JP6318034B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus that cuts a workpiece with a cutting blade, and more particularly to a cutting apparatus that performs cutting while supplying cutting water to the cutting blade.

  When a workpiece is cut with a cutting blade, frictional heat is generated at a contact portion (processing point) between the workpiece and the cutting blade. For example, in the case of a workpiece in which a pattern formed on the surface of a wafer is molded with a resin, the resin tends to melt due to frictional heat. Cutting water is supplied to the processing point for lubrication and cooling, but cutting scraps such as resin generated by the cutting processing clog the cutting blade. For this reason, the frictional force of the cutting blade is increased, resulting in a decrease in cutting efficiency and generation of heat. Then, the cutting device which blows air, supplying cutting water toward a process point is proposed (for example, refer patent document 1 and patent document 2). In these patent documents, a cut object generated by cutting can be removed from a work piece or a cutting blade with the force of air.

Japanese Patent Laid-Open No. 11-058234 Japanese Patent Laid-Open No. 11-254281

  However, in the above-mentioned patent document, a sufficient cooling effect on the cutting blade cannot be obtained only by supplying cutting water and air to the processing point, and an increase in temperature at the processing point during cutting is inevitable. For this reason, clogging of the cutting blade or increase in frictional force causes vibration in the cutting blade during cutting, which may impair the quality of the cutting, such as disorder of the cutting groove and increase in the kerf width.

  This invention is made | formed in view of this point, and it aims at providing the cutting device which can cool the cutting blade effectively and can suppress the quality deterioration of cutting.

  The cutting apparatus of the present invention includes a chuck table for holding a workpiece, a cutting means for cutting the workpiece held on the chuck table with a cutting blade, and a workpiece held by the chuck table when cutting with the cutting means. A cutting device comprising a cutting water supply means for supplying cutting water to an object and a cooling means for cooling the cutting blade, wherein the cutting means has a spindle and a circle having a cutting edge on the outer periphery attached to the tip of the spindle. A plate-shaped cutting blade, a blade cover that covers the cutting blade, and a rotating means that rotates the spindle. The cooling means has an air injection hole that injects air from the outer peripheral edge of the cutting blade toward the center. It is characterized by providing.

  According to this configuration, the cutting water supplied to the machining point is wound up in the circumferential direction of the cutting blade by the rotation of the cutting blade, and air is injected into the wound up cutting water. Thereby, the spray with which cutting water and air were mixed is generated. This spray takes heat of the cutting blade when it is vaporized by colliding with the cutting blade. In this way, the cutting blade can be effectively cooled by not only supplying the cutting water but also utilizing the heat of vaporization of the spray. Moreover, the cutting dust adhering to the surface of the cutting blade can be removed by the collision of the spray with the cutting blade. As described above, by preventing clogging of the cutting blade while cooling the cutting blade, it is possible to suppress vibration of the cutting blade caused by an increase in frictional force or heat generation. Therefore, the disturbance of the cutting groove and the increase in the kerf width due to the vibration of the cutting blade can be suppressed. As a result, it is possible to suppress the quality deterioration of the cutting process.

  In the cutting device of the present invention, the cooling means is arranged in the blade cover along with the air injection holes on the front side in the rotation direction of the cutting blade in the circumferential direction of the cutting blade and supplies cooling water to the cutting blade. A cooling water supply hole is provided.

  In the cutting apparatus of the present invention, the cooling means is arranged on the blade cover in the circumferential direction of the cutting blade, arranged along the air injection hole and spaced apart from the cutting blade by an equal distance in the axial direction of the spindle. Two cooling water supply holes for supplying water are provided.

  ADVANTAGE OF THE INVENTION According to this invention, while using the vaporization heat of the spray with which water and air were mixed, while cutting a cutting blade effectively, the quality reduction of cutting can be suppressed.

It is a perspective view of the cutting device concerning a 1st embodiment. It is a mimetic diagram of a cutting device concerning a 1st embodiment. It is a figure which shows the mode of a process of the cutting device which concerns on 1st Embodiment. It is a figure which shows the mode of a process of the cutting device which concerns on 2nd Embodiment. It is a schematic diagram of the cutting device which concerns on 3rd Embodiment.

  Hereinafter, a first embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a cutting apparatus according to the first embodiment. FIG. 2 is a schematic diagram of the cutting device according to the first embodiment. In the following, an example of the cutting device will be described, but the configuration of the cutting device according to the first embodiment is not limited to this. The cutting device may have any configuration as long as the workpiece can be cut. In the following drawings, the far side in the X-axis direction (left side of the paper) is the front, and the near side in the X-axis direction (right side of the paper) is the rear.

  As shown in FIGS. 1 and 2, the cutting apparatus 1 is configured to cut the workpiece W held on the chuck table 2 by a cutting means 3 provided above the chuck table 2. . The workpiece W is a disk-shaped semiconductor wafer, and the surface is divided into a plurality of regions by division planned lines (not shown). Various devices D such as IC and LSI are formed in each area divided by the division lines. A protective tape T is attached to the back surface of the workpiece W. The workpiece W may be not only a semiconductor wafer but also a ceramic, glass, or sapphire optical device wafer.

  A rectangular opening extending in the X-axis direction is formed on the upper surface of the base 10 of the cutting apparatus 1, and this opening is formed by a movable plate 11 movable together with the chuck table 2 and a bellows-shaped waterproof cover 12. It is covered. Below the waterproof cover 12, a ball screw type moving mechanism (not shown) for moving the chuck table 2 in the X-axis direction is provided. On the surface of the chuck table 2, a suction surface 20 that sucks the workpiece W by a porous ceramic material is formed. The suction surface 20 is connected to a suction source (not shown) through a flow path in the chuck table 2.

  The cutting means 3 is positioned above the chuck table 2 and is moved in the Y-axis direction and the Z-axis direction by a ball screw type moving mechanism (not shown). The cutting means 3 is configured by mounting a disc-shaped cutting blade 31 on the tip of a spindle 30. The spindle 30 is rotatably supported by a spindle housing 32 and is rotated by a rotating means (not shown) such as a motor. The cutting blade 31 is configured by fixing a ring-shaped washer blade having a cutting blade on the outer periphery with a flange 33.

  The cutting blade of the cutting blade 31 is formed by bonding abrasive grains such as diamond with a bonding material, and has a thickness of about 10 μm to 500 μm, for example. The spindle housing 32 is provided with a blade cover 34 so as to cover the periphery of the cutting blade 31. The blade cover 34 is formed of a rectangular parallelepiped block, and a concave portion 34a having a circular arc shape in cross section for accommodating the cutting blade 31 is formed on the lower surface side.

  Further, the cutting means 3 includes a cutting water supply means 4 for supplying cutting water to the workpiece W held by the chuck table 2 and a cooling means 5 for cooling the cutting blade 31. The cutting water supply means 4 supplies cutting water to the nozzle 40 through a substantially L-shaped nozzle 40 that protrudes from the lower surface on the front side of the blade cover 34 and extends rearward, and a flow path in the blade cover 34. And a cutting water supply source 41. A plurality of slits 40 a are formed on the tip side of the nozzle 40. Further, an electromagnetic valve 42 is provided between the blade cover 34 and the cutting water supply source 41 via a pipe. The supply of cutting water to the nozzle 40 is controlled by opening and closing the electromagnetic valve 42. The cutting water is sprayed from the slit 40a of the nozzle 40 toward the processing point.

  The cooling means 5 injects air from the air injection holes 50 formed in the blade cover 34 and supplies cooling water from the cooling water supply holes 53 formed in the blade cover 34 toward the cutting blade 31. It is configured. The air injection hole 50 is formed downward from substantially the center of the upper surface of the blade cover 34, and penetrates at the uppermost position of the recess 34a. An air flow path in the blade cover 34 constituted by the air injection holes 50 is connected to an air supply source 51 through a joint and piping. An electromagnetic valve 52 is provided between the blade cover 34 and the air supply source 51. By opening and closing the electromagnetic valve 52, the injection of air to the cutting blade 31 is controlled. The air is jetted from the outer peripheral end of the cutting blade 31 toward the center through an air flow path in the blade cover 34 from the air supply source 51 through a pipe.

  The cooling water supply hole 53 is formed downward from the upper surface of the blade cover 34 and penetrates through the recess 34a. Further, the cooling water supply hole 53 is arranged adjacent to the air injection hole 50 on the front side of the air injection hole 50 in the circumferential direction of the cutting blade 31 (upstream in the rotation direction of the cutting blade 31). ing. The cooling water flow path in the blade cover 34 constituted by the cooling water supply holes 53 is connected to a cooling water supply source 54 via a joint and piping. An electromagnetic valve 55 is provided between the blade cover 34 and the cooling water supply source 54. The supply of cooling water to the cutting blade 31 is controlled by opening and closing the electromagnetic valve 55. The cooling water is sprayed from the cooling water supply source 54 to the cutting blade 31 through the cooling water flow path in the blade cover 34 through the pipe.

  The cutting apparatus 1 configured as described above cuts the workpiece W by rotating the cutting blade 31 at a high speed and cutting the cutting blade 31 into a predetermined division line of the workpiece W. During the cutting process, cutting water is supplied from the nozzle 40, and cooling water and air are supplied from the cooling means 5. The air jetted from the cooling means 5 is mixed with the cutting water or the cooling water to be sprayed and collides with the surface of the cutting blade 31. Then, when the spray is vaporized, the cutting blade 31 is deprived of heat, and as a result, the cutting blade 31 is cooled.

  Next, with reference to FIG. 3, the process of the cutting apparatus according to the first embodiment will be described. FIG. 3 is a diagram illustrating a state of processing of the cutting apparatus according to the first embodiment. In FIG. 3, air is indicated by broken line arrows, and cooling water is indicated by solid line arrows.

  As shown in FIG. 3, the workpiece W is cut by moving the rotating cutting blade 31 and the chuck table 2 relative to each other. During the cutting process, cutting water is supplied from the nozzle 40 to a contact portion (processing point) between the workpiece W and the cutting blade 31. In this way, cutting is performed while removing the cutting waste with the cutting water and cooling the processing point. The cutting water alone does not sufficiently remove the cutting waste and cool the cutting blade 31. For this reason, in the first embodiment, cutting is performed while supplying cooling water and air from the cooling means 5 in addition to the cutting water. For example, the cooling water flow rate from the cooling water supply source 54 is set to 0.5 L / min, and the air flow rate from the air supply source 51 is set to 50 L / min.

  The cutting water sprayed from the nozzle 40 is wound up by the rotation of the cutting blade 31 and enters the blade cover 34. The wound cutting water moves toward the air injection hole 50 on the downstream side in the rotation direction of the cutting blade 31. Further, part of the cooling water ejected from the cooling water supply hole 53 collides with the cutting blade 31, merges with the wound cutting water, and moves toward the air ejection hole 50 by the rotation of the cutting blade 31. . Further, another part of the cooling water travels from the cooling water supply hole 53 to the inner wall of the recess 34 a of the blade cover 34 and moves toward the air injection hole 50 on the downstream side in the rotation direction of the cutting blade 31.

  And these cutting water and cooling water are mixed with the air injected from the air injection hole 50 below the air injection hole 50, As a result, a fine spray is produced | generated. Since the concave portion 34a of the blade cover 34 is shaped along the outer periphery of the cutting blade 31, the spray collides with the outer periphery of the cutting blade 31 while being guided to the inner wall of the concave portion 34a. The spray that has collided with the cutting blade 31 takes heat from the surface of the cutting blade 31 when it is vaporized. As a result, the cutting blade 31 is cooled. Thus, the cooling effect of the cutting blade 31 can be enhanced by utilizing the vaporization heat of the spray.

  Further, since the air injection hole 50 and the cooling water supply hole 53 are provided at positions away from the processing point, the ambient temperature of the air injection hole 50 and the cooling water supply hole 53 is lower than the temperature around the processing point. It has become. Thus, the cooling effect of the cutting blade 31 can be further enhanced by causing the spray to collide with the cutting blade 31 at a position away from the processing point.

  In addition, as described above, the destination of the cooling water sprayed from the cooling water supply hole 53 differs depending on whether the coolant is directly supplied to the cutting blade 31 or the inner wall of the blade cover 34. For this reason, the flow rate of the cooling water when mixed with the air below the air injection hole 50 is adjusted to be smaller than the flow rate of the cooling water immediately after being injected from the cooling water supply hole 53. Thus, the spray of a very small particle size can be produced | generated by finely adjusting the flow volume of a cooling water before mixing a cooling water and air. Since the spray with a small particle size is easy to vaporize (evaporate), the amount of heat taken away from the surface of the cutting blade 31 when the spray is vaporized can be increased by causing many sprays with a small particle size to collide with the cutting blade 31. it can. As a result, the cooling effect of the cutting blade 31 can be further enhanced.

  As described above, according to the cutting device 1 according to the first embodiment, the cutting water supplied to the processing point is wound up in the circumferential direction of the cutting blade by the rotation of the cutting blade 31. Moreover, the cooling water sprayed from the cooling water supply hole 53 merges with the wound cutting water. These cutting water and cooling water are sprayed by being mixed with air on the downstream side of the cutting blade 31 in the rotation direction. This spray takes heat of the cutting blade 31 when it is vaporized by colliding with the cutting blade 31. Therefore, the cutting blade 31 can be effectively cooled. Moreover, the cutting dust adhering to the surface of the cutting blade 31 can be removed because the spray collides with the cutting blade 31. Thus, by preventing clogging of the cutting blade 31 while cooling the cutting blade 31, vibration of the cutting blade 31 caused by an increase in frictional force or heat generation can be suppressed. Therefore, the disturbance of the cutting groove and the increase in the kerf width due to the vibration of the cutting blade 31 can be suppressed. As a result, it is possible to suppress the quality deterioration of the cutting process.

  In 1st Embodiment, since it was set as the structure which supplies cooling water from the cooling means 5, when cutting water is not supplied, for example, even when it is not in process, it produces | generates with cooling water and air. The cutting blade 31 can be cooled by spraying. In addition, it is not limited to this structure, The cooling means 5 is good also as a structure which injects only air. In this case, spray can be generated by the cutting water wound up by the rotation of the cutting blade 31 being processed and the air injected from the air injection holes 50.

  Next, a cutting apparatus according to the second embodiment will be described with reference to FIG. FIG. 4 is a schematic diagram of a cutting device according to the second embodiment. In FIG. 4, air is indicated by broken line arrows, and cooling water is indicated by solid line arrows. In the second embodiment, the air injection direction is different from that of the first embodiment. Hereinafter, differences will be mainly described. In addition, the structure of the same name as 1st Embodiment is attached | subjected and demonstrated with the same code | symbol.

  As shown in FIG. 4, the cooling means 5 injects air from the air injection holes 50 formed in the blade cover 34 and moves from the cooling water supply holes 53 formed in the blade cover 34 toward the cutting blade 31. The cooling water is supplied. The air injection hole 50 is formed so as to extend from the upper surface of the blade cover 34 in the tangential direction of the outer peripheral end of the cutting blade 31, and penetrates through the recess 34a. The cooling water supply hole 53 is formed on the front side (upstream in the rotational direction of the cutting blade 31) from the air injection hole 50 and is formed downward from the upper surface of the blade cover 34 and penetrates through the recess 34a. The outlets on the recess 34 a side of the air injection holes 50 and the cooling water supply holes 53 are adjacent to each other in the front-rear direction of the cutting blade 31.

  The air injected from the air injection holes 50 and the cooling water injected from the cooling water supply holes 53 are mixed immediately after being injected from each hole, and collide toward the outer peripheral end of the cutting blade 31 while being sprayed. At this time, since the rotation direction of the cutting blade 31 and the spraying direction of the spray are in opposite directions, the relative speed between the spray and the cutting blade 31 when the spray collides with the cutting blade 31 is increased. Therefore, the cutting waste adhering to the surface of the cutting blade 31 can be effectively removed. Further, the spray is easily vaporized on the surface of the cutting blade 31, and heat is easily taken from the cutting blade 31. As a result, the cooling effect of the cutting blade 31 using the vaporization heat of spray can be enhanced. Thus, also in the second embodiment, the cutting blade 31 can be prevented from being clogged while the cutting blade 31 is cooled.

  Next, a cutting apparatus according to a third embodiment will be described with reference to FIG. FIG. 5 is a schematic view of a cutting device according to the third embodiment, and shows a cross-sectional view when the cutting blade is cut in the thickness direction. FIG. 5 shows a state in which air and cooling water are jetted from the cooling means toward the rotating cutting blade, where air is indicated by broken line arrows and cooling water is indicated by solid line arrows. Note that the third embodiment is different from the first and second embodiments in that two cooling water supply holes are formed. Hereinafter, the differences will be mainly described.

  As shown in FIG. 5, the cooling means 101 injects air from the air injection hole 102 toward the cutting blade 104 and cools from the two (a pair of) cooling water supply holes 103 a and 103 b toward the cutting blade 104. It is configured to inject water. The cutting blade 104 is covered with a blade cover 105, and a concave portion 105a is formed along the outer diameter of the cutting blade 104 so as to accommodate the cutting blade of the cutting blade 104.

  The air injection hole 102 is formed at the center in the thickness direction of the cutting blade 104 so as to penetrate through the inner wall portion of the recess 105 a from the upper surface of the blade cover 105 positioned just above the cutting blade 104. The pair of cooling water supply holes 103 a and 103 b are formed so as to sandwich the air injection hole 102 in the thickness direction of the cutting blade 104 at a position spaced apart from the cutting blade 104 by an equal distance in the axial direction of a spindle (not shown). Yes. The air injection hole 102 and the cooling water supply holes 103 a and 103 b are formed at the same position in the circumferential direction of the cutting blade 104. Each cooling water supply hole 103a, 103b is formed so as to be inclined from the upper surface of the cutting blade 104 toward the cutting blade 104 directly below the air injection hole 102, and penetrates through the recess 105a.

  After being ejected from the air ejection hole 102, the air flows from the outer peripheral end of the cutting blade 104 toward the center so as to follow both side surfaces of the cutting blade 104 while colliding with the outer peripheral end of the cutting blade 104. At this time, the air flow is separated by the outer peripheral end of the cutting blade 104, and an air flow along the left side surface 104a of the cutting blade 104 and an air flow along the right side surface 104b are formed. On the other hand, the cooling water is sprayed toward the outer peripheral end of the cutting blade 104 from the pair of cooling water supply holes 103a and 103b. At this time, the cooling water sprayed from the respective cooling water supply holes 103a and 103b merges with air in the vicinity of the outer peripheral end of the cutting blade 104 (the portion indicated by the two-dot chain line in FIG. 5). As a result, the cooling water and the air are mixed and a spray is generated.

  The spray generated on the left side of the cutting blade 104 flows from the outer peripheral end toward the center along the left side surface 104a of the cutting blade 104 by the flow of air. The spray generated on the right side of the cutting blade 104 flows from the outer peripheral end toward the center along the right side surface 104b of the cutting blade 104 by the air flow. Thus, since the spray flows so as to scrape the surface along both side surfaces of the cutting blade 104, the cutting waste adhering to the surface of the cutting blade 104 can be effectively removed.

  Further, since the spray flows while colliding with both side surfaces of the cutting blade 104, the heat of the cutting blade 104 can be taken away when the spray is vaporized. Thus, the cooling effect of the cutting blade 104 can be enhanced by utilizing the vaporization heat of the spray. Moreover, since the recessed part 105a is formed along the outer periphery of the cutting blade 104, the spray staying in the recessed part 105a becomes easy to hit the cutting blade 104. Therefore, the cooling effect of the cutting blade 104 can be further enhanced. As described above, also in the third embodiment, clogging of the cutting blade 104 can be prevented while the cutting blade 104 is cooled.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, the cutting blades 31 and 104 are configured by washer blades, but are not limited to this configuration. The cutting blades 31 and 104 may be configured by a hub blade in which a ring-shaped hub (base) and a blade are integrated.

  In the above embodiment, the air injection hole is formed directly above the cutting blade, but is not limited to this configuration. The air injection hole may be formed at any position and in any shape as long as air can be injected onto the cutting blade.

  As described above, the present invention has an effect that the cutting blade can be effectively cooled and the quality of the cutting process can be suppressed, and in particular, cutting is performed while supplying cutting water to the cutting blade. Useful for cutting equipment.

W Workpiece 1 Cutting device 2 Chuck table 3 Cutting means 30 Spindle 31, 104 Cutting blade 34, 105 Blade cover 4 Cutting water supply means 40 Nozzle 5, 101 Cooling means 50, 102 Air injection holes 53, 103 Cooling water supply holes

Claims (3)

A chuck table for holding a workpiece, a cutting means for cutting the workpiece held on the chuck table with a cutting blade, and a workpiece that is held by the chuck table when being cut by the cutting means. A cutting device comprising: a cutting water supply means for supplying the cooling blade; and a cooling means for cooling the cutting blade,
The cutting means includes a spindle, a disk-shaped cutting blade having a cutting edge attached to the tip of the spindle, a blade cover covering the cutting blade, and a rotating means for rotating the spindle,
The cooling means includes
A cutting device provided with an air injection hole in the blade cover for injecting air from an outer peripheral end of the cutting blade toward the center.   The cooling means is a cooling water supply hole that is arranged in the blade cover along the air injection hole in the circumferential direction of the cutting blade in the circumferential direction of the cutting blade and supplies cooling water to the cutting blade. The cutting device according to claim 1, comprising:   The cooling means is arranged on the blade cover at an equal distance from the cutting blade in the axial direction of the spindle, aligned with the air injection hole in the circumferential direction of the cutting blade, and supplies cooling water to the cutting blade The cutting device according to claim 1, comprising two cooling water supply holes.

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