JP5717696B2 - 電磁放射の光学的な分割および変調のための装置 - Google Patents
電磁放射の光学的な分割および変調のための装置 Download PDFInfo
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- JP5717696B2 JP5717696B2 JP2012152082A JP2012152082A JP5717696B2 JP 5717696 B2 JP5717696 B2 JP 5717696B2 JP 2012152082 A JP2012152082 A JP 2012152082A JP 2012152082 A JP2012152082 A JP 2012152082A JP 5717696 B2 JP5717696 B2 JP 5717696B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/113—Circuit or control arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
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Description
放射源によって放射される単色のコヒーレントな電磁放射、特にレーザ源からの光を複数のビームに分割するため、異なるかつ/または予め指定できる周波数を有する複数の電気信号によって動作する音響光学素子と、
音響光学素子が必要とする種々の周波数を有する電気信号を生成する信号生成器と、
音響光学素子において個々のビームの強度、特にレーザビームの強度を、調節および/または制御できるようにする回路(以下では、強度制御回路と称する)と、
音響光学素子において、個々の周波数の互いに対する位相を調節および/または制御できるようにする回路(以下では、位相変調回路と称する)と、
分割されたビーム、特にレーザビームを、好ましくは焦点合わせされた様相で再生する光学系と、
個々の、好ましくは焦点合わせされた部分ビーム、特にはレーザビームを、もう1つの信号生成器による供給される回路によって、互いに別個に変調できるようにする音響光学変調器と、
変調の際に個々のビームの強度、特にレーザビームの強度を、調節および/または制御できるようにする回路(以下では、やはり強度制御回路と称する)と、
音響光学素子および音響光学変調器における個々のプロセスを、互いに時間的に整列および/または同期させることができるようにするトリガ回路とである。
Claims (6)
- 単色のコヒーレントな電磁放射を光学的に分割および変調するための装置であって、
前記放射のビームのビーム源(2)と、
前記ビーム源によって生成されたビーム(4)を複数の部分ビーム(L1、L2、L3、L4)に分割するように構成され、前記ビーム源の下流側に配置された音響光学素子(8)と、
前記音響光学素子(8)の下流側に配置される音響光学変調器(22)とを備え、前記部分ビーム(L1、L2、L3、L4)が、変調のために前記音響光学変調器(22)に供給され、前記装置がさらに、
前記ビーム(4)をそれぞれ前記複数の部分ビーム(L1、L2、L3、L4)に分割するために、音響光学素子(8)に与えられる複数の第1の高周波電気信号(12)を生成する第1の高周波信号生成器(14)と、
前記第1の高周波電気信号(12)を前記音響光学素子(8)に転送する、前記第1の高周波信号生成器(14)と前記音響光学素子(8)との間の位相変調回路(18)とを備え、個々の部分ビーム(L1、L2、L3、L4)の振幅変動が最小限であるように、前記位相変調回路は、前記第1の高周波電気信号(12)それぞれの位相を、互いに無関係に結合してずらすように構成され、
前記音響光学変調器(22)が、前記第1の高周波電気信号ではない第2の高周波電気信号(Mf1)を用いて制御可能であり、
前記装置が、第2の高周波信号生成器(26)をさらに備え、該第2の高周波信号生成器(26)が、前記音響光学変調器(22)に与えられかつ前記音響光学変調器(22)を制御する前記第2の高周波電気信号(Mf1)を生成し、
前記装置が、変調回路(28)および画像プロセッサ(30)をさらに備え、前記変調回路(28)が、前記第2の高周波電気信号(Mf1)を変調するために前記第2の高周波信号生成器(26)と前記音響光学変調器(22)との間に配置され、画像プロセッサ(30)からの画像信号が、前記第2の高周波電気信号(Mf1)の変調を制御するために前記変調回路(28)に供給され、
前記装置が、前記変調回路(28)と音響光学変調器(22)との間に配置された強度制御回路(32)をさらに備え、前記強度制御回路(32)が、各部分ビーム(L1、L2、L3、L4)のエネルギーを調整し、
前記装置が、トリガ回路(34)をさらに備え、該トリガ回路(34)が、前記音響光学素子(8)および前記音響光学変調器(22)の両方のプロセスを同期化するように前記第1および第2の高周波信号生成器の両方を制御し、互いに異なる周波数を有する前記第1の高周波電気信号(F1、F2、F3、F4)が、前記ビームを前記複数の部分ビームに分割するように前記音響光学素子(8)を制御することを特徴とする、装置。 - 光学系(20)が、特に前記部分ビーム(L1、L2、L3、L4)を前記音響光学変調器(22)内または前記音響光学変調器(22)上に焦点合わせするために、前記音響光学素子(8)と前記音響光学変調器(22)との間のビーム経路に配置されることを特徴とする、請求項1に記載の装置。
- 前記音響光学変調器(22)が、信号送信器(24)を含み、あるいは複数の音響光学変調器が、信号送信器(24)を備え、前記信号送信器(24)の間隔が、前記部分ビーム(L1、L2、L3、L4)の間隔に一致することを特徴とする、請求項1または2に記載の装置。
- 前記第2の高周波信号生成器(26)が、特に信号クロック生成器によって周波数および位相位置の両者に関して一致した高周波信号(Mf1)を生成することを特徴とする、請求項1から3のいずれか一項に記載の装置。
- 前記第1の高周波信号生成器(14)の前記電気信号(F1、F2、F3、F4)の強度を制御するための回路(16)および/または前記信号生成器(14)の前記電気信号(F1、F2、F3、F4)の位相を変調するための前記位相変調回路(18)が、前記信号生成器(14)と前記音響光学素子(8)との間に配置されていることを特徴とする、請求項1から4のいずれか一項に記載の装置。
- 前記音響光学素子(8)および前記音響光学変調器(22)が、空間的に分離されて配置され、かつ/または互いから離して配置され、前記音響光学素子(8)において、前記ビーム(4)が、部分ビーム(L1、L2、L3、L4)に分割され、好ましくは前記ビーム(4)から空間的に分離されて部分ビーム(L1、L2、L3、L4)に分割され、前記部分ビーム(L1、L2、L3、L4)が、前記音響光学変調器(22)において変調されることを特徴とする、請求項1から5のいずれか一項に記載の装置。
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JP2012152082A Active JP5717696B2 (ja) | 2005-08-31 | 2012-07-06 | 電磁放射の光学的な分割および変調のための装置 |
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US (1) | US7826130B2 (ja) |
EP (1) | EP1920387B1 (ja) |
JP (2) | JP2009506365A (ja) |
AU (1) | AU2006286782B2 (ja) |
CA (1) | CA2621001C (ja) |
IL (1) | IL189780A (ja) |
WO (1) | WO2007025748A1 (ja) |
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JP4413261B2 (ja) * | 2008-01-10 | 2010-02-10 | シャープ株式会社 | 撮像装置及び光軸制御方法 |
US20110106013A1 (en) * | 2009-10-30 | 2011-05-05 | DePuy Mikek, Inc. | Dual cannula system and method for partial thickness rotator cuff repair |
US8896909B2 (en) | 2010-11-04 | 2014-11-25 | Micronic Ab | Method and device scanning a two-dimensional brush through an acousto-optic deflector (AOD) having an extended field in a scanning direction |
WO2012059582A1 (en) * | 2010-11-04 | 2012-05-10 | Micronic Mydata AB | Method and device scanning a two-dimensional brush through an acousto-optic deflector (aod) having an extended field in a scanning direction |
DE102011100252A1 (de) * | 2011-05-03 | 2012-11-08 | Polytec Gmbh | Verfahren und Vorrichtung zur optischen, berührungslosen Schwingungsmessung eines schwingenden Objekts |
WO2015088902A1 (en) * | 2013-12-10 | 2015-06-18 | Dolby Laboratories Licensing Corporation | Acousto-optic beam steering modulator for a projection system |
JP6391370B2 (ja) * | 2014-08-29 | 2018-09-19 | キヤノン株式会社 | 光ポンピング磁力計及び磁気センシング方法 |
US10451953B2 (en) | 2014-11-12 | 2019-10-22 | Orbotech Ltd. | Acousto-optic deflector with multiple output beams |
WO2018197546A1 (de) * | 2017-04-25 | 2018-11-01 | Leica Microsystems Cms Gmbh | Verfahren und signalgenerator zum ansteuern eines akustooptischen elements |
DE102017121926A1 (de) * | 2017-09-21 | 2019-03-21 | Leica Microsystems Cms Gmbh | Verfahren und eine Vorrichtung zur Ansteuerung eines akusto-optischen Elements |
US11860349B2 (en) | 2018-07-02 | 2024-01-02 | Universitat De Barcelona | Programmable multiple-point illuminator, confocal filter, confocal microscope and method to operate said confocal microscope |
KR20210144802A (ko) | 2019-03-29 | 2021-11-30 | 마이크로닉 아베 | 긴 스위프 길이 duv 마이크로리소그래피 빔 스캐닝 음향 광학 편향기 및 광학 설계 |
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JPS5133521A (ja) * | 1974-09-14 | 1976-03-22 | Canon Kk | Hikarijohokirokusochi |
JPS5512976A (en) * | 1978-07-14 | 1980-01-29 | Mitsubishi Electric Corp | Multi beam light modulation deflector |
JPS6019027U (ja) * | 1983-07-15 | 1985-02-08 | 松下電器産業株式会社 | 光情報処理装置 |
JPS6029725A (ja) | 1983-07-28 | 1985-02-15 | Hoya Corp | 音響光学変調装置 |
CA2051193C (en) | 1990-09-14 | 1995-09-26 | Hidetoshi Tatemichi | Information recording apparatus |
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KR20010014272A (ko) * | 1997-07-08 | 2001-02-26 | 게스레이 마크 | 감소된 고주파 크로스토크를 가지는 음향-광학 변조기 배열 |
EP1157301B1 (de) * | 1999-03-03 | 2005-02-09 | TRUMPF Laser GmbH + Co. KG | Optische modulationseinrichtung |
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EP1920387A1 (de) | 2008-05-14 |
CA2621001A1 (en) | 2007-03-08 |
US7826130B2 (en) | 2010-11-02 |
AU2006286782A1 (en) | 2007-03-08 |
EP1920387B1 (de) | 2015-07-01 |
IL189780A0 (en) | 2008-08-07 |
JP2012212172A (ja) | 2012-11-01 |
IL189780A (en) | 2012-02-29 |
AU2006286782B2 (en) | 2009-12-03 |
JP2009506365A (ja) | 2009-02-12 |
US20090073544A1 (en) | 2009-03-19 |
CA2621001C (en) | 2012-10-16 |
WO2007025748A1 (de) | 2007-03-08 |
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