JP2008213103A - Working fluid feeding device of wire saw - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a working fluid feeding device of a wire saw, which reduces the amount of working fluid usage and improves the machining ability and machining accuracy of the wire saw, by making the working fluid efficiently adhere to a wire. <P>SOLUTION: The wire saw functions to cut a workpiece 5 by pressing the same to the reciprocating wire 2 in a perpendicular direction while feeding the working fluid to the wire 2. The working fluid feeding device is composed of a working fluid introducing guide 13 which is arranged between a working fluid feeding nozzle 11 for ejecting the working fluid and a wire row 4, for introducing the working fluid ejected from the working fluid feeding nozzle 11, on an upper surface of the wire 2 in the vicinity of a machining point 15. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a machining fluid supply device for a wire saw that presses and cuts a workpiece while supplying the machining fluid to a traveling wire.

As a means to manufacture wafer-like thin plates from semiconductor crystal materials such as silicon and hard and brittle materials such as quartz (workpiece: work piece), a processing liquid and wire in which abrasive is mixed with an oily or aqueous dispersion medium are used. A wire saw for cutting these workpieces is known.
This wire saw includes a grooved roller around which a wire is wound at a predetermined pitch, and a processing liquid supply device that supplies a processing liquid to the wire. The roller is driven to rotate to reciprocate the wire. While supplying and attaching the machining liquid to the reciprocating wire by the liquid supply device, the workpiece is pressed and cut in the vertical direction against the reciprocating wire.

As the machining liquid supply device, for example, a machining liquid supply nozzle is provided above a wire that reciprocates in the horizontal direction, and the machining liquid supplied by a pump or the like from a tank that stores the machining liquid is directed downward from the machining liquid supply nozzle toward the wire. There are those that inject and supply.
However, in such a machining fluid supply apparatus, the machining fluid is compressed by a pump or the like and sprayed from the machining fluid supply nozzle, and the machining fluid is supplied to the wire from the vertical direction. It is difficult to adhere to the wire effectively.

Thus, when the amount of the processing liquid adhering to the wire is small, the sharpness of the wire is poor, the processing capability is lowered, and the processing accuracy such as non-uniform cutting thickness, waviness of the cut surface, and surface roughness may be reduced. There is.
Therefore, a working fluid receiving plate is provided immediately below the wire, and by supplying the working fluid on the receiving plate, the work fluid placed on the receiving plate is drawn into the wire so that the wire is drawn. There is also known a method of supplying to a processing point that is a contact portion of (Patent Document 1).
Japanese Patent Laying-Open No. 2005-153031

However, even with a wire saw configured as described in Patent Document 1 above, since the machining fluid is supplied in a direction substantially perpendicular to the wire traveling at high speed, the machining fluid is repelled by the wire and efficiently. It is difficult to adhere to the wire.
In particular, in a down-cut type wire saw that presses and cuts a workpiece against the wire from above, the upper surface of the wire comes into contact with the workpiece. Even if a receiving plate is provided below the wire as in Patent Document 1, the processing liquid is likely to adhere to the lower surface of the wire, but is relatively difficult to adhere to the upper surface. Accordingly, in the down-cut type wire saw, even if the above-described receiving plate is provided, the amount of machining fluid used must be increased, and it may be difficult to ensure economic efficiency.

  The present invention has been made in view of the above points, and provides a machining fluid supply device for a wire saw in which machining fluid is efficiently attached to a wire and machining capacity and machining accuracy are improved while suppressing the amount of machining fluid used. Aim to do.

  In order to achieve the above object, according to the first aspect of the present invention, in the wire saw that cuts the workpiece by pressing the workpiece in a direction perpendicular to the wire while supplying the machining fluid to the traveling wire, the machining fluid supply for discharging the machining fluid is provided. A machining fluid introduction guide is provided between the nozzle and the wire to introduce the machining fluid discharged from the machining fluid supply nozzle onto the upper surface of the wire in the vicinity of the machining point where the wire and the workpiece are in contact with each other. To do.

According to a second aspect of the present invention, in the first aspect, the machining fluid introduction guide extends from the machining fluid supply nozzle disposed above the wire toward the machining point while being inclined downward along the wire. It is formed.
According to a third aspect of the present invention, in the first or second aspect, the wires are arranged in a plurality of rows and extend in the row direction of the wire between the machining fluid supply nozzle and the machining fluid introduction guide. A processing liquid storage tank is further provided for temporarily storing the processing liquid supplied from the supply nozzle and discharging the processing liquid to the processing liquid introduction guide so as to be uniformly supplied to all the plurality of rows of wires. Features.

  According to the first aspect of the present invention, since the machining liquid discharged from the machining liquid supply nozzle is supplied to the wire in the vicinity of the machining point by the machining liquid introduction guide, the machining liquid is efficiently supplied to the machining point. It is possible to improve the processing capability and processing accuracy while suppressing the amount of use. Further, since the processing liquid is supplied to the upper surface of the wire, the processing liquid is likely to adhere to the upper surface of the wire. Therefore, particularly in a down cut type wire saw, the machining liquid can be supplied to the machining point more efficiently.

In the second aspect of the present invention, since the machining fluid introduction guide extends along the wire while being inclined downward toward the machining point, the machining fluid moving direction and the wire moving direction during supply to the wire And the difference between these moving speeds are reduced, making it difficult for the working fluid to be repelled by the wire and making it easier for the working fluid to adhere to the wire.
In the invention of claim 3, since the machining fluid is uniformly supplied to the plurality of rows of wires, the machining capability for each wire becomes uniform, and stable machining accuracy can be obtained.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view showing a configuration of a processing portion 1 of a wire saw according to the present invention. In the present embodiment, a down-cut type wire saw that presses a workpiece (workpiece) such as silicon against the wire 2 from above is cut as the wire saw.
As shown in FIG. 1, the processing portion 1 of the wire saw includes two rollers 3 arranged at intervals in the horizontal direction. A plurality of grooves are formed on the roller 3 at a predetermined pitch (plate thickness to be sliced + cutting allowance), and a wire 2 fed from a new reel (not shown) is spirally wound around the grooves. A wire row 4 is formed between the rollers 3. The roller 3 is driven to rotate by a motor (not shown) and has a function of reciprocating the wire 2. Further, tension adjusting means (not shown) is provided on the feeding side of the wire 2 so that the tension of the wire 2 can be adjusted to a predetermined value.

FIG. 2 is a front view showing a schematic configuration of the processing portion 1 of the wire saw.
As shown in FIG. 2, the workpiece 5 is bonded and fixed to a workpiece fixture 7 through a base material 6. The work fixture 7 is detachably fixed to the work lifting device 8. The workpiece lifting / lowering device 8 has a function of moving the workpiece 5 up and down between the rollers 3 via the workpiece fixture 7. Above the wire row 4, machining fluid supply devices 10 are respectively provided at positions sandwiching the workpiece 5.

The machining liquid supply device 10 has a function of supplying the machining liquid to the wire row 4 that travels between the rollers 3. In the wire saw of the present embodiment, a processing liquid in which an abrasive is mixed with an oily or aqueous dispersion medium is employed as the processing liquid.
FIG. 3 is a perspective view showing the structure of the machining fluid supply apparatus.
As shown in FIG. 3, the machining fluid supply apparatus 10 includes a machining fluid supply nozzle 11 that ejects a machining fluid, and a machining fluid supply stabilization tank (temporarily storing the machining fluid ejected and supplied from the machining fluid supply nozzle 11. The processing liquid storage tank) 12 and a guide plate (processing liquid introduction guide) 13 extending from the bottom surface of the processing liquid supply stabilization tank 12 toward the wire row 4 are configured.

4 to 6 are structural views showing the shape of the machining liquid supply nozzle 11, FIG. 4 is a front sectional view, FIG. 5 is a side sectional view, and FIG. 6 is a side view of another embodiment of the machining liquid supply nozzle 11. It is sectional drawing.
The machining liquid supply nozzle 11 is formed in a cylindrical shape as shown in FIG. 4, and is arranged above the wire row 4 so that the axis extends in the row direction of the wire row 4. As shown in FIG. 5, the machining liquid supply nozzle 11 is formed with the proximal end 11 a being open and the distal end 11 b being closed. The base end 11a of the machining liquid supply nozzle 11 is connected to one end of a supply pipe (not shown). The other end of the supply pipe is connected to a tank for storing the machining fluid via a pump (not shown). At the lower end of the machining liquid supply nozzle 11, a plurality of holes 11 c for discharging the machining liquid are provided between substantially the same width as the rollers 3. In addition, you may provide the slit 11d extended in the substantially the same width as the roller 3 as shown in FIG.

FIG. 7 is a cross-sectional view showing the structure of the machining liquid supply stabilization tank 12 and the guide plate 13.
As shown in FIG. 7, the machining liquid supply stabilization tank 12 has a tank shape that extends in the row direction of the wire row 4 and has an open upper surface, and is disposed below the machining liquid supply nozzle 11. A slit-like hole 12 a extending substantially the same width as the roller 3 is provided at the lower end of the machining liquid supply stabilizing tank 12. A mesh-like net 14 is attached to the machining liquid supply stabilization tank 12 so as to cover the holes 12a.

  The guide plate 13 is formed in the shape of a bowl having substantially the same width as the width direction of the roller 3 with both side ends 13 a bent upward. The base end portion (upper end portion) 13b of the guide plate 13 is formed integrally with the lower wall of the machining liquid supply stabilizing tank 12, while the front end (lower end) 13c is inclined downward, while the wire row 4 and the workpiece 5 are inclined. It extends to the vicinity of the machining point 15 where it contacts. The vertical distance La between the tip 13c of the guide plate 13 and the wire row 4 is set to 1 to 5 mm, and the inclination angle θa of the guide plate 13 is set to an angle (10 ° to 30 °) that is almost parallel to the wire row 4. . The distance Lb from the processing point 15 to the tip 13c is set to 5 to 30 mm, for example.

  With such a configuration, the processing liquid discharged from the processing liquid supply nozzle 11 and stored in the processing liquid supply stabilization tank 12 is discharged from the hole 12a in the width direction of the roller 3, and the upper surface of the guide plate 13 is curtained. It flows down to the shape. Then, the machining liquid falls from the tip 13 c of the guide plate 13 to the upper surface of the wire 2 to the full width of the wire row 4. In this way, the wire 2 is reciprocated while supplying the machining fluid to the wire 2, the workpiece 5 is lowered by the workpiece lifting device 8, and the workpiece 5 is pressed against the upper surface of the wire 2. The abrasive rolls, lapping is performed, and the workpiece 5 is cut.

  In the present invention, the tip 13c of the guide plate 13 extends above the wire row 4 toward the machining point 15 to the vicinity thereof, so that the machining liquid is efficiently supplied to the machining point 15. Therefore, while reducing the amount of machining fluid used, the sharpness of the wire 2 is ensured and the amount of heat generated at the time of cutting is suppressed, so that the machining capability and machining accuracy can be improved. In addition, since the machining liquid is supplied to the upper surface of the wire 2, the machining liquid easily adheres to the upper surface of the wire 2. Therefore, particularly in a down cut type wire saw, the machining liquid can be supplied to the machining point 15 more efficiently.

  Furthermore, in the present embodiment, the guide plate 13 is arranged so that the tip 13c extends at an angle that is nearly parallel to the wire row 4, so the movement direction of the wire 2 toward the machining point 15 and the movement direction of the machining liquid And the difference (relative speed) between the flow rate of the machining fluid and the moving speed of the wire 2 become small. Therefore, the machining liquid can be smoothly placed on the upper surface of the wire 2, and the machining liquid can be effectively adhered to the upper surface of the wire 2.

Thereby, since the machining fluid can be efficiently supplied to the machining point 15, it is possible to suppress a decrease in machining ability and heat generation due to insufficient supply of the machining fluid while suppressing the amount of machining fluid used. Therefore, productivity can be improved, and non-uniform cutting thickness of the workpiece 5, waviness of the cut surface, surface roughness, and the like can be suppressed, and processing accuracy can be improved.
Further, a machining liquid supply stabilization tank 12 is provided between the machining liquid supply nozzle 11 and the guide plate 13, and the machining liquid discharged from the machining liquid supply nozzle 11 is temporarily stored, and the guide plate 13 is uniformly distributed in the width direction of the roller 3. Therefore, the cutting ability of each wire 2 becomes uniform, and stable machining performance can be obtained. For example, even when the machining liquid is clogged in the hole 11c of the machining liquid supply nozzle 11 and the machining liquid is not uniformly discharged, the machining liquid is uniformly discharged in the width direction of the roller 3 by the machining liquid supply stabilizing tank 12, so that the cutting process is performed. It is not necessary to frequently perform maintenance such as cleaning of the machining fluid supply nozzle 11 before, and the productivity can be improved.

In addition, the down-cut type wire saw adopted as the present embodiment does not cause the workpiece 5 to fall after being cut, so that the workpiece 5 can be efficiently processed even with a long cutting distance. Compared with an up-cut type wire saw that is pressed and cut from below, productivity can be improved.
In addition, in this embodiment, although the process liquid supply stabilization tank 12 and the guide plate 13 are integrated, you may provide these independently. In this case, the guide plate 13 may be disposed so that the machining liquid dropped from the hole 12a of the machining liquid supply stabilization tank 12 is received by the base end portion 13b.

Moreover, in this embodiment, although the wire 2 was reciprocated, this invention is applicable also to the wire saw of the form which a wire drive | works only in one direction.
In this embodiment, the machining fluid supply apparatus of the present invention is applied to a down-cut type wire saw. However, the present invention can also be applied to an up-cut type wire saw.
FIG. 8 is a schematic configuration diagram of an up-cut type wire saw to which the machining fluid supply apparatus of the present invention is applied. As shown in FIG. 8, in the up-cut type wire saw, a base material 6 is provided below the wire row 4 stretched in the horizontal direction between the rollers 3, and the lower surface of the wire 2 contacts the workpiece 5. Therefore, it is desirable that the working fluid is further adhered to the lower surface of the wire 2. However, in the present invention, since the working fluid is introduced onto the wire 2 at least in the vicinity of the working point 15, the working fluid is efficiently applied to the working point 15. The effect of supplying can be obtained.

  Further, in this embodiment, a free-spitting type wire saw using a processing liquid in which an abrasive is mixed with a dispersion medium has been described, but the present invention is also applied to a fixed-spouting-type wire saw in which an abrasive is fixed to a wire. The invention can be applied. In this case, by adopting the present invention as a coolant supply device that supplies the processing point for cooling, the coolant can be uniformly and efficiently attached to the wire row and supplied to the processing point. Performance can be improved.

It is a perspective view which shows the structure of the process part of the wire saw which concerns on this invention. It is a front view which shows schematic structure of the process part of a wire saw. It is a perspective view which shows the structure of a process liquid supply apparatus. It is front sectional drawing which shows the shape of a process liquid supply nozzle. It is side surface sectional drawing which shows the shape of a process liquid supply nozzle. It is side surface sectional drawing of other embodiment of a process liquid supply nozzle. It is sectional drawing which shows the structure of a process liquid supply stabilization tank and a guide plate. It is a schematic block diagram of the process part of the up-saw type wire saw which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processing part 2 Wire 3 Roller 4 Wire row 5 Workpiece 10 Processing fluid supply apparatus 11 Processing fluid supply nozzle 12 Processing fluid supply stabilization tank 13 Guide plate 15 Processing point

Claims (3)

In a wire saw for cutting a workpiece by pressing the workpiece in a direction perpendicular to the wire while supplying a machining fluid to the traveling wire,
Between the machining liquid supply nozzle for discharging the machining liquid and the wire, the machining liquid discharged from the machining liquid supply nozzle is disposed on the upper surface of the wire in the vicinity of a machining point where the wire and the workpiece are in contact with each other. A wire saw machining fluid supply device comprising a machining fluid introduction guide for introduction into a wire saw.   The machining fluid introduction guide is formed to extend from the machining fluid supply nozzle disposed above the wire toward the machining point while being inclined downward along the wire. Item 2. A wire saw machining fluid supply device according to Item 1. The wires are arranged in a plurality of rows,
It extends in the row direction of the wire between the machining fluid supply nozzle and the machining fluid introduction guide, temporarily accumulates the machining fluid supplied from the machining fluid supply nozzle, and is uniform for all the plurality of rows of wires. 3. The wire saw machining fluid supply apparatus according to claim 1, further comprising a machining fluid storage tank for discharging the machining fluid to the machining fluid introduction guide.

Images