JP5380674B2 - Grinding wheel retainer - Google Patents

Description

The present invention relates to a grinding wheel and its holder, and further to a cooling method and a cooling device, and in particular, allows high-pressure coolant to pass inside the grinding wheel of the grinding wheel, or from the flange clearance along the grinding wheel side surface (grinding surface). In addition, the grinding surface of the workpiece is surrounded by a water-room atmosphere with high-pressure coolant to provide a grinding wheel, a grinding wheel holder, a cooling method and a cooling device that dramatically improve the grinding efficiency. To do.

In recent years, for example, there has been an increase in demand for low fuel consumption in order to cope with an increase in international logistics by aircraft and to improve the environment of the earth, and lightening of jet engines and improvement in fuel consumption have been attempted. As specific measures, two jet engines are made smaller and smaller, and further, turbine blades are made thinner. In particular, high-precision grinding technology is essential for reducing the thickness of turbine blades. As this conventional grinding method, there is generally known a method in which cooling water is sprayed onto the surface of a grinding wheel to cool the surface and remove chips and dust.

  In view of this, a high-speed polishing apparatus has been provided that achieves a creep grinding process for removing polishing debris adhering to the polishing surface of a polishing wheel at a high raw material removal rate. Its structure is intended for thin plate cutting machines, and it consists essentially of a porous grinding wheel, a machine that attaches the grinding wheel and rotates the grinding wheel at a peripheral speed of up to 80 m per second, and a coolant jetted at high pressure. And a high-pressure coolant supply system having at least one nozzle means for directing to a sighting point on the periphery of the polishing wheel prior to the processing point. The nozzle means directs the jet of coolant substantially radially to the aiming point around the grinding wheel, and the nozzle means approximately sets the aiming point around the grinding wheel to the processing point. Oriented at a distance of 30 mm to 40 mm and the coolant nozzle means is rotatable about the spindle axis of the machine to reposition the coolant injection aim point relative to the processing point ( For example, see Patent Document 1.)

  Further, there is provided a grinding wheel in which the grinding wheel is improved so that the supplied coolant can be effectively used for cooling the grinding wheel and an object to be ground (for example, a semiconductor wafer). In the grinding wheel comprised of an annular base and grinding wheel means mounted on the lower surface of the base, a cooling liquid reservoir opened radially inward is formed on the inner periphery of the base. A plurality of cooling liquid guide grooves extending from the cooling liquid reservoir to the grinding wheel means are formed on the inner peripheral surface and the lower surface of the base at intervals in the circumferential direction. The coolant guide groove extends from the coolant reservoir so as to incline in one circumferential direction toward the grinding wheel means. The coolant reservoir is continuously extended in the circumferential direction. The cooling liquid reservoir has an upper inclined surface extending obliquely outward in the radial direction and a lower portion of the upper inclined surface substantially horizontally inward in the radial direction or downward inward in the radial direction. It is prescribed | regulated between the protrusion surfaces extended in inclination. Further, a plurality of communication cutouts or communication holes communicating with the coolant reservoir from the upper surface are formed in the base at intervals in the circumferential direction. Further, the base has a lower inclined surface extending downward and inclined radially outward below the projecting surface. The grindstone means is composed of a plurality of grindstones arranged at intervals in the circumferential direction and extending in an arc shape in the circumferential direction, and the coolant guide groove is formed corresponding to each of the grindstones. (For example, see Patent Document 2).

  Furthermore, there is a grinding wheel and a grinding fluid supply method that can improve the cooling performance in the grinding section and can also perform ultra-precision finish grinding. In the grinding wheel for grinding a workpiece on the surface of the abrasive grain layer by providing an abrasive grain layer around the grinding wheel base metal and rotating, a grinding liquid is provided on a side surface of the grinding stone base metal. While forming a grinding fluid receiving portion for receiving the grinding fluid ejected from the nozzle, and forming a grinding fluid conduit for guiding the grinding fluid from the grinding fluid receiving portion to the abrasive layer on the grindstone base metal, The abrasive layer is a grinding wheel formed porous so that the grinding fluid from the grinding fluid conduit oozes out to the surface of the abrasive layer. In addition, the grinding fluid supply method rotates the grinding wheel and injects the grinding fluid into the grinding fluid receiving portion of the grinding stone, and the grinding fluid is centrifugally applied to the abrasive layer through the grinding fluid conduit. It is guided and oozes out from the abrasive layer to the surface of the abrasive layer through a porous material and supplies a grinding liquid to the grinding part (for example, refer to Patent Document 3).

  JP-A-11-254324   JP 2003-89065 A   Japanese Patent Laid-Open No. 10-118940

In the creep grinding process (high-speed polishing device) that removes grinding scraps adhering to the grinding surface of the grinding wheel at a high raw material removal rate, cooling water and coolant are formed with high-speed rotation of the grindstone. The air is blown off by the outer air layer, and clogging of the grindstone and work cooling cannot be sufficiently performed. In the heavy grinding, the problem that the grinding burn of the workpiece easily occurs is not solved.

In addition, the grinding wheel disclosed in Japanese Patent Laid-Open No. 11-254324 is limited to a porous grindstone, and a high-pressure coolant is sprayed onto the grindstone to destroy the air layer formed on the outer edge, thereby removing clogging of the grindstone. Has a merit that a grinding wheel surface is generated, and even if the grinding wheel and the workpiece surface are cooled and subjected to heavy grinding, the workpiece is not ground and burned. In order to ensure this, the coolant nozzle is made to follow the wear change of the grinding wheel diameter by biaxial NC control, and high pressure water (pressure of about 40 to 70 Bar) is always injected in accordance with the aiming point of the grinding wheel circumference. It is essential that For this reason, not only is an expensive high-pressure coolant supply system indispensable, but there are also disadvantages and problems that the operation is complicated and expensive (over 100 million yen) for controlling 7 axes (2 coolant nozzles are required). . Further, although this cooling method is suitable for cutting out from a block material or the like, the problem that it is not suitable for blade grinding for thin-walled and medium-volume production has not been solved.

Furthermore, the grinding wheel of the above-mentioned JP-A-2003-89065 forms a cooling liquid reservoir that is opened radially inward on the inner periphery of the base, and further from the cooling liquid reservoir on the inner peripheral surface and the lower surface of the base. A cooling liquid guide groove extending to the grinding wheel means is formed, and the flow of the cooling liquid supplied to the base of the grinding wheel is prevented from flowing radially outward by the cooling liquid reservoir. It flows out toward the workpiece. Thereby, it has the merit which can utilize the cooling fluid supplied sufficiently effectively for cooling of a grinding wheel and a to-be-ground object. However, the above-described grinding wheel is limited to a flat plate workpiece such as a semiconductor wafer, and the problem that it is not suitable for thin-wall , medium-volume production blade grinding, which is the main purpose of the present invention, has not been solved.

Furthermore, since the grinding wheel and the grinding fluid supply method disclosed in Japanese Patent Application Laid-Open No. 10-118940 are limited to a porous grinding wheel, the porous grinding wheel is used to grind the workpiece at a high speed by rotating at a high speed. There is a limit to the amount of grinding fluid to be supplied. Due to insufficient supply of the grinding fluid, a water curtain atmosphere is not created in the grinding section, and the porous grinding wheel is clogged. As a result, the problem that the main object of the present invention is not suitable for thin-walled and medium-volume production blade grinding is not solved.

The present invention has been made in view of the problems in the grinding wheel and its cooling water injection method to the grinding wheel, the grinding wheel and the grinding fluid supply method, and in particular, allows the high pressure cooling liquid to pass through the grinding wheel. Grinding wheel that can be supplied to the grinding wheel outer peripheral surface (grinding surface) from the flange clearance along the side of the grinding wheel, and the grinding surface of the workpiece is surrounded by a water room atmosphere with a high-pressure coolant to dramatically improve grinding efficiency And a grinding wheel holder, a cooling method thereof, and a cooling device.

In order to achieve the above object, a grinding wheel holder according to claim 1 of the present invention has an annular base having a communication hole through which gas or liquid is circulated on the outer periphery, and has a breathability as a core material on the annular base. A ceramic disc, an identical annular grindstone to be joined to both side surfaces of the ceramic disc, a small-diameter flange disc to be joined to both side surfaces of the annular grindstone and forming a radial passage on the inner surface side, and the annular base The connecting hole of the base is a grinding wheel which is connected to the passage of the ceramic disk and the flange disk, and the annular base of the grinding wheel is fitted to the support shaft having a center through hole through which the high-pressure coolant flows. characterized in that was.

The grinding wheel holder according to claim 2 of the present invention is characterized in that in the grinding wheel holder according to claim 1, the high-pressure coolant has a pressure equivalent to about 7 megapascals.

According to the grinding wheel holder according to claim 1 of the present invention , the high-pressure cooling liquid easily passes along both side surfaces of the annular grindstone, and is efficiently injected from the outer peripheral surface of the grindstone toward the ground surface of the workpiece to be ground. The Further, the high-pressure coolant penetrates through the air-permeable ceramic disc in the annular grindstone and is efficiently injected from the outer peripheral surface toward the ground surface of the workpiece to be ground.

According to the grinding wheel holder according to claim 2 of the present invention , ultra-high-efficiency heavy grinding and continuous unmanned machining can be performed by ejecting a high-pressure coolant pressurized to about 7 megapascals from a high-pressure spray nozzle.

The operation and effect of the grinding wheel holder of the present invention will be described for each item. (1) For example, the blade grinding process is performed by using a high-pressure coolant pressurized to about 7 megapascals from a high-pressure injection nozzle. Super-high efficiency heavy grinding and continuous unmanned machining can be performed by jetting. (2) The grindstone can be applied to all grindstones such as porous other electrodeposition grindstones. (3) Furthermore, the coolant K that is jetted out at a high pressure expands to a volume ratio of about 3000 times by the processing heat (friction heat) generated by being injected to the processing point of the workpiece and the grinding surface, thereby causing a steam explosion effect. Generate vapor pressure. Thus, the grinding dust accumulated in the grindstone is blown away, and the effect of preventing clogging of the grindstone and the effect of preventing grinding burn of the workpiece can be exhibited synergistically. That is, a dust removing effect (filter effect on the cooling liquid) with respect to the cooling liquid K that passes through the whetstone becomes a filter. (4) If a surrounding body is provided in the holding tool of the grinding wheel, a water room atmosphere by the high-pressure coolant can be formed around the grinding surface, and a further effect of preventing grinding burn of the workpiece can be exhibited synergistically. (5) No NC control device is required, it can be applied to machining centers, lathes, grinders and other processing machines, is highly versatile, and has simple operability and low cost of equipment (reduced to around tens of millions of yen) Can be planned.

In the 1st Embodiment of this invention, it is the side view and sectional drawing of a grinding wheel. In the 1st Embodiment of this invention, the action side view and action | operation sectional drawing of a grinding wheel are shown. In the 1st Embodiment of this invention, it is the expanded view and sectional drawing of the holder of a grinding wheel. In the 2nd Embodiment of this invention, it is the side view and sectional drawing of a grinding wheel. In the 2nd Embodiment of this invention, it is an action side view and action | operation sectional drawing of a grinding wheel. In the 2nd Embodiment of this invention, it is an expanded view and sectional drawing of the holder of a grinding wheel. In the 3rd Embodiment of this invention, it is a side view of the processing apparatus of a grinding wheel. In the 4th Embodiment of this invention, it is a side view of the processing apparatus of a grinding wheel. In the 5th Embodiment of this invention, it is an effect | action figure of the processing apparatus of a grinding wheel. In the 5th Embodiment of this invention, it is an effect | action figure of the processing apparatus of a grinding wheel. In the 6th Embodiment of this invention, it is an effect | action figure of the processing apparatus of a grinding wheel. In the 7th Embodiment of this invention, it is an effect | action figure of the processing apparatus of a grinding wheel. It is the side view and sectional drawing of the 1st grinding wheel used as a well-known structure. It is the side view and sectional drawing of the 2nd grinding wheel used as a well-known structure.

Hereinafter, sequentially illustrating each embodiment of the present invention with reference to FIGS. 1 to 14.

FIG. 1 shows a grinding wheel according to a first embodiment of the present invention. The grinding wheel 30 includes an annular base 1 having flanges 1F and 1F on both edges, and an annular grindstone 2 in which an outer peripheral surface 1B of the annular base 1 is mounted with an inner peripheral surface 2A . An inner peripheral surface 1A of the annular base 1 is fitted to the rotation main shaft 5, and a passage 1G having a concave cross section is formed at a portion where both edge flanges 1F, 1F of the annular base 1 are in contact with both side faces 2F, 2F of the annular grindstone 2. The passage 1G communicates with the communication holes H0 and H1 from the coolant supply passage A of the coolant K (high-pressure coolant K) connected from the inside of the rotating main shaft 5 to the outer periphery 5A, and at the outer peripheral end of the flange. Opened to both side surfaces 2F, 2F of the annular grindstone 2.

As shown in FIG. 3 , the holder 60 of the grinding wheel 30 includes an annular base 1 having a communication hole H1 through which gas or liquid flows on the outer periphery, and an inner peripheral surface 2A on the outer peripheral surface 1B of the annular base. in the fitted grinding wheel made of breathable annular grindstone 2 which shall, instead the annular base of the grinding wheel rotation spindle 5, the center hole 33A was fitted to a support shaft 33 that is opened The annular grindstone 2 and the annular grindstone 2 are sandwiched between two flange disks 1F and 1F. The detailed configuration includes an annular grindstone 2 fitted to an annular base 1 having double rows of communication holes H1 for circulating a gas or liquid high-pressure coolant K on the outer periphery 1B, and both sides of the annular grindstone. The flange discs 1F and 1F are formed with radial passages 1G and 1G on the inner surface side joined to both side surfaces 2F and 2F of the annular grindstone. . The communication hole H1 of the annular base is in communication with the passages 1G and 1G. A center through hole 41 through which the high-pressure coolant K is circulated is formed at the center axis position of the taper shank 42 connected to the rear end of the support shaft 33.

Next, the action and cooling method of the grinding wheel 30 and the holder 60 of the grinding wheel 30 will be described. As shown in FIG. 2 , the grinding wheel 30 has an annular grindstone 2 fitted on the outer peripheral surface of the annular base 1, and flanges 1 </ b> F and 1 </ b> F on both edges. Radial passages 1G and 1G are formed on the inner surface side joined to both side surfaces 2F and 2F. As a result, the high pressure coolant K is supplied from the coolant supply passage A bored in the axis of the rotating spindle to the inner passages 1G and 1G where the two sides 2F and 2F of the annular grindstone are joined. Thus, the high-pressure coolant K supplied to the annular grindstone 2 is ejected from the both side surfaces 2F, 2F of the annular grindstone to the outside of the outer peripheral surface 2B , and the high-pressure coolant is generated by centrifugal force due to the high-speed rotation of the grinding wheel 30. Since the ejection to the outside of the outer peripheral surface 2B of K is promoted, the surface to be ground W1 of the surface W to be ground is completely surrounded from the outside, thereby effectively cooling.
Furthermore, the high-pressure jet of the high-pressure coolant K can be expected to have a highly efficient removal effect of grinding dust adhering and adhering directly to the workpiece grinding surface and a highly efficient cooling effect of the grinding wheel and workpiece grinding surface. Anti-burn effect can be expected. That is, the coolant K that is jetted out at a high pressure expands to a volume ratio of about 3000 times by the processing heat (frictional heat) generated by being injected at the processing point between the workpiece and the grinding surface, thereby increasing the vaporization pressure by the steam explosion effect. generate.

Furthermore, the effect of the grinding wheel 30 according to the first embodiment is that the high-pressure coolant K easily passes along both side surfaces 2F and 2F of the annular grindstone 2 , and the ground surface W1 is water- washed by the high-pressure coolant K. The room is shielded from the outside air and cooled efficiently. Further, when a gas such as air or nitrogen gas is used, the surface to be ground W1 is wrapped in an air flow atmosphere to block external air. Further, the high-pressure coolant is likely to pass along both side surfaces 2F, 2F of the annular grindstone 2, and the effect of preventing clogging of the grindstone and preventing grinding burn of the workpiece can be expected.
Furthermore, the holder 60 of the grinding wheel 30 can be easily attached and detached via the taper shank 42 with respect to the main spindle taper of the grinding machine.

Grinding wheels 40 according to the second embodiment of the present invention, shown in FIGS. 4 to 6. The grinding wheel 40 is composed of an annular base 1 and an annular grindstone 2 mounted on the outer peripheral surface 1B of the base 1. The coolant 1 is supplied to the inner peripheral surface 1A of the base 1 from a plurality of communication holes H0 provided in the outer periphery 5A. A receiving hole H1 is provided. The communication hole H1 is connected to a passage 2G opened radially in the annular grindstone, and penetrates from the inner peripheral surface 2A to the outer peripheral surface 2B. Further, the annular base 1 is provided with flanges 1F and 1F on both edges, and a concave cross-section passage 1G is provided radially at a portion where both edge franchis of the base are in contact with both side surfaces 2F and 2F of the annular grindstone 2. . The passage 1G communicates with a communication hole H1 of an annular base that receives the coolant from a coolant hole A0 that is connected to the outer peripheral surface 5A from a coolant supply passage A that is drilled in the axis of the rotating spindle 5 . A plurality of coolant discharge ports are opened on both side surfaces 2F, 2F of the annular grindstone 2 at the outer peripheral end of the flange.

The action by the grinding wheel 40 and the cooling method by the grinding wheel according to the second embodiment will be described. As shown in FIG. 5 , the communication hole H <b> 1 provided on the inner peripheral surface 1 </ b> A of the base 1 is fitted to the rotation main shaft 5 and from a plurality of communication holes H <b> 0 provided on the outer periphery 5 </ b> A of the rotation main shaft 5. Coolant K is supplied. Then, the coolant K pressurized and supplied from the rotary spindle 5 by the centrifugal force generated by the high-speed rotation of the annular grindstone 2 passes through the passage 2G opened in the annular grindstone from the communication hole H1 of the base 1, and the outer peripheral surface of the grindstone. It is sprayed from the central position of 2B toward the surface to be ground W1 of the workpiece W to be ground, and the entire surface is cooled from the central position of the surface to be ground W1. Further, the annular base 1 is provided with flanges 1F and 1F on both edges , and a concave cross-section passage 1G is radially provided at a portion where both the flanges 1F and 1F of the base are in contact with both side surfaces 2F and 2F of the annular grindstone. ing. Thus, the coolant K pressurized and supplied from the rotary spindle 5 by the centrifugal force generated by the high-speed rotation of the annular grindstone is sent from the inside of the rotary spindle 5 to the passage 1G of the base 1. Further, the coolant K is jetted from the opening at the outer peripheral edge of the flange along the both side surfaces 2F and 2F of the annular grindstone 2 to the outer peripheral surface of the grindstone and the outer peripheral edge of the surface to be ground W1 of the workpiece W to be ground. Cool down.

Regarding the effect of the grinding wheel 40 according to the second embodiment, the high-pressure coolant K easily passes along the both side surfaces 2F and 2F of the annular grindstone 2 without clogging, and the workpiece W to be ground is ground. It can be efficiently ejected toward the surface W1. Further, the high-pressure coolant K can be efficiently injected from the center position of the grindstone outer peripheral surface toward the entire surface to be ground W1 of the work surface to be ground W through the passage 2G opened in the annular grindstone.
Thus, the high-pressure coolant K makes the surface to be ground W1 a water room atmosphere and is completely shielded from the outside air so that it can be cooled efficiently. Moreover, when gas, such as air and nitrogen gas , is used, the to-be-ground surface W1 is wrapped in an air flow atmosphere, and external air can be shut off . Further, the high-pressure coolant is likely to pass along both side surfaces 2F, 2F of the annular grindstone 2, and the effect of preventing clogging of the grindstone and preventing grinding burn of the workpiece can be expected.

A holder 65 of the grinding wheel 40 according to the second embodiment of the present invention is shown in FIG . The configuration of the grinding wheel 40 or the design of the grinding wheel 40A according to the second embodiment is changed. First, one air-permeable ceramic disc 31 serving as a substitute for the passage 2G for injecting the cooling liquid K from the center in the grindstone to the outer peripheral surface 2B, two annular grindstones 21 and 22 sandwiching this , and this ring The design is changed so that the grindstones 21 and 22 are sandwiched between the inner surfaces 24A and 25A of the two flange disks 24 and 25. Specifically, in contrast to the annular base 1 having double rows of connection ports H0 through which gas or liquid high-pressure coolant K is circulated on the outer periphery 1B, the circular base 1 serves as a core material for the ceramic base having air permeability. Radial grooves ( passages ) on the plate 31, the same annular grindstones 21 and 22 joined to both side surfaces 31A and 31B of the ceramic disc, and the inner surface sides 24A and 25A joined to both side surfaces 21A and 22A of the annular grindstone A grinding wheel in which small-diameter flange disks 24 and 25 formed with 24G and 25G are stacked and sandwiched, and the communication holes H1 of the annular base are connected to grooves ( passages ) 24G and 25G of the ceramic disk and the flange disk. 40 A. The annular base 1 of the grinding wheel is fitted with a support shaft 33 having a center hole 33A, and a center through hole 41 through which the high-pressure coolant K is circulated is formed at the center axis position of the taper shank 42 connected thereto. ing.
Further, at least one side of the annular grindstones 21 and 22 is made the same quality as the ceramic disc 31, or the annular grindstones 21 and 22 on both sides are made different. Thus, by making the annular grindstones 21 and 22 heterogeneous, it becomes possible to contribute to the improvement of the quality and processing efficiency of the grinding surface.

The holder 65 of the grinding wheel 40A according to the second embodiment operates as follows. First, the holder 40A includes a tapered shank 42 that can be attached to a spindle of a processing machine such as a machining center , a lathe , or a grinding machine and has high versatility. Therefore, the holder 40A is easily attached to the spindle of the processing machine. After being mounted on the spindle of the processing machine, the high-pressure coolant K is supplied from the center through hole 41 at the center axis position of the holder 65 of the grinding wheel 40A . The flow of the high-pressure coolant K is permeated through one air-permeable ceramic disk 31 and is ejected from the outer peripheral surface to the outside. Now, it sprays toward the to- be-ground surface W1 of the to-be-ground surface W which faces the center position of the outer peripheral surface 2B of the grindstone, and this part is cooled. On the other hand, the flow of the high-pressure coolant K is a radial groove ( passage) provided on both inner side surfaces 24A and 25A that sandwich the both side surfaces of the two annular grindstones 21 and 22 between the two flange disks 24 and 25. ) 24G, through the 25G, ejected from the opening of the flange outer peripheral end sides 21A of the annular grinding wheel 21, from both sides of the grindstone along the 22A on the outer circumferential edge of the ground surface W1 of the ground surface the workpiece W Cool this part.

Regarding the effect of the holder 65 of the grinding wheel 40A , the high-pressure coolant K easily passes along both side surfaces 21A and 22A of the annular grinding stones 21 and 22, and efficiently toward the ground surface W1 of the ground surface workpiece W. Be injected. Further, the high-pressure coolant K easily passes through the ceramic disk 31 in the annular grindstone and is efficiently injected from the grindstone outer peripheral surface toward the ground surface W1 of the workpiece W to be ground.
Thus, when the coolant K is used, the surface to be ground W1 is made into a water room atmosphere and is shielded from the outside air, so that it can be cooled efficiently . Moreover, when gas, such as nitrogen gas , is used, the to-be-ground surface W1 can be wrapped in an air flow atmosphere, and external air can be shut off . Furthermore, the high-pressure coolant is likely to pass along both side surfaces 21A and 22A of the annular grindstones 21 and 22, so that the effect of preventing clogging of the grindstone and preventing grinding burn of the workpiece can be expected. Furthermore, the high-pressure jet of coolant can be expected to have a high-efficiency removal effect of grinding dust that stagnates and adheres directly to the grinding surface of the workpiece and a high-efficiency cooling effect of the grinding wheel and workpiece grinding surface .

Furthermore, according to the holders 60 , 65 of the grinding wheels 30 , 40 , 40A of the present invention, an NC control device is not required, and as a specific means, it can be mounted on a spindle of a processing machine such as a machining center , a lathe , a grinding machine, etc. High nature. In addition, simple operability and low cost of the processing machine (which can be reduced to around tens of millions of yen) can be achieved.

Next, the cooling apparatus 100A for the grinding wheel according to the third embodiment of the present invention will be described with reference to FIG . In addition to the grinding wheels 30, 40 and 40A, grinding wheels 10 and 20 having a known configuration are also fitted to the rotating spindle 5 of the processing machine . The configuration of the grinding wheel 10 is shown in FIG. An annular base 1 having flanges 1F and 1F on both edges, an annular grindstone 2 having an inner peripheral surface 2A attached to the outer peripheral surface 1B of the annular base 1, and the annular base 1 have an inner peripheral surface 1A. The rotating main shaft 5 is fitted. A communication hole H is formed in the annular base 1 and the outer peripheral wall 5A of the rotary main shaft 5. The high-pressure coolant K is supplied to the annular grindstone 2 from a passage hole (passage) A formed in the axial center of the rotary main shaft. The configuration is such that it can be supplied to the inner peripheral surface 2A. The annular grindstone 2 is obtained by sintering or adhering porous grindstone powder. The annular grindstone 2 easily allows the high-pressure coolant K supplied to the inner peripheral surface 2A of the annular grindstone 2 to pass therethrough and enters the high-pressure coolant K. Demonstrates a filter effect that filters out small amounts of dust and dirt.
The configuration of the grinding wheel 20 is shown in FIG. The grinding wheel 20 includes an annular base 1 having flanges 1F and 1F on both edges, an annular grindstone 2 in which an inner peripheral surface 2A is mounted on the outer peripheral surface 1B of the annular base 1, and the annular base 1 The inner peripheral surface 1 </ b> A is fitted to the rotation main shaft 5. Then, contact holes H0 to the outer peripheral wall 5A of the annular base 1 and the rotating main shaft 5 is grave, the annular base of the contact hole H0 is in communication with the hole 2C that penetrates the annular grinding wheel 2 in the radial direction, The high-pressure coolant K can be supplied from the coolant hole 2C of the annular grindstone 2 to the outer peripheral surface 2B through the communication hole H1 from the coolant supply passage A bored in the axis of the rotating main shaft. The annular grindstone 2 sinters or bonds porous grindstone powder so that a part of the high-pressure coolant K supplied to the through-hole 2C of the annular grindstone 2 easily passes through the porous grindstone. And exerts a filter effect for filtering a small amount of dust, dust and the like mixed in the high-pressure coolant K.

The rotating spindle 5 is a center-through system in which a coolant supply passage A is opened at the center, and the high-pressure coolant K pressurized to about 7 megapascals from the high-pressure fluid supply machine 200 is supplied to the grinding wheels 10 to 40A. Has been supplied to. The high-pressure coolant K is also supplied to a high-pressure injection nozzle HN that injects the high-pressure coolant to the injection position on the outer peripheral surface of the grinding wheel. Further, an outer diameter measuring sensor DS is arranged toward the outer peripheral surface of the grinding wheel, and the wear of the annular grindstone 2 is detected and the detected value is finely adjusted as the outer diameter displacement value h for the injection position of the high pressure injection nozzle. Connected to the adjusting means 300. The adjusting means 300 operates the drive unit DU based on the outer diameter displacement value h to control the position of the high pressure injection nozzle HN at the optimum position. Further, in order to form a water room atmosphere WB around the surface to be ground W1 of the work surface to be ground W, an enclosure 70 covering about half of the grinding wheel is provided. Further, the nitrogen gas injection nozzle NN is disposed in the enclosure 70 along with the high-pressure injection nozzle HN, and the space atmosphere in the enclosure 70 is in a state of spraying oxygen-free and high-pressure coolant K.

In addition, as shown in FIG. 8 , it is good also as cooling apparatus 100A 'of the grinding wheel used as the 4th Embodiment of this invention. This cooling device 100A 'is obtained by omitting the outer diameter measurement sensor DS and the nitrogen gas injection nozzle NN in the grinding wheel cooling device 100A according to the third embodiment shown in FIG. . Other configurations are the same as those of the grinding wheel cooling device 100A, and the description thereof is omitted.

In the cooling device 100A for the grinding wheel , the cooling device 100A of the fourth embodiment shown in FIG. 9 using the grinding wheel 10 operates as follows. First, a grinding wheel 10 is mounted on a rotating spindle 5 in a processing machine such as a machining center , a lathe , or a grinding machine. The grinding wheel 10 has an annular grindstone 2 fitted on the outer peripheral surface of the annular base 1 and flanges 1F and 1F on both edges, and an inner peripheral surface 1A of the annular base 1 is fitted on the rotary spindle 5. ing. As a result, when the high-pressure coolant K is supplied to the inner peripheral surface 2A of the annular grindstone 2 from the coolant supply passage A bored in the axis of the rotary spindle, the annular grindstone 2 burns porous grindstone powder. Since it is bonded or bonded, the high-pressure cooling liquid K supplied to the inner peripheral surface 2A of the annular grindstone 2 is easily passed, and a small amount of dust , dust, etc. mixed in the high-pressure cooling liquid K is filtered. A filter effect is obtained. That is, the coolant K that is jetted out at a high pressure expands to a volume ratio of about 3000 times by the processing heat (frictional heat) generated by being injected at the processing point between the workpiece and the grinding surface, thereby increasing the vaporization pressure by the steam explosion effect. generate. As a result, grinding dust accumulated in the grindstone is blown off to prevent clogging of the grindstone, and a dust removal effect on the coolant K passing through the grindstone (filter effect on the coolant) is also obtained.

Further, as shown in FIG. 7 , the high-pressure coolant K is also supplied to the high-pressure injection nozzle HN that injects the high-pressure coolant to the injection position on the outer peripheral surface of the grinding wheel 10, thereby cooling the outer peripheral surface of the grinding wheel 10. Secure. Further, in order to further secure a water room atmosphere WB formed around the surface to be ground W1 of the workpiece W to be ground, the enclosure 70 covers about half of the grinding wheel. As a result, the nitrogen gas injection nozzle NN is disposed in the enclosure 70 along with the high-pressure injection nozzle HN, so that the space atmosphere in the enclosure 70 is filled with nitrogen gas and oxygen-free and high-pressure. The water room atmosphere WB is sprayed with the coolant K. Therefore, the water room atmosphere WB is in an oxygen-free state filled with the high-pressure coolant K in a spray state and nitrogen gas confined in the water-room atmosphere WB, and is more strongly ground by removing clogging of the annular grindstone 2. An increase in the heat generation suppression effect and an oxidation suppression effect on the ground surface W1 of the surface workpiece W can be achieved.

  The outer diameter measuring sensor DS arranged toward the outer peripheral surface of the grinding wheel 10 detects the wear of the annular grindstone 2. The detected value is calculated by the adjusting means 300 for finely adjusting the injection position of the high-pressure injection nozzle as the outer diameter displacement value h. As a result, the adjusting means 300 can operate the drive unit DU to control the position of the high pressure injection nozzle HN at the optimum position based on the outer diameter displacement value h, so that the high pressure injection can be performed regardless of the wear of the annular grindstone 2. The injection position of the nozzle can be finely adjusted. As a result, the high-pressure coolant K can be ejected to the optimum position of the annular grindstone 2, and an increase in the heat generation suppression effect and the oxidation suppression effect on the ground surface W1 of the ground surface workpiece W can always be ensured.

In the cooling device 100A for the grinding wheel , the high-pressure coolant K is used. However, dry cooling using nitrogen gas collected from the air, nitrogen gas from a nitrogen cylinder, or the like for cooling the grinding wheel. It may be a method. The greatest merit of this method is that it is possible to actively prevent polishing burn due to the oxygen-free effect of the surface to be ground W1 of the workpiece W to be ground, and to increase the heat generation suppression effect and the oxidation suppression effect of the surface to be ground W1. Always secure.

The grinding wheel cooling device 100B according to the fifth embodiment shown in FIG. 10 using the grinding wheel cooling device 100A and the grinding wheel 20 operates as follows. The grinding wheel 20 has an annular grindstone 2 fitted on the outer peripheral surface of the annular base 1 and flanges 1F and 1F on both edges. The inner peripheral surface 1A of the annular base 1 is fitted on the rotary spindle 5. Yes. As a result, when the high-pressure coolant K is supplied from the coolant supply passage A bored in the axis of the rotary spindle 5 to the through hole 2 </ b> C penetrating in the radial direction of the annular grindstone 2, the annular grindstone 2 is supplied. The high-pressure coolant K easily passes through and is ejected to the outside from the outer peripheral surface 2B, thereby effectively cooling the surface to be ground W1 of the workpiece W to be ground.

Further, operation of the above grinding wheel 20, as an effect, the high pressure ejection of the coolant K, directly stagnation on the grinding surface of the workpiece, highly efficient elimination effect of the grinding dust adheres and an annular grindstone 2 of the ground surface W1 A highly efficient cooling effect can be expected, and an effect of preventing grinding burn of the workpiece can be expected. That is, the coolant K that is jetted out at a high pressure expands to a volume ratio of about 3000 times by the processing heat (frictional heat) generated by being injected at the processing point between the workpiece and the grinding surface, thereby increasing the vaporization pressure by the steam explosion effect. generate.

Furthermore, the high pressure coolant K is also supplied to the high-pressure injection nozzle HN for injecting high-pressure coolant injection position of the outer peripheral surface of the grinding wheel 20, to ensure the cooling effect of the outer peripheral surface of the grinding wheel 20. Further, in order to further secure a water room atmosphere WB formed around the surface to be ground W1 of the workpiece W to be ground, the enclosure 70 covers about half of the grinding wheel. As a result, the nitrogen gas injection nozzle NN is arranged facing the inside of the enclosure 70 along with the high-pressure injection nozzle HN, and the space atmosphere in the enclosure 70 is filled with nitrogen gas and oxygen-free and high-pressure coolant K. It is set as the spray state of the water room atmosphere WB by. Thus, the water room atmosphere WB is in an oxygen-free state filled with the high-pressure coolant K in a spray state and nitrogen gas confined in this, and the surface to be ground by removing clogging of the grindstone 2 more powerfully. An increase in the heat generation suppression effect and the oxidation suppression effect on the surface W1 to be ground of the workpiece W can be achieved.

An outer diameter measuring sensor DS arranged toward the outer peripheral surface of the grinding wheel 20 detects the wear of the annular grindstone 2. The detected value is calculated by the adjusting means 300 that finely adjusts the injection position of the high-pressure injection nozzle as the outer diameter displacement value h. As a result, the adjusting means 300 can operate the drive unit DU to control the position of the high pressure injection nozzle HN at the optimum position based on the outer diameter displacement value h, so that the high pressure injection can be performed regardless of the wear of the annular grindstone 2. The injection position of the nozzle can be finely adjusted. As a result, the high-pressure coolant K can be ejected to the optimum position of the annular grindstone 2, and an increase in the heat generation suppression effect and the oxidation suppression effect on the ground surface W1 of the ground surface workpiece W can always be ensured.

In the fifth embodiment, the high-pressure coolant K is used. However, as a dry cooling method using nitrogen gas collected from the air, nitrogen gas from a nitrogen cylinder, or the like for cooling the grindstone. Also good. The greatest merit of this method is that it is possible to actively prevent polishing burn due to the oxygen-free effect of the surface to be ground W1 of the workpiece W to be ground, and to increase the heat generation suppression effect and the oxidation suppression effect of the surface to be ground W1. Always secure.

The grinding wheel cooling device 100C according to the sixth embodiment shown in FIG. 11 using the grinding wheel cooling device 100A and the grinding wheel 30 operates as follows. First, when the grinding wheel 30 is used, as shown in FIGS. 7 and 12 , the grinding wheel 30 is mounted on the rotary spindle 5 in a processing machine such as a machining center , a lathe , or a grinding machine. In the grinding wheel 30, the inner surface 1 </ b> A of the annular base 1 is fitted to the rotation main shaft 5, and both edge flanges 1 </ b> F and 1 </ b> F of the annular base 1 are in contact with both side faces 2 </ b> F and 2 </ b> F of the annular grindstone 2. Concave cross-section passages 1G are provided radially, and this passage 1G communicates with a coolant supply passage A connected from the inside of the rotating spindle 5 to the outer periphery, and this is opened to both side surfaces 2F, 2F of the annular grindstone 2 at the outer peripheral end of the flange. ing. As a result, the coolant K pressurized and supplied from the rotary spindle 5 by the centrifugal force generated by the high-speed rotation of the annular grindstone is efficiently ejected along the both side surfaces 2F, 2F of the annular grindstone 2, and the workpiece W to be ground W A water room atmosphere WB is formed around the grinding surface W1. As a result, the coolant K sprayed onto the surface to be ground W1 of the surface to be ground W is immersed and held without scattering to the periphery, and the clogging of the annular grindstone 2 can be effectively removed and cooled. Actively remove frictional heat (polishing burn).

  That is, the coolant K expands to a volume ratio of about 3000 times by processing heat (friction heat) due to high-speed rotation of the annular grindstone. This causes a vapor explosion, which generates vaporization pressure, blows away the grinding dust that accumulates in the grinding wheel, and prevents the clogging of the grinding wheel, the filter effect of the coolant by the grinding stone, and the grinding burn prevention effect of the workpiece To be demonstrated.

Further, the high-pressure coolant K is also supplied to a high-pressure injection nozzle HN that injects the high-pressure coolant to the injection position on the outer peripheral surface of the grinding wheel 30 to ensure the cooling action of the outer peripheral surface of the grinding wheel 30. Further, in order to further secure a water room atmosphere WB formed around the surface to be ground W1 of the workpiece W to be ground, the enclosure 70 covers about half of the grinding wheel. As a result, the nitrogen gas injection nozzle NN is arranged facing the inside of the enclosure 70 along with the high-pressure injection nozzle HN, and the space atmosphere in the enclosure 70 is filled with nitrogen gas and oxygen-free and high-pressure coolant K. It is set as the spray state of the water room atmosphere WB by. Therefore, the water room atmosphere WB is in an oxygen-free state filled with the high-pressure coolant K in a spray state and nitrogen gas confined in the water-room atmosphere WB, and is more strongly ground by removing clogging of the annular grindstone 2. An increase in the heat generation suppression effect and an oxidation suppression effect on the ground surface W1 of the surface workpiece W can be achieved.

  The outer diameter measuring sensor DS disposed toward the outer peripheral surface of the grinding wheel 30 detects the wear of the annular grindstone 2. The detected value is calculated by the adjusting means 300 for finely adjusting the injection position of the high-pressure injection nozzle as the outer diameter displacement value h. As a result, the adjusting means 300 can operate the drive unit DU to control the position of the high pressure injection nozzle HN at the optimum position based on the outer diameter displacement value h, so that the high pressure injection can be performed regardless of the wear of the annular grindstone 2. The injection position of the nozzle can be finely adjusted. As a result, the high-pressure coolant K can be ejected to the optimum position of the annular grindstone 2, and an increase in the heat generation suppression effect and the oxidation suppression effect on the ground surface W1 of the ground surface workpiece W can always be ensured.

In the sixth embodiment, the high-pressure coolant K is used. However, as a dry cooling method using nitrogen gas collected from the air, nitrogen gas from a nitrogen cylinder, or the like for cooling the grindstone. good. The greatest merit of this method is that it is possible to actively prevent polishing burn due to the oxygen-free effect of the surface to be ground W1 of the workpiece W to be ground, and to increase the heat generation suppression effect and the oxidation suppression effect of the surface to be ground W1. Always secure.

Further, the operation using the grinding wheel 40 in the seventh embodiment shown in FIGS. 7 and 12 using the cooling device 100D for the grinding wheel and the grinding wheel 40 , (40A) will be described. First, a description will be given of the case where the grinding wheel 40 is mounted on a spindle of a processing machine such as a machining center , a lathe , or a grinding machine. The grinding wheel 40 passes through the passage 2G in which the high-pressure coolant K is opened in the annular grindstone 2 from the coolant supply passage A bored in the axis of the rotating spindle 5, and passes through the grinding wheel outer peripheral surface of the workpiece W to be ground. Sprayed toward the surface to be ground W1 to cool the surface to be ground W1. Further, the annular base 1 is provided with flanges 1F and 1F on both edges , and a concave cross-section passage 1G is radially formed at a portion where both edge flanges 1F and 1F of the annular base 1 are in contact with both side surfaces 2F and 2F of the annular grindstone. Provided. Thus, the coolant K pressurized and supplied from the rotary spindle 5 by the centrifugal force generated by the high-speed rotation of the annular grindstone 5 passes through the annular grindstone 2 from the passage holes H0 and H1 connected from the coolant supply passage A to the outer periphery 5A. It is sent to the passage 1G. Further, the coolant K is jetted from the opening at the outer peripheral end of the flange along the both side surfaces 2F and 2F of the annular grindstone 2 to the outer peripheral surface 2B of the annular grindstone 2 and the surface to be ground W1 of the workpiece W to be ground. Thus, a water room atmosphere WB is formed around the surface to be ground W1 of the surface W to be ground. Thus, in the water room atmosphere WB, the cooling liquid K is jet-cooled from the central passage 2G of the annular grindstone toward the ground surface W1, and the cooling liquid K is applied to both side surfaces 2F and 2F of the annular grindstone 2. Although the coolant K is efficiently ejected along the surface, the coolant K is immersed and held without splashing to the periphery, and the clogging of the grindstone 2 can be effectively removed and cooled, and frictional heat (polishing burn) is positively generated. To remove.

In particular, in the water room atmosphere WB, jet cooling is performed from the central passage 2G of the annular grindstone toward the surface to be ground W1, and the outer peripheral surface of the grindstone and the workpiece to be ground along both side surfaces 2F and 2F of the annular grindstone 2 Since W is ejected onto the surface to be ground W1, the cooling , clogging removal , and grinding burn prevention effects on the surface to be ground W1 are synergistically enhanced. Other operations and effects are the same as when the grinding wheels 10 to 30 are used, and the description thereof is omitted.

The grinding wheel becomes the first 3-7 embodiment - According to Le cooling device 100A to 100D, the following effects are exhibited. (1) For example, in the blade grinding process, ultra-high-efficiency heavy grinding and continuous unmanned machining can be performed by ejecting the high-pressure coolant K pressurized to about 7 megapascals from a high-pressure spray nozzle. (2) The grindstone can be applied to all grindstones such as porous other electrodeposition grindstones. (3) Furthermore, the coolant K that is jetted out at a high pressure expands to a volume ratio of about 3000 times by the processing heat (friction heat) generated by being injected to the processing point of the workpiece and the grinding surface, thereby causing a steam explosion effect. Generate vapor pressure. Thus, the grinding dust accumulated in the grindstone is blown away, and the effect of preventing clogging of the grindstone and the effect of preventing grinding burn of the workpiece can be exhibited synergistically . That is, a dust removing effect (filter effect on the cooling liquid) with respect to the cooling liquid K that passes through the whetstone becomes a filter. (4) Since the nitrogen gas injection nozzle is provided in addition to the high-pressure injection nozzle, the effect of preventing grinding and burning of the workpiece can be further enhanced. ( 5) Since the outer diameter measuring sensor for detecting the wear of the annular grindstone can finely adjust the injection position of the high pressure injection nozzle by the outer diameter displacement of the grindstone, the high pressure injection nozzle can always be adjusted to the optimum position. (6) Since the surrounding body of the grinding wheel is provided, a water room atmosphere by a high-pressure coolant can be formed around the grinding surface, and a further effect of preventing grinding burn of the workpiece can be exhibited synergistically. (7) No NC control device is required, it can be applied to machining centers , lathes , grinders and other processing machines, is highly versatile, and has simple operability and low equipment cost (reduced to around tens of millions of yen) Can be planned.

The grinding wheel of the present invention, the cooling method thereof, the cooling device, and the holder of the grinding wheel are not limited to the above embodiments, and the design can be changed freely within the scope of the invention. For example, the number of passages, the radial shape thereof, and the circular grindstone can be any material such as porous, electrodeposited or ceramic. The coolant K can be water , a coolant , or a special component, or can be air , nitrogen gas , or other airflow. Furthermore, in the cooling devices 100A to 100D for the grinding wheel, detailed configuration changes and increase / decrease in functions can be freely performed. And in each said grinding wheel 10-40, it is good also as a 5th grinding wheel which combined each grinding wheel 10-40. That is, a large amount of the cooling liquid K may be uniformly ejected to the ground surface W1 of the workpiece W to be ground from the outer peripheral surface 2B of the annular grindstone, the two edges 2F, or the through holes 2C opened in the outer peripheral surface 2B. .

  In the present invention, the target object is a thin plate-like workpiece of a blade used in an aircraft jet engine or a generator. However, the target object is a plate-like workpiece in various product apparatuses. Application to workpieces is possible.

DESCRIPTION OF SYMBOLS 1 Annular base 1A Inner peripheral surface 1B Outer peripheral surface 1F Both edges flange 1G Passage 2 Annular grindstone 2A Inner peripheral surface 2B Outer peripheral surface 2C Through hole 2F Both side surfaces 2G Passage 5 Rotating spindle 5A Outer periphery 10-40A Grinding wheel 31 Ceramic disc 31A , 31B Both side surfaces 33A Center holes 21, 22 Annular grindstones 24, 25 Flange discs 24A, 25A Both inner side surfaces 24G, 25G Groove ( passage )
60, 65 Holder 41 Center through hole 70 Enclosures 100A to 100D Cooling device 200 for grinding wheel High pressure liquid supply machine 300 Adjusting means A Coolant supply passage DS Outer diameter measurement sensor DU Drive unit H0 communication hole H1 communication hole HN High pressure injection Nozzle h Outer diameter displacement value NN Nitrogen gas injection nozzle K Coolant (high pressure coolant)
W Surface to be ground W1 Surface to be ground WB Water room atmosphere

Claims (2)

  An annular base having a communication hole through which gas or liquid flows on the outer periphery, a ceramic disk having air permeability as a core material on the annular base, and an annular ring of the same shape joined to both side surfaces of the ceramic disk A small-diameter flange disc bonded to both side surfaces of the annular grindstone and having a radial passage formed on the inner surface thereof, and grinding in which the communication hole of the annular base is in communication with the passage of the ceramic disc and the flange disc A grinding wheel holder, wherein the annular base of the grinding wheel is fitted to a support shaft having a center through hole through which a high-pressure coolant flows. In the holder of the grinding wheel of claim 1, the high-pressure coolant, the retainer of the grinding wheel, characterized in that it has about 7 MPa considerable pressure.

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