the blade with a very light constant pressure while bending the member. By disposing the tip portion extending to the peripheral side surface of the blade, it is possible to reliably transfer and supply the lubricating or cooling liquid along the member to the peripheral side surface of the blade.

According to a third aspect of the invention, the blade has a plurality of concentric microgrooves on the blade circumferential surface, the capillary tube structure members, while bending in the longitudinal direction of the capillary structure member, wherein the capillary structure The dicing according to claim 1 or 2, wherein a tip portion of the member is brought into contact with the plurality of minute groove portions, and the liquid is transferred from the tip portion of the capillary structure member into the minute groove of the blade by utilizing interfacial tension. An apparatus blade lubrication mechanism is provided.

  According to this configuration, a plurality of minute grooves are formed concentrically along the blade rotation direction, that is, the movement direction of the blade, on the peripheral side surface of the blade, and are efficiently lubricated or cooled along the plurality of minute grooves. Supplied in a form to be coated with liquid. For this reason, the liquid is not rebounded against the blade rotating at high speed, and all the liquid is not blown off by the centrifugal force.

  Since the plurality of minute grooves are formed concentrically, the lubricating or cooling liquid tends to spread in the circumferential direction, and the liquid is uniformly distributed in the circumferential direction of the blade. The lubricating or cooling liquid imprinted in the concentric minute grooves gradually moves to the outside of the blade while maintaining the uniformity in the circumferential direction by centrifugal force as the blade rotates at high speed. . At that time, a thin lubricating film is formed on the peripheral surface of the blade and plays a role of greatly reducing the friction between the peripheral surface of the blade and the workpiece. As a result, the cutting process proceeds smoothly with a low frictional force, so that the workpiece does not thermally deform or peel off due to excessive frictional force. Further, excessive wear between the blade and the workpiece prevents the blade from progressing at an early stage.

The invention according to claim 4 provides the blade lubrication mechanism of the dicing apparatus according to claim 3, wherein the capillary structure member is made of a conductive fiber .

According to this configuration, the capillary structure member uses the conductive soft member in addition to the carbon fiber to provide the blade lubrication mechanism of the dicing apparatus composed of the conductive fiber, so that static electricity staying on the blade can be prevented. It is possible to efficiently supply the lubricating liquid to the side surface of the blade while removing it efficiently.

According to a fifth aspect of the present invention , a lubricating or cooling surface is provided on a peripheral side surface of a blade that rotates in a longitudinal direction at a required rotational speed while moving relative to the workpiece and cuts the workpiece into pieces. In a blade lubrication method for a dicing apparatus for supplying a liquid, a capillary structure member composed of a soft linear member is bent in the longitudinal direction of the capillary structure member while a longitudinal tip portion of the capillary structure member is bladed A dicing apparatus characterized in that the liquid which is brought into contact with a peripheral side surface and spreads uniformly in the capillary structure member is transported and supplied from a tip portion of the capillary structure member to a blade peripheral side surface using interfacial tension . A blade lubrication method is provided.

According to this configuration, the lubricating or cooling liquid supplied to the capillary structure member spreads uniformly in the capillary structure member by capillary action, and is applied to the peripheral side surface of the blade at the tip of the capillary structure member. Transport. That is, liquid is transferred and supplied from solid to solid by utilizing interfacial tension.
The method of supplying the liquid to the capillary structure member may be intermittent, for example, supplied in the form of dripping. When a liquid for lubrication or cooling is supplied to the capillary structure member, it automatically spreads within the capillary structure member, and when it is supplied so as to be transferred from the tip of the capillary structure member to the peripheral side of the blade, it is thinly stretched. Thus, the blade is continuously supplied to the peripheral side surface of the blade.
By doing so, lubrication or cooling of the cutting point is performed with a very small amount without using a large amount of lubricating or cooling liquid. Further, since the thin film is efficiently stretched thinly, evaporation of the supplied liquid is promoted, and heat accumulated in the blade can be removed by heat of vaporization due to evaporation.
Even if the lubricating or cooling liquid to be used has a high viscosity, the inside of the capillary structure member is uniformly dispersed by the capillary phenomenon, and the liquid is transferred from the solid as the capillary structure member to the solid as the blade. When supplying the liquid for lubrication or cooling, the liquid can be supplied smoothly, continuously and minimally while utilizing the interfacial tension acting between the solid and the liquid. Therefore, it is possible to supply liquid with almost no waste. In addition, by using a capillary structure composed of soft linear members, the blade side surface is not excessively damaged even if it contacts the side surface of the blade that rotates at high speed, and the air spindle that rotates the blade is greatly damaged. There is no load. Moreover, the tip of the capillary structure member can be brought into contact with the blade with an extremely light constant pressure by bringing the capillary structure into contact with the peripheral surface of the blade while bending the capillary structure.

  According to the first aspect of the present invention, the liquid for lubrication or cooling is thinly stretched so as to be applied from the tip of the capillary structure member to the peripheral side surface of the blade, and continuously supplied, so that a very small amount of liquid can be applied to the cutting point. Lubricating and cooling can be performed, and by supplying the lubricating or cooling liquid thinly and efficiently to the blade peripheral surface, the evaporation of the supplied liquid is accelerated and the heat of vaporization caused by the evaporation is separated from the blade peripheral surface. Even if the frictional heat generated at the friction point of the workpiece is removed and the lubricating or cooling liquid to be used has a high viscosity, the capillary structure member is uniformly dispersed by the capillary phenomenon, and a solid body called a capillary structure member is obtained. When a liquid is transferred from a solid to a blade, the liquid for lubrication or cooling is smoothed by utilizing the interfacial tension acting between the solid and the liquid. In the advantage that continuously and can be fed to the blade peripheral surface to a minimum. In addition, at the blade tip, which is the machining contribution part that contributes to machining, excessive lubrication can distribute stress as a cushioning material when giving incision, or the blade tip can slide on the workpiece surface to give effective cutting. However, aggressive lubrication reduces the machining speed. On the other hand, the blade side surface is a portion that does not contribute to processing. Therefore, it is necessary to improve the lubricity of the blade side surface as much as possible and to further reduce the heat generated by unnecessary friction. Therefore, it is desirable to supply the liquid while actively applying the liquid to the blade side surface that needs lubrication without contributing to the processing.

In addition to the effect of the invention of the first aspect, the invention described in claim 2 further comprises a capillary structure member, specifically, a brush-like member or a brush-like member, so that it is extremely A small amount of liquid can be smoothly transferred and supplied to the peripheral side surface of the blade rotating at high speed. Further, even if the blade side surface is in a slightly complicated portion as described above, there is an advantage that the tip portion can be extended to the peripheral side surface of the blade while bending the member.

In addition to the effect of claim 1 or 2, the invention described in claim 3 is formed by concentrically forming a plurality of minute grooves on the peripheral side surface of the blade, so that a plurality of liquids for lubrication or cooling can be obtained. Without being bounced off against the blade rotating at high speed and being blown off by centrifugal force, the liquid is reliably transferred to the peripheral surface of the blade that rubs against the workpiece without waste. Can be supplied. The lubricating or cooling liquid imprinted in a plurality of concentric minute grooves gradually moves to the outside of the blade while maintaining the uniformity in the circumferential direction by centrifugal force as the blade rotates at high speed. A thin lubricating film can be formed on the peripheral side surface. As a result, cutting can be smoothly performed with a low frictional force. Further, there is an advantage that the blade can be prevented from progressing at an early stage due to excessive friction between the blade and the workpiece, and the life of the blade can be extended.

In addition to the effects of the invention of claim 3, the invention described in claim 4 further provides that the capillary structure member provides a blade lubrication mechanism of a dicing device composed of a conductive fiber. By using a soft material, there is an advantage that it is possible to efficiently supply a lubricating liquid to the side surface of the blade while efficiently removing static electricity remaining on the blade.

Invention of claim 5, wherein the hair capillary structure the liquid or for cooling the supplied lubricant into the material, uniformly spread into the capillary structure member by capillary action, is transferred to the tip of the capillary structure member blade Supplied to be applied to the peripheral side of At this time, the tip of the capillary structure member does not have to be in direct contact with the peripheral side surface of the blade, and the tip of the capillary structure member is in contact with the lubricating or cooling liquid contained in the capillary structure member. The liquid for lubrication or cooling is supplied so as to be applied to the peripheral side surface of the blade. By doing so, it is possible to lubricate and cool the cutting point with a very small amount without using a large amount of lubricating or cooling liquid. Further, since the lubricating or cooling liquid is efficiently thinly stretched, evaporation of the supplied liquid is promoted, and there is an advantage that heat remaining on the blade can be removed by heat of vaporization due to evaporation.

The front view of the blade lubrication mechanism of the dicing apparatus which concerns on the Example of this invention. FIG. 2 is a side view of the blade lubrication mechanism of FIG. It is a figure which shows the blade part in the Example of FIG. 1, (a) is a front view, (b) is sectional drawing which expands and shows a blade front-end | tip part. FIG. 2 is a partially enlarged cross-sectional view showing an example of behavior of a lubricating or cooling liquid supplied to the blade in the embodiment of FIG. 1, and (a) is a cross-sectional view showing a plurality of minute groove portions on the peripheral surface of the blade; FIG. 4B is a diagram showing the state of the liquid that has entered the minute groove, and FIG. 5C is a diagram showing the state of the liquid staying on the peripheral side surface of the blade. The top view of the dicing apparatus applied to the Example of FIG. It is a figure which shows the example of a processing method of several concentric groove | channels to a blade surrounding side surface, (a) is a top view, (b) is a side view. The figure for demonstrating a mode that cooling water rebounds on a blade surface in the conventional supply method of the cooling water to a blade surface.

According to the present invention, the lubricating or cooling liquid supplied to the blade rotating at a high speed is reliably transferred without waste to the peripheral surface of the blade that rubs against the workpiece without being rebounded or blown off by centrifugal force. Even if the blade side is in a slightly intricate space, it can be efficiently lubricated and cooled to the cutting point with a very small amount of liquid. The required amount of lubricating or cooling liquid is reliably transferred to the peripheral surface of the blade without being affected by the discharge pressure or the gravity applied to the liquid when supplied by the nozzle, and the lubricating or cooling liquid has a high viscosity. Even if you have it, it is stable without interruption, and it is continuously supplied pinpoint to the peripheral side surface of the blade, for unnecessary useless lubrication or cooling Friction that occurs at the friction point between the blade peripheral surface and the workpiece while facilitating the evaporation of heat by evaporating heat by supplying the liquid to the blade peripheral surface efficiently and thinly without using the liquid. In order to achieve the purpose of removing heat and further prolonging the life of the blade, the blade that rotates at a required rotational speed is used to cut the workpiece that moves relative to the blade into pieces. In a blade lubrication mechanism of a dicing apparatus provided with a lubrication mechanism that supplies a liquid for lubrication or cooling to the peripheral side surface of the blade, the lubrication mechanism is composed of a capillary structure member composed of a soft linear member, While the capillary structure member is bent in the longitudinal direction of the capillary structure member, the distal end portion in the longitudinal direction of the capillary structure member Adopting a configuration in which the liquid that has spread uniformly in the capillary structure member is transported and supplied from the tip of the capillary structure member to the blade peripheral surface using interfacial tension. Realized by.

  A preferred embodiment of the present invention will be described below with reference to FIGS. 1 to 6A and 6B. First, the configuration of the blade lubrication mechanism of the dicing apparatus according to the present embodiment will be described. FIG. 5 shows a dicing apparatus 1 applied to this embodiment. In the figure, a rectangular housing 2 formed in a square in plan view, which is a main body portion of the dicing apparatus 1, has a right isosceles triangular portion at the right front corner thereof cut out, and is 45 with respect to the front surface of the dicing apparatus 1. A hypotenuse edge forming an angle of degrees is formed. An opening 3 with an opening / closing cover is provided at the oblique edge, and workpiece exchange and maintenance work are performed on the rectangular housing 2 from the opening 3.

  On the rectangular housing 2, a rotatable work table 4 on which a wafer W as a work (hereinafter referred to as a wafer W) is placed, and a blade 5 for cutting the wafer W into individual pieces. 5 and a work table feed mechanism 6 for moving the work table 4 on which the wafer W is placed relative to the blades 5 and 5 are provided. As will be described later, a plurality of concentric minute grooves are formed in the annular regions of the required widths on both circumferential side surfaces of the blades 5 and 5. The work table feeding mechanism 6 is installed on a first diagonal line connecting the right front corner and the left rear corner of the rectangular housing 2.

  A spindle moving mechanism 7 is installed on the rectangular housing 2, and the spindle moving mechanism 7 includes a guide rail 8. The spindle moving mechanism 7 is installed on a second diagonal line connecting the left front corner and the right rear corner of the rectangular housing 2. For this reason, the spindle moving mechanism 7 is arranged so as to be orthogonal to the work table feeding mechanism 6. Therefore, the guide rail 8 of the spindle moving mechanism 7 intersects the work feed direction by the work table feed mechanism 6 at a right angle.

  Two spindles 9, 9 are movably supported on the guide rail 8, and the spindles 9, 9 are arranged opposite to each other on the same axis. Blades 5 and 5 are rotatably attached to the spindles 9 and 9, respectively. A workpiece cutting portion 10 is disposed at a substantially central portion of the dicing apparatus 1, that is, at a portion where the spindle moving mechanism 7 and the work table feeding mechanism 6 are orthogonal to each other in the rectangular housing 2. 5 and 5 cut the wafer W. In the workpiece cutting unit 10, the moving distance of the spindles 9, 9 that hold the blades 5, 5 can be increased according to the length of the diagonal line, so even a large-diameter wafer W can be efficiently processed. Can be cut.

  A work exchanging portion 11 is provided in the right front side portion of the dicing apparatus 1, and the work exchanging portion 11 is disposed in the vicinity of the opening 3 provided at the right front oblique side edge of the rectangular housing 2. In this work exchanging section 11, the wafer W placed on the work table 4 can be easily exchanged. Reference numeral 12 in the drawing is an oil pan that receives waste liquid of cutting water and cleaning water flowing out from the workpiece cutting unit 10, and the oil pan 12 is formed so as to surround the work table feeding mechanism 6.

  A drainage mechanism 14 having a drainage port 13 and an exhaust mechanism 16 having an exhaust port 15 are disposed at the left rear corner of the rectangular housing 2. When the wafer W is cut by the blades 5 and 5 that rotate at high speed, the drain port 13 is disposed on an extension line in a direction in which cutting water and cleaning water scatter along the rotation direction of the blades 5 and 5. . Further, the exhaust port 15 is formed substantially directly above the drain port 13. Note that an operation / display unit, an imaging unit, a monitor TV, an indicator lamp, a controller (not shown), and the like are provided at predetermined positions of the dicing apparatus 1.

  Then, the wafer W is cut by the dicing apparatus 1 configured as described above as follows. First, the blades 5 and 5 are attached to the spindles 9 and 9, and the wafer W is mounted and fixed on the work table 4. Next, the work table 4 is transported along the first diagonal direction to the substantially central portion of the rectangular housing 2 by the work table feeding mechanism 6, and the wafer W is carried into the work cutting unit 10 at a predetermined moving speed.

  Thereafter, the spindles 9 and 9 are moved toward the center of the workpiece cutting unit 10, and the wafer W is cut while the blades 5 and 5 attached to the spindles 9 and 9 are rotated at high speed. During processing, a lubricating or cooling liquid and cleaning water are supplied to processing points on the wafer W from a later-described lubrication mechanism and cleaning nozzle (not shown) provided at the tips of the spindles 9 and 9, respectively.

  Then, the wash water containing the supplied lubricating or cooling liquid is received by the oil pan 12. Thereafter, the cleaning water containing the lubricating or cooling liquid flows downstream of the oil pan 12 and then passes through the drain port 13 and the drain pipe (not shown) of the drain mechanism 14 connected to the oil pan 12. And discharged to the outside. Further, at the time of machining, the mist is scattered along the rotation direction of the blades 5 and 5 together with the cleaning water containing the lubricating or cooling liquid, and the scattered mist is left behind from the workpiece cutting unit 10 to the left side of the rectangular casing 2. It flows toward the side corner. Thereafter, the mist passes through an exhaust pipe (not shown) from the exhaust port 15 of the exhaust mechanism 16 and is discharged to the outside.

  In this way, when the cutting process along one cutting line for the wafer W is completed, the blades 5 and 5 are indexed and positioned to the adjacent cutting line by one pitch to be processed next, and the same as described above. According to the procedure, cutting along the cutting line is performed. When the cutting process is repeated and all the cutting processes along the predetermined number of cutting lines are completed, the wafer W is rotated 90 degrees together with the work table 4, and the above-described cutting line is performed by the same processing procedure as described above. Cutting is performed along a cutting line in a direction orthogonal to, and the wafer W is finally cut in a dice shape.

  Next, the configuration of the blade 5 provided in the dicing apparatus 1 and a lubrication mechanism for supplying a liquid for lubrication or cooling to the peripheral side surface of the blade 5 is shown in FIGS. 1 to 3 (a) and (b). I will explain. The blade 5 is formed by electrodepositing diamond abrasive grains having a diamond count of about # 240 on a grinding part 5a which is a part contributing to cutting. As shown in FIGS. 1 and 3 (a) and (b), a plurality of concentric micro grooves 17 are formed in the annular region of the required width adjacent to the grinding portion 5a on both side surfaces of the blade 5, respectively. Is formed. The plurality of concentric micro grooves 17 are formed with a groove width of about 0.1 mm and a pitch of about 0.2 mm, for example.

  The grinding part 5a that contributes to the cutting process has a small contact area with the wafer W, and the cutting process constantly proceeds by destruction. The peripheral side surface portion that does not contribute to the cutting process with respect to the grinding portion 5a has a large contact area with the wafer W and large unnecessary friction. Therefore, both peripheral side surfaces of the blade 5 are portions that need to be actively lubricated, and a plurality of the concentric minute grooves 17 are formed in these portions.

  For example, as shown in FIGS. 6A and 6B, the concentric micro grooves 17 are formed by a dresser having a diamond count # 60 which is coarser than the diamond abrasive grains of the blade 5 while rotating the blade 5. By lightly abutting 23 on both peripheral side surfaces of the blade 5, it is possible to engrave an annular region having a required width on both peripheral side surfaces of the blade 5.

  As shown in FIGS. 1 and 2, the blade 5 is surrounded by a flange cover 18 fixed to the spindle 9 side, and a liquid supply as a liquid supply means attached to the flange cover 18 is provided. A tube 19 and a capillary structure member 20 which receives a supply of a lubricating or cooling liquid from the liquid supply tube 19 and transfers the supplied lubricating or cooling liquid to both peripheral side surfaces of the blade 5 by capillary action. And a lubrication mechanism 21 is provided.

As the capillary structure member 20 , either a brush-like member or a brush-like member is used. That is, a structural member in which small spaces are continuously present in the gap is used. As shown in FIG. 2, the capillary structure member 20 is slightly bent between the lower end portion of the liquid supply pipe 19 and the peripheral side surface of the blade 5, and the blade structure from both sides so that the tip thereof follows the rotation direction of the blade 5. 5 is in contact with both side surfaces. The capillary structure member 20 is formed to have a required width in order to uniformly apply a liquid for lubrication or cooling into the plurality of minute grooves 17 engraved with the required width.

  As shown in FIG. 2, a guide member 22 made of a rigid material that guides the distal end portion of the capillary structure member 20 to the peripheral side surface of the blade 5 is provided at the lower end portion of the liquid supply tube 19. As a constituent material such as the brush-like member and the brush-like member as the capillary structure member 20, for example, a soft linear member such as a polyester wire or cotton fiber can be suitably used. If a soft linear member or the like is used, even if it contacts the side surface of the blade 5 that rotates at high speed, the side surface of the blade 5 is not excessively damaged.

  And even if it is the capillary structure member 20 which uses such a soft linear member, by guiding the front-end | tip part of this capillary structure member 20 to the surrounding side surface of the braid | blade 5 with the guide member 22 made from a rigid material, capillary tube The tip of the capillary structure member 20 made of a soft linear member can be guided to come into contact with the blade 5 without being affected by the gravity of the liquid existing in the gap in the structure member 20 and rotates at high speed. It becomes possible to reliably supply the lubricating or cooling liquid to the peripheral side surface of the blade 5.

  Surfactant is mentioned as the liquid for lubrication thru | or cooling supplied to the surrounding side surface of the braid | blade 5. FIG. For example, surfactants that reduce frictional force include ethanol and isopropyl alcohol (IPA). However, if an alcohol is used, it is a liquid with a high vapor pressure, and thus vaporizes the latent heat contained in the blade 5 by evaporating. It is possible to take away as heat and greatly reduce the temperature of the blade 5. In addition, there is an effect as a lubricant for reducing the frictional force between the blade 5 and the wafer W. In addition to this, a highly viscous liquid may be used.

  In order to supply lubricating or cooling liquid to both sides of the blade 5 from both sides of the blade 5, various members such as a spindle cover surround the blade 5. It is necessary to devise space, such as adjusting the discharge pressure of water from the nozzle from a position slightly away from the nozzle to the cutting position, or arranging the nozzle above the blade and flowing down from above by gravity. It is. On the other hand, in this embodiment, the capillary structure member 20 is used for the lubrication mechanism 21, so that the distal end portion is bent from both sides of the blade 5 to both circumferential side surfaces of the blade 5 while bending the capillary structure member 20. Even if it is a slightly complicated position, the tip portion is brought into contact with both circumferential side surfaces of the blade 5 and the liquid for lubrication or cooling is transported and supplied along the capillary structure member 20. It is possible.

  Next, the operation of the blade lubrication mechanism of the dicing apparatus configured as described above will be described. The lubricating or cooling liquid supplied from the liquid supply pipe 19 to the capillary structure member 20 spreads uniformly in the capillary structure member 20 by capillary action, and reaches the plurality of microgrooves 17 at the tip of the capillary structure member 20. It is supplied to the peripheral side surface of the blade 5 in a form to be imprinted. That is, a mechanism for transferring and supplying liquid from solid to solid by utilizing interfacial tension is provided.

  The method of supplying the liquid from the liquid supply pipe 19 to the capillary structure member 20 may be intermittent, for example, supplied in a form of dropping. When a liquid for lubrication or cooling is supplied to the capillary structure member 20, it automatically spreads within the capillary structure member 20, and is transferred from the tip of the capillary structure member 20 to a plurality of micro grooves 17 on the peripheral side surface of the blade 5. When supplying to hand over, it is thinly stretched and continuously supplied to the plurality of microgrooves 17 on the peripheral side surface of the blade 5.

  The lubricating or cooling liquid applied so as to be imprinted in the plurality of micro-grooves 17 is not rebounded against the blade 5 rotating at high speed, and is not immediately blown away even if centrifugal force is applied. It is uniformly supplied to the peripheral side surface of the blade 5 along the plurality of minute grooves 17.

  The tip of the capillary structure member 20 is established at a certain point by making the thickness of one brush member or the like as the capillary structure member 20 correspond to the groove width of the minute groove 17 carved on the peripheral side surface of the blade 5. Enters the micro-groove 17 on the peripheral side surface. As a result, the lubricating or cooling liquid that has soaked into the capillary structure member 20 is supplied to the microgrooves 17 at a pinpoint. Since the liquid that has soaked into the solid spreads due to the interfacial tension between the solids, the surface tension of the liquid is apparently lowered and it is difficult to form a mass such as a water droplet. As a result, the liquid soaked in the capillary structure material 20 is transferred to the peripheral side surface of the blade 5 with its area expanded as it is by the interfacial tension.

  As shown in FIG. 4A, minute grooves 17 are formed on the peripheral side surface of the blade 5. The linear / thread-like members constituting the capillary structure member 20 are appropriately bent so as to enter the micro grooves 17. The bent linear / thread-like member automatically enters the low micro-groove 17 at a constant pressure due to the bending stress, and the liquid can be surely discharged even in the groove recessed by the entered linear / thread-like member. It can be conveyed and supplied into the microgroove 17. Further, since the minute groove 17 is cut, the linear / thread-like member does not greatly deviate from the minute groove 17, and is applied along the minute groove 17.

  The micro-grooves 17 may be jagged in shape, but in this case, the purpose is to provide a constant guide for the liquid, so that the wettability is alternately changed by surface coating or the like. May be.

  In addition, as shown in FIG. 4B, the liquid imprinted in the minute groove 17 is surrounded by the groove e, and the liquid e exists. Even if centrifugal force is applied, the surface area to be contacted is large. Since it is wide, large interfacial tension acts and it is not blown away immediately. And as shown in FIG.4 (c), the liquids e of the circumferential direction are tied together and a fixed liquid film is always formed. As a result, when the blade 5 has heat, the liquid e evaporates, thereby effectively taking away the heat of the blade 5 by the heat of vaporization, so that the heat of the blade 5 does not rise and remains at a low temperature. Cutting progresses.

  As described above, the lubrication or cooling liquid is not used in a large amount, and the cutting point is lubricated or cooled with a very small amount. Further, since the cutting process proceeds smoothly with a low frictional force, the wafer W as a workpiece is not thermally deformed and the wafer W is not peeled off due to excessive frictional force. Further, the excessive friction between the blade 5 and the wafer W prevents the blade 5 from progressing at an early stage.

  Even if the lubricating or cooling liquid used has a high viscosity, the inside of the capillary structure member 20 is uniformly dispersed by the capillary phenomenon, and the liquid from the solid of the capillary structure member 20 to the solid of the blade 5 is liquid. The liquid can be supplied smoothly, continuously and minimally at the point of supplying the liquid for lubrication or cooling while utilizing the interfacial tension acting between the solid and the liquid. It is possible to supply liquid with almost no waste without requiring excessive liquid.

  As described above, in the dicing apparatus having the blade lubrication mechanism according to the present embodiment, the liquid for lubrication or cooling is thinly extended so as to be applied from the tip of the capillary structure member 20 to the peripheral side surface of the blade 5 and continuously. By supplying, it is possible to lubricate and cool the cutting point with a very small amount of liquid.

  By supplying the lubricating or cooling liquid thinly and efficiently on the peripheral surface of the blade 5, evaporation of the supplied liquid is promoted and heat is generated at the friction point between the peripheral surface of the blade 5 and the wafer W due to evaporation heat. Frictional heat can be removed.

  Even if the lubricating or cooling liquid to be used has a high viscosity, the inside of the capillary structure member 20 is uniformly dispersed by the capillary phenomenon, and the liquid is transferred from the solid of the capillary structure member 20 to the solid of the blade. At this time, the liquid for lubrication or cooling can be smoothly and continuously supplied to the peripheral surface of the blade 5 by utilizing the interfacial tension acting between the solid and the liquid.

  Even if both circumferential side surfaces of the blade 5 are in a slightly intricate space, the distal end portion is extended from both sides of the blade 5 to both circumferential side surfaces while bending the capillary structure member 20. Thus, the liquid for lubrication or cooling is not affected by the discharge pressure or gravity when supplied by the nozzle, and the necessary amount of liquid is transferred at high speed while being transmitted through the capillary structure member 20 by the surface tension of the liquid itself. The rotating blade 5 can be smoothly transported and supplied to both circumferential side surfaces.

  Specifically, by forming the capillary structure member 20 with any one of a brush-like member, a brush-like member, and a foam member, a very small amount of liquid can be smoothly transferred to the peripheral side surface of the blade 5 that rotates at high speed by capillary action. Can be supplied.

  When the capillary structure member 20 is used, a minute communication space is formed in the capillary structure member 20. A very small amount of liquid can automatically transfer the liquid in the space by capillary action generated by the interfacial tension acting between the individual liquids in the space. For example, a brush-like member or a brush-like member is formed by bundling a plurality of linear members, so that a minute communication space is formed between the linear members, and the liquid is made uniform by capillary action and automatically. It becomes possible to transfer to.

  When a very small amount of liquid is transferred by capillary action, it is possible to transfer the liquid with almost no influence of gravity. Therefore, in the blade lubrication mechanism of the dicing apparatus according to the present embodiment, the side surface of the vertical blade 5 is used. Even if it is a portion, the lubricating liquid can be satisfactorily applied to the side surface of the blade 5 without dropping in the direction of gravity.

  As such a brush-like member and a brush-like member, for example, a polyester wire or a fiber such as cotton can be suitably used. Further, it may be a hair member used in a general brush. If a soft linear member or the like is used, even if it contacts the blade side surface that rotates at high speed, the blade side surface is not excessively damaged, and a large load is not applied to the air spindle that rotates the blade 5.

  However, when liquid is supplied to the side surface of the blade 5 that rotates in the vertical direction, the blade is surely affected by gravity applied to the liquid existing in a gap formed by a linear member or the like, or by the influence of the blade 5 that rotates at high speed. It may not be possible to supply to the side. Therefore, it is desirable to guide the soft linear member to the vicinity of the blade 5 with the rigid guide member 22 that guides in the direction of the blade 5 so that the vicinity of the tip of the soft linear member is in contact with the blade 5.

  A capillary structure member 20 such as PVA sponge is preferably used instead of the linear member. However, since such a foamable member is also soft, the capillary structure member 20 is guided to the vicinity of the blade by a rigid base material. It is only necessary to bring the tip of the blade into contact with the blade. In addition, although it is set as contact here, it is not necessary to make it contact separately. Due to the degree to which no droplet is formed from the capillary structure member 20 which is an individual to the side of the blade 5 which is the other solid, that is, the interfacial tension acting between the solid and the liquid (here, the capillary structure member). And between the blades) may be close to a distance that allows the liquid (lubricating liquid) to be delivered smoothly.

  On the other hand, since the blade dicer is processed while supplying a large amount of water as described in the cited document, it is generally assumed to be wet processing. However, recently, porous low dielectric constant film materials such as Low-k materials are processed while water is applied. In the case of wet processing, there is a problem that the characteristics of the film change because the film absorbs water (in the case of a low-k material, the dielectric constant changes). Therefore, a low-k material or the like cannot normally be wet-processed, that is, cannot be processed using a blade, and a dry process using a laser or the like is required.

  According to the blade lubrication mechanism of the dicing apparatus according to the present embodiment, even in the dicing process using the blade 5, it is not necessary to supply the liquid to the other wafer region or the like by simply applying a thin liquid on the side surface of the blade. Further, since the liquid supplied to the side surface of the blade 5 is also applied very thinly, it immediately vaporizes and takes away the heat on the side surface of the blade 5 as heat of vaporization. As a result, the side surface of the blade 5 does not generate heat and can be processed stably, and the liquid does not touch the surface of the wafer W, particularly the inside of the chip other than the cutting line (scribe line). Therefore, almost dry processing can be performed.

  Therefore, by using the blade lubrication mechanism of the dicing apparatus according to the present embodiment, even a low-k material that has been conventionally used for dry machining can be cut with a blade.

  Next, in the case of dry processing in machining, when the cutting material is a hard and brittle material such as silicon and is not a conductive material such as a metal material, and the blade to be cut is also an insulating material, Since the insulators rub against each other during processing, static electricity sometimes accumulates in the blade 5 main body, and the cutting process proceeds to discharge between the surface of the wafer W and the blade 5 to destroy the chips in the wafer W. In some cases, the wafer W cannot be removed from the work table 4 due to static electricity.

  Even in such a case, it is preferable to use carbon fiber or the like as a linear member for supplying a liquid to the blade 5 in the blade lubrication mechanism of the dicing apparatus according to the present embodiment. The carbon fiber may be bundled and brought into contact with the side surface of the blade, and the liquid may be supplied to the side surface of the blade 5 by impregnating the carbon fiber with a lubricating liquid. In the case of carbon fiber, since electric conductivity is good, even if the blade 5 is charged by rubbing during cutting, it is immediately discharged through the carbon fiber and static electricity does not accumulate on the blade 5.

  By using a conductive soft member other than the carbon fiber, it is possible to efficiently supply the lubricating liquid to the side surface of the blade 5 while efficiently removing static electricity accumulated in the blade 5.

  By forming the plurality of micro grooves 17 concentrically on the peripheral side surface of the blade 5, the lubricating or cooling liquid is supplied along the plurality of micro grooves 17 so as to be efficiently applied and rotated at high speed. The liquid can be reliably transferred and supplied without waste to the peripheral surface of the blade 5 that rubs against the wafer W as a workpiece without being rebounded against the blade 5 and without being blown off by centrifugal force.

The lubricating or cooling liquid imprinted in the concentric micro grooves 17 gradually moves to the outside of the blade 5 while maintaining the uniformity in the circumferential direction by centrifugal force as the blade 5 rotates at high speed. In addition, a thin lubricating film can be formed on the circumferential surface of the blade 5. As a result, the cutting process can be smoothly performed with a low frictional force, and the workpiece W on the wafer W is not thermally deformed and the workpiece on the wafer W is not peeled off by an excessive frictional force. Therefore, the blade 5 and the wafer W can be stably cut even when a low dielectric constant material such as a low-k material having a low mechanical strength or a composite material thereof exists on the wafer W. It is possible to prevent the blade 5 from advancing at an early stage due to excessive friction between the two, thereby extending the life of the blade 5.

  The present invention can be variously modified without departing from the spirit of the present invention, and the present invention naturally extends to the modified ones.

  Lubricating or cooling liquid is thinly drawn and supplied to the peripheral surface of the blade to efficiently lubricate and cool the cutting point with a very small amount of liquid, and even if the lubricating or cooling liquid has high viscosity, it is interrupted So that it can be stably and continuously supplied to the peripheral surface of the blade in a pinpoint manner, and the liquid can be efficiently and thinly stretched on the peripheral surface of the blade without using unnecessary lubricating or cooling liquid. By supplying the liquid, it is easy to evaporate the liquid to promote the heat dissipation due to the heat of vaporization, and it can be widely applied to cutting processing of mounting boards, etc. where it is indispensable to remove the frictional heat generated at the blade peripheral side and the friction point of the workpiece. Is possible.

DESCRIPTION OF SYMBOLS 1 Dicing apparatus 2 Square body 3 Opening part 4 Worktable 5 Blade 6 Worktable feed mechanism 7 Spindle movement mechanism 8 Guide rail 9 Spindle 10 Work cutting part 11 Work exchange part 12 Oil pan 13 Drainage port 14 Drainage mechanism 15 Exhaust port 16 Exhaust mechanism 17 Micro groove 18 Flange cover 19 Liquid supply pipe (liquid supply means)
20 Capillary structure member 21 Lubrication mechanism 22 Guide member 23 Dresser W Wafer (workpiece)

Claims (5)

A dicing machine equipped with a lubrication mechanism for cutting a workpiece that moves relative to the blade with a blade rotating at a required rotational speed and supplying a liquid for lubrication or cooling to the peripheral side surface of the blade. In the blade lubrication mechanism of the device,
The lubrication mechanism is composed of a capillary structure member composed of a soft linear member, and the longitudinal end portion of the capillary structure member is bent while bending the capillary structure member in the longitudinal direction of the capillary structure member. A dicing apparatus characterized in that the liquid which is brought into contact with a peripheral surface of a blade and spreads uniformly in the capillary structure member is transported and supplied from a tip end portion of the capillary structure member to the peripheral surface of the blade using an interfacial tension. Blade lubrication mechanism. 2. The blade lubrication mechanism of a dicing apparatus according to claim 1, wherein the capillary structure member is constituted by either a brush-like member or a brush-like member . The blade has a plurality of concentric micro grooves on a peripheral surface of the blade, and while bending the capillary structure member in the longitudinal direction of the capillary structure member, the tip portion of the capillary structure member The blade lubrication of the dicing apparatus according to claim 1 or 2 , wherein the liquid is brought into contact with the minute groove portion, and the liquid is transferred from the tip end portion of the capillary structure member into the minute groove of the blade by utilizing an interfacial tension. mechanism. 4. A blade lubrication mechanism for a dicing apparatus according to claim 3 , wherein the capillary structure member is made of a conductive fiber . A blade of a dicing device that supplies a liquid for lubrication or cooling to a peripheral side surface of a blade that rotates in a vertical direction at a required rotational speed while moving relative to the workpiece and cuts the workpiece into pieces. In the lubrication method,
While the capillary structure member formed of a soft linear member is bent in the longitudinal direction of the capillary structure member, the tip end portion in the longitudinal direction of the capillary structure member is brought into contact with the peripheral surface of the blade, and the capillary structure member A blade lubrication method for a dicing apparatus, characterized in that the uniformly spread liquid is transported and supplied from a tip end portion of the capillary structure member to a peripheral surface of the blade using interfacial tension .

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